CN105370587A - Compound molecular pump capable of reducing traction-level gap backflow - Google Patents
Compound molecular pump capable of reducing traction-level gap backflow Download PDFInfo
- Publication number
- CN105370587A CN105370587A CN201510895340.XA CN201510895340A CN105370587A CN 105370587 A CN105370587 A CN 105370587A CN 201510895340 A CN201510895340 A CN 201510895340A CN 105370587 A CN105370587 A CN 105370587A
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- China
- Prior art keywords
- stator
- molecular pump
- composite molecular
- circumferential groove
- traction rotor
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
A compound molecular pump capable of reducing traction-level gap backflow is characterized in that a gas backflow prevention structure is arranged between a traction rotor and a stator; the gas backflow prevention structure comprises a circular boss and a circular groove which are opposite to each other; the axial center lines of the circular boss and the circular groove coincide with the axial center line of a driving spindle; when the traction rotor is a smooth cylinder and a spiral groove is formed in the stator, the circular boss is arranged on the traction rotor and the circular groove is formed in the stator; when the stator is a smooth cylinder and a spiral groove is formed in the traction rotor, the circular boss is arranged on the stator and the circular groove is formed in the traction rotor; the gas backflow prevention structure is arranged at either a viscous flow state part of the compound molecular pump or a transitional flow state part between a molecular flow state part and the viscous flow state part, or is arranged at the viscous flow state part and the transitional flow state part simultaneously; in the axial direction, the width of the circular boss is less than that of the circular groove; and the distance between the circular boss and the circular groove is 1-5 times that between the traction rotor and the stator.
Description
Technical field
The invention belongs to technical field of vacuum equipment, particularly relate to a kind of composite molecular pump that can reduce draft stage gap and backflow.
Background technique
Molecular pump is as a kind of pumping equipment that can obtain clean high vacuum, be widely used in a lot of industrial field, wherein composite molecular pump is in wider pressure range, still can keep higher pumping performance, therefore be widely used in the industries such as semiconductor.
Existing composite molecular pump is mainly divided into two classes, and a class is formed by turbomolecular pump and disc type molecular drag pump Combination Design, is namely with the composite molecular pump of disc type hitch structure; Another kind of is formed by turbomolecular pump and cartridge type molecular drag pump Combination Design, is namely with the composite molecular pump of cartridge type hitch structure, is present stage to use composite molecular pump type the most general.
For the composite molecular pump of band cartridge type hitch structure, due to restrictions such as processing, assembly precisions, the gap between too small draft stage rotor and stator, is difficult to the functional reliability ensureing composite molecular pump.The increase in gap between draft stage rotor and stator, makes gas serious along backflowing of gap, and then has had influence on the pumping performance of composite molecular pump, particularly larger on the pumping performance impact under viscous fluidised form.
Summary of the invention
For prior art Problems existing, the invention provides a kind of composite molecular pump that can reduce draft stage gap and backflow, to promote the compression of draft stage, improve the pumping performance of composite molecular pump further.
To achieve these goals, the present invention adopts following technological scheme: a kind of composite molecular pump that can reduce draft stage gap and backflow, comprise turbine stage, cartridge type draft stage and drive main spindle, described turbine stage comprises stator blade and movable vane wheel, described cartridge type draft stage comprises traction rotor and stator, described movable vane wheel and traction rotor are fixedly set in drive main spindle, are characterized in: between described traction rotor and stator, be provided with anti-gas backflow structure.
Described anti-gas backflow structure comprises hoop boss and circumferential groove, and described hoop boss and circumferential groove are opposite to each other setting, and the longitudinal center line of hoop boss and circumferential groove and the longitudinal center line of drive main spindle coincide.
When described traction rotor is when offering spiral chute in light cylinder, stator, described hoop boss is arranged on traction rotor, and described circumferential groove is arranged on stator.
When described stator be light cylinder, traction rotor on offer spiral chute time, described hoop boss is arranged on stator, described circumferential groove be arranged on traction rotor on.
Described anti-gas backflow vibrational power flow at the viscous fluidised form place of composite molecular pump, the transition flow regime place between Molecular flow and viscous fluidised form or simultaneously arrange at above-mentioned two kinds of fluidised form places.
In the axial direction, the width of described hoop boss is less than the width of circumferential groove.
Between described hoop boss and circumferential groove, spacing is 1 ~ 5 times that draws spacing between rotor and stator.
Beneficial effect of the present invention:
The present invention, by increasing anti-gas backflow structure between traction rotor and stator, serves obvious barrier effect by hoop boss to the gas that backflows, ensures to bleed normally by the gap left between hoop boss and circumferential groove.The present invention reduces when ensureing that pumping performance is constant the effect of backflowing, and then improves the pumping performance of composite molecular pump.
Accompanying drawing explanation
Fig. 1 of the present inventionly a kind ofly can reduce composite molecular pump when being light cylinder and offering spiral chute in stator (traction rotor) structural representation backflowed in draft stage gap;
Fig. 2 of the present inventionly a kind ofly can reduce composite molecular pump (stator be light cylinder and on traction rotor when the offering spiral chute) structural representation backflowed in draft stage gap;
In figure, 1-stator blade, 2-movable vane is taken turns, 3-traction rotor, 4-stator, 5-drive main spindle, 6-hoop boss, 7-circumferential groove.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figure 1, 2, a kind of composite molecular pump that can reduce draft stage gap and backflow, comprise turbine stage, cartridge type draft stage and drive main spindle 5, described turbine stage comprises stator blade 1 and movable vane wheel 2, described cartridge type draft stage comprises traction rotor 3 and stator 4, described movable vane wheel 2 and traction rotor 3 are fixedly set in drive main spindle 5, are characterized in: between described traction rotor 3 and stator 4, be provided with anti-gas backflow structure.
Described anti-gas backflow structure comprises hoop boss 6 and circumferential groove 7, and described hoop boss 6 is opposite to each other setting with circumferential groove 7, and the axis centre line of the axis centre line of hoop boss 6 and circumferential groove 7 and drive main spindle 5 coincides.
When described traction rotor 3 is when offering spiral chute in light cylinder, stator 4, described hoop boss 6 is arranged on traction rotor 3, and described circumferential groove 7 is arranged on stator 4.
When described stator 4 be light cylinder, spiral chute offered by traction rotor 3 time, described hoop boss 6 is arranged on stator 4, and described circumferential groove 7 is arranged on traction rotor 3.
Described anti-gas backflow vibrational power flow at the viscous fluidised form place of composite molecular pump, the transition flow regime place between Molecular flow and viscous fluidised form or simultaneously arrange at above-mentioned two kinds of fluidised form places.
In the axial direction, the width of described hoop boss 6 is less than the width of circumferential groove 7.
Between described hoop boss 6 and circumferential groove 7, spacing is 1 ~ 5 times that draws spacing between rotor 3 and stator 4.
Below in conjunction with accompanying drawing, a using process of the present invention is described:
Composite molecular pump operationally, movable vane wheel 2 and traction rotor 3 are along with drive main spindle 5 High Rotation Speed, and then carry gas and flow downward along spiral chute, along with the enhancing to gas compression, pressure reduction between composite molecular pump draft stage entrance and outlet is increasing, now, particularly when viscous fluidised form, gas can increase along gap regurgitation volume upwards between traction rotor 3 and stator 4 under differential pressure action, and the existence of phenomenon of backflowing can cause the decline of pump pumping performance and compression performance.
After composite molecular pump arranges anti-gas backflow structure between traction rotor 3 and stator 4, by hoop boss 6, obvious barrier effect is served to the gas that backflows, ensure normal pumping process by the gap left between hoop boss 6 and circumferential groove 7.Therefore, reducing when ensureing that pumping performance is constant the effect of backflowing, owing to reducing gas backflow, just achieving the lifting of composite molecular pump pumping performance.
Scheme in embodiment is also not used to limit scope of patent protection of the present invention, and the equivalence that all the present invention of disengaging do is implemented or changed, and is all contained in the scope of the claims of this case.
Claims (7)
1. the composite molecular pump that can reduce draft stage gap and backflow, comprise turbine stage, cartridge type draft stage and drive main spindle, described turbine stage comprises stator blade and movable vane wheel, described cartridge type draft stage comprises traction rotor and stator, described movable vane wheel and traction rotor are fixedly set in drive main spindle, it is characterized in that: between described traction rotor and stator, be provided with anti-gas backflow structure.
2. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 1, it is characterized in that: described anti-gas backflow structure comprises hoop boss and circumferential groove, described hoop boss and circumferential groove are opposite to each other setting, and the longitudinal center line of hoop boss and circumferential groove and the longitudinal center line of drive main spindle coincide.
3. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 2, it is characterized in that: when described traction rotor is when offering spiral chute in light cylinder, stator, described hoop boss is arranged on traction rotor, and described circumferential groove is arranged on stator.
4. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 2, it is characterized in that: when described stator be light cylinder, traction rotor on offer spiral chute time, described hoop boss is arranged on stator, and described circumferential groove is arranged on traction rotor.
5. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 3 or 4, is characterized in that: described anti-gas backflow vibrational power flow at the viscous fluidised form place of composite molecular pump, the transition flow regime place between Molecular flow and viscous fluidised form or simultaneously arrange at above-mentioned two kinds of fluidised form places.
6. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 3 or 4, is characterized in that: in the axial direction, the width of described hoop boss is less than the width of circumferential groove.
7. a kind of composite molecular pump that can reduce draft stage gap and backflow according to claim 3 or 4, is characterized in that: between described hoop boss and circumferential groove, spacing is 1 ~ 5 times that draws spacing between rotor and stator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510895340.XA CN105370587A (en) | 2015-12-07 | 2015-12-07 | Compound molecular pump capable of reducing traction-level gap backflow |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510895340.XA CN105370587A (en) | 2015-12-07 | 2015-12-07 | Compound molecular pump capable of reducing traction-level gap backflow |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105370587A true CN105370587A (en) | 2016-03-02 |
Family
ID=55373096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510895340.XA Pending CN105370587A (en) | 2015-12-07 | 2015-12-07 | Compound molecular pump capable of reducing traction-level gap backflow |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105370587A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105909538A (en) * | 2016-06-28 | 2016-08-31 | 东北大学 | Compound molecular pump using segmented structure traction level |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
| CN114352553A (en) * | 2021-12-31 | 2022-04-15 | 北京中科科仪股份有限公司 | Vortex mechanism and composite molecular pump |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
| JP2005163613A (en) * | 2003-12-02 | 2005-06-23 | Sankyo Seiki Mfg Co Ltd | Thread groove type vacuum pump |
| CN1860299A (en) * | 2003-09-30 | 2006-11-08 | 英国氧气集团有限公司 | Vacuum pump |
| CN101457758A (en) * | 2008-10-31 | 2009-06-17 | 东北大学 | Enhancement air exhaust composite molecular pump |
| CN101709713A (en) * | 2009-12-25 | 2010-05-19 | 成都南光机器有限公司 | High-flow ring-type dragging compound molecule pump |
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN203488392U (en) * | 2013-09-18 | 2014-03-19 | 北京北仪创新真空技术有限责任公司 | Folding line gap traction class |
| CN104791264A (en) * | 2015-04-20 | 2015-07-22 | 东北大学 | Compound molecular pump with transition structure |
| CN205260360U (en) * | 2015-12-07 | 2016-05-25 | 东北大学 | Can reduce and draw compound molecule pump that backflows in grade clearance |
-
2015
- 2015-12-07 CN CN201510895340.XA patent/CN105370587A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
| CN1860299A (en) * | 2003-09-30 | 2006-11-08 | 英国氧气集团有限公司 | Vacuum pump |
| JP2005163613A (en) * | 2003-12-02 | 2005-06-23 | Sankyo Seiki Mfg Co Ltd | Thread groove type vacuum pump |
| CN101457758A (en) * | 2008-10-31 | 2009-06-17 | 东北大学 | Enhancement air exhaust composite molecular pump |
| CN101709713A (en) * | 2009-12-25 | 2010-05-19 | 成都南光机器有限公司 | High-flow ring-type dragging compound molecule pump |
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN203488392U (en) * | 2013-09-18 | 2014-03-19 | 北京北仪创新真空技术有限责任公司 | Folding line gap traction class |
| CN104791264A (en) * | 2015-04-20 | 2015-07-22 | 东北大学 | Compound molecular pump with transition structure |
| CN205260360U (en) * | 2015-12-07 | 2016-05-25 | 东北大学 | Can reduce and draw compound molecule pump that backflows in grade clearance |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105909538A (en) * | 2016-06-28 | 2016-08-31 | 东北大学 | Compound molecular pump using segmented structure traction level |
| CN105909538B (en) * | 2016-06-28 | 2018-06-26 | 东北大学 | A kind of composite molecular pump using segmentation structure draft stage |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
| CN114352553A (en) * | 2021-12-31 | 2022-04-15 | 北京中科科仪股份有限公司 | Vortex mechanism and composite molecular pump |
| CN114352553B (en) * | 2021-12-31 | 2024-01-09 | 北京中科科仪股份有限公司 | Vortex mechanism and compound molecular pump |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160302 |