WO2005031297A1 - Method and device for the detection and localization of leakages in vacuum systems - Google Patents

Method and device for the detection and localization of leakages in vacuum systems Download PDF

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Publication number
WO2005031297A1
WO2005031297A1 PCT/IT2004/000489 IT2004000489W WO2005031297A1 WO 2005031297 A1 WO2005031297 A1 WO 2005031297A1 IT 2004000489 W IT2004000489 W IT 2004000489W WO 2005031297 A1 WO2005031297 A1 WO 2005031297A1
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WO
WIPO (PCT)
Prior art keywords
detection
leakages
localization
sensor
vacuum systems
Prior art date
Application number
PCT/IT2004/000489
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English (en)
French (fr)
Inventor
Fabio La Spina
Antonio Albergo
Original Assignee
Xsemisys Di Fabio La Spina & C. S.N.C.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xsemisys Di Fabio La Spina & C. S.N.C. filed Critical Xsemisys Di Fabio La Spina & C. S.N.C.
Publication of WO2005031297A1 publication Critical patent/WO2005031297A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators

Definitions

  • the present invention relates to a method and a device for the detection and localization of leakages in vacuum systems typically operating under negative pressure with respect to the atmospheric pressure. They are based upon the use of sensors to detect alcohols and/or solvents and/or hydrocarbons and/or C0 2 that are characterized by a great sensitivity and very small size.
  • the peculiarity of the invention is the detection and the localization of leakages in vacuum systems under the following vacuum range: 760 Torr ⁇ l*10 ⁇ 12 Torr having a leakage amount in the following range: 1*10 5 mbar.l/sec ⁇ l*10 "10 mbar.l/sec such peculiarity being not provided by the state of art .
  • any (accidental) opening in the system that connects the inside to the outside thereof is detected as an increase in the inner pressure caused by an air flow from the outside (at higher pressure) to the inside (at lower pressure) .
  • the sensitivity to C0 2 allows a vacuum leakage to be detected by monitoring the change in the concentration of gas that will be clearly lower under vacuum conditions than the concentration in the atmosphere.
  • the sensitivity to alcohols, solvents, hydrocarbons and C0 2 allows the device of the invention to localize the leakage.
  • the injection of one of the elements mentioned above (by nebulization and/or vaporization and/or gasification) along the surfaces of the system under detection will be sufficient to detect a change in the signal of the sensor when one of the above-mentioned elements is sprayed to the opening which is the cause of the vacuum leakage.
  • METHOD OF OVERPRESSURE The system or the component is pressurized with air and dipped into water. The detection and the localization of a leakage is made by a flow of air bubbles coming out of water. Further advantages (in terms of capability of detection of lower leakages) are achieved if the gas used is lighter than air and the liquid has a lower surface tension than water. To this purpose, it is demonstrated that helium bubbles in alcohol detect leakages which are one hundred times lower than leakages detected by air bubbles in water. 2.
  • DETECTOR OF THERMAL CONDUCTIVITY This technique is based on the different thermal conductivity of air and a gas used as monitor detecting the leakage.
  • the analysed system is placed also in this case under overpressure and a probe senses the surface of the analysed system to detect the leakage.
  • a change in the temperature of a sensor placed under the flow of the monitoring gas is produced with respect to a similar sensor placed under a controlled air flow. Such change in the temperature is treated to give the operator a leakage signal.
  • MASS SPECTROMETER This technique is based upon the detection of helium ion ionised one time (He + ) by mass spectroscopy. As the whole system is tuned to such specific element, extremely small helium concentrations can be detected by this technique.
  • the operating mode is to place the analysed system under depression (vacuum) with respect to the outside environment, whereupon helium is sprayed by a probe along the whole surface of the system.
  • vacuum depression
  • helium will penetrate to the inside of the system and will be detected by the mass spectroscopy.
  • the detection of a vacuum leakage can be carried out by inputting helium inside the system and, at the same time, by searching outside traces of helium by a "nose" that enters helium inside mass spectrometer.
  • the first limit (if the first mentioned technique of the preceding section is used) is caused by the size of the investigated system that of course cannot be excessively large; actually, such technique is mainly provided for little systems that can be dipped into basins.
  • Such limit is overcome extremely well by using techniques 2 and 3 (the latter is used with the "nose") .
  • the limit is given by the system engineering. Actually, when a system is designed to guarantee a vacuum tightness, it will absolutely assure the tightness only if the inside pressure is lower than the outside pressure; in contrast, i.e. if the inside pressure is higher than the outside pressure, additional leakages will add unavoidably to the already existing leakages.
  • the present invention seeks to overcome all limits of the conventional systems. This has been accomplished by the use of a sensor capable of detect a tracing gas without modifying its state of neutrality. In this way the detection system cannot suffer from the limits due to ionisation. On the other hand, also the limits of the systems operating under overpressure have been well overcome by that operating conditions under lower pressure than the outside environment are provided.
  • Fig. 1 shows schematically the mode of use of the device for the detection and the localization of vacuum leakages according to the invention
  • Fig. 2 is a diagram of the two modules forming the device for the detection and the localization of the leakages.
  • a sensor 3 capable of detecting the presence of a particular gas or vapour is positioned inside such system 1.
  • element 5 that can be sensed by the sensor is sprayed or vaporized by suitable means 2 on the surfaces to be investigated in order to locate easily the vacuum leakage.
  • element 5 will penetrate inside the system and will be sensed by the sensor. This allows to locate the leakage in system 1.
  • a suitable control device 4 of the sensor will facilitate the operation.
  • control device 4 is able to measure the change in the concentration of the element inside system 1 because of the leakage on the basis of the change in the concentration of the gas with respect to a typical environmental basic condition.
  • This method provides that the gas and/or vapour used to detect the position of the leakage can also be an element usually present in the atmosphere.
  • the leakage detection and localization device essentially consists of two modules.
  • the first module designated in the figure by MOD. 1, connected to sensor assembly 3 includes an A/D converter and a codec for the dialogue with MOD. 2. According to the type of microcontroller used, A/D converter and codec can be integrated in one and the same chip.
  • the second module, MOD. 2 in the figure, includes the semiautomatic offset system, the variable gain amplifier (block OA) and display (block D) in addition to codec as well as the acoustic alarm (block AA) and a data log system (RS232) . Also in this case such module can be integrated in one and the same chip.
  • Sensor 3 is a transducer the output signal of which (which is variable as a function of the gas and/or vapour concentration to which it is responsive) is applied to a voltage divider supplied with a voltage of 12 Volt fed after the modules have been recognized.
  • the signal consisting of the voltage variations due to the change in the gas concentration is converted to a digital signal fed to module 2 by cable.
  • the digital signal received by module 1 only after the two modules have recognized each other is available after about two minutes, a time necessary for the system to be stabilized. Thereafter, it is sampled to represent the zero of the instrument (automatic offset) from that time on. The next changes in the voltage will form the useful signal for the operator.
  • the gain of the signal can be adjusted according to several fixed amounts by on/off keys and shown on a display of the current settings.
  • the signal is shown on a graphic display and can be heard in the form of an acoustic signal at a frequency and/or loudness which is variable as a function of the magnitude of the signal.
  • a log system which can be downloaded to a computer by RS232 as well as a dedicated software able to display the logged variations are available.
  • the signal can also be displayed in real time by RS232.
  • Module 2 is fed by cells P and has a jack for recharging purposes.
  • the voltages in module 1 are supplied by module 2.
  • module 1 is fixed to the system in which the detection is made, and module 2 is portable and connected to module 1 by cable.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
PCT/IT2004/000489 2003-09-30 2004-09-10 Method and device for the detection and localization of leakages in vacuum systems WO2005031297A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000451A ITRM20030451A1 (it) 2003-09-30 2003-09-30 Metodo e dispositivo per la rivelazione e la
ITRM2003A000451 2003-09-30

Publications (1)

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WO (1) WO2005031297A1 (it)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011124611A3 (en) * 2010-04-09 2011-12-22 Inficon Gmbh Method for performing a leak test on a test object
WO2013006974A1 (en) * 2011-07-12 2013-01-17 Ruks Engineering Ltd. Real-time gas monitoring method and system
JP2015052614A (ja) * 2007-12-01 2015-03-19 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH 気密性を検査するための方法及び装置
CN108645575A (zh) * 2018-07-27 2018-10-12 歌尔股份有限公司 一种液体渗漏检测设备和方法
US11193069B2 (en) 2018-12-28 2021-12-07 Suncoke Technology And Development Llc Coke plant tunnel repair and anchor distribution
US11214739B2 (en) 2015-12-28 2022-01-04 Suncoke Technology And Development Llc Method and system for dynamically charging a coke oven
US11261381B2 (en) 2018-12-28 2022-03-01 Suncoke Technology And Development Llc Heat recovery oven foundation
US11359145B2 (en) 2012-12-28 2022-06-14 Suncoke Technology And Development Llc Systems and methods for maintaining a hot car in a coke plant
US11359146B2 (en) 2013-12-31 2022-06-14 Suncoke Technology And Development Llc Methods for decarbonizing coking ovens, and associated systems and devices
US11395989B2 (en) 2018-12-31 2022-07-26 Suncoke Technology And Development Llc Methods and systems for providing corrosion resistant surfaces in contaminant treatment systems
US11441077B2 (en) 2012-08-17 2022-09-13 Suncoke Technology And Development Llc Coke plant including exhaust gas sharing
US11486572B2 (en) 2018-12-31 2022-11-01 Suncoke Technology And Development Llc Systems and methods for Utilizing flue gas
US11508230B2 (en) 2016-06-03 2022-11-22 Suncoke Technology And Development Llc Methods and systems for automatically generating a remedial action in an industrial facility
US11643602B2 (en) 2018-12-28 2023-05-09 Suncoke Technology And Development Llc Decarbonization of coke ovens, and associated systems and methods
US11680208B2 (en) 2018-12-28 2023-06-20 Suncoke Technology And Development Llc Spring-loaded heat recovery oven system and method
US11692138B2 (en) 2012-08-17 2023-07-04 Suncoke Technology And Development Llc Automatic draft control system for coke plants
US11746296B2 (en) 2013-03-15 2023-09-05 Suncoke Technology And Development Llc Methods and systems for improved quench tower design
US11760937B2 (en) 2018-12-28 2023-09-19 Suncoke Technology And Development Llc Oven uptakes
US11767482B2 (en) 2020-05-03 2023-09-26 Suncoke Technology And Development Llc High-quality coke products
US11788012B2 (en) 2015-01-02 2023-10-17 Suncoke Technology And Development Llc Integrated coke plant automation and optimization using advanced control and optimization techniques
US11795400B2 (en) 2014-09-15 2023-10-24 Suncoke Technology And Development Llc Coke ovens having monolith component construction
US11845898B2 (en) 2017-05-23 2023-12-19 Suncoke Technology And Development Llc System and method for repairing a coke oven
US11845037B2 (en) 2012-12-28 2023-12-19 Suncoke Technology And Development Llc Systems and methods for removing mercury from emissions
US11851724B2 (en) 2021-11-04 2023-12-26 Suncoke Technology And Development Llc. Foundry coke products, and associated systems, devices, and methods
US11939526B2 (en) 2012-12-28 2024-03-26 Suncoke Technology And Development Llc Vent stack lids and associated systems and methods
US11946108B2 (en) 2021-11-04 2024-04-02 Suncoke Technology And Development Llc Foundry coke products and associated processing methods via cupolas

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JPS6117930A (ja) * 1984-07-04 1986-01-25 Mitsubishi Heavy Ind Ltd 真空容器のリ−ク検出方法
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Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015052614A (ja) * 2007-12-01 2015-03-19 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH 気密性を検査するための方法及び装置
WO2011124611A3 (en) * 2010-04-09 2011-12-22 Inficon Gmbh Method for performing a leak test on a test object
CN102869969A (zh) * 2010-04-09 2013-01-09 英福康有限责任公司 一种对检测对象进行泄漏检测的方法
WO2013006974A1 (en) * 2011-07-12 2013-01-17 Ruks Engineering Ltd. Real-time gas monitoring method and system
US9664656B2 (en) 2011-07-12 2017-05-30 Ruks Engineering Ltd. Real-time gas monitoring method and system
US11441077B2 (en) 2012-08-17 2022-09-13 Suncoke Technology And Development Llc Coke plant including exhaust gas sharing
US11692138B2 (en) 2012-08-17 2023-07-04 Suncoke Technology And Development Llc Automatic draft control system for coke plants
US11939526B2 (en) 2012-12-28 2024-03-26 Suncoke Technology And Development Llc Vent stack lids and associated systems and methods
US11845037B2 (en) 2012-12-28 2023-12-19 Suncoke Technology And Development Llc Systems and methods for removing mercury from emissions
US11359145B2 (en) 2012-12-28 2022-06-14 Suncoke Technology And Development Llc Systems and methods for maintaining a hot car in a coke plant
US11746296B2 (en) 2013-03-15 2023-09-05 Suncoke Technology And Development Llc Methods and systems for improved quench tower design
US11359146B2 (en) 2013-12-31 2022-06-14 Suncoke Technology And Development Llc Methods for decarbonizing coking ovens, and associated systems and devices
US11795400B2 (en) 2014-09-15 2023-10-24 Suncoke Technology And Development Llc Coke ovens having monolith component construction
US11788012B2 (en) 2015-01-02 2023-10-17 Suncoke Technology And Development Llc Integrated coke plant automation and optimization using advanced control and optimization techniques
US11214739B2 (en) 2015-12-28 2022-01-04 Suncoke Technology And Development Llc Method and system for dynamically charging a coke oven
US11508230B2 (en) 2016-06-03 2022-11-22 Suncoke Technology And Development Llc Methods and systems for automatically generating a remedial action in an industrial facility
US11845898B2 (en) 2017-05-23 2023-12-19 Suncoke Technology And Development Llc System and method for repairing a coke oven
CN108645575B (zh) * 2018-07-27 2020-09-22 歌尔股份有限公司 一种液体渗漏检测设备和方法
CN108645575A (zh) * 2018-07-27 2018-10-12 歌尔股份有限公司 一种液体渗漏检测设备和方法
US11505747B2 (en) 2018-12-28 2022-11-22 Suncoke Technology And Development Llc Coke plant tunnel repair and anchor distribution
US11261381B2 (en) 2018-12-28 2022-03-01 Suncoke Technology And Development Llc Heat recovery oven foundation
US11643602B2 (en) 2018-12-28 2023-05-09 Suncoke Technology And Development Llc Decarbonization of coke ovens, and associated systems and methods
US11597881B2 (en) 2018-12-28 2023-03-07 Suncoke Technology And Development Llc Coke plant tunnel repair and flexible joints
US11760937B2 (en) 2018-12-28 2023-09-19 Suncoke Technology And Development Llc Oven uptakes
US11193069B2 (en) 2018-12-28 2021-12-07 Suncoke Technology And Development Llc Coke plant tunnel repair and anchor distribution
US11845897B2 (en) 2018-12-28 2023-12-19 Suncoke Technology And Development Llc Heat recovery oven foundation
US11680208B2 (en) 2018-12-28 2023-06-20 Suncoke Technology And Development Llc Spring-loaded heat recovery oven system and method
US11365355B2 (en) 2018-12-28 2022-06-21 Suncoke Technology And Development Llc Systems and methods for treating a surface of a coke plant
US11819802B2 (en) 2018-12-31 2023-11-21 Suncoke Technology And Development Llc Methods and systems for providing corrosion resistant surfaces in contaminant treatment systems
US11395989B2 (en) 2018-12-31 2022-07-26 Suncoke Technology And Development Llc Methods and systems for providing corrosion resistant surfaces in contaminant treatment systems
US11486572B2 (en) 2018-12-31 2022-11-01 Suncoke Technology And Development Llc Systems and methods for Utilizing flue gas
US11767482B2 (en) 2020-05-03 2023-09-26 Suncoke Technology And Development Llc High-quality coke products
US11851724B2 (en) 2021-11-04 2023-12-26 Suncoke Technology And Development Llc. Foundry coke products, and associated systems, devices, and methods
US11946108B2 (en) 2021-11-04 2024-04-02 Suncoke Technology And Development Llc Foundry coke products and associated processing methods via cupolas

Also Published As

Publication number Publication date
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