WO2005029006A3 - Heissfilmluftmassensensor mit kontaktierung mittels anisotropem leitkleber - Google Patents

Heissfilmluftmassensensor mit kontaktierung mittels anisotropem leitkleber Download PDF

Info

Publication number
WO2005029006A3
WO2005029006A3 PCT/EP2004/052036 EP2004052036W WO2005029006A3 WO 2005029006 A3 WO2005029006 A3 WO 2005029006A3 EP 2004052036 W EP2004052036 W EP 2004052036W WO 2005029006 A3 WO2005029006 A3 WO 2005029006A3
Authority
WO
WIPO (PCT)
Prior art keywords
anisotropic conductive
air mass
conductive glue
film air
hot film
Prior art date
Application number
PCT/EP2004/052036
Other languages
English (en)
French (fr)
Other versions
WO2005029006A2 (de
Inventor
Uwe Konzelmann
Tobias Lang
Original Assignee
Bosch Gmbh Robert
Uwe Konzelmann
Tobias Lang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Uwe Konzelmann, Tobias Lang filed Critical Bosch Gmbh Robert
Publication of WO2005029006A2 publication Critical patent/WO2005029006A2/de
Publication of WO2005029006A3 publication Critical patent/WO2005029006A3/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692Thin-film arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D41/00Electrical control of supply of combustible mixture or its constituents
    • F02D41/02Circuit arrangements for generating control signals
    • F02D41/18Circuit arrangements for generating control signals by measuring intake air flow
    • F02D41/187Circuit arrangements for generating control signals by measuring intake air flow using a hot wire flow sensor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Die Erfindung bezieht sich auf einen Heissfilmluftmassensensor, der einen Sensorchip (3) mit Sensormembran (4) und eine Elektronikträgerstruktur (22) umfasst. Auf der Sensormembran (4) sind mindest ein Heizelement (11) und mindestens ein Temperatursensor (12, 13; 31, 32) angeordnet. Die Kontaktierung des Sensorchips (3) mit der Elektronikträgerstruktur (22) erfolgt mittels anisotropem Leitkleber.
PCT/EP2004/052036 2003-09-22 2004-09-03 Heissfilmluftmassensensor mit kontaktierung mittels anisotropem leitkleber WO2005029006A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003143793 DE10343793A1 (de) 2003-09-22 2003-09-22 Heissfilmluftmassensensor mit Kontaktierung mittels anisotropem Leitkleber
DE10343793.2 2003-09-22

Publications (2)

Publication Number Publication Date
WO2005029006A2 WO2005029006A2 (de) 2005-03-31
WO2005029006A3 true WO2005029006A3 (de) 2005-06-23

Family

ID=34306012

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/052036 WO2005029006A2 (de) 2003-09-22 2004-09-03 Heissfilmluftmassensensor mit kontaktierung mittels anisotropem leitkleber

Country Status (2)

Country Link
DE (1) DE10343793A1 (de)
WO (1) WO2005029006A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008516252A (ja) 2005-09-20 2008-05-15 ビ−エイイ− システムズ パブリック リミテッド カンパニ− センサー装置
DE102011119957A1 (de) * 2011-12-02 2013-06-06 Micronas Gmbh Befestigungsvorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19743409A1 (de) * 1997-10-01 1999-04-08 Bosch Gmbh Robert Meßvorrichtung zur Messung der Masse eines strömenden Mediums
US6279394B1 (en) * 1999-12-06 2001-08-28 Delphi Technologies, Inc. Mass air flow meter
DE10059813A1 (de) * 2000-12-01 2002-06-13 Hahn Schickard Ges Vorrichtung zur Erfassung eines Fluiddrucks
EP1291622A2 (de) * 2001-09-11 2003-03-12 Hitachi Ltd. Thermischer Massendurchflussmesser mit Teilchenschutzvorrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19743409A1 (de) * 1997-10-01 1999-04-08 Bosch Gmbh Robert Meßvorrichtung zur Messung der Masse eines strömenden Mediums
US6279394B1 (en) * 1999-12-06 2001-08-28 Delphi Technologies, Inc. Mass air flow meter
DE10059813A1 (de) * 2000-12-01 2002-06-13 Hahn Schickard Ges Vorrichtung zur Erfassung eines Fluiddrucks
EP1291622A2 (de) * 2001-09-11 2003-03-12 Hitachi Ltd. Thermischer Massendurchflussmesser mit Teilchenschutzvorrichtung

Also Published As

Publication number Publication date
DE10343793A1 (de) 2005-04-14
WO2005029006A2 (de) 2005-03-31

Similar Documents

Publication Publication Date Title
TW200725880A (en) Semiconductor piezoresistive sensor and operation method thereof
WO2009021741A3 (de) Organische elektronische bauelemente
ATE257440T1 (de) Sensoranordnung
WO2007041007A3 (en) Magnetic tunnel junction temperature sensors
WO2007034437A3 (en) A micro-fluidic device based upon active matrix principles
WO2004046690A3 (en) Composite sensor membrane
WO2006099936A3 (de) Vorrichtung und verfahren zur bestimmung der temperatur eines kühlkörpers
EP1536467A3 (de) Halter und Wärmeleiter für Elektroniktbauteil
RU2007102701A (ru) Узел высокотемпературного давления
WO2008054519A3 (en) Ceramic heater and method of securing a thermocouple thereto
WO2006007078A8 (en) Force sensing resistor with calibration element
WO2004013900A3 (en) System and method for manufacturing embedded conformal electronics
WO2006068893A3 (en) Flat stress free display element
WO2005010925A3 (de) Integrierte sensor-chip-einheit
EP1376262A3 (de) Fixiergerät und Bilderzeugungsgerät
WO2006104768A3 (en) Anisotropic electrically conductive structure
WO2005036664A3 (en) Organic electronic devices with low thermal resistance and processes for forming and using the same
WO2005119232A3 (en) Differential thermal sensors
WO2007034240A3 (en) Sensor device with backside contacts
WO2007010011A3 (en) Optical element module
ATE540298T1 (de) Elektronischer heizkostenverteiler
HK1139506A1 (en) Electric device, connecting method and adhesive film
EP1742025A3 (de) Thermischer Durchflussmesser
EP1612522A3 (de) Thermischer Durchflussmesser mit einem umgekehrten Substrat
MX2009003164A (es) Dispositivo de calentamiento electrico para sistemas de canales calientes.

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BW BY BZ CA CH CN CO CR CU CZ DM DZ EC EE EG ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR KZ LK LR LS LT LU LV MA MD MG MK MW MX MZ NA NI NO NZ OM PG PH PT RO RU SC SD SE SG SK SL SY TJ TN TR TT TZ UA UG US UZ VC VN ZA ZM

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SZ TZ UG ZM ZW AM AZ BY KG MD RU TJ TM AT BE BG CH CY DE DK EE ES FI FR GB GR HU IE IT MC NL PL PT RO SE SI SK TR BF CF CG CI CM GA GN GQ GW ML MR SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase