WO2005019493A2 - Target/backing plate constructions, and methods of forming them - Google Patents
Target/backing plate constructions, and methods of forming them Download PDFInfo
- Publication number
- WO2005019493A2 WO2005019493A2 PCT/US2004/025801 US2004025801W WO2005019493A2 WO 2005019493 A2 WO2005019493 A2 WO 2005019493A2 US 2004025801 W US2004025801 W US 2004025801W WO 2005019493 A2 WO2005019493 A2 WO 2005019493A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- target
- interlayer
- backing plate
- construction
- copper
- Prior art date
Links
- 238000010276 construction Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000011229 interlayer Substances 0.000 claims abstract description 73
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000010949 copper Substances 0.000 claims abstract description 55
- 229910052802 copper Inorganic materials 0.000 claims abstract description 53
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 28
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 15
- 239000010936 titanium Substances 0.000 claims abstract description 15
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052709 silver Inorganic materials 0.000 claims abstract description 10
- 239000004332 silver Substances 0.000 claims abstract description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052738 indium Inorganic materials 0.000 claims abstract description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052718 tin Inorganic materials 0.000 claims abstract description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011135 tin Substances 0.000 claims abstract description 7
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000203 mixture Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 17
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052804 chromium Inorganic materials 0.000 claims description 14
- 239000011651 chromium Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 5
- 238000001513 hot isostatic pressing Methods 0.000 claims description 5
- 229910017604 nitric acid Inorganic materials 0.000 claims description 5
- 238000004880 explosion Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 description 10
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- -1 for example Chemical compound 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 239000003637 basic solution Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- FBOZXECLQNJBKD-ZDUSSCGKSA-N L-methotrexate Chemical compound C=1N=C2N=C(N)N=C(N)C2=NC=1CN(C)C1=CC=C(C(=O)N[C@@H](CCC(O)=O)C(O)=O)C=C1 FBOZXECLQNJBKD-ZDUSSCGKSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/06—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of high energy impulses, e.g. magnetic energy
- B23K20/08—Explosive welding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
Definitions
- Target/Backing Plate Constructions and Methods of Forming Target/Backing Plate Constructions
- the invention pertains to target/backing plate constructions, and also pertains to methods of forming target/backing plate constructions.
- PVD Physical vapor deposition
- semiconductor processing frequently utilizes PVD for deposition of metals and/or other materials over semiconductor substrates.
- a typical PVD operation utilizes a target comprising a desired material.
- the target is provided within a chamber of an appropriate apparatus.
- the target is typically bonded to a backing plate, and the backing plate is utilized to retain the target in a desired orientation within the apparatus.
- a substrate is provided in a location of the chamber spaced from the target. Desired material of the target is then sputtered or otherwise dislodged from the target, whereupon the desired material deposits on the substrate.
- Desired material of the target is then sputtered or otherwise dislodged from the target, whereupon the desired material deposits on the substrate.
- the invention includes a target/backing plate construction.
- the construction includes a copper-containing target having an average grain size of less than 80 microns.
- the construction has a bond strength from the target to the backing plate of at least about 20 ksi.
- the invention includes a target/backing plate construction.
- the construction includes a copper-containing target, a backing plate, and an interlayer between the target and backing plate.
- the backing plate comprises at least about 0.1 weight % of each of copper, chromium, nickel and silicon.
- the backing plate consists essentially of copper, chromium, nickel and silicon with the nickel being present to from about 2 weight % to about 3 weight %; the silicon being present to from about 0.4 weight % to about 0.8 weight %; and the chromium being present to from about 0.1 weight % to about 0.8 weight %.
- the interlayer can comprise one or more of silver, copper, nickel, tin and indium.
- the bond strength from the target to the backing plate through the interlayer is at least about 20 ksi, while the average grain size within the target is less than 80 microns, and in some aspects less than or equal to about 45 microns.
- the invention includes a target/backing plate construction containing a target predominately comprising (in other words, comprising more than 50%, by weight) aluminum, a backing plate, and an interlayer predominately comprising nickel or titanium between the target and the backing plate.
- the invention includes a method of forming a target/backing plate construction.
- a target is provided.
- the target is of a first composition and has a first bonding surface.
- a backing plate is provided.
- the backing plate is of a second composition different from the first composition and has a second bonding surface.
- An interlayer composition is formed on one or both of the first and second bonding surfaces.
- the interlayer composition predominately comprises a material soluble in one or both of the first and second compositions.
- the target is bonded to the backing plate through the interlayer composition.
- Fig. 1 is a diagrammatic, cross-sectional view of an exemplary target/backing plate construction of the present invention.
- Fig. 2 is a top view of the Fig. 1 construction, with the cross-section of
- One aspect of the present invention pertains to utilization of alloys or other compositions comprising copper, chromium, nickel and silicon as backing plate materials (i.e., CuCrNiSi materials).
- An exemplary material can comprise from about 2% to about 3% nickel, from about 0.4% to about 0.8% silicon, from about 0.1 % to about 0.8% chromium, and the balance copper (with the percentages listed as weight percent).
- Such material has a tensile strength of about 700 MPa, a yield strength of about 630 MPa, a hardness greater than 158 HB, an average coefficient of thermal expansion of about 17.3 ⁇ m/m.C, and an electrical conductivity at 20°C of about 40% IACS.
- Such backing plate material can be referred to as C18000.
- the backing plate material can be utilized in combination with high purity copper targets, such as, for example, targets having a copper purity of greater than 99.9% (i.e., 3N), by weight percent, and in particular applications copper targets having greater than 99.995% (i.e., 4N5) copper, such as, for example, targets having greater than or equal to 99.9999% (i.e., 6N) copper.
- CuCrNiSi backing plate constructions can be that CuCrNiSi can have a more suitable conductivity for particular applications, and another advantage is that CuCrNiSi can have a more suitable strength for particular applications. Specifically, CuCrNiSi can have a higher strength and lower conductivity than CuCr.
- Difficulties in utilizing CuCrNiSi occur in attempting to bond high-purity copper targets to the backing plates.
- an interlayer is provided between a high-purity copper target and a CuCrNiSi backing plate.
- the interlayer can comprise, consist essentially of, or consist of, for example, one or more of silver, copper, nickel, tin and indium. Such materials are preferred for the interlayer because there can be good diffusion between the materials and the backing plate and target.
- a target which comprises a first composition
- a backing plate which comprises a second composition different from the first composition.
- the target has a bonding surface (which can be referred to as a first bonding surface) and the backing plate has a bonding surface (which can be referred to as a second bonding surface).
- the interlayer composition is provided on the bonding surface of the target and/or the bonding surface of the backing plate, and subsequently the target and backing plate are subjected to conditions causing bonding of the target and backing plate through the interlayer composition.
- the interlayer composition be formed at least on the backing plate bonding surface in applications in which the backing plate comprises CuCrNiSi, in that the backing plate can have an oxide surface which interferes with bonding unless the surface is disrupted prior to bonding.
- the provision of the interlayer composition on the surface can disrupt the oxide surface.
- the oxide may occur through oxidation of silicon associated with the CuCrNiSi. Regardless of the cause of the oxide, the oxide can be disrupted by a chemical treatment in addition to, or alternatively to, formation of the interlayer composition on the backing plate.
- An exemplary chemical treatment is to treat a bonding surface of the backing plate with either hydrofluoric acid alone, or a combination of hydrofluoric acid and nitric acid, to remove oxide from the surface. Such treatment can also remove silicon from the bonding surface, which can be desired in particular applications.
- An exemplary treatment process can comprise the following seven steps: 1 ) a bonding surface of the backing plate is exposed to a basic solution (with a suitable basic solution being a sodium hydroxide solution formed from Metex T-103TM); 2) the bonding surface is rinsed with deionized water; 3) the bonding surface is treated with a solution comprising nitric acid and hydrofluoric acid (such as, for example, a solution comprising about 43% nitric acid and about 4.9% hydrofluoric acid (v/v)); 4) the bonding surface is rinsed with deionized water; 5) the bonding surface is treated with a solution comprising sulfuric acid (such as, for example, a solution comprising about 2.8% sulfuric acid (v/v)); 6) the bonding surface is rinsed with deionized water; and 7) the backing plate is dried using high pressure air and then promptly vacuum bagged to avoid surface oxidation.
- a basic solution being a sodium hydroxide solution formed from Metex T-103TM
- the treatment with the hydroxide (step 1) can occur for about 30 seconds
- the treatment with the hydrofluoric acid/nitric acid mixture (step 3) can occur for about 10 seconds
- the treatment with the sulfuric acid (step 5) can occur for about 30 seconds, in typical applications.
- the chemical treatment described above can be utilized with or without the interlayer composition described herein, but typically would be utilized as a pretreatment in conjunction with applications that also utilized the interlayer composition.
- the interlayer composition can be utilized with or without the chemical treatment described herein.
- the interlayer composition can be applied to the backing plate bonding surface and/or target bonding surface utilizing any suitable method, including, for example, ion plating, electroplating, electroless methodology, etc.
- the backing plate is bonded to the target utilizing, for example, hot isostatic pressing (HIP) at a temperature of from about 250°C to about 450°C, and the interlayer composition becomes an interlayer between the target and backing plate.
- HIP hot isostatic pressing
- the bond strength between the target and backing plate can be at least about 20,000 lbs per square inch while an average grain size within the target remains less than 80 microns, and in some aspects while substantially all of the grains within the target have a maximum grain size of less than about 80 microns.
- Cu is ion plated on bonding surfaces of both a 99.9999% Cu target and a CuCrNiSi backing plate prior to diffusion bonding. The ion plated layers are about 5 microns thick on the target and backing plate.
- the target and backing plate are diffusion bonded at 400°C by HIP.
- the bond strength is about 20.4 ksi and the average target grain size is about 49 microns.
- the bond strength is about 12.5 ksi and the average target grain size is about 210 microns.
- An exemplary target/backing plate construction 10 which can be formed in accordance with methodology of the present invention is described with reference to Figs. 1 and 2.
- the construction comprises a backing plate 12, a target 14, and an interlayer 16 between the target and backing plate (the interlayer is specifically at an interface between a bonding surface of the target and a bonding surface of the backing plate).
- the backing plate can, in particular aspects, comprise CuCrNiSi, the target can comprise high-purity copper, and the interlayer can comprise one or both of silver and copper.
- the interlayer will typically have a thickness of from about 0.1 microns to about 20 microns.
- Construction 10 is shown in an exemplary shape. It is to be understood that the methodology of the present invention can be utilized to form numerous target/backing plate constructions, including, but not limited to, the shown shape of construction 10.
- the interlayer is shown as a single homogeneous composition, it is to be understood that the interlayer can, in some aspects, comprise a stack of differing compositions.
- the methodology of the present invention can be particularly useful for bonding high-purity copper targets to backing plates comprising CuCrNiSi in order to obtain high strength bonds while retaining small grain sizes in the high-purity copper material.
- the invention can be applied to other target/backing plate compositions.
- the target can comprise, consist essentially of, or consist of one or more of aluminum, tantalum, titanium and copper, or can comprise any other composition suitable for bonding through an appropriate interlayer.
- the backing plate can comprise one or more of copper, chromium, nickel and silicon, and in particular applications can be a backing plate of Cu and Cr.
- the backing plate is not limited to the compositions described above, and can comprise any suitable composition which can be appropriately bonded to a suitable target utilizing the methodology described herein.
- an appropriate interlayer to utilize between a particular target and a particular backing plate it can be desired to choose a material soluble in either of, and preferably both of, the target and backing plate compositions. If, for example, a target predominately comprising aluminum (by weight) is utilized, it can be desired to utilize an interlayer predominately comprising nickel or titanium (by weight).
- the target can consist essentially or consist of aluminum
- the interlayer can consist essentially of or consist of nickel or titanium.
- HIP is described above for forming a bond between a target and backing plate
- methodology of the present invention can be utilized with other methods of bonding targets to backing plates.
- explosion bonding techniques can be utilized to bond Cu-containing targets to CuCrNiSi backing plates.
- An exemplary explosion bonding technique forms an approximate bond strength of at least about 45 ksi (and in particular aspects about 47 ksi) between a 99.9999% Cu target and a CuCrSiNi backing plate, and maintains a maximum target grain size of from about 38 microns to about 45 microns, with the average target grain size being less than or equal to about 45 microns (typically less than or equal to about 41 microns).
- the explosion bonding technique can be utilized without a chemical surface treatment of the backing plate, and without an interlayer between the backing plate and target.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Electrodes Of Semiconductors (AREA)
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Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2004800160306A CN1802450B (en) | 2003-08-11 | 2004-08-10 | Target/backing plate constructions, and methods of forming them |
EP04780608A EP1654395B1 (en) | 2003-08-11 | 2004-08-10 | Target/backing plate constructions, and methods of forming them |
US10/556,174 US20080197017A1 (en) | 2003-08-11 | 2004-08-10 | Target/Backing Plate Constructions, and Methods of Forming Them |
JP2006523291A JP4970034B2 (en) | 2003-08-11 | 2004-08-10 | Target / backing plate structure and method of forming target / backing plate structure |
DE602004028129T DE602004028129D1 (en) | 2003-08-11 | 2004-08-10 | TARGET / SUPPORT PLATE CONSTRUCTIONS AND METHOD OF MANUFACTURING THEREOF |
AT04780608T ATE474071T1 (en) | 2003-08-11 | 2004-08-10 | TARGET/SUPPORT PLATE CONSTRUCTIONS AND MANUFACTURING METHODS THEREOF |
US12/259,998 US20090078570A1 (en) | 2003-08-11 | 2008-10-28 | Target/backing plate constructions, and methods of forming target/backing plate constructions |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49507003P | 2003-08-11 | 2003-08-11 | |
US60/495,070 | 2003-08-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/259,998 Continuation-In-Part US20090078570A1 (en) | 2003-08-11 | 2008-10-28 | Target/backing plate constructions, and methods of forming target/backing plate constructions |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005019493A2 true WO2005019493A2 (en) | 2005-03-03 |
WO2005019493A3 WO2005019493A3 (en) | 2005-09-09 |
Family
ID=34215913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/025801 WO2005019493A2 (en) | 2003-08-11 | 2004-08-10 | Target/backing plate constructions, and methods of forming them |
Country Status (9)
Country | Link |
---|---|
US (1) | US20080197017A1 (en) |
EP (2) | EP2213763A3 (en) |
JP (1) | JP4970034B2 (en) |
KR (1) | KR20060037255A (en) |
CN (1) | CN1802450B (en) |
AT (1) | ATE474071T1 (en) |
DE (1) | DE602004028129D1 (en) |
TW (1) | TW200606269A (en) |
WO (1) | WO2005019493A2 (en) |
Cited By (2)
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EP1644143A2 (en) * | 2003-07-14 | 2006-04-12 | Tosoh Smd, Inc. | Sputtering target assembly having low conductivity backing plate and method of making same |
EP1715077A4 (en) * | 2003-12-25 | 2010-09-29 | Nippon Mining Co | Copper or copper alloy target/copper alloy backing plate assembly |
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JP4846872B2 (en) * | 2009-03-03 | 2011-12-28 | Jx日鉱日石金属株式会社 | Sputtering target and manufacturing method thereof |
KR20120070607A (en) * | 2009-11-20 | 2012-06-29 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | (sputtering target)-(bucking plate) joint body, and process for production thereof |
JP4872014B1 (en) * | 2010-08-31 | 2012-02-08 | Jx日鉱日石金属株式会社 | Laminated structure and manufacturing method thereof |
CN101956167B (en) * | 2010-10-28 | 2012-08-29 | 宁波江丰电子材料有限公司 | Method for preparing target structure |
KR20130099109A (en) * | 2010-11-17 | 2013-09-05 | 가부시키가이샤 아루박 | Backing plate, target assembly, and sputtering target |
WO2015003806A1 (en) * | 2013-07-09 | 2015-01-15 | Oerlikon Trading Ag, Trübbach | Target for the reactive sputter deposition of electrically insulating layers |
CN104690410A (en) * | 2013-12-05 | 2015-06-10 | 有研亿金新材料股份有限公司 | Preparation method for target material component |
US9761420B2 (en) | 2013-12-13 | 2017-09-12 | Praxair S.T. Technology, Inc. | Diffusion bonded high purity copper sputtering target assemblies |
JP2018529019A (en) * | 2015-07-17 | 2018-10-04 | ハネウェル・インターナショナル・インコーポレーテッドHoneywell International Inc. | Heat treatment method for the production of metals and metal alloys |
US20170287685A1 (en) * | 2016-04-01 | 2017-10-05 | Honeywell International Inc. | Sputtering target assembly having a graded interlayer and methods of making |
Family Cites Families (61)
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- 2004-08-10 EP EP10004921A patent/EP2213763A3/en not_active Withdrawn
- 2004-08-10 US US10/556,174 patent/US20080197017A1/en not_active Abandoned
- 2004-08-10 EP EP04780608A patent/EP1654395B1/en not_active Not-in-force
- 2004-08-10 CN CN2004800160306A patent/CN1802450B/en not_active Expired - Fee Related
- 2004-08-10 JP JP2006523291A patent/JP4970034B2/en not_active Expired - Fee Related
- 2004-08-10 KR KR1020057022200A patent/KR20060037255A/en not_active Application Discontinuation
- 2004-08-10 AT AT04780608T patent/ATE474071T1/en not_active IP Right Cessation
- 2004-08-11 TW TW093124094A patent/TW200606269A/en unknown
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1644143A2 (en) * | 2003-07-14 | 2006-04-12 | Tosoh Smd, Inc. | Sputtering target assembly having low conductivity backing plate and method of making same |
EP1644143A4 (en) * | 2003-07-14 | 2008-10-15 | Tosoh Smd Inc | Sputtering target assembly having low conductivity backing plate and method of making same |
EP1715077A4 (en) * | 2003-12-25 | 2010-09-29 | Nippon Mining Co | Copper or copper alloy target/copper alloy backing plate assembly |
EP2626444A3 (en) * | 2003-12-25 | 2013-10-16 | JX Nippon Mining & Metals Corporation | Copper or copper alloy target/copper alloy backing plate assembly |
US9472383B2 (en) | 2003-12-25 | 2016-10-18 | Jx Nippon Mining & Metals Corporation | Copper or copper alloy target/copper alloy backing plate assembly |
Also Published As
Publication number | Publication date |
---|---|
EP2213763A2 (en) | 2010-08-04 |
WO2005019493A3 (en) | 2005-09-09 |
JP2007502366A (en) | 2007-02-08 |
TW200606269A (en) | 2006-02-16 |
DE602004028129D1 (en) | 2010-08-26 |
CN1802450A (en) | 2006-07-12 |
EP1654395B1 (en) | 2010-07-14 |
EP1654395A2 (en) | 2006-05-10 |
EP2213763A3 (en) | 2010-08-18 |
KR20060037255A (en) | 2006-05-03 |
ATE474071T1 (en) | 2010-07-15 |
US20080197017A1 (en) | 2008-08-21 |
CN1802450B (en) | 2010-11-03 |
JP4970034B2 (en) | 2012-07-04 |
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