WO2005017977A3 - Carbon nanotube bundle probe for scanning probe microscopes - Google Patents

Carbon nanotube bundle probe for scanning probe microscopes Download PDF

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Publication number
WO2005017977A3
WO2005017977A3 PCT/GB2004/003493 GB2004003493W WO2005017977A3 WO 2005017977 A3 WO2005017977 A3 WO 2005017977A3 GB 2004003493 W GB2004003493 W GB 2004003493W WO 2005017977 A3 WO2005017977 A3 WO 2005017977A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe
carbon nanotube
nanotube bundle
microscopes
scanning
Prior art date
Application number
PCT/GB2004/003493
Other languages
French (fr)
Other versions
WO2005017977A2 (en
Inventor
Julie V Macpherson
Neil Wilson
Original Assignee
Univ Warwick
Julie V Macpherson
Neil Wilson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Warwick, Julie V Macpherson, Neil Wilson filed Critical Univ Warwick
Publication of WO2005017977A2 publication Critical patent/WO2005017977A2/en
Publication of WO2005017977A3 publication Critical patent/WO2005017977A3/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08Probe characteristics
    • G01Q70/10Shape or taper
    • G01Q70/12Nanotube tips

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

We describe a probe for use in the imaging of a substrate, said probe comprising a probe body and a probe needle wherein said probe needle comprises a bundle of nanotubes, a process for the manufacture of the probe and uses thereof.
PCT/GB2004/003493 2003-08-13 2004-08-12 Carbon nanotube bundle probe for scanning probe microscopes WO2005017977A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0318987.5A GB0318987D0 (en) 2003-08-13 2003-08-13 Probe
GB0318987.5 2003-08-13

Publications (2)

Publication Number Publication Date
WO2005017977A2 WO2005017977A2 (en) 2005-02-24
WO2005017977A3 true WO2005017977A3 (en) 2005-04-28

Family

ID=28052416

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/003493 WO2005017977A2 (en) 2003-08-13 2004-08-12 Carbon nanotube bundle probe for scanning probe microscopes

Country Status (2)

Country Link
GB (1) GB0318987D0 (en)
WO (1) WO2005017977A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8872176B2 (en) 2010-10-06 2014-10-28 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8130007B2 (en) 2006-10-16 2012-03-06 Formfactor, Inc. Probe card assembly with carbon nanotube probes having a spring mechanism therein
US8354855B2 (en) 2006-10-16 2013-01-15 Formfactor, Inc. Carbon nanotube columns and methods of making and using carbon nanotube columns as probes
US8149007B2 (en) 2007-10-13 2012-04-03 Formfactor, Inc. Carbon nanotube spring contact structures with mechanical and electrical components
GB0803076D0 (en) 2008-02-20 2008-03-26 Univ Ghent Mucosal Membrane Receptor and uses thereof
US8272124B2 (en) 2009-04-03 2012-09-25 Formfactor, Inc. Anchoring carbon nanotube columns

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998005920A1 (en) * 1996-08-08 1998-02-12 William Marsh Rice University Macroscopically manipulable nanoscale devices made from nanotube assemblies
EP1054249A1 (en) * 1998-12-03 2000-11-22 Daiken Chemical Co. Ltd. Electronic device surface signal control probe and method of manufacturing the probe
US20030001091A1 (en) * 2000-11-26 2003-01-02 Yoshikazu Nakayama Conductive probe for scanning microscope and machining method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998005920A1 (en) * 1996-08-08 1998-02-12 William Marsh Rice University Macroscopically manipulable nanoscale devices made from nanotube assemblies
EP1054249A1 (en) * 1998-12-03 2000-11-22 Daiken Chemical Co. Ltd. Electronic device surface signal control probe and method of manufacturing the probe
US20030001091A1 (en) * 2000-11-26 2003-01-02 Yoshikazu Nakayama Conductive probe for scanning microscope and machining method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8872176B2 (en) 2010-10-06 2014-10-28 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts

Also Published As

Publication number Publication date
GB0318987D0 (en) 2003-09-17
WO2005017977A2 (en) 2005-02-24

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