WO2004035462A3 - Nanostructures including controllably positioned and aligned synthetic nanotubes, and methods of their manufacture - Google Patents

Nanostructures including controllably positioned and aligned synthetic nanotubes, and methods of their manufacture Download PDF

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Publication number
WO2004035462A3
WO2004035462A3 PCT/US2003/031094 US0331094W WO2004035462A3 WO 2004035462 A3 WO2004035462 A3 WO 2004035462A3 US 0331094 W US0331094 W US 0331094W WO 2004035462 A3 WO2004035462 A3 WO 2004035462A3
Authority
WO
WIPO (PCT)
Prior art keywords
predetermined set
microelectronic substrate
coordinates
manufacture
methods
Prior art date
Application number
PCT/US2003/031094
Other languages
French (fr)
Other versions
WO2004035462A2 (en
Inventor
Jean M Frechet
Daniel J C Herr
Original Assignee
Semiconductor Res Corp
Univ California
Jean M Frechet
Daniel J C Herr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Res Corp, Univ California, Jean M Frechet, Daniel J C Herr filed Critical Semiconductor Res Corp
Priority to AU2003277190A priority Critical patent/AU2003277190A1/en
Priority to EP03808979A priority patent/EP1551760A2/en
Publication of WO2004035462A2 publication Critical patent/WO2004035462A2/en
Publication of WO2004035462A3 publication Critical patent/WO2004035462A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/02—Single-walled nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/06—Multi-walled nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

An integrated nanostructure comprises a microelectronic substrate having a surface; a catalyst disposed upon the surface of the microelectronic substrate and positioned thereupon within a first predetermined set of X and Y coordinates, wherein the catalyst is activated within a second predetermined set of X and Y coordinates defined within the surface of the microelectronic substrate; and a nanotube selectively disposed upon the activated second predetermined set of X and Y coordinates defined within the surface of the microelectronic substrate, such that the nanotube is controllably grown at a predetermined position upon the surface of the microelectronic substrate; wherein at least one selected from the group consisting of: (1) the disposition according to the first predetermined set of X and Y coordinates and (2) the activation of the catalyst according to the second predetermined set of X and Y coordinates is scaled with atomic precision.
PCT/US2003/031094 2002-10-15 2003-10-01 Nanostructures including controllably positioned and aligned synthetic nanotubes, and methods of their manufacture WO2004035462A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003277190A AU2003277190A1 (en) 2002-10-15 2003-10-01 Nanostructures including controllably positioned and aligned synthetic nanotubes, and methods of their manufacture
EP03808979A EP1551760A2 (en) 2002-10-15 2003-10-01 Nanostructures including controllably positioned and aligned synthetic nanotubes and methods of their manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/271,104 2002-10-15
US10/271,104 US20040072994A1 (en) 2002-10-15 2002-10-15 Nanostructures including controllably positioned and aligned synthetic nanotubes, and related methods

Publications (2)

Publication Number Publication Date
WO2004035462A2 WO2004035462A2 (en) 2004-04-29
WO2004035462A3 true WO2004035462A3 (en) 2004-09-16

Family

ID=32069080

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/031094 WO2004035462A2 (en) 2002-10-15 2003-10-01 Nanostructures including controllably positioned and aligned synthetic nanotubes, and methods of their manufacture

Country Status (4)

Country Link
US (1) US20040072994A1 (en)
EP (1) EP1551760A2 (en)
AU (1) AU2003277190A1 (en)
WO (1) WO2004035462A2 (en)

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US20040235199A1 (en) * 2003-05-22 2004-11-25 Jung Hee Tae Method for fabricating a nanoarray using the self-assembly of supramolecules and staining of metals
KR100549103B1 (en) * 2003-06-05 2006-02-06 한국과학기술원 Method for Fabricating a Carbon Nanotube Array
US7109581B2 (en) * 2003-08-25 2006-09-19 Nanoconduction, Inc. System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler
US20050151126A1 (en) * 2003-12-31 2005-07-14 Intel Corporation Methods of producing carbon nanotubes using peptide or nucleic acid micropatterning
FR2876831B1 (en) * 2004-10-15 2007-02-02 Commissariat Energie Atomique DATA RECORDING DEVICE HAVING INCLINED CARBON NANOTUBES AND METHOD FOR MANUFACTURING THE SAME
US7662648B2 (en) * 2005-08-31 2010-02-16 Micron Technology, Inc. Integrated circuit inspection system
US7209858B1 (en) * 2005-09-30 2007-04-24 Matsushita Electric Industrial Co., Ltd Precision position determining method
US20070237681A1 (en) * 2005-09-30 2007-10-11 Paul Boyle Nanostructures containing inorganic nanotubes and methods of their synthesis and use
US20090320991A1 (en) * 2005-09-30 2009-12-31 Paul Boyle Methods of synthesis of nanotubes and uses thereof
US8679630B2 (en) 2006-05-17 2014-03-25 Purdue Research Foundation Vertical carbon nanotube device in nanoporous templates
US7678672B2 (en) * 2007-01-16 2010-03-16 Northrop Grumman Space & Mission Systems Corp. Carbon nanotube fabrication from crystallography oriented catalyst
US9487877B2 (en) 2007-02-01 2016-11-08 Purdue Research Foundation Contact metallization of carbon nanotubes
US8715981B2 (en) 2009-01-27 2014-05-06 Purdue Research Foundation Electrochemical biosensor
US8362673B2 (en) * 2009-04-06 2013-01-29 ISC8 Inc. Micro-image acquisition and transmission system
US8872154B2 (en) 2009-04-06 2014-10-28 Purdue Research Foundation Field effect transistor fabrication from carbon nanotubes
US20160052172A1 (en) * 2014-11-05 2016-02-25 N1 Technologies Method of Manufacturing a High Performance Polymer and Nanotube Composite
CN106442878A (en) * 2016-09-08 2017-02-22 天津大学 Preparation method of gold-doped silicon nanocone array gas-sensitive sensor

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US6346189B1 (en) * 1998-08-14 2002-02-12 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube structures made using catalyst islands
US6401526B1 (en) * 1999-12-10 2002-06-11 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor
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Also Published As

Publication number Publication date
EP1551760A2 (en) 2005-07-13
US20040072994A1 (en) 2004-04-15
AU2003277190A1 (en) 2004-05-04
WO2004035462A2 (en) 2004-04-29
AU2003277190A8 (en) 2004-05-04

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