WO2005017971A3 - Nanomachined and micromachined electrodes for electrochemical devices - Google Patents

Nanomachined and micromachined electrodes for electrochemical devices Download PDF

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Publication number
WO2005017971A3
WO2005017971A3 PCT/US2004/026534 US2004026534W WO2005017971A3 WO 2005017971 A3 WO2005017971 A3 WO 2005017971A3 US 2004026534 W US2004026534 W US 2004026534W WO 2005017971 A3 WO2005017971 A3 WO 2005017971A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
nanomachined
sacrificial metal
array
metal rods
Prior art date
Application number
PCT/US2004/026534
Other languages
French (fr)
Other versions
WO2005017971A2 (en
WO2005017971A9 (en
Inventor
Davorin Babic
John M Baxley
Paul D Browne
Original Assignee
Johnson Res & Dev Company Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johnson Res & Dev Company Inc filed Critical Johnson Res & Dev Company Inc
Publication of WO2005017971A2 publication Critical patent/WO2005017971A2/en
Publication of WO2005017971A3 publication Critical patent/WO2005017971A3/en
Publication of WO2005017971A9 publication Critical patent/WO2005017971A9/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/045—Anodisation of aluminium or alloys based thereon for forming AAO templates
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing

Abstract

A nanomachined and micromachined electrode (10) is disclosed that is produced by providing a layer of aluminum (11) positioned upon a conductive substrate (12), anodizing the layer of aluminum to produce a layer of aluminum oxide (13) having an array of pores (14), depositing a sacrificial metal (17) within the pores of the aluminum oxide layer, etching the aluminum oxide layer so as to leave an array of sacrificial metal rods (18), depositing a layer of electrode material (19) between the array of sacrificial metal rods, and etching the sacrificial metal rods so that a layer of copper remains having an array of pores (20) where the sacrificial metal rods had existed. The layer of copper is the electrode (10).
PCT/US2004/026534 2003-08-14 2004-08-16 Nanomachined and micromachined electrodes for electrochemical devices WO2005017971A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US49496503P 2003-08-14 2003-08-14
US60/494,965 2003-08-14

Publications (3)

Publication Number Publication Date
WO2005017971A2 WO2005017971A2 (en) 2005-02-24
WO2005017971A3 true WO2005017971A3 (en) 2005-07-21
WO2005017971A9 WO2005017971A9 (en) 2005-09-09

Family

ID=34193257

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/026534 WO2005017971A2 (en) 2003-08-14 2004-08-16 Nanomachined and micromachined electrodes for electrochemical devices

Country Status (2)

Country Link
US (1) US6986838B2 (en)
WO (1) WO2005017971A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8679252B2 (en) * 2005-09-23 2014-03-25 Lam Research Corporation Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof
US20080218939A1 (en) * 2007-03-09 2008-09-11 Marcus Matthew S Nanowire supercapacitor electrode
US8143143B2 (en) 2008-04-14 2012-03-27 Bandgap Engineering Inc. Process for fabricating nanowire arrays
US8023250B2 (en) * 2008-09-12 2011-09-20 Avx Corporation Substrate for use in wet capacitors
US8279585B2 (en) * 2008-12-09 2012-10-02 Avx Corporation Cathode for use in a wet capacitor
WO2012067926A1 (en) * 2010-11-15 2012-05-24 The Government of the United State of America, as represented by the Secretary of the Navy Perforated contact electrode on vertical nanowire array
CN102092674B (en) * 2011-01-05 2012-07-25 东南大学 Method for preparing micro-electrode array
US8852981B2 (en) 2011-09-19 2014-10-07 Bandgap Engineering, Inc. Electrical contacts to nanostructured areas
CN104350184B (en) * 2012-05-30 2017-09-22 三菱化学株式会社 The manufacture method of mould and surface have the manufacture method of the formed body of minute concave-convex structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970094A (en) * 1983-05-31 1990-11-13 The Dow Chemical Company Preparation and use of electrodes
US6139713A (en) * 1996-08-26 2000-10-31 Nippon Telegraph And Telephone Corporation Method of manufacturing porous anodized alumina film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998048456A1 (en) * 1997-04-24 1998-10-29 Massachusetts Institute Of Technology Nanowire arrays

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970094A (en) * 1983-05-31 1990-11-13 The Dow Chemical Company Preparation and use of electrodes
US6139713A (en) * 1996-08-26 2000-10-31 Nippon Telegraph And Telephone Corporation Method of manufacturing porous anodized alumina film

Also Published As

Publication number Publication date
US6986838B2 (en) 2006-01-17
US20050279638A1 (en) 2005-12-22
WO2005017971A2 (en) 2005-02-24
WO2005017971A9 (en) 2005-09-09

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