WO2005017480A1 - Sensor slip fit apparatus and method - Google Patents
Sensor slip fit apparatus and method Download PDFInfo
- Publication number
- WO2005017480A1 WO2005017480A1 PCT/US2004/025264 US2004025264W WO2005017480A1 WO 2005017480 A1 WO2005017480 A1 WO 2005017480A1 US 2004025264 W US2004025264 W US 2004025264W WO 2005017480 A1 WO2005017480 A1 WO 2005017480A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cover
- sensor
- base
- pressure
- dimple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
- G01L9/0064—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
Definitions
- the present invention is generally related to sensing methods and systems.
- the present invention is particularly related to pressure sensors.
- the present invention is also related to sensor cover and base designs. BACKGROUND OF THE INVENTION
- Such pressure sensors generally communicate with the vehicle so that the sensed pressure is displayed to the operator when the vehicle is moving, i.e. the wheel rotating relative to the body of the vehicle.
- Such devices are generally relatively complex and expensive or alternatively are not particularly robust.
- Some tire pressure sensor systems incorporate a sensor that is fixed to the body so no rotating electrical contact between the rotating wheel and the chassis is required.
- a sensor rod is deflected by contact with the tire sidewall when the sidewall of the tire is deformed as occurs when the tire pressure is low.
- This system provides an indication of low tire pressure but is not robust. For example mud or other debris on the wheels may cause faulty readings.
- this system provides an indication only when the tire pressure is reduced significantly as is necessary for significant tire bulge to occur. Clearly such a system simply cannot provide a reading of actual tire pressure.
- the height of the vehicle can be detected and when the height is reduced, it is deemed tire pressure is low. However, if the tire in a rut or is parked on uneven ground, a faulty low- pressure reading is likely to be generated.
- More complicated systems are capable of monitoring tire pressure.
- some pressure sensor systems utilize a rotating encoder formed by a multipolar ring of magnetic segments of different polarity that are distributed circumferentially in a regular and alternating manner.
- a transmitter coil coaxial with the ring and a fixed pickup is energized by alternating electrical current flowing through the transmitter coil to generate a magnetic field superimposed on the magnetic field created by the multipolar ring generates a signal picked up and delivers a signal relating the rotating characteristic of the wheel and thus, the state of the tire.
- Some tire pressure systems also utilize a wheel system wherein each sensor on each wheel is provided with a radio transmitter that transmit the information on tire pressure, etc. from the wheel to a radio receiver on the body of the vehicle and this transmitted signal is decoded to provide information on tire pressure etc. and makes it available to the operator.
- Conventional wireless systems are not durable and are expensive to design and produce.
- SAW pressure sensors for example, can be composed of a sense element on a base and pressure transducer sensor diaphragm that is part of the cover.
- the sensor diaphragm must be in intimate contact with the sense element at all pressure levels and temperatures.
- the sense element and sensor diaphragm must be preloaded when they are assembled to shift the output frequency a known amount, which ensures contact at all times.
- an interference fit between the cover and base can maintain a preload until the cover and base are locked in place by welding, soldering or other connecting means. This type of interference fit can weaken before the parts are locked together and cause the preload to be reduced.
- a sensor apparatus including a method of manufacturing the apparatus, is disclosed herein.
- a base is generally located proximate to a cover.
- a sensor element e.g., quartz, ceramic, silicon, and the like
- the clearance can be configured such that the cover is at a smallest dimension within a tolerance range thereof and the base is at its largest dimension with the tolerance range thereof.
- a pressure transducer sensor diaphragm and a dimple can be incorporated into the cover, wherein the dimple is in intimate contact with the sensor element at all pressure levels and temperatures thereof.
- the components thereof are designed to have a clearance between them.
- Such a design does not rely on an interference between the two parts to maintain preload, but instead can utilize welding, soldering or other connecting means to lock the components in position at the time the cover is assembled to the base.
- the components can be designed such that when the cover is at its smallest inside dimension with the tolerance range and the base is at its largest outside dimension within the tolerance range there will be clearance between them when they are assembled together.
- FIG. 1 illustrates an exploded view of a sensor apparatus, which can be implemented in accordance with an embodiment of the present invention
- FIG. 2 illustrates a top view of a cover, which can be implemented in accordance with an embodiment of the present invention
- FIG. 3 illustrates a side sectional A-A view of cover depicted in FIG. 2, in which the cover is mounted over a base in accordance with an embodiment of the present invention.
- FIG. 4 illustrates top and side sectional views of a metal base, which can be implemented in accordance with an embodiment of the present invention
- FIG. 5 illustrates a side sectional A-A view of the metal base depicted in FIG. 4, in accordance with an embodiment of the present invention
- FIG. 6 illustrates a view of a detail C of the metal base depicted in FIG. 4, in accordance with an embodiment of the present invention
- FIG. 7 illustrates top and side sectional views of a metal cover, which can be implemented in accordance with an alternative embodiment of the present invention
- FIG. 8 illustrates a cut-away view of the metal cover depicted in
- FIG. 7 in accordance with an alternative embodiment of the present invention.
- FIG. 9 illustrates a side sectional view of a sensor apparatus having a base, a cover and a clearance therebetween, which can be implemented in accordance with a preferred embodiment of the present invention.
- the invention described herein can be implemented, in accordance with one possible embodiment, as a product in a component in a wireless pressure monitoring system. Such an embodiment can be configured as a small-size device, which is also lightweight and based on battery-less operation.
- the pressure sensor described herein does not consume power when implemented in the context of a Tire Pressure Monitoring System (TPMS) operation.
- TPMS Tire Pressure Monitoring System
- the present invention can be embodied in a practical and low cost design solution. Such a design can be mass-produced for automotive, heavy-duty vehicles, and other commercial markets.
- the sensor described herein can be implemented as a pressure sensor that includes a sense element, a package base, and a cover that contains a flexible diaphragm and a dimple.
- the dimple must be in intimate contact with the sense element at all pressure levels and temperatures.
- the sense element e.g., a quartz sense element
- the sensor diaphragm are preferably preloaded when they are assembled, in order to shift the output frequency a known amount to ensure contact at all times.
- the pressure sensor can be implemented as a SAW pressure sensor, it can be appreciated that embodiments of the present invention can be implemented in the context of a non-SAW sensors.
- a quartz sense element rather than utilizing a quartz sense element, other types of sense elements (e.g., ceramic, silicon and the like) may be utilized in accordance with alternative embodiments of the present invention.
- a dimple can be formed in the center of the pressure sensor diaphragm portion of the cover during its manufacture.
- the dimple contacts a flat surface on the quartz sense element.
- the pressure sensor can be embodied as a small, circular element.
- the design configuration is generally implemented as small, circular, hermetically sealed button package.
- Example dimensions include approximately 12 mm in diameter and approximately 2 mm thick. It can be of course be appreciated by those skilled in the art that such dimensions are discussed herein for illustrative purposes only, and are not considered limiting features of the present invention. Pressure sensor dimensions may vary, depending on the needs and use of such a device.
- the design of the cover and base are such that it generally allows for the reduction of assembly tolerances.
- the sensor material of the base and cover can be formed from stainless steel 17-7 PH. The advantages of such a material are discussed in greater detail herein.
- the pressure sensor can also be configured in association with an interface design board.
- a PCB or flex circuit interconnect can be located between the pressure sensor button package and one or more antennas thereof for the transmission and receipt of wireless data.
- FIG. 1 illustrates an exploded view of a sensor 100, which can be implemented in accordance with an embodiment of the present invention.
- Sensor 100 generally includes a package cover 104 that includes a dimple 102 formed at the center of diaphragm 103.
- the diaphragm area of diaphragm 103 is indicated generally by a circular dashed line.
- dimple 102 is generally indicated also by a circular dashed line.
- the diaphragm 103 is the flat surface on the top of cover 102.
- Sensor 100 also can include a sense element 106, and a package base 108.
- Sense element 106 can be implemented, for example, as a quartz sense element, a ceramic sense element, a silicon sense element and the like.
- a SAW chip for example, can be utilized as sense element 106.
- Base 108 includes a base portion 120, which is recessed into base 108 and in which the sensor element or sense element 106 can rest.
- Cover 104 can be formed from a stainless steel, such as, for example, a stainless steel 17-7 PH material. Cover 104 can be initially formed from a flat sheet stock that is approximately 0.50 mm thick in the annealed condition. The cover can next be stamped into a circular shape, and deep drawn into a cup configuration.
- dimple 102 can be formed into the center of the diaphragm 103 portion of cover 104, such that dimple 102 is formed approximately 0.6 mm deep into cover 104. It can be of course be appreciated by those skilled in the art that such dimensions are discussed herein for illustrative purposes only, and are not considered limiting features of the present invention.
- the dimensions of cover 104 may vary, depending on the needs and use of such a device.
- Base 108 can also be formed from a stainless steel such as a stainless steel 17-7 PH material. Stamping approximately 2 mm thick annealed material into a circular disk can form base 108. Such a disk can be formed so that two small saddles are protruding from base 108 for which the sensor chip (e.g., a sense element 106) will rest. Holes 116 and 118 can thus be punched into base 108 to facilitate glass to metal seals thereof. Hole 116 is associated with pin 112, while hole 118 is associated with pin
- Pins 112 and 114 can be utilized to make electrical connection through the hermetic seal.
- the glass to metal seal process and hardening process can occur simultaneously.
- the material can be heated to approximately 975 degree centigrade to re-flow the glass and for simultaneous "Austenite Conditioning" (a process well known in the art, which does not need to be described in detail herein) of 17-7 PH stainless steel used for base 108 and cover 104.
- So-called "Austenite Conditioning” precipitates a significant amount of chromium carbide and prepares it for complete transformation to a hard martensitic plastic.
- Stainless steel type 17-7 PH can then be cooled to approximately -100 degree Fahrenheit and held 8 hours for complete transformation to a hard "Martensitic" phase for maximum strength and rigidity of the parts. In this condition, the parts are generally hard, but also brittle.
- the last process involves gold plating the pins 114 and 112 to facilitate wire bonding and soldering.
- the sensor 100 can be assembled and tested.
- the sensor assembly sequence generally involves the following steps: die attach, wire bond, cover attach, pre-load, weld, after weld test, stabilization bake, after stabilization bake test, PCB attach and chamber test.
- Cover 104 and base 108 are thus designed to provide an interference fit so that the pre-load process and hermetic seal process can be controlled with increasingly accuracy and efficiency.
- the cover to base design of sensor 100 also removes assembly tolerances from the tolerance stack because it features a flange-less design.
- FIG. 2 illustrates a top view 200 of cover 104, which can be implemented in accordance with an embodiment of the present invention. Note that in FIGS 1 , 2 and 3, like parts or elements are generally indicated by identical reference numerals.
- FIG. 3 illustrates a side sectional A-A view 300 of cover 104 depicted in FIG. 2, in which cover 104 is mounted over base 108, including pins 112 and 114, in accordance with an embodiment of the present invention.
- Cover 104 thus generally includes a dimple 102 formed at the center of the diaphragm 103 portion of cover 104.
- Sense element 106 is depicted in FIG. 3 as located below proximate to dimple 102 and between pins 112 and 114.
- FIG. 3 illustrates a top view 200 of cover 104, which can be implemented in accordance with an embodiment of the present invention. Note that in FIGS 1 , 2 and 3, like parts or elements are generally indicated by identical reference numerals.
- FIG. 3 illustrates a side sectional
- FIG. 4 illustrates respective top and side sectional views 400 and 402 of metal base 108, which can be implemented in accordance with an embodiment of the present invention.
- FIG. 5 illustrates a side sectional A-A view 500 of the metal base 108 depicted in FIG. 4, in accordance with an embodiment of the present invention.
- FIG. 6 illustrates a detail of view C 600 of the metal base 108 based depicted in FIG. 4 in accordance with an embodiment of the present invention. Note that in FIGS. 1 to 6 herein, like or analogous parts or elements are generally indicated by identical reference numerals.
- FIG. 7 illustrates top and side sectional views of cover 104, which can be implemented in accordance with an alternative embodiment of the present invention.
- FIG. 7 illustrates top and side sectional views of cover 104, which can be implemented in accordance with an alternative embodiment of the present invention.
- FIG. 8 illustrates a cut-away view 800 of the dimple 102 depicted in FIG. 7, in accordance with an alternative embodiment of the present invention.
- FIG. 7 illustrates a top view 700 of cover 104, including dimple 102 located at the center the diaphragm 103 portion of cover 104.
- FIG. 7 also depicts a side sectional view 702 of cover 104, including the location of dimple 102 and diaphragm 103 of cover 104.
- the cut-away view 800 of cover 104 depicted in FIG. 8 provides a close-up view of dimple 102, and diaphragm 103 of cover 104.
- the sensor described herein can be utilized to measure pressure and temperature inside a vehicle tire (e.g., a passenger car tire or truck tire).
- the sensor should preferably possess a low cross sectional area and thickness, and is generally light weight in configuration and compatible with processes used to mold truck tires and passenger car tires.
- the pressure sensor base and cover materials preferably have a low-yield strength (e.g., approximately 40,000 psi) in the annealed condition so that the sensor can be fabricated utilizing conventional processes such as machining and forming.
- the pressure sensor base and cover materials also have a high-yield strength (e.g., approximately 20,000 psi) in the hardened condition so that the sensor possesses an enhanced elastic range and lower deformation in the end application.
- the use of a 17-7 PH material as the sensor material for the base and cover is also preferred because the hardening process is also compatible with forming glass to metal seals in the base.
- the use of a 17-7 PH material for this sensor is an advantage of the present invention because the hardening process and the glass to metal sealing processes are combined. Another advantage of the present invention is that it provides enhanced sensor performance over other conventional pressures sensor designs.
- a plurality of resonators can be connected in parallel to an antenna positioned within a tire or any other device requiring pressure sensors.
- Such a SAW pressure sensor embodiment can be interrogated by a short RF pulse at a frequency of approximately 434 MHz, which can excite natural oscillations of the resonators.
- the oscillations can be re-radiated by the antenna and received by an interrogation unit.
- Such an interrogation unit can analyze the spectrum of the oscillators, calculate two different frequencies and find the pressure and the temperature of the tire.
- a pressure sensor can be composed of a sense element on a base and pressure transducer sensor diaphragm that is part of the cover.
- the sensor diaphragm must be in intimate contact with the sense element at all pressure levels and temperatures.
- the sense element and sensor diaphragm must be preloaded when they are assembled to shift the output frequency a known amount, which ensures contact at al times.
- FIG. 9 illustrates a side sectional view of a sensor apparatus 900 having a base 908, a cover 904 and a clearance 910 and 911 therebetween, which can be implemented in accordance with an alternative, but preferred embodiment of the present invention.
- Apparatus 900 is analogous to sensor 100 of FIG. 1 and the various components depicted in FIGS. 1 to 9, the difference being that apparatus 900 includes a clearance 910 and a clearance 911 between cover 904 and base 908.
- Cover 904 is analogous, for example, to cover 104 of FIG. 9.
- Base 908 is analogous to base 108 of FIG. 8. Clearances 910 and 911 thus respectively form gaps between cover 904 and base 908.
- Apparatus 900 can thus be configured such that the base 908 is located proximate to cover 904.
- a sensor element 906 is located on the base 908 in a manner that permits clearances 910 and 911 to form between cover 904 and base 908.
- a sensor diaphragm 903 is incorporated into the cover 904.
- the cover 904 is located on the base 908 such that the dimple 902 is in intimate contact with the sensor element 910 at all pressure levels and temperatures thereof.
- Cover 904 additionally can be configured to include a dimple 902, which is generally analogous to the dimple 102 illustrated in FIG. 1. Note that the particular shape and size of dimple 902 may vary, depending on particular applications. The dimple 902 depicted in FIG. 9 is thus presented for illustrative purposes only and the size and shape thereof are not considered limiting features of the present invention.
- the components thereof can be designed to form a clearance or gap between the cover and base.
- Such a design does not rely on an interference between the two parts to maintain preload, but instead can utilize welding, soldering or other connecting means to lock the components in position at the time the cover is assembled to the base.
- the components can be designed such that even if the cover is at its smallest inside dimension within the tolerance range and the base is at its largest outside dimension within the tolerance range there will be clearance between them when they are assembled together. Thus, a clearance should exist generally between the cover and base even if the cover is at its smallest dimension within the tolerance range and the base is at its largest dimension within the tolerance range. The intent of such a feature is to produce the parts at their nominal dimension.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP04780153A EP1651938A1 (en) | 2003-08-05 | 2004-08-05 | Sensor slip fit apparatus and method |
| JP2006522712A JP2007501396A (ja) | 2003-08-05 | 2004-08-05 | センサの滑り嵌め装置及び方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/635,351 | 2003-08-05 | ||
| US10/635,351 US7047813B2 (en) | 2003-08-05 | 2003-08-05 | Sensor slip fit apparatus and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2005017480A1 true WO2005017480A1 (en) | 2005-02-24 |
Family
ID=34116225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2004/025264 Ceased WO2005017480A1 (en) | 2003-08-05 | 2004-08-05 | Sensor slip fit apparatus and method |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7047813B2 (https=) |
| EP (1) | EP1651938A1 (https=) |
| JP (1) | JP2007501396A (https=) |
| CN (1) | CN1860357A (https=) |
| WO (1) | WO2005017480A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005003711A1 (ja) * | 2003-07-03 | 2005-01-13 | Toyo Communication Equipment Co., Ltd. | 水晶式圧力センサ、及びその製造方法 |
| US6931934B2 (en) * | 2003-09-10 | 2005-08-23 | Honeywell International Inc. | Sensor top hat cover apparatus and method |
| USD611075S1 (en) | 2007-08-08 | 2010-03-02 | Honeywell International Inc. | Saw sensor button package |
| GB2462128B (en) * | 2008-07-25 | 2012-05-02 | Transense Technologies Plc | SAW sensor with adjustable preload |
| CN102812343B (zh) * | 2010-02-05 | 2015-07-22 | 霍尼韦尔国际公司 | 加压介质的介质隔离的测量 |
| CN103175731B (zh) * | 2013-03-10 | 2015-01-21 | 中国水利水电科学研究院 | 三轴试验仪内置轴向荷载传感器 |
| DE102015207307A1 (de) * | 2015-04-22 | 2016-10-27 | Robert Bosch Gmbh | Kraftstoffinjektor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4586382A (en) * | 1982-09-29 | 1986-05-06 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
| US5447071A (en) * | 1992-12-16 | 1995-09-05 | Hanson; Richard A. | Direct coupled pressure sensing device |
| US5712428A (en) * | 1995-08-01 | 1998-01-27 | Endress & Hauser Gmbh | Pressure sensor with a solid to minimize temperature-related measurement error |
| WO2002031461A1 (en) * | 2000-10-10 | 2002-04-18 | Transense Technologies Plc | Pressure monitor incorporating saw device |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3588395A (en) * | 1968-09-27 | 1971-06-28 | Ranco Inc | Fluid pressure responsive device |
| US4454440A (en) * | 1978-12-22 | 1984-06-12 | United Technologies Corporation | Surface acoustic wave (SAW) pressure sensor structure |
| US4978941A (en) * | 1988-07-11 | 1990-12-18 | Air Chex, Inc. | Low tire pressure detector |
| US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US6484585B1 (en) * | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| US5821425A (en) * | 1996-09-30 | 1998-10-13 | The United States Of America As Represented By The Secretary Of The Army | Remote sensing of structural integrity using a surface acoustic wave sensor |
| US5999082A (en) * | 1998-03-25 | 1999-12-07 | Kulite Semiconductor Products, Inc. | Compensated oil-filled pressure transducers |
| US6218936B1 (en) * | 1998-08-25 | 2001-04-17 | Pacific Industrial Co. Ltd. | Tire air pressure monitoring system |
| JP2000099869A (ja) * | 1998-09-21 | 2000-04-07 | Toyota Motor Corp | タイヤ空気圧モニタ |
| EP1092570B1 (en) * | 1999-10-12 | 2005-09-14 | Pacific Industrial Co., Ltd. | Transmitter and transmitting method of tire air pressure monitoring apparatus |
-
2003
- 2003-08-05 US US10/635,351 patent/US7047813B2/en not_active Expired - Fee Related
-
2004
- 2004-08-05 EP EP04780153A patent/EP1651938A1/en not_active Withdrawn
- 2004-08-05 CN CNA2004800285797A patent/CN1860357A/zh active Pending
- 2004-08-05 WO PCT/US2004/025264 patent/WO2005017480A1/en not_active Ceased
- 2004-08-05 JP JP2006522712A patent/JP2007501396A/ja not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4586382A (en) * | 1982-09-29 | 1986-05-06 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
| US5447071A (en) * | 1992-12-16 | 1995-09-05 | Hanson; Richard A. | Direct coupled pressure sensing device |
| US5712428A (en) * | 1995-08-01 | 1998-01-27 | Endress & Hauser Gmbh | Pressure sensor with a solid to minimize temperature-related measurement error |
| WO2002031461A1 (en) * | 2000-10-10 | 2002-04-18 | Transense Technologies Plc | Pressure monitor incorporating saw device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1860357A (zh) | 2006-11-08 |
| US20050028600A1 (en) | 2005-02-10 |
| EP1651938A1 (en) | 2006-05-03 |
| JP2007501396A (ja) | 2007-01-25 |
| US7047813B2 (en) | 2006-05-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7082835B2 (en) | Pressure sensor apparatus and method | |
| US6962084B2 (en) | Sensor with molded sensor diaphragm cover | |
| US6907787B2 (en) | Surface acoustic wave pressure sensor with microstructure sensing elements | |
| US6931934B2 (en) | Sensor top hat cover apparatus and method | |
| EP1533601A2 (en) | Surface acoustic wave diaphragm transducer | |
| US20090165546A1 (en) | Wireless and batteryless sensor | |
| WO2008134685A1 (en) | Mechanical packaging of surface acoustic wave device for sensing applications | |
| US7047813B2 (en) | Sensor slip fit apparatus and method | |
| US6964198B2 (en) | Sensor testing system and method | |
| US7070086B2 (en) | Sensor pre-load and weld fixture apparatus and method | |
| US7136683B2 (en) | Surface acoustic wave sensor and radio frequency identification interrogator fixture | |
| US20050210973A1 (en) | Patch wireless test fixture | |
| US7059511B2 (en) | Adjustable force and position pre-load welding fixture | |
| KR20080010401A (ko) | 반전된 감지 부품 및 통합된 샤프트 하우징을 구비한 토크센서 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WWE | Wipo information: entry into national phase |
Ref document number: 200480028579.7 Country of ref document: CN |
|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| WWE | Wipo information: entry into national phase |
Ref document number: 2004780153 Country of ref document: EP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 2006522712 Country of ref document: JP |
|
| WWP | Wipo information: published in national office |
Ref document number: 2004780153 Country of ref document: EP |