WO2005001593A1 - Reference pattern extraction method and device, pattern matching method and device, position detection method and device, and exposure method and device - Google Patents

Reference pattern extraction method and device, pattern matching method and device, position detection method and device, and exposure method and device

Info

Publication number
WO2005001593A1
WO2005001593A1 PCT/JP2004/008982 JP2004008982W WO2005001593A1 WO 2005001593 A1 WO2005001593 A1 WO 2005001593A1 JP 2004008982 W JP2004008982 W JP 2004008982W WO 2005001593 A1 WO2005001593 A1 WO 2005001593A1
Authority
WO
WIPO (PCT)
Prior art keywords
view
unique
lowbar
area
reference pattern
Prior art date
Application number
PCT/JP2004/008982
Other languages
French (fr)
Japanese (ja)
Other versions
WO2005001593A3 (en
WO2005001593A2 (en
Inventor
Yuji Kokumai
Shinichi Nakajima
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to JP2005511046A priority Critical patent/JP4389871B2/en
Publication of WO2005001593A1 publication Critical patent/WO2005001593A1/en
Publication of WO2005001593A2 publication Critical patent/WO2005001593A2/en
Publication of WO2005001593A3 publication Critical patent/WO2005001593A3/en

Links

Abstract

There is disclosed a reference pattern extraction method capable of appropriately and effectively extracting a reference pattern valid for template matching. In the maximum field-of-view range (OR_Area) as the largest range which can be an observation field-of-view (VIEW_Area) on the image information obtained by imaging a wafer, a plurality of unique patterns having different unique features and recognized as unique within the observation field-of-view (VIEW_Area) arbitrarily arranged in the maximum field-of-view range (OR_Area) are extracted. All the unique patterns extracted are set as reference patterns (templates) regardless of the range which the observation field-of-view (VIEW_Area) can occupy. Each of the unique patterns is expressed by a combination of an element which is unique or an element which is almost unique.
PCT/JP2004/008982 2003-06-27 2004-06-25 Reference pattern extraction method and device, pattern matching method and device, position detection method and device, and exposure method and device WO2005001593A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005511046A JP4389871B2 (en) 2003-06-27 2004-06-25 Reference pattern extraction method and apparatus, pattern matching method and apparatus, position detection method and apparatus, exposure method and apparatus

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003185392 2003-06-27
JP2003-185392 2003-06-27
JP2004-150499 2004-05-20
JP2004150499 2004-05-20

Publications (3)

Publication Number Publication Date
WO2005001593A1 true WO2005001593A1 (en) 2005-01-06
WO2005001593A2 WO2005001593A2 (en) 2005-01-06
WO2005001593A3 WO2005001593A3 (en) 2005-05-19

Family

ID=33554475

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/008982 WO2005001593A2 (en) 2003-06-27 2004-06-25 Reference pattern extraction method and device, pattern matching method and device, position detection method and device, and exposure method and device

Country Status (2)

Country Link
JP (1) JP4389871B2 (en)
WO (1) WO2005001593A2 (en)

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US9008352B2 (en) 2012-12-27 2015-04-14 Panasonic Intellectual Property Corporation Of America Video display method

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