WO2004111575A3 - Interferometric absolute and real-time surface curvature sensor insensitive to tilt, translation and vibration - Google Patents

Interferometric absolute and real-time surface curvature sensor insensitive to tilt, translation and vibration Download PDF

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Publication number
WO2004111575A3
WO2004111575A3 PCT/US2004/018401 US2004018401W WO2004111575A3 WO 2004111575 A3 WO2004111575 A3 WO 2004111575A3 US 2004018401 W US2004018401 W US 2004018401W WO 2004111575 A3 WO2004111575 A3 WO 2004111575A3
Authority
WO
WIPO (PCT)
Prior art keywords
reflector
lens
sample surface
tilt
translation
Prior art date
Application number
PCT/US2004/018401
Other languages
French (fr)
Other versions
WO2004111575B1 (en
WO2004111575A2 (en
Inventor
Kyung-Suk Kim
Junlan Wang
Pranav Shrotriya
Original Assignee
Univ Brown
Kyung-Suk Kim
Junlan Wang
Pranav Shrotriya
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Brown, Kyung-Suk Kim, Junlan Wang, Pranav Shrotriya filed Critical Univ Brown
Publication of WO2004111575A2 publication Critical patent/WO2004111575A2/en
Publication of WO2004111575A3 publication Critical patent/WO2004111575A3/en
Publication of WO2004111575B1 publication Critical patent/WO2004111575B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

An apparatus and a method are disclosed to characterize curvature of a surface (16) of a sample. The apparatus (10) includes a reflector (14), a lens (12) characterized by having two focal planes and an optical source, such as a laser (20), that outputs measurement light that is directed to pass through the lens and to be reflected by the reflector. The reflector and lens are arranged so that when a sample surface of interest is positioned relative to the reflector such that the reflector and the sample surface are each located at one of the two focal planes of the lens, the sample surface becomes the image plane of itself for the lens, and beams bl and b2 of the measurement light are reflected at least twice from the sample surface and accumulate a path length difference, Δ, that is proportional to the curvature, κ, of the sample surface. The apparatus further includes a detector (30) for detecting the path length difference.
PCT/US2004/018401 2003-06-12 2004-06-10 Interferometric absolute and real-time surface curvature sensor insensitive to tilt, translation and vibration WO2004111575A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47792003P 2003-06-12 2003-06-12
US60/477,920 2003-06-12

Publications (3)

Publication Number Publication Date
WO2004111575A2 WO2004111575A2 (en) 2004-12-23
WO2004111575A3 true WO2004111575A3 (en) 2005-05-19
WO2004111575B1 WO2004111575B1 (en) 2005-06-16

Family

ID=33551782

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/018401 WO2004111575A2 (en) 2003-06-12 2004-06-10 Interferometric absolute and real-time surface curvature sensor insensitive to tilt, translation and vibration

Country Status (1)

Country Link
WO (1) WO2004111575A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100454000C (en) * 2006-10-12 2009-01-21 上海交通大学 Long term monitoring sensor for steel bar corrosion in steel concrete member
CN102798491B (en) * 2011-05-23 2014-04-16 同济大学 Thin film residual stress separating and measuring device
CN111895989A (en) * 2020-06-24 2020-11-06 浙江大华技术股份有限公司 Robot positioning method and device and electronic equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5248889A (en) * 1990-08-14 1993-09-28 Tencor Instruments, Inc. Laser apparatus and method for measuring stress in a thin film using multiple wavelengths
US5523582A (en) * 1992-04-30 1996-06-04 Ann F. Koo Method and apparatus for measuring the curvature of wafers with a laser source selecting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5248889A (en) * 1990-08-14 1993-09-28 Tencor Instruments, Inc. Laser apparatus and method for measuring stress in a thin film using multiple wavelengths
US5523582A (en) * 1992-04-30 1996-06-04 Ann F. Koo Method and apparatus for measuring the curvature of wafers with a laser source selecting device

Also Published As

Publication number Publication date
WO2004111575B1 (en) 2005-06-16
WO2004111575A2 (en) 2004-12-23

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