WO2004107362A1

WO2004107362A1 - Methods for producing a shielded ribbon cable, device for coating a ribbon cable, and shielded ribbon cable

Info

Publication number: WO2004107362A1
Application number: PCT/DE2004/001136
Authority: WO
Inventors: Rolf Winkler; Dietmar Zeibig; Steffen Griehl
Original assignee: Creavac-Creative Vakuumbeschichtung Gmbh; Panta Gmbh
Priority date: 2003-05-27
Filing date: 2004-05-26
Publication date: 2004-12-09

Abstract

The invention relates to methods for producing a shielded ribbon cable, devices for coating ribbon cables, and a shielded ribbon cable. The inventive devices are especially characterised in that the ribbon cable is continuously coated with metal to form a shield. According to the invention, the shielding of the ribbon cable - which is wound onto rollers - is carried out in at least one evacuable processing chamber. In order to provide the ribbon cable with a shield, preferably both sides of a layer consisting of an electroconductive material are vacuum-deposited. The shielded ribbon cable consists of electrical conductors in a cladding and vacuum-deposited layers consisting of an electroconductive material. Said cladding is formed by an extruded plastic material that is further characterised by a low release of gas quantities in the vacuum and a high adhesive force in relation to vacuum-deposited layers. The invention is also advantageous in that even cables with very small cross-sections can easily be provided with a shield.

Description

description

Process for the production of shielded ribbon cable, device for coating ribbon cable and shielded ribbon cable

The invention relates to methods for producing shielded ribbon cables, devices for coating ribbon cables and shielded ribbon cables according to the preambles of claims 1, 5 and 12.

Shielded ribbon cables are also known as coaxial cables. Cables are cables that consist of one or more electrically insulated conductors and additional elements such as sheath, reinforcement and shields.

DE 33 08 300 AI (highly flexible miniature coaxial line) describes a line which is distinguished by a highly flexible structure. For this purpose, there is a tight-fitting elastic and electrically conductive extruded layer directly on the outer conductor. Furthermore, an outer insulating outer shell is extruded onto this layer. An additional step is required to apply this elastic and electrically conductive layer. At the same time, this layer increases the outside diameter of the ribbon cable.

DE 195 24 526 AI (coaxial cable) contains a coaxial cable which comprises a central conductor and an outer conductor, which are separated from one another by an electrically insulating layer. The outer conductor of the cable is optionally provided with at least one protective coating. The outer conductor of the cable represents an electrically conductive lacquer layer, which is further preferably provided with a metal layer. This additional metal layer is applied galvanically. The cable is pulled through a bath to form the electrically conductive lacquer layer. As a result, no constant layer thicknesses of the outer conductor can largely be guaranteed. The paint layer contains conductive particles made of metal, preferably silver or copper, which after drying become electrical Form conductive paths. These paths are based on the touch of these particles. An insufficient number of these particles and / or electrically non-conductive oxide layers on the particles cannot lead to interruptions in the outer conductor.

By DE 21 41 723 AI (vacuum evaporation system for continuous

Steaming of tapes and Like.) A vacuum evaporation system is known, wherein in the vapor deposition zone, the strip to be vaporized is the vaporization space against the

The polarity reversal space is separated and the back of the tape is at least partially exposed in the vapor deposition toward the winding space. This releases gases that are released during the

Evaporation not in the evaporation room.

In DE 27 58 772 AI (process for producing a tape-shaped, magnetic

Recording medium) a method for producing a belt-shaped, magnetic recording medium is described, wherein the substrate is arranged obliquely and is guided on a heatable or coolable drum. This allows the

Temperature of the substrate can be controlled so that even a thick layer on the

Substrate can be deposited.

Several cooling rollers are described in DE 42 21 800 (vacuum system for generating

Oxide layers on plastic films) used, so that the overheating

Plastic film is avoided during vapor deposition. The plastic film is pre-cooled by a cooling roller in this vacuum system to a temperature which corresponds to the temperature increase to be expected due to the evaporation.

In DE 196 25 875 AI (system for plasma-assisted physical vapor deposition of workpieces), a system is described which consists of a main and a

Secondary chamber exists. The substrate to be coated is only in the main chamber.

These known devices are not individually suitable for a two-sided

Evaporation of a band-shaped substrate. The object of the invention specified in patent claims 1, 5 and 12 is to produce shielded ribbon cables continuously, simply and economically from electrical conductors embedded in an extruded plastic.

This object is achieved with the features listed in claims 1, 5 and 12.

Ribbon cables as cables are cables that consist of one or more electrically conductive conductors and additional elements such as sheath as an insulating sleeve and shields. Conductors are preferably made of copper and are used to conduct electrical current, in the narrower sense a structural element of the ribbon cable intended for the transmission of electrical energy or electrical signals. The ladder is covered by a coat. Ribbon cable is known to consist of a ribbon-shaped plastic in which electrical conductors are introduced. The electrical conductors are ribbon-shaped and are introduced during the production of the ribbon-shaped plastic. The band-shaped plastic is produced by extrusion. This is a continuous process for processing thermoplastic molding compounds so that long strips can be made from plastic. After cooling the extruded ribbon-shaped plastic with the embedded ribbon-shaped conductors, the ribbon cable is realized. The extruded plastic is further characterized by a low release of gas in a vacuum and a high level of adhesion to vapor-deposited layers. The ribbon cable is advantageously wound on reel-shaped rolls.

According to the invention, a shield as at least one layer of a vapor-deposited, electrically conductive material is applied as an insulating sleeve. The shield thus envelops the coat.

Another advantage is that even ribbon cables with very small cross sections can be easily shielded. The temperature load of the jacket is determined by its speed

Evaporation process minimized. With larger layer thicknesses of the outer conductor, several layers of the electrically conductive material are advantageously vapor-deposited.

In this way, errors in the jacket based on elevated temperatures can be largely avoided. In particular, the opposite widths

Surfaces of the ribbon cable with a vapor-deposited electrically conductive

Provide material.

This enables very economical production, these surfaces being provided with the electrically conductive material via two evaporators in the processing chamber.

For this purpose, the devices for coating the ribbon cables are located

Surface pretreatment devices via a plasma activation and two

Evaporators between two rollers for the ribbon cable on the one hand and the shielded ribbon cable on the other. The pretreatment device and the evaporators advantageously work quasi-continuously. Steaming takes place at a uniform speed of the ribbon cable. Furthermore, there is between either two systems, each consisting of both a pre-treatment

Device as well as at least one evaporator or the two evaporators one

Device for rotating the ribbon cable, so that the surface of the surface opposite the vapor-deposited electrically conductive material

Ribbon cable is continuously provided with an electrically conductive material.

To produce this shielding of the ribbon cable, a is advantageously

Layer of copper evaporated on both sides.

The evaporation of metallic substances in a high vacuum to produce thin ones

Layers represent a diverse and mature process. The material to be evaporated is heated up by suitable processes until it is one

Internal steam pressure of 1 to 10 Pa reached. The resulting vapor particles spread in a straight line at a correspondingly low pressure in the evacuated processing chamber and condense predominantly on the surface of the ribbon cable opposite the source. The method is advantageously suitable for metallizing the plastic of the ribbon cable. This is great compared to sputtering Separation rates realized. Another advantage of vapor deposition is that the

Copper layers on the ribbon cables have the same physico-chemical properties as the base material.

The jacket advantageously consists of one of the polymers as an insulator

Polyether sulfone, polyetherimide or polyethematic phthalate or a derivative thereof

Polymers or a mixture containing these polymers and / or derivatives of these polymers. These materials are characterized in that the shield is a large one as at least one vapor-deposited layer of an electrically conductive material

Has adhesive strength on the coat.

Advantageous embodiments of the invention are specified in claims 2 to 4, 6 to 11 and 13 to 17.

The development of claim 2 advantageously leads to shielded ribbon cables with several conductors shielded from each other. This is achieved by inserting the openings in the jacket between the conductors. The remaining webs between the openings ensure that the ribbon cable with the conductors is held in place. The shielding between the conductors is ensured by a layer on the wall of the opening, areas of the walls of the openings being simultaneously provided with a vapor-deposited layer when the jacket is vapor-deposited. This enables ribbon cables with several conductors shielded from each other to be produced very economically.

The further developments of claims 3 and 15 lead to a protective layer on the shield. This protective layer is advantageously an extruded layer or a lacquer layer. This protects the ribbon cable and, above all, the shielding, in particular against mechanical stress. At the same time, protection against the environmental influences surrounding the ribbon cable is guaranteed. Another vapor-deposited electrically conductive layer on the electrical

Insulation layer according to the developments of claims 4 and 17 leads to a further shielding of the shielded ribbon cable. This also eliminates external influences on the shielded ribbon cable.

For this purpose, this additional shielding is placed on an electrical potential.

To implement the shielding of the ribbon cable located on the rollers, at least three evacuable processing chambers are arranged in the processing direction according to the development of claim 6. This can be both individually implemented chambers and an evacuable processing chamber with several partition walls. The ribbon cable is led from the evacuable processing chamber to the evacuable processing chamber in openings or tubular connecting parts, so that there is a continuous processing of the ribbon cable. Furthermore, by means of a cross section of the openings or openings and pipes adapted to the ribbon cable, pressure equalization between the evacuable processing chambers can be reduced during processing. A wall separating the evacuable processing chambers advantageously leads to a simple and compact implementation of the device for coating ribbon cables. The main advantage of this design is that only a vacuum necessary in accordance with the processing has to be realized in the respective evacuable processing chamber.

To produce the shielding of the ribbon cable, a layer of copper is advantageously vapor-deposited on both sides, the copper layers on the ribbon cable having the same physico-chemical properties as the base material. A protective layer is advantageously subsequently applied to the vapor-coated copper layers on both sides by sputtering. Sputtering is a technique of atomizing solid surfaces in vacuo to produce high-quality and adhesive layers. Bombardment with ions allows stoichiometric dusting of the solid surface as a so-called target, metals, alloys and dielectrics, and on copper surfaces of the ribbon cables to be brought to condensation. For this purpose, a gas discharge in the working gas, preferably argon, is ignited by applying a high voltage between the targets and the copper layers. The positive ions become the negative biased

Target accelerates. With the impact of the ions, the surface of the target is atomized. The sputter rate as the number of particles sputtered from the target per incident ion is primarily a function of the energy of the ions

(Electrode voltage), the angle of incidence of the ions on the target and the

Ratio of the relative atomic masses of working gas and target material. The layers formed by the sputtering process have in the first stages

Condensation a larger nucleus density than vapor deposition layers with the same particle rate and otherwise the same conditions. However, the attainable rate is at

Deposition of thick layers less, so that a longer period of time is necessary.

The sputtering process is thus advantageously suitable for thinning

Layers, here to realize a thin protective layer for the copper layer.

With the use of various deposition methods in the form of vapor deposition and sputtering, it can advantageously be carried out both continuously and economically

Metal layers are applied as a shield to the ribbon cable, the first vapor-deposited copper layer the actual shield and the sputtered

Layer on the copper layer the protective layer against corrosion,

Represent environmental influences and protection against contact. So that is a continuous

Throughput realizable.

NiCr as the target material of the sputtering devices according to the development of claim 7 leads to a corrosion-resistant protective layer on the copper layers.

Advantageously, according to the development of patent claim 8, a ribbon turner is arranged between the two vaporization devices, so that the ribbon cable can be vaporized with copper on both sides. At the same time, it is ensured that there are equal contact surfaces between the ribbon cable and the respective cooling roller. With the further development of claim 9, wherein the evaporators of the two vaporization devices are arranged in one plane and between the cooling rollers and the evaporators at least one deflection roller for guiding and guiding the ribbon cable from the second cooling roller to the third evacuable processing chamber, advantageously opposite surfaces of the ribbon cable can be coated be, with no tape turner between the steaming devices is necessary.

By means of two plasma electrodes, between which the ribbon cable is guided before vapor deposition, according to the development of claim 10, the surfaces of the ribbon cable to be vaporized can advantageously be pretreated, in particular also removing contaminants as adhering contamination layers.

The development of claim 11 advantageously leads to the fact that several guided ribbon cables can be coated at the same time, so that shielded ribbon cables can be implemented very economically.

The developments of claims 13 and 14 advantageously lead to shielded ribbon cables with several electrically conductive conductors, which are also shielded from one another. This is achieved through the openings in the jacket between the conductors. The webs between the openings ensure that the ribbon cable with the conductors is held in place. The shielding between the conductors is either by a layer on the wall of the opening according to the further development of claim 13 or by at least partially filling an electrical conductor, for example from hardened paste-like mixtures of an organic and / or inorganic binder in the openings after the further development of the Claim 14 guaranteed. The first implementation variant is the easiest to manufacture. Areas of the walls of the openings are simultaneously provided with a vapor-deposited layer during the evaporation of the jacket. Thereby can be very economical ribbon cables with several shielded from each other

Ladders are made. Another advantage is that the distances between the

Ladder can be very small.

According to the development of patent claim 16, masks can advantageously be used to produce sections that can be predetermined in particular in length. Removal of the layers for contacting the ribbon cable is avoided except for the jacket.

Embodiments of the invention are shown in the drawings and are described in more detail below.

In each case, the basic illustration shows:

Fig. 1 shows a device for coating ribbon cable and thus

Production of shielded ribbon cable with a processing chamber, Fig. 2 a device for coating ribbon cable with a processing chamber divided into rooms, Fig. 3 a device for coating ribbon cable with spaced evacuable processing chambers, Fig. 4 a device for coating ribbon cable without tape changer between 5, a shielded ribbon cable in section, Fig. 6 a two-core shielded ribbon cable in a plan view and in one

Section and Fig. 7 is a two-core shielded ribbon cable with shields in one

Cut.

1st exemplary embodiment

A device for coating ribbon cables and thus for producing shielded ribbon cables 2 with electrical conductors 14 as flat conductors in one Jacket as an insulator with a predominantly polygonal cross section made of an extruded

Plastic essentially consists of an evacuable processing chamber 1,

Devices for the detachable fastening of a first roll 3 with ribbon cable and a second roll 4 with thin ribbon cable 2, two devices for

Pretreatment of the ribbon cable in the form of plasma electrodes 5, two

Evaporators 6, a device for rotating the ribbon cable, guides for the

Ribbon cable and the shielded ribbon cable 2 and at least one drive for moving the ribbon cable / shielded ribbon cable 2.

1 shows a basic illustration of a device for coating ribbon cables and thus for producing shielded ribbon cables 2 with a processing chamber 1.

The drive is coupled to the device for releasably fastening the second roller 4 with shielded ribbon cable 2 and is a known electric motor for providing a uniform speed of the ribbon cable in accordance with the vapor deposition process. For this purpose, this electric motor is connected to a control and regulating device. The device for releasably attaching the first roll 3 with ribbon cable is advantageously connected to either a permanently acting braking device or a braking device that can be adjusted via the control and regulating device, so that a tight position of the ribbon cable / shielded ribbon cable 2 is ensured during the movement.

In the direction of movement of the ribbon cable after the first roll 3, the first plasma electrode 5a is arranged for the continuous pretreatment of the first wider surface of the ribbon cable. This results in cleaning, a roughening of this surface in the micro range and the creation of condensation nuclei through the generation of polar surface groups. Immediately afterwards is the first evaporator 6a for the continuous evaporation of the pretreated surface with an electrically conductive material, in particular copper. Known directly heated block evaporators with wire feeding, radiation-heated ones can be used as evaporators Crucible evaporators, radiation-heated block evaporators with wire lining and radiation-heated linear evaporators are used. Advantageously come

Evaporators with wire lining are used, the wire consisting of the electrically conductive material to be evaporated. The wire is moved and guided by a rotatably mounted wire coil to the evaporator. The

Movement is based on a pair of rollers, with another electric motor with a

Roller is coupled and pulls the wire from the wire spool. Both ceramic boats and tungsten funnel coils can be used as evaporators, for example. Tungsten funnel spirals advantageously require significantly less energy for the same ϊ or better evaporation rate. The electric motor for the wire is connected to the control and regulating device. After the first evaporator 6a, in the direction of movement of the ribbon cable, there is a ribbon turner 7 as a device for rotating the ribbon cable in the processing chamber 1. The ribbon turner 7 consists either of a tube rotated in its longitudinal axis, of a channel rotated in its longitudinal axis, or several pairs of rollers, see above that the ribbon cable is turned by 180 °.

The second plasma electrode 5b for continuous pretreatment of the surface of the ribbon cable opposite the surface with the vapor-deposited electrically conductive material is located after the ribbon turner 7 in the direction of movement of the ribbon cable coated on one side. In the direction of movement of the ribbon cable after the second plasma electrode 5b, a second evaporator 6b is arranged in the processing chamber 1 for the continuous vapor deposition of this surface of the ribbon cable. The design of this second evaporator 6b corresponds to that of the first evaporator 6a. The opposite, broad surfaces of the ribbon cable are thus provided with a vapor-deposited, electrically conductive layer. A shielded ribbon cable 2 is thus realized. This shielded ribbon cable 2 is wound on the second roll 4 in the processing chamber 8.

The functions of the vacuum-generating devices for the evacuable processing chamber 1, the speeds of the electric motors, the operation of the plasma electrodes 5 and the temperatures of the evaporators 6 are controlled by the control and control device influenced. The setting is made in accordance with the ribbon cable to be coated and the layers to be implemented

Controls.

In one embodiment of the first exemplary embodiment, a known tubular magnetron sputtering system can be arranged after the second evaporator 6b. The tubular target reacts with constituents of the plasma between this target and the shielded ribbon cable 2, so that the chemical reaction product is deposited on the surface of the shielded ribbon cable 2. A mixture of argon with a reactive gas is preferably used as the plasma. A NiCr layer is applied over the tubular magnetron sputtering system.

2nd embodiment

A device for coating ribbon cable essentially consists of at least three evacuable processing chambers 1, devices for releasably attaching a first roller 3 with the ribbon cable and a second roller 4 with the shielded ribbon cable 2, cleaning devices for the ribbon cable, two vaporization devices and two sputtering devices.

2 shows a basic illustration of a device for coating ribbon cables with a processing chamber 1 divided into rooms.

In accordance with that of the first exemplary embodiment, the ribbon cable is a strip-shaped extruded plastic in which ribbon-shaped electrical conductors 14 are embedded. The ribbon cable is initially on the first roll 3 and after processing on the second roll 4. In the first evacuable processing chamber 1 a, devices for releasably fastening these rolls 3, 4 are arranged. These devices act as unwinder and as rewinder, at least the rewinder being connected to a drive. This drive can be arranged either in the first evacuable processing chamber la or outside it. Such devices including a coupled drive are known and are therefore not shown in the figures. In the first evacuable processing chamber la there are two plasma electrodes 5a, 5b spaced apart from the ribbon cable after the first roll 3 for cleaning, roughening this surface in the micro range and creating condensation nuclei by generating polar surface groups in the first evacuable processing chamber la, the ribbon cable is guided between these plasma electrodes 5a, 5b. In the second evacuable processing chamber 1b, two evaporators 6a, 6b for copper are arranged in succession for coating the ribbon cable on both sides at least in regions, each opposite a cooling roller 8a, 8b for simultaneously guiding the ribbon cable. A strip turner 7 is located between the cooling rollers 8a, 8b, so that vapor deposition with copper is ensured on both sides. The technology and devices for evaporation are known - see also the explanations in the first exemplary embodiment, so that the evaporators 6a, 6b are only shown in principle in the figures.

In the third evacuable processing chamber 1c, two sputtering devices are arranged at a distance for depositing a protective layer on both sides onto the copper layers of the shielded ribbon cable 2. For this purpose, two targets 9a, 9b made of NiCr are spaced apart in the third evacuable processing chamber 1c. An NiCr layer is applied to the copper layers of the shielded ribbon cable 2. A magnetic field-assisted target atomization using so-called high-performance magnetrons is used as the device for sputtering. The target holders on the back are also equipped with magnetic systems that lead to a very high plasma concentration in front of the target due to the field penetration. Large atomization yields are thereby achieved. The electrons generated in the process are directed to an auxiliary electrode arranged in the cathode area and extracted. The shielded ribbon cable 2 is therefore predominantly hit by atomized NiCr as a material, as a result of which low temperatures of the shielded ribbon cable 2 arise. Another advantage is that due to the high plasma density reduced resistance of the plasma leads to very low discharge voltages. The

Dusting rates are almost proportional to the power fed in.

After the NiCr layers have been applied to the shielded ribbon cable 2, this is evacuated to the second reel 4 with the rewinder in the first

Processing chamber la led.

After the coating of the ribbon cable 5, the roles are exchanged.

The evacuable processing chambers la, lb, lc are advantageously components of a chamber. The individual evacuable processing chambers la, lb, lc are formed by corresponding partition walls 10. Through openings 11 in this

The ribbon cable / shielded ribbon cable 2 is guided between the walls.

Other guides are based on correspondingly arranged rotatable guide rollers.

Such deflection rollers are shown in the figures by way of example without a designation. Each of the evacuable processing chambers la, lb, lc has a vacuum-generating one

Establishment connected. Different pressures required for the respective processing can thus be generated in the evacuable processing chambers.

The following pressures are preferably realized in the evacuable processing chambers la, lb, lc:

- first evacuable processing chamber of 10 ^"1 mbar,

- Second evacuable processing chamber lb 10 ^"4 mbar and

- Third evacuable processing chamber lc 10 ^"3 mbar.

At least the vacuum generating devices, the at least one drive, the plasma electrodes 5a, 5b, the vapor deposition devices and the sputtering devices are connected to at least one control device, so that a continuous coating of the ribbon cable is ensured.

In a first embodiment of the second exemplary embodiment, the evacuable processing chambers la, lb, lc, ld can also be arranged in a row (illustration in FIG. 3). For this purpose, the device as a winder is not in the first evacuable processing chamber la, but in a fourth evacuable processing chamber ld. The evacuable processing chambers la, lb, lc, ld can be implemented as independent units, the transport of the Ribbon cable / shielded ribbon cable 2 through openings in walls and attached tubes 12 from evacuable processing chamber to evacuable

Processing chamber is guaranteed (representation in Fig. 3).

In a second embodiment of the second exemplary embodiment, the belt turner 7 can be omitted in the second evacuable processing chamber 1b. The evaporators 6a, 6b of the two vaporization devices are located on one level. At least one deflection roller 13 for guiding and guiding the shielded ribbon cable 2 from the second cooling roller 5b to the third evacuable processing chamber 1c is arranged between the cooling rollers 5a, 5b (illustration in FIG. 4). Such an embodiment is also particularly advantageous for the coating of a plurality of ribbon cables which are routed in parallel. For this purpose, several rolls are arranged on the unwinder and the unwinder as first rolls 3 and second rolls 4. The ribbon cables are routed in parallel in the device for coating ribbon cables, so that at the same time several ribbon cables can be coated in parallel.

3rd embodiment

In this embodiment, shielded ribbon cables 2 and

Process for their preparation explained together.

A shielded ribbon cable 2 consists of flat conductors as electrical conductors 14

(Wire) in a jacket 15 as an insulator and a shield. The electrical conductors

14 are elongated structural elements of the ribbon cable made of copper. The electrical

Conductors 14 are in an extruded plastic made of polyethersulfone,

Polyetherimide or Polyethemaphthalat or a derivative of these polymers or a mixture containing these polymers and / or derivatives of these polymers, as

Coat 15.

The jacket 15 and the conductors 14 form a known ribbon cable manufactured using known methods. The ribbon cable is located on a roll 3, which is rotatably mounted in an evacuable processing chamber 1. The Ribbon cable is in this evacuable processing chamber 1 at a uniform speed after pretreatment of surfaces

Evaporators 6a, 6b are guided in such a way that the wider, opposite surfaces of the ribbon cable are provided with a vapor-deposited layer 16 made of an electrically conductive material, in particular copper. Tin or silver can also be vapor-deposited as an electrically conductive material. The shielded ribbon cable 2 is thus realized (illustration in FIG. 5). The pretreatment of the surfaces serves for pre-cleaning, the roughening of the surface in the

Micro range and the creation of condensation nuclei by generating polar

Surface groups. A plasma pretreatment and

Plasma activation used. The speed of the ribbon cable depends on the required layer thickness and the evaporation rate. After evaporation, the shielded ribbon cable 2 is placed on a second rotatably mounted and detachable roll

4 wound up in the processing chamber 1.

In one embodiment of the third exemplary embodiment, a NiCr layer can be applied to the vapor-deposited layer made of copper. This layer is sputtered on in a tubular magnetron. This is reactive sputtering, where a target reacts with components of a plasma in such a way that the chemical reaction product is deposited on the surface of the copper layer.

4th embodiment

A shielded ribbon cable 2 consists of at least two electrical conductors 14 (wires) which are arranged at a distance from one another and which are sheathed by a jacket 15 as an insulator made of an extruded plastic. The jacket 15 is preferably made of the materials of the third embodiment. The electrical conductors 14 are flat conductors, with at least two electrical conductors 14 being present in the jacket 15 as two-core ribbon cables. Openings 17 are introduced between the electrical conductors 14, spaced apart and running parallel to the electrical conductors 14, advantageously punched or through the action of electromagnetic ones Beams in the form of laser beams. The distances are webs that serve the firm hold of the shielded ribbon cable 2. The length of the webs is less than λ / 20.

This ribbon cable is then in at least one processing chamber 1 with at least two evaporators 6 with a layer 16 of an electrically conductive material, in particular copper, tin or silver, the same as that of the third

Embodiment provided. The ribbon cable is guided in such a way that, at least in addition to the opposing wide surfaces, areas of the

Walls of the openings 17 are pretreated and the electrically conductive material is evaporated. As a result, there is also a shield in addition to the outside

Shielding is present between the electrical conductors 14, so that an at least two-core shielded ribbon cable 2 is realized. The illustration in FIG. 6 shows a two-core flinned ribbon cable 2 in a top view and in one

Cut.

In a first embodiment of this fourth exemplary embodiment, the openings 17 are at least partially filled with an electrically conductive material before the vapor deposition. This is in particular a hardened electrical conductive adhesive, a dried electrically conductive lacquer or a hardened paste-like mixture of an organic and / or inorganic binder. Such materials are available. Thereafter, the multicore ribbon cable pretreated in this way is pretreated in the at least one evacuable processing chamber 1 at least on the broad surfaces and an electrically conductive material is evaporated, so that a two-core shielded ribbon cable 2 is realized.

In a second embodiment of the fourth exemplary embodiment, a NiCr layer can be applied to the evaporated copper layer. This layer is sputtered on in a tubular magnetron. This is reactive sputtering, where a target reacts with components of a plasma in such a way that the chemical reaction product is deposited on the surface of the copper layer. In a third embodiment of the fourth exemplary embodiment, these shielded ribbon cables 2 can be provided with an electrical insulation layer 18. This is in particular an extruded plastic or a layer of paint, so that a

Protection against physical or chemical influences is given. In another

In the embodiment, a layer 19 of a vapor-deposited electrical material can be arranged on this electrical insulation layer 18 (illustration in FIG. 7). This

Layer 19 can advantageously be applied by the devices according to the first and second exemplary embodiment. Of course, in another

Embodiment of this layer 19 also with another electrical

Insulation layer be provided.

In a further embodiment of the third or fourth exemplary embodiment, the electrically conductive material can also be evaporated only in sections. The lengths of these sections can be specified via masks, so that the shielded ribbon cable 2 is easily contacted. In a further embodiment, the outward-facing electrical insulation layer can also be applied in sections. This also provides for easy contacting of the shielded ribbon cable 2 designed in this way.

The ribbon cable can of course also have more than two electrical conductors 14 arranged at a distance from one another, so that a multi-core shielded ribbon cable 2 can be realized.

Claims

claims

1.Procedure for the production of shielded ribbon cable consisting of electrical conductors embedded in an extruded plastic as an insulating jacket in at least one evacuable processing chamber with rollers for the ribbon cable and the shielded ribbon cable, devices for pretreatment, evaporators, guides for the ribbon cable and at least one drive for the movement of the ribbon cable, characterized in that the processing chamber (1) is evacuated, that at least one of the surfaces or a region of a surface of the ribbon cable is continuously pretreated with a first device, that on this surface or this region of the surface with at least a first Evaporator (6a) an electrically conductive material is continuously evaporated, that the ribbon cable is rotated via a guide and that either against the surface with the evaporated electrically conductive material an electrically conductive material is continuously vapor-deposited on the surface or the area of the surface of the ribbon cable opposite the surface with the vapor-deposited electrically conductive material using at least one second evaporator (6b).

2. The method according to claim 1, characterized in that prior to the pretreatment in the jacket (15) spaced openings (17) between adjacent conductors (14) are introduced in rows.

3. The method according to any one of claims 1 or 2, characterized in that an electrical insulation layer is applied after the vapor deposition of the electrically conductive material.

4. The method according to claims 1 and 3, characterized in that the processing chamber (1) is evacuated, that at least one of the surfaces or a region of a surface of the electrical insulation layer is continuously pretreated with a first device that is on this

Surface of the insulation layer or this area of the surface of the

Insulation layer with at least the first evaporator (6a) an electrically conductive material is continuously evaporated that the

Ribbon cable is rotated and that either the surface of the surface with the vapor-deposited electrically conductive material

Insulation layer or the area of the surface of the surface with the vapor-deposited electrically conductive material

Isolation layer of the ribbon cable with the second evaporator (6b) an electrically conductive material is continuously evaporated.

5.Device for coating ribbon cables with electrical conductors in a jacket as an insulator made of an extruded plastic in at least one evacuable processing chamber with a first rotatable roller for ribbon cables, at least two devices for pretreatment, at least two evaporators, a second rotatable roller for the shielded ribbon cable, guides for the ribbon cable and at least one drive for moving the ribbon cable, characterized in that pre-cleaning and plasma-activating devices are located as devices for pretreatment in the processing chamber (1) and that between the at least one first evaporator (6a) and either the second plasma-activating device or the at least one second evaporator (6b), a device for rotating the ribbon cable is arranged such that either the surface with the vapor-deposited electrically conductive material is opposed The surface above or the area of the surface of the ribbon cable opposite the surface with the vapor-deposited electrically conductive material is continuously pretreated either with the second pre-cleaning and plasma-activating device and subsequently vaporized with at least the second evaporator (6b) with an electrically conductive material or with the second evaporator (6b) is vapor-deposited with an electrically conductive material.

6. The device according to claim 5, characterized in that in the processing direction of the ribbon cable located on rollers (3, 4) at least three evacuable processing chambers (1) that in a first evacuable processing chamber (la) or both in a first evacuable processing chamber (la ) as well as in a fourth evacuable processing chamber (ld), at least one of these devices being coupled to a drive, for releasably fastening the rollers (3, 4) with ribbon cable, that in a second evacuable processing chamber (lb) two steaming devices in succession one evaporator (6a, 6b) each for copper to coat the ribbon cable on both sides at least in regions, each with respect to a cooling roller (8a, 8b) for simultaneously guiding the ribbon cable that in a third evacuable processing chamber (lc) spaced two sputtering devices for the mutual deposition of a Sc protective layer on the copper layers and that the evacuable processing chambers 1 with openings for guiding the ribbon cable and through at least one wall as an intermediate wall (10) are immediately adjacent or that pipes (12) for guiding the ribbon cable are arranged between evacuable processing chambers.

7. The device according to claim 6, characterized in that the target material of the sputtering devices is NiCr.

8. The device according to claim 6, characterized in that the evaporators (6a, 6b) of the two vapor deposition devices in one plane and that in the transport direction of the ribbon cable between the cooling rollers (8a, 8b), a ribbon turner (7) for the ribbon cable as a device for rotating the ribbon cable is arranged.

9. The device according to claim 6, characterized in that the

Evaporator (6a, 6b) of the two steaming devices in one plane and that between the cooling rollers (8 a, 8b) and the evaporators at least one deflection roller (13) for guiding and guiding the shielded ribbon cable (2) from the second cooling roller (8b) third evacuable processing chamber (lc) is arranged as a device for rotating the ribbon cable.

10. The device according to claim 6, characterized in that in the first evacuable processing chamber (lc) after the first roll (3) with the uncoated ribbon cable spaced two plasma electrodes (5a, 5b) are arranged, the ribbon cable between the plasma electrodes (5 a , 5b) is performed.

11. The device according to claim 6, characterized in that a plurality of ribbon cables are guided in parallel, devices for releasable fastening in the first evacuable processing chamber (lc) or both in the first evacuable processing chamber (lc) and in the fourth evacuable processing chamber (ld) Several roles with ribbon cable and shielded ribbon cable (2) are arranged.

12. Shielded ribbon cable with at least two spaced-apart electrical conductors in a sheath as an insulator made of an extruded plastic and a shield, characterized in that the sheath (15) as an insulator made of one of the polymers polyether sulfone, polyether imide or polyethene phthalate or a derivative this polymer or a mixture which contains these polymers and / or derivatives of these polymers, and that the deposit is at least one vapor-deposited layer (16) of an electrically conductive material on the jacket (15).

13. Shielded ribbon cable according to claim 12, characterized in that between adjacent conductors (14) openings (17) are introduced and that on the walls of the openings (17) at least in regions and on the jacket (15) an evaporated layer (16) is made of an electrically conductive material.

14. Shielded ribbon cable according to claim 12, characterized in that between adjacent conductors (14) openings (17) are introduced that either on the walls of the openings (17) at least partially an electrically conductive layer and / or at least partially in the openings there is a filling made of an electrically conductive material and that on the jacket (15) and either the electrically conductive layer on the wall of the opening (17) or the filling in the opening (17) there is a vapor-deposited layer (16) made of an electrically conductive material is arranged.

15. Shielded ribbon cable according to one of the claims 12 or 13, characterized in that there is an electrical insulation layer (18) on the vapor-deposited layer (16) of the electrically conductive material.

16. Thin ribbon cable according to one of the claims 12 to 15, characterized in that the vapor-deposited layer (16) and / or the insulation layer (18) over masks as first sections with predeterminable lengths and / or patterns on the jacket or the vapor-deposited layer ( 16) are applied and that between the first sections there are second sections of predeterminable length without vapor-deposited layer (16) as outer conductor and / or insulation layer.

17. Shielded ribbon cable according to claim 14, characterized in that a further vapor-deposited layer (19) made of an electrically conductive material is arranged on the electrical insulation layer.