WO2004106881A3 - Leckraten-messvorrichtung - Google Patents

Leckraten-messvorrichtung Download PDF

Info

Publication number
WO2004106881A3
WO2004106881A3 PCT/EP2004/004949 EP2004004949W WO2004106881A3 WO 2004106881 A3 WO2004106881 A3 WO 2004106881A3 EP 2004004949 W EP2004004949 W EP 2004004949W WO 2004106881 A3 WO2004106881 A3 WO 2004106881A3
Authority
WO
WIPO (PCT)
Prior art keywords
leak rate
gas
measuring device
rate measuring
spectrometer
Prior art date
Application number
PCT/EP2004/004949
Other languages
English (en)
French (fr)
Other versions
WO2004106881A2 (de
Inventor
Ludolf Gerdau
Randolf Rolff
Ralf Kilian
Original Assignee
Inficon Gmbh
Ludolf Gerdau
Randolf Rolff
Ralf Kilian
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh, Ludolf Gerdau, Randolf Rolff, Ralf Kilian filed Critical Inficon Gmbh
Priority to EP04731926A priority Critical patent/EP1629262B1/de
Priority to DE502004001914T priority patent/DE502004001914D1/de
Priority to JP2006508169A priority patent/JP4444954B2/ja
Priority to US10/558,164 priority patent/US7331216B2/en
Publication of WO2004106881A2 publication Critical patent/WO2004106881A2/de
Publication of WO2004106881A3 publication Critical patent/WO2004106881A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Die Leckraten-Messvorrichtung enthält ein Bahn-Spektrometer (8), bei dem der Ionenweg (21) des jeweiligen Gases durch mindestens eine veränderbare Einflussgröße beeinflusst wird. Wenn ein Gas der Masse M4 detektiert werden soll und durch mangelnde Selektivität des Spektrometers Ausläufer des Gases der Massen M2 oder M3 diese Detektion überlagern, wird vorgeschlagen, die Einflussgröße sinusförmig zu modulieren und anschließend das Nutzsignal in einem Lock-In-Verstärker zu selektieren. Damit kann der störende Einfluss eines Wasseruntergrundes bei der Leckraten-Messung mit Helium als Testgas eliminiert werden.
PCT/EP2004/004949 2003-05-31 2004-05-10 Leckraten-messvorrichtung WO2004106881A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP04731926A EP1629262B1 (de) 2003-05-31 2004-05-10 Leckraten-messvorrichtung
DE502004001914T DE502004001914D1 (de) 2003-05-31 2004-05-10 Leckraten-messvorrichtung
JP2006508169A JP4444954B2 (ja) 2003-05-31 2004-05-10 検出すべきガスの漏れレートを測定する方法及び漏れレート測定装置
US10/558,164 US7331216B2 (en) 2003-05-31 2004-05-10 Leak rate measuring device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10324766.1 2003-05-31
DE10324766A DE10324766A1 (de) 2003-05-31 2003-05-31 Leckraten-Messvorichtung

Publications (2)

Publication Number Publication Date
WO2004106881A2 WO2004106881A2 (de) 2004-12-09
WO2004106881A3 true WO2004106881A3 (de) 2005-05-12

Family

ID=33441539

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/004949 WO2004106881A2 (de) 2003-05-31 2004-05-10 Leckraten-messvorrichtung

Country Status (6)

Country Link
US (1) US7331216B2 (de)
EP (1) EP1629262B1 (de)
JP (1) JP4444954B2 (de)
CN (1) CN100549650C (de)
DE (2) DE10324766A1 (de)
WO (1) WO2004106881A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888128B1 (fr) * 2005-07-11 2007-10-12 Maintenance Securite Installat Procede de controle du taux de fuite des filtres a charbon actif
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
CN102564709A (zh) * 2010-12-10 2012-07-11 中国航空工业集团公司第六三一研究所 一种密封结构零件的检漏方法
DE102012203137A1 (de) * 2012-02-29 2013-08-29 Inficon Gmbh Verfahren zur Bestimmung des Maximums des Massenpeaks in der Massenspektrometrie
CN103808474A (zh) * 2012-11-14 2014-05-21 广州市特种承压设备检测研究院 一种安全阀密封性能的校验方法
DE102014118623B3 (de) 2014-12-15 2016-04-28 Areva Gmbh Vorrichtung und Verfahren zur Durchführung einer Dichtheitsprüfung an Brennstabkapseln
CN107389498B (zh) * 2017-07-07 2024-01-12 金华职业技术学院 一种测量甲烷透过率的方法
CN108981561B (zh) * 2018-08-02 2020-11-03 河北盛世天昕电子科技有限公司 一种漏气孔确定方法、真空电机及其吸附物品检测方法
CN116358796B (zh) * 2023-05-18 2023-08-01 天津博益气动股份有限公司 新能源动力电池箱体的检漏方法及检漏系统
CN118670631A (zh) * 2024-08-21 2024-09-20 成都睿宝电子科技有限公司 基于氦质谱检漏仪漏率的信号动态处理方法、设备及介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4409482A (en) * 1980-04-11 1983-10-11 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Stabilization control for a mass spectrometer
JPH02309226A (ja) * 1989-05-24 1990-12-25 Ulvac Corp ガス洩れ検査装置
JP2000046680A (ja) * 1998-07-29 2000-02-18 Ulvac Japan Ltd 磁場偏向型質量分析管を使用した漏洩検知方法及び装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1219255B (de) * 1962-10-09 1966-06-16 Leybolds Nachfolger E Massenspektrometer
JPH05325883A (ja) * 1992-05-26 1993-12-10 Shimadzu Corp 質量分析装置
DE4494302C1 (de) * 1993-06-19 1998-04-16 W Von Der Heyde Gmbh Maschinen Verfahren und Vorrichtung zur Dichtheitsprüfung von Hohlkörpern
DE4408877A1 (de) * 1994-03-16 1995-09-21 Leybold Ag Testgaslecksucher

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4409482A (en) * 1980-04-11 1983-10-11 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Stabilization control for a mass spectrometer
JPH02309226A (ja) * 1989-05-24 1990-12-25 Ulvac Corp ガス洩れ検査装置
JP2000046680A (ja) * 1998-07-29 2000-02-18 Ulvac Japan Ltd 磁場偏向型質量分析管を使用した漏洩検知方法及び装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 015, no. 095 (P - 1176) 7 March 1991 (1991-03-07) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 05 14 September 2000 (2000-09-14) *

Also Published As

Publication number Publication date
US7331216B2 (en) 2008-02-19
JP4444954B2 (ja) 2010-03-31
JP2007524072A (ja) 2007-08-23
CN100549650C (zh) 2009-10-14
DE10324766A1 (de) 2004-12-16
US20060283235A1 (en) 2006-12-21
DE502004001914D1 (de) 2006-12-14
CN1798964A (zh) 2006-07-05
EP1629262A2 (de) 2006-03-01
EP1629262B1 (de) 2006-11-02
WO2004106881A2 (de) 2004-12-09

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