WO2004097805A1

WO2004097805A1 - Thin-film magnetic head, production method therefor, and magnetic storage unit

Info

Publication number: WO2004097805A1
Application number: PCT/JP2003/005524
Authority: WO
Inventors: Yuichi Yamada
Original assignee: Fujitsu Limited
Priority date: 2003-04-30
Filing date: 2003-04-30
Publication date: 2004-11-11

Abstract

A thin-film magnetic head (30) comprising a recording head (35) formed on a substrate (32), and a reproducing head (36) formed on the recording head (35), wherein the recording head (35) comprises a lower magnetic pole layer (38), an upper magnetic pole layer (41) magnetically connected with the lower magnetic pole layer (38) via a magnetic layer (40) and formed to face the lower magnetic pole layer (38) across a non-magnetic insulation films (39A), (39B), an upper tip-end sub-magnetic pole (42) magnetically connected with the upper magnetic pole layer (41) on an air bearing surface (33) side and having a width accommodating a recording track width, and a coil (43) formed between the lower magnetic pole layer (38) and the upper magnetic pole layer (41). The coil (43) is formed in a single layer, and the lower magnetic pole layer (38) and the upper magnetic pole layer (41) are formed almost in parallel to each other. Heat generated from the coil (43) is conducted in the directions of the substrate (32), the air bearing surface (33) and the reproducing head (36) to be efficiently dissipated, thereby preventing failures due to heat.

Description

Description Thin expansion head, manufacturing method thereof, and magnetic storage device

The present invention relates to a composite thin I-head having a recording head and a reproducing head, a method of manufacturing the same, and a magnetic storage device.

In recent years, as the capacity of magnetic storage devices has increased, the recording density of magnetic recording media has increased by as much as 100% per year. This advance in high-density recording technology is mainly due to lower noise in magnetic recording media and higher sensitivity of thin magnetic heads. With the high recording density, the size of the recording head and the reproducing head of the head has been reduced. Background art

The small head of the self-recorded head and the playback head of the light head, especially the write gap of the recording head, the read gap of the playback head, and the core width of these heads Emphasis is placed on narrowing

FIG. 1A is a cross-sectional view of a conventional thin hard head, and FIG. 1B is a configuration diagram of an air bearing surface. Referring to Figure 1 A and FIG. 1 B, Ru head 1 0 to thin film magnetic is opposite to the magnetic recording medium 2 0 which moves in the direction of the arrow, AlTiC _{(A 1 2 θ3- Τ i C} ) from Do ' It comprises a reproducing head 12 formed on the substrate 11 and a recording head 13 formed on the reproducing head 12, and performs recording and reproduction on the magnetic recording medium 20. An MR element, a GMR element, or the like is used as the magnetic sensing element 14 of the reproducing head 12, and a sense current of about 1 O mA flows to detect a magnetic field from the magnetic recording medium 20. On the other hand, the recording head 13 includes a lower magnetic pole layer 15 and an upper magnetic pole layer 16 forming a magnetic circuit, and a laminated coil 18 wound around these magnetic circuits. . A recording current of a high-frequency pulse having a magnitude of 30 mA to 60 mA flows through the coil 18 to record information. In particular, the coercive force of the magnetic recording medium 20 is increased as the recording density is increased, and a larger recording magnetic field, that is, a larger recording current is required to secure the overwrite characteristics. Therefore, the heat generated from coil 18 It is important to radiate heat efficiently.

The heat generated by the coil 18 of the recording head 13 flows mainly in three directions of the substrate 11, the upper insulating film 19, and the air bearing surface 21 and is radiated to the outside. Of these, in the direction of the substrate 11, the coil 18 force, the lower magnetic pole layer 15, the insulating film 22 about 5 m thick, the reproducing head 12 and the insulating film 23 Heat is dissipated through the substrate 11. The lower and upper shield layers 24 and 25 of the lower magnetic pole layer 15 and the reproducing head 12 are made of a metal material and have high thermal conductivity, and the substrate material of the substrate 11 is thermally conductive. Since the rate is about 21 W / (m-K), heat radiation in this direction is good. Further, since the lower and upper shield layers 24 and 25 are exposed on the surface of the air bearing 21, heat is also dissipated in the direction of the air bearing surface 21.

However, regarding heat radiation from the coil 18 to the upper insulating film 19 via the upper magnetic pole layer 16, the upper insulating film 19 is made of aluminum oxide having a low thermal conductivity (a thermal conductivity of about 15 W / (m- K)), it is usually formed with a film thickness of 6 to several tens / m, so it is difficult to dissipate heat. In addition, the top pole layer 16 also has a tapered tip 16-1 exposed on the air bearing surface 21 so that the heat conduction path is narrow and heat is not easily dissipated! /, The structure. Therefore, heat generation of the coil 18 is likely to be accumulated. As a result, the temperature rises and thermal expansion causes the tip portions of the upper magnetic pole layer 16 and the lower magnetic pole layer 15, and furthermore, the magneto-sensitive element 14 to protrude from the air bearing surface 21 in the direction of the magnetic recording medium 20. . As a result, the thin air head 10 is likely to come into contact with the magnetic recording medium 20 and further crashes.

As a countermeasure, it is conceivable to increase the heat dissipation capacity by reducing the thickness of the upper insulating film 19. Since the coil 18 is laminated on the upper magnetic pole layer 16, the upper magnetic pole layer 16 has an inclined portion 16-2 from the far end to the air bearing ring surface 33 to the tip 16-1. And a few μπ! There is a step of ~ 1 Ο μ πι. Therefore, if the upper insulating film 19 is simply made thinner, the upper magnetic pole layer 16 may not be completely covered, and the function as a protective film is deteriorated by an external environment, for example, acid or alkaline. There is. In the manufacturing process of the thin head 10, a reproducing head 12 is first formed on the substrate 11, and then a recording head 13 is formed on the reproducing head 12. Is done. Therefore, when manufacturing the recording head 13, in particular, a heat treatment step or the application of a magnetic field In the process of heat treatment, there is a problem that the characteristics of the reproducing head 12 are deteriorated, for example, the previously formed magneto-sensitive element 14 is thermally damaged or the magnetic orientation is disturbed. In addition, since the read head 12 is formed of a laminate of ultra-thin thin films of about several nm, it is easily broken by static electricity during handling, such as transfer between devices, and production yield is reduced. There is a problem of poor stability.

Patent Document 1: Japanese Patent Application Laid-Open No. 2000-28085 4 21 Disclosure of the Invention

Therefore, an object of the present invention is to provide a novel thin-film magnetic head, a method of manufacturing the same, and a magnetic storage device which solve the above-mentioned problems.

A more specific object of the present invention is to provide a thin-film magnetic head and a magnetic storage device that prevent thermal damage due to heat generation of a coil and an MR element, have high operation reliability, and are capable of high-density recording. . Another specific object of the present invention is to provide a method for manufacturing a thin head, which prevents performance deterioration and yield reduction due to thermal damage or the like of an MR element and simplifies the manufacturing process. It is to share the tree.

According to one aspect of the invention,

A composite head comprising a substrate, a recording head, and a reproducing head, wherein the recording head is formed between the substrate and the reproducing head;

A lower magnetic pole layer formed on the substrate,

An upper magnetic pole layer magnetically connected to the lower magnetic pole layer and facing the lower magnetic pole layer;

Having a coil formed between the lower pole layer and the upper pole layer,

A thin-film magnetic head is provided in which the coil is formed in a single layer and the lower pole layer and the upper pole layer are substantially parallel.

According to the present invention, the recording head is formed between the substrate and the reproducing head. Heat generated from the coil of the recording head can be transmitted to the substrate, the air bearing surface facing the magnetic recording medium, and the reproducing head, so that heat can be efficiently radiated. Therefore, it is possible to prevent heat failure such as disconnection of the coil due to a rise in temperature, and protrusion of the lower and upper pole layers toward the air bearing surface. As a result, a highly reliable thin β-air head can be realized. Furthermore, by preventing the above protrusion, In addition, the spacing between the reproducing head and the magnetic recording medium can be stabilized, and a thin β-head capable of reducing the spacing and enabling high-density recording can be realized. Further, since the lower magnetic pole layer and the upper magnetic pole layer are formed substantially in parallel, a flat underlayer required for the magneto-sensitive element of the reproducing head formed on the recording head can be easily formed. be able to.

According to another aspect of the present invention, there is provided a magnetic storage device including the above thin-film magnetic head. According to the present invention, it is possible to realize a magnetic storage device capable of high-density recording with high reliability.

According to another aspect of the present invention,

A substrate, a recording head formed on the substrate, and a reproducing head formed on the recording head,

The tat self-recording head includes a lower magnetic pole layer formed on the substrate, an upper magnetic pole layer magnetically connected to the lower magnetic pole layer, and facing the lower magnetic pole layer, and the lower magnetic pole layer and the upper magnetic pole. A coil formed in the non-magnetic insulating film between the first magnetic layer and the magnetic recording medium, and a magnetic pole part magnetically connected to the upper magnetic pole layer on the side facing the magnetic recording medium to form a recording gap. A method of manufacturing a thin head,

Embedding the coil and the magnetic pole portion with the nonmagnetic insulating film;

A flattening step of flattening the nonmagnetic insulating film to expose the magnetic pole portion.

According to the present invention, the non-magnetic insulating film is polished and flattened, whereby the magneto-sensitive element of the reproducing head can be formed with good flatness. Also, since the coil is formed in a single layer, the amount of polishing can be reduced, and the manufacturing process time can be shortened. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a cross-sectional view of a conventional thin head, and FIG. 1B is a configuration diagram of an air bearing surface of the thin J head shown in FIG. 1A.

FIG. 2 is a diagram showing a state where the thin-film magnetic head according to the first embodiment of the present invention flies above a magnetic recording medium. ' FIG. 3 is a view of the thin air manifold shown in FIG. 2 as viewed from the air bearing surface side. FIG. 4A is an enlarged cross-sectional view showing a main part of the thin-film magnetic head of FIG. 3, and FIG.

FIG. 4 is a configuration diagram of an air bearing surface of the thin-film magnetic head shown in FIG. 4A.

FIG. 5 is a plan view of the recording head.

FIG. 6A is an enlarged cross-sectional view showing a main part of a thin-film magnetic head according to a first modification of the first embodiment, and FIG. 6B is an air view of the thin-film magnetic head shown in FIG. 6A. It is a block diagram of a bearing surface.

FIG. 7A is an enlarged cross-sectional view showing a main part of a thin air head according to a second modification of the first embodiment, and FIG. 7B is a thin air head shown in FIG. 7A. FIG. 2 is a configuration diagram of an air bearing surface of FIG.

FIG. 8A is a cross-sectional view showing an enlarged main part of the perpendicular magnetic recording head according to the second embodiment of the present invention, and FIG. 8B is a sectional view of the perpendicular magnetic recording head shown in FIG. 8A. FIG. 3 is a configuration diagram of an air bearing surface.

FIG. 9A is an enlarged cross-sectional view showing a manufacturing process (No. 1) of the thin head according to the present invention, and FIG. 9B is a configuration diagram of an air bearing surface thereof.

FIG. 10A is an enlarged cross-sectional view showing a manufacturing process (part 2) of the thin β-air head according to the present invention, and FIG. 10 is a configuration diagram of an air bearing surface thereof.

FIG. 11A is an enlarged sectional view showing a manufacturing process (part 3) of the thin-film magnetic head according to the present invention, and FIG. 11B is a configuration diagram of an air bearing surface thereof.

FIG. 12A is an enlarged cross-sectional view showing a manufacturing process (part 4) of the thin-room air head according to the present invention, and FIG. 12B is a configuration diagram of an air bearing surface thereof.

FIG. 13A is an enlarged cross-sectional view illustrating a manufacturing process (part 5) of the thin-film magnetic head according to the present invention, and FIG. 13B is a configuration diagram of an air bearing surface thereof.

FIG. 14A is an enlarged sectional view showing a manufacturing process (part 6) of the thin air head according to the present invention, and FIG. 14B is a configuration diagram of an air bearing surface thereof.

FIG. 15 is a diagram showing a main part of the magnetic storage device according to the present invention.

Explanation of symbols: 3 0 · 5 5 ■ 6 · 7 0 ... thin and hard head, 3 3 ... air bearing surface, 35 · 5 6 · 6 1 · 7 1 ··· recording head 3 6 · 6 2 · · · playback head, 3 · · · · lower pole layer, 4 1 · · · upper pole layer, 4 2 · · · top tip sub-pole, 4 3 · · coil, 4 8 · · · ' MR element, 52 · · · · upper insulating film, 58 · · · thermal conductive layer, 70 · · · perpendicular magnetic recording head, 72 · · · auxiliary magnetic pole layer, 73 · · · main magnetic pole layer, 80 ... magnetic storage device BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a thin film magnetic head according to an embodiment of the present invention will be described with reference to the drawings.

[First embodiment]

FIG. 2 is a diagram showing a state in which a thin air head according to an embodiment of the present invention flies above a magnetic recording medium. Referring to FIG. 2, the thin-film magnetic head 30 of the present embodiment obtains a flying force by the air flow (the direction of the arrow AIR) flowing over the magnetic recording medium 31 moving in the direction of the arrow ME to obtain the slider 3. The inflow end 3 2-1 of the magnetic recording medium 3 1 is high, and the outflow end 3 2-2 floats while maintaining a low attitude. Outflow end 3 of air bearing surface 3 3

2-2 is provided with a composite head 3 4.

FIG. 3 is a view of the thin-film magnetic head 30 of FIG. 2 as viewed from the air bearing surface 33 side. Referring to FIG. 3, the thin-film magnetic head 30 includes a pad 34 for adjusting a flying height and a flying posture on an air bearing surface 33 of a slider 32, and a slider on an outflow end 3 2 1 2 side. A composite head 34 is formed on 32 (hereinafter, the slider is referred to as a substrate), and a recording head 35 and a reproducing head 36 are formed along the direction of air flow from the slider 32. They are arranged in order.

FIG. 4A is a cross-sectional view showing a recording head and a reproducing head of the thin head 30 of FIG. 3 in an enlarged manner, and FIG. 4B is a configuration diagram of the air bearing surface 33. Referring to FIGS. 4A and 4B, the thin head 30 is composed of a substrate 32, a recording head 35 formed on the substrate 32, and a recording head 3 formed on the substrate 32. 5 consists of a regenerative head formed on 3 and 6 forces. The recording head 35 includes a lower insulating film 37 made of an inorganic material formed on the substrate 32, a lower magnetic pole layer 38 formed on the lower insulating film 37, and a lower magnetic pole layer 38. Magnetically connected through the magnetic layer 40, the lower magnetic pole layer 38 and the nonmagnetic insulating film 39A,

The upper magnetic pole layer 41 formed opposite to the 39 B and the upper magnetic pole layer 41 which is magnetically connected to the upper magnetic pole layer 41 on the air bearing surface 33 side and has a width corresponding to the track width to be recorded. The tip sub-pole 4 2, the lower pole layer 3 8 and the upper pole layer 4 1 It is composed of a coil 43 and the like formed in the magnetic insulating films 39A and 39B. The lower insulating film 37 is made of an inorganic material, for example, aluminum oxide, and has a thickness of 5 μm. From the viewpoint of heat conduction, the thickness is preferably 1 μΐη to 5 zm. If it is less than 1 μm, pinholes are likely to occur, and if it exceeds 5 μm, conduction becomes difficult, and the heat radiation effect is reduced. Further, the lower insulating film 37 is preferably made of A 1 N. It has higher thermal conductivity than aluminum oxide and can transmit heat efficiently.

Lower magnetic layer 3 8 and the upper magnetic pole layer 4 1, and the magnetic layer 4 0, the soft magnetic materials of high magnetic flux density, for example, N i F e (N i: 8 0 wt%, F e: 2 0 Weight ⁰ / .), NiFe (Ni: 50 mass ⁰ /., Fe: 50 mass ⁰ /.), FeCoA10, CoZrNb, FeSiN Which can be used. The thickness of the lower magnetic pole layer 38 and the upper magnetic pole layer 4 is 1.0 μπ! It is set in the range of ~ 5.0, and can be formed by plating method, sputtering method, vacuum evaporation method, CVD method and the like.

The coil 43 is formed as a single layer on the lower magnetic pole layer 38 via a non-magnetic insulating film 39 A serving as a recording gap. By forming the coil 43 in a single layer, inductance can be reduced, delay in rise time can be suppressed, and high-speed writing can be performed.

Further, in the configuration of the conventional laminated coil, heat is easily stored between the coils. In this embodiment, by forming the coil 43 in a single layer, a large heat storage can be avoided.

Furthermore, by forming the coil 43 in a single layer, the upper magnetic pole layer 41 formed on the coil 43 can be formed with good flatness. As a result, the flatness of the reproducing head 36 formed on the upper magnetic pole layer 41, particularly the flatness of the MR element 48 can be improved, and the film thickness of the laminated thin film of the MR element 48 can be improved. Can be formed uniformly.

FIG. 5 is a plan view of the recording head 35. Referring to FIG. 5, the coil 43 is almost completely sandwiched between the lower magnetic pole layer 38 and the upper magnetic pole layer 41, and the lower magnetic pole layer 38 and the upper magnetic pole layer 41 are exposed on the air bearing surface 33. I have. Therefore, the heat of the coil 43 is efficiently radiated to the air bearing surface 33 through the lower magnetic pole layer 38 and the upper magnetic pole layer 41. As a result, heat is not stored near the coil 43, so that disconnection of the coil 43 due to temperature rise can be avoided. Further, since the lower magnetic pole layer 38 and the upper magnetic pole layer 41 are formed so as to be exposed on the bearing surface 33, heat generated by the coil 43 is transferred through the lower magnetic pole layer 38 and the upper magnetic pole layer 41. The heat can be dissipated to the outside from the air bearing surface 33, and the heat dissipation ability is improved.

′ Returning to FIGS. 4A and 4B, the upper tip sub-pole 42 can be formed of the same material as the above-described upper pole layer 41, and in particular, a material having a high saturation magnetic flux density, for example, F e C o It is preferable to use AlO. Prevent magnetic saturation at the connection with the upper magnetic pole layer 41 and prevent leakage of a magnetic field from the air bearing surface 33 side of the upper magnetic pole layer 41 toward the facing magnetic recording medium (not shown). Can be.

The reproducing head 36 includes a nonmagnetic insulating film 44 formed on the upper magnetic pole layer 41, a lower shield layer 45 formed on the nonmagnetic insulating film 44, and a lower shield layer 4. MR element 48 formed on non-magnetic insulating film 46 A on top of 5 and conductive material electrically connected to both sides of MR element 48 to supply sense current to MR element 48 From the terminal 49, the upper shield layer 51 formed on the MR element 48 and the terminal 49 via the nonmagnetic insulating film 46B, and the upper nonmagnetic insulating film 52 covering the upper shield layer 51. It is configured.

Lower shielding layer 4 5 and the upper shield layer 5 1, a soft magnetic material having a high magnetic flux density, if example embodiment N i F e (N i: 7 5 mass ^_0/0, F e: 2 5 weight ^_0/0), etc., The same soft magnetic material as the lower and upper magnetic pole layers described above can be used, and can be formed by a plating method, a sputtering method, a vacuum evaporation method, a CVD method, or the like.

As the MR element 48, a known laminated MR element can be used. Further, a GMR element or a TMR element may be used. Among the GMR elements, a current-perpendicular-to-plane (CPP) type spin valve element that allows a sense current to flow vertically through the stacked thin films may be used.

The upper non-magnetic insulating film 52 is made of an insulating material made of an inorganic material, such as an aluminum oxide film or a hydrogenated carbon film, and has a thickness of 1 μπ! It is set in the range of ~ 5 um. Since the surface of the upper shield layer 51 is flat, the upper nonmagnetic insulating film 52 can be made thinner than before. Therefore, even if an aluminum oxide film having a relatively low thermal conductivity is used, Heat can be radiated to the outside via the upper non-magnetic insulating film 52.

As described above, the thin air head 30 of the present embodiment can efficiently transfer heat generated by the recording current to the three directions of the substrate 32, the air bearing surface, and the upper insulating film 52, and efficiently Heat can be dissipated. Heat is not stored in the recording head 35, and the temperature rise is avoided, thereby preventing heat failure such as disconnection of the coil 43 and protrusion of the lower and upper pole layers 38, 41 and the MR element 48 outside the air bearing surface 33. be able to. As a result, contact with the magnetic recording medium and head crash can be prevented to realize a highly reliable thin head.

In addition, heat generated by the sense current flowing in the MR element 48 can be radiated in the same manner, and the phenomenon in which the change in magnetic resistance due to the temperature rise of the MR element becomes unstable can be avoided. Thus, a highly reliable thin β-head can be realized.

FIG. 6 is an enlarged sectional view showing a recording head and a reproducing head of a thin-film magnetic head according to a first modification of the present embodiment, and FIG. 6B is a configuration diagram of an air bearing surface. In the figure, parts corresponding to the parts described above are denoted by the same reference numerals, and description thereof will be omitted.

Referring to FIGS. 6A and 6B, the thin-film magnetic head 55 according to the present modification is configured such that the recording head 56 is formed between the substrate 32 and the lower insulating film 37 of the recording head 35 of the first embodiment. The configuration is the same as that of the recording head 35 of the first embodiment except that a heat conductive layer 58 is provided therebetween.

The heat conductive layer 58 is formed between the substrate 32 and the lower insulating film 37 by a non-magnetic metal material or an intermetallic compound exposed on the air bearing surface 33, for example, Au, Ag, Cu, A1, Materials having high thermal conductivity such as W, Pt, Pd, Rh, Ir, Ni, Mo, Fe, Zn, and alloys and intermetallic compounds thereof are exemplified. Further, it is preferable to use a material having a high specific resistance. When a material having a small specific resistance is used as the heat conductive layer 58, an eddy current is induced by the pulsed recording current, and the rise of the recording current is delayed due to the influence of the eddy current. By using a material having a specific resistance equal to or higher than the material forming the magnetic path of the recording head, the substrate 32 and air can be suppressed while suppressing an increase in NLTS (non-in-line transistor on shift). Bearing surface 33 Thermal conductivity in three directions can be improved. The heat conduction layer 58 may further extend in the Y direction (the width direction of the slider 32) shown in FIG. According to the present modification, the heat generated from the coil 43 can be enhanced by the heat conductive layer 58 in the direction of the substrate 32 and the air bearing surface 33 to further facilitate heat radiation. .

FIG. 7A is a cross-sectional view schematically illustrating a recording head and a reproducing head of a thin-film magnetic head according to a second modification of the present embodiment, and FIG. 7B is a diagram illustrating a configuration of an air bearing surface. You. In the figure, parts corresponding to the parts described above are denoted by the same reference numerals, and description thereof will be omitted.

Referring to FIG. 7A and FIG. 7B, the thin magnetic head 60 of the present modified example has an upper magnetic pole layer 63 of the recording head 61 and a lower sinored layer of the reproducing head 62. ₍ I.e., the lower sinored layer 45 of the reproducing head 36 of the first embodiment shown in FIGS. 4A and 4B is shared with the upper magnetic pole layer 41 of the recording head 35. However, except that the lower shield layer 45 and the non-magnetic insulating film 44 are omitted, the thin flame-retardant bed 60 of the present modification is configured in the same manner as the first embodiment.

The upper magnetic pole layer 41 of the first embodiment is exposed on the air bearing surface 33. Therefore, the upper magnetic pole layer 63 having the function of the lower shield layer can be formed without changing the process of forming the upper magnetic pole layer 63 at all, and the process of forming the lower shield layer and the non-magnetic insulating film can be performed. Since it can be omitted, the manufacturing process can be simplified.

Further, in the thin air head 60 of this modification, heat generated from the coil 43 flows through the upper pole layer 63 to the upper shield layer 51 of the reproducing head 62. 'Since the non-magnetic insulating film is omitted, heat is easily transmitted to the reproducing head 62 side, and is discharged outside through the air bearing surface 33 or the upper insulating film 52 through the upper shield layer 51. Therefore, heat is efficiently dissipated.

[Second embodiment]

FIG. 8A is an enlarged cross-sectional view showing a recording head for a perpendicular magnetic recording head and a reproducing head according to a second embodiment of the present invention, and FIG. 8B is a configuration diagram of an air bearing surface. . In the figure, parts corresponding to the parts described above are denoted by the same reference numerals, and description thereof will be omitted. I do.

Referring to FIGS. 8A and 8B, the perpendicular magnetic recording head 70 of the present embodiment has a single-pole recording head 71 formed on the substrate 32 and a recording head 7. It consists of a reproduction head 36 formed on 1. The recording head 71 includes a lower insulating film 37 made of an inorganic material formed on a substrate 32, an auxiliary pole layer 72 formed on the lower insulating film 37, and an auxiliary pole layer 7 formed on the lower insulating film 37. And the main magnetic pole layer 7 3, which is magnetically connected to the main magnetic pole layer 7 through the magnetic layer 40 and the auxiliary magnetic pole layer 72 and the nonmagnetic insulating films 75 A and 75 B. Non-magnetic insulation between the main magnetic pole tip sub-magnetic pole 7 4 having a width corresponding to the track width provided on the 3 air bearing surface 3 3 side, and the trapping magnetic pole layer 7 2 and the main magnetic pole layer 7 3 It is composed of coils 43 and the like formed in the membranes 75A and 75B.

The reproducing head 36 has the same configuration as in the first embodiment described above. The reproducing head 36 includes a nonmagnetic insulating film 44 formed on the main magnetic pole layer 73, a lower shield layer 45 formed on the nonmagnetic insulating film 44, and a lower shield layer 45. An MR element 48 formed via a nonmagnetic insulating film 46 A, a terminal 49 for supplying a sense current to the MR element 48, and a nonmagnetic insulating film 4 on the MR element 48 and the terminal 49. The upper shield layer 51 includes an upper non-magnetic insulating film 52 covering the upper shield layer 51.

The main magnetic pole layer 73 and the auxiliary magnetic pole layer 72 of the recording head 71 are formed of the same material as the upper magnetic pole layer 41 and the lower magnetic pole layer 38 of the first embodiment, and have substantially the same thickness. It is. The main magnetic pole tip sub-magnetic pole 74 is formed of the same material as the upper tip sub-magnetic pole 42 of the first embodiment.

Here, since the coil 43 is a single layer and the surface of the main magnetic pole layer 73 is formed flat, the perpendicular magnetic recording head 70 of the present embodiment is similar to the first embodiment of the present embodiment. In addition, it has effects such as good thermal conductivity, high-efficiency heat dissipation, and high-speed writing.

Next, a method for manufacturing a thin-film magnetic head according to the present invention will be described by taking the thin-film magnetic head according to the first modification of the first embodiment described above as an example. Hereinafter, in each of FIGS. 9 to 14, FIG. A is a cross-sectional view showing an enlarged main part of the thin-film magnetic head, and FIG. B is a configuration diagram of the air bearing surface.

First, in the steps of FIGS. 9A and 9B, for example, A heat conductive layer 58 made of aluminum fluoride is formed with a thickness of 3 μm by a sputtering method. In the next layer, a lower insulating film 37 made of aluminum oxide is formed on the heat conductive layer 58 with a thickness of about 2 / Zm.

Next, in FIG. 1 OA and B step, N i on the lower insulating film 3 7 F e made of (N i:: 8 0 Weight ^_0/0, F e 2 0 mass ^_0/0), the recording Tsu The lower magnetic pole layer 38 of the metal layer 56 is selectively formed to a thickness of 1 to 4 μm by a plating method. Although not shown, a plating seed layer made of NiFe may be formed to a thickness of several tens nm by sputtering prior to film formation by plating. Note that the lower magnetic pole layer 38 may be trimmed with an ion beam or the like to form a lower magnetic pole having a width substantially the same as that of the write track, facing an upper magnetic sub-pole 42 described later. Alternatively, on the lower magnetic pole layer 3 8, the soft magnetic material of high saturation magnetic flux density, for example, N i F e (N i: 5 0 mass ^_0/0, F e: 5 0 mass ^_0/0) consisting of a thickness A lower tip sub-magnetic pole of 0.2-1.'0 m may be provided. The writability can be improved by concentrating the recording magnetic field leaking from the lower magnetic pole layer 38. In the steps shown in FIGS. 10A and 10B, a nonmagnetic insulating film 39 A made of aluminum oxide and formed on the lower magnetic pole layer 38 on the air bearing surface 33 side to form a recording gap on the lower magnetic pole layer 38 is further formed by sputtering. It is formed with a thickness of 0 nm to 300 nm. Next, in order to provide a magnetic layer 40 for forming a magnetic path connecting the lower magnetic pole layer 38 and the upper magnetic pole layer 41 to a side far from the air bearing surface 33 side, a nonmagnetic insulating film 39 A is provided. Form contact honoré 39 A-1 For example, the nonmagnetic insulating film 39A is selectively removed by a photoresist method and an etching method.

Next, in FIG. 1 1 A and FIG. 1 1 B process, the contact hole 3 9 A- 1 Odor Te N i F e (N i: 8 0 Weight ^_0/0, F e: 2 0 Mass ^_0/0) The magnetic layer 40 for forming a magnetic path is selectively formed to a thickness of about 0.35 μΐη〜5 / ζm by plating. Thereby, the magnetic layer 40 is connected to the lower magnetic pole layer 38.

In the steps shown in FIGS. 11A and 11B, a resist film (not shown) is further formed on the nonmagnetic insulating film 39A by photolithography and patterned to form a soft film having a high saturation magnetic flux density. An upper tip auxiliary magnetic pole 42 made of a magnetic material, for example, FeCoAlO is selectively formed to a thickness of 0.3 μm to 1.0 μm by a sputtering method. The upper tip sub-pole 4 2 has a lower tip sub-pole, and the ^ faces the lower tip sub-pole It is provided as follows. Also, the upper tip auxiliary magnetic pole 42 may be a laminated film made of a plurality of different soft magnetic materials. Further, the shape of the upper tip magnetic pole 42 may be formed so that the cross-sectional area becomes gradually smaller in the direction toward the lower magnetic pole layer 38. Further, a soft magnetic material may be used so that the saturation magnetic flux density increases from the base to the tip of the upper tip auxiliary magnetic pole 42. By avoiding saturation of the magnetic flux density, a larger recording magnetic field can be generated. The upper tip sub-pole may be formed simultaneously with the above-described magnetic layer 40 using the same material. The manufacturing process can be simplified. In the steps shown in FIGS. 11 and 11B, a recording coil 43 made of, for example, Cu is formed on the nonmagnetic insulating film 39A to a thickness of about 1 to 2 zm by a plating method. Form selectively. The pattern of the coil 43 is formed by, for example, a photoresist method. Before the coil 43 is formed by the plating method, a Cu seed layer may be formed by a sputtering method. Thus, a single-layer coil 43 is formed by winding the magnetic layer 40. The lead portion 47 of the coil 43 is provided farther from the air bearing surface 33 of the magnetic layer 40.

Next, in the process of FIGS. 12A and 12B, a nonmagnetic insulating film 39B made of aluminum oxide is formed to a thickness of about 4 μm by sputtering so as to cover the structure of FIGS. 11A and B. Form with. Next, the nonmagnetic insulating film 39B is exposed by a CMP method or a mechanical method to expose the upper tip sub-pole 42 and the upper surface of the magnetic layer 40, and the surface roughness of the force nonmagnetic insulating film 39B is reduced to the average surface roughness. Polishing is performed until Ra is within the range of 0.05 to 0.5 nm. MR elements 48, which will be described later and are formed by laminating thin films having a thickness of several nm, can be uniformly laminated. The polishing method is preferably a CMP method. The surface roughness can be uniformly polished over the entire substrate. Further, it is preferable to use a polishing agent having a high polishing rate for aluminum oxide forming an insulating film. Also, polishing may be performed in multiple stages using abrasives having different particle diameters of the slurry. The upper tip auxiliary magnetic pole 42 and the magnetic layer 40 can be efficiently exposed, and the surface roughness can be controlled within the above range. The surface of the upper magnetic pole layer 41 described later may be further flattened.

In Figure 1 3 A及Pi Figure 1 3 B steps Next, on the structure of FIG. 1 2 A及Pi B, for example, N i F e (N i: 8 0 Weight ^{_{0/0, F e: 2}} 0 selectively formed to a thickness of 0. 5 / X m~ 3 μ m by mass ^_0/0) the upper magnetic pole layer 4 1 spatter method consisting. Upper pole layer 4 1 For example, a pattern of the upper magnetic pole layer 41 is formed by, for example, a photoresist method, and after depositing NiFe, the resist film is formed by lift-off. The upper magnetic pole layer 41 may be formed to have a thickness of 0.2 ^ m to 1.0 m. Since the upper magnetic pole layer 41 is flat, there is no need for processing such as ion milling, so that it can be made thinner. In this case, it is preferable to form by a sputtering method, and it is preferable to use FeNZr and FeA1ON having a high saturation magnetic flux density as the soft magnetic material.

Here, the upper magnetic pole layer 41 is formed so as to be exposed on the air bearing surface 33. Heat radiation to the outside is facilitated, and a rise in the temperature of the recording head can be suppressed. As described above, by connecting the upper magnetic pole layer 41 to the upper tip auxiliary magnetic pole 42 and the magnetic layer 40, a magnetic path including the lower magnetic pole layer 38 is formed, and a flat recording head is formed. Is done. By applying a recording current to the coil 43, a recording magnetic field is formed on the air bearing surface 33 side of the recording gap between the lower magnetic pole layer 38 and the upper tip auxiliary magnetic pole 42.

In the steps shown in FIGS. 13A and 13B, a nonmagnetic insulating film 44 made of aluminum oxide is further formed on the upper magnetic pole layer 41 by sputtering for about 2! Formed with a thickness of ~ 4 μπι. Then, the non-magnetic insulating film 4 4 on the N i F e (N i: 7 5 mass ⁰ /, F e:. 2 5 mass ^_0/0) of the lower shield layer 4 5 consisting of about 2 m by sputtering It is formed with a thickness. Next, in the steps shown in FIGS. 14A and 14B (the recording head 56 is omitted), the lower shield layer 45 is overlaid with, for example, aluminum oxide having a thickness of 50 nm. A 50 nm non-magnetic insulating film 46 A is formed. Next, a thin film for forming the MR element 48 is laminated on the nonmagnetic insulating film 46A by a known method, and the MR element 48 is formed by patterning by RIE or the like. In addition, it is not limited to the MR element, and may be a GMR element or a TMR element. Next, terminals (leads) 49 connected to the MR element 48 are formed on both sides using a conductive material. Next, a nonmagnetic insulating film 46B made of aluminum oxide is formed to a thickness of 50 nm to 150 nm so as to cover the MR element 48 and the terminal 49.

In the steps of FIGS. 14A and 14B, the upper shield layer 5 made of NiFe (Ni: 75% by mass, Fe: 25% by mass) is further formed on the nonmagnetic insulating film 46B. 1 is formed by a sputtering method. Next, so as to cover the upper shield layer 51. The upper insulating film 52 is formed to a thickness of 0.5 / m to 5 // m (preferably, 0,0 to 2 / im). Since the upper shield layer surface is formed flat, the thickness of the upper insulating film 52 can be reduced, and heat can be easily radiated through the upper insulating film 52. Also, by making the upper insulating film 52 thinner, the sputtering time can be greatly reduced.

Thus, the thin-film magnetic head according to the first modification of the first embodiment shown in FIGS. 6A and 6B is completed.

According to the method for manufacturing a thin hard head according to the present invention, since the reproducing head 36 is formed after the recording head 56 is formed, the electrostatic rupture of the MR element 48 or the magnetic field It is possible to avoid performance degradation such as random disturbance of orientation.

Also, in the conventional recording head, for example, the recording head 13 shown in FIG. 1, the coil 18 on which the upper magnetic pole layer 16 is laminated is connected to the upper magnetic pole layer tip 16 1 on the air bearing surface 21 side. In order to do so, there was a step. In this case, it is necessary to form an upper magnetic pole layer of a thick film (thickness: 2.0 tm to 6.0 Mm) on the inclined portion 16-2 and then to shape the upper magnetic pole layer by ion milling or the like. is there. However, according to the method for manufacturing a thin I-head according to the present invention, when the upper tip sub-magnetic pole 42 and the upper magnetic pole layer 41 are connected, the surface of the nonmagnetic insulating film 39 B is flattened. It is only necessary to expose the upper tip auxiliary magnetic pole 42 and the magnetic layer 40, so that the ion milling step can be omitted and the manufacturing process can be simplified. Further, in the conventional recording head 13, the pattern of the groove having a large aspect ratio (= groove depth Z groove width) is formed in the resist film at the top end portion 16-1 of the upper magnetic pole layer due to the above-mentioned step. It must be formed by In this method, it was difficult to control the groove width because the aspect ratio was large. However, according to the method for manufacturing a thin head according to the present invention, the resist film is formed on the flat non-magnetic insulating film 39 A, and the groove depth may be the thickness of the upper tip sub-pole. Therefore, the aspect ratio is small. Therefore, pattern formation by exposure can be performed with high precision, and the width of the upper tip auxiliary magnetic pole 42 corresponding to the write track width can be controlled with high precision. As a result, the track width can be reduced to achieve a higher track density.

Next, a magnetic storage device according to the present invention will be described.

FIG. 15 is a diagram showing a main part of the magnetic storage device according to the present invention. See Figure 15 Further, the magnetic storage device 80 generally comprises a housing 81. The housing 81 includes a hub 82 driven by a spindle (not shown), a magnetic recording medium 83 fixed to and rotated by the knob 82, an actuator unit 84, and an actuator unit. An arm 85, a suspension 86, and a thin-film magnetic head 88 supported by the suspension 86 are provided.

The magnetic storage device 80 of the present embodiment is characterized by a thin-film magnetic head 88. The thin-film magnetic head 88 is, for example, the magnetic head according to the first embodiment, the first and second modifications of the first embodiment, and also the second embodiment.

The basic configuration of the magnetic storage device 80 is not limited to that shown in FIG. The magnetic recording medium 83 used in the present invention is not limited to a magnetic disk.

According to the present embodiment, the thin-film magnetic head 88 has excellent heat conductivity and heat dissipation performance, and has high operation reliability. Therefore, the magnetic storage device 80 can prevent the magnetic storage medium 83 from being damaged or head crash due to the protrusion of the lower and upper pole layers and the MR element from the air bearing surface due to the temperature rise, and can be used for a long time. Operating reliability over a wide range. Further, since the spacing between the thin magnetic head 88 and the magnetic recording medium 83 is stabilized, the spacing can be further reduced, and high-density recording can be performed. Industrial applicability

According to the present invention, it is possible to provide a thin-film magnetic head and a magnetic storage device that can prevent a failure due to heat generated from a coil and an MR element in a thin air head, have high operation reliability, and can perform high-density recording. it can. Further, it is possible to provide a method for manufacturing a thin hard head which prevents performance deterioration and yield reduction due to thermal damage of the MR element and simplifies the manufacturing process.

Claims

The scope of the claims

1. A thin composite head consisting of a substrate, a recording head, and a reproduction head.

The recording head is formed between the substrate and the reproducing head;

A lower magnetic pole layer formed on the substrate,

Having a coil formed between the lower pole layer and the upper pole layer,

The coil is formed in a single layer, and the lower magnetic pole layer and the upper magnetic pole layer are substantially ffi.

2 · The entire upper surface of the upper magnetic pole layer is substantially flat.

'' Thin β-Head described. .

3. On the air bearing surface side facing the magnetic recording medium, recording is magnetically connected to the lower magnetic pole layer or the upper magnetic pole layer, with the upper magnetic pole layer or the lower magnetic pole layer and a recording gap layer made of a non-magnetic material interposed therebetween. It has a magnetic pole part that generates a magnetic field,

2. The thin head according to claim 1, wherein the lower magnetic pole layer and the upper magnetic pole layer are exposed on an air bearing surface.

4. The magnetic head according to claim 3, wherein the magnetic pole portion is made of a soft magnetic material having a higher saturation magnetic flux density than the lower magnetic pole layer and the upper magnetic pole layer.

5) having a lower insulating film made of a non-magnetic insulating material between the substrate and the lower magnetic pole layer,

The lower insulating film has a thickness of 1 · Ομπ! 2. The thin head according to claim 1, wherein the thickness is set in a range of about 5.O ^ m.

6. A heat conductive layer between the substrate and the lower magnetic pole layer, 2. The thin head of claim 1, wherein the heat conductive layer is made of a non-magnetic metal, alloy, or intermetallic compound.

7. The thin head of claim 1, wherein the entire surface of the coil is substantially covered by a lower magnetic pole layer and an upper magnetic pole layer.

8. The read head is

A lower shield layer formed on the upper pole layer with an intermediate insulating film interposed therebetween; an upper shield layer formed on the lower shield layer with another insulating film interposed therebetween; and an upper shield layer formed in the other insulating film. A magneto-sensitive element,

An upper insulating film made of a nonmagnetic material covering the upper shield layer,

2. The thin-film magnetic head according to claim 1, wherein the thickness of the upper insulating film is set in a range from 0.5 m to 5 m.

9. The read head comprises: an upper shield layer formed on the upper pole layer with another insulating film interposed therebetween;

A magneto-sensitive element formed in the other insulating film,

2. The thin β-air head according to claim 1, wherein the thickness of the upper insulating film is set in a range of 0.5 μm to 5 m.

10. A composite thin head comprising a substrate, a recording head, and a reproducing head,

The recording head is formed between the substrate and the reproducing head;

A main pole layer for applying a magnetic field in a direction perpendicular to the magnetic recording medium;

Magnetically connected, an auxiliary magnetic pole layer facing the main magnetic pole layer,

Having a coil formed between the main pole layer and the auxiliary pole layer,

A thin hard head, wherein the coil is formed in a single layer, and the main pole layer and the auxiliary pole layer are substantially TO.

11. A magnetic storage device provided with the head according to any one of claims 1 to L0.

12. A substrate, a recording head formed on the substrate, and a reproducing head formed on the recording head,

The recording head includes: a lower magnetic pole layer formed on the substrate; an upper magnetic pole layer magnetically connected to the lower magnetic pole layer, facing the lower magnetic pole layer; and the lower magnetic pole layer and the upper magnetic pole layer. And a magnetic pole portion magnetically connected to the upper magnetic pole layer on the side facing the magnetic recording medium and forming a recording gap portion. The method of manufacturing

A flattening step of flattening the non-magnetic insulating film and exposing the magnetic pole portion.

13. The thin film according to claim 12, wherein the average surface roughness of the surface of the non-magnetic insulating film after the planarization is set in a range of 0.05 nm to 0.5 nm. »Head manufacturing methods.

14. A step of forming an upper magnetic pole layer after the flattening step,

21. The method for producing a thin magnetic head according to claim 11, wherein the thickness of the upper magnetic pole layer is set in a range of 0.2 / xm to l.Ομπι.