WO2004092865A1 - 選出方法、露光方法、選出装置、露光装置、並びにデバイス製造方法 - Google Patents

選出方法、露光方法、選出装置、露光装置、並びにデバイス製造方法

Info

Publication number
WO2004092865A1
WO2004092865A1 PCT/JP2004/005474 JP2004005474W WO2004092865A1 WO 2004092865 A1 WO2004092865 A1 WO 2004092865A1 JP 2004005474 W JP2004005474 W JP 2004005474W WO 2004092865 A1 WO2004092865 A1 WO 2004092865A1
Authority
WO
WIPO (PCT)
Prior art keywords
shot areas
sub
exposure
selection
error
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2004/005474
Other languages
English (en)
French (fr)
Other versions
WO2004092865A3 (ja
WO2004092865A2 (ja
Inventor
Tarou Sugihara
Ayako Sukegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2005505475A priority Critical patent/JPWO2004092865A1/ja
Publication of WO2004092865A2 publication Critical patent/WO2004092865A2/ja
Publication of WO2004092865A1 publication Critical patent/WO2004092865A1/ja
Publication of WO2004092865A3 publication Critical patent/WO2004092865A3/ja
Priority to US11/250,435 priority patent/US20060033916A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

PCT/JP2004/005474 2003-04-17 2004-04-16 選出方法、露光方法、選出装置、露光装置、並びにデバイス製造方法 Ceased WO2004092865A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005505475A JPWO2004092865A1 (ja) 2003-04-17 2004-04-16 選出方法、露光方法、選出装置、露光装置、並びにデバイス製造方法
US11/250,435 US20060033916A1 (en) 2003-04-17 2005-10-17 Selection method, exposure method, selection unit, exposure apparatus, and device manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003112933 2003-04-17
JP2003-112933 2003-04-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/250,435 Continuation US20060033916A1 (en) 2003-04-17 2005-10-17 Selection method, exposure method, selection unit, exposure apparatus, and device manufacturing method

Publications (3)

Publication Number Publication Date
WO2004092865A2 WO2004092865A2 (ja) 2004-10-28
WO2004092865A1 true WO2004092865A1 (ja) 2004-10-28
WO2004092865A3 WO2004092865A3 (ja) 2004-12-29

Family

ID=

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