WO2004091275A1 - Parts holdability testing method and testing device - Google Patents

Parts holdability testing method and testing device Download PDF

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Publication number
WO2004091275A1
WO2004091275A1 PCT/JP2004/004570 JP2004004570W WO2004091275A1 WO 2004091275 A1 WO2004091275 A1 WO 2004091275A1 JP 2004004570 W JP2004004570 W JP 2004004570W WO 2004091275 A1 WO2004091275 A1 WO 2004091275A1
Authority
WO
WIPO (PCT)
Prior art keywords
negative pressure
component holding
detection
suction
holding performance
Prior art date
Application number
PCT/JP2004/004570
Other languages
French (fr)
Japanese (ja)
Inventor
Yukio Ueno
Takehiro Ido
Youji Fujita
Original Assignee
Fuji Machine Mfg. Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Machine Mfg. Co., Ltd. filed Critical Fuji Machine Mfg. Co., Ltd.
Priority to JP2005505212A priority Critical patent/JP4474592B2/en
Publication of WO2004091275A1 publication Critical patent/WO2004091275A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408Incorporating a pick-up tool
    • H05K13/0409Sucking devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/0895Maintenance systems or processes, e.g. indicating need for maintenance

Definitions

  • the present invention relates to a component holding device provided in an electronic circuit component mounting machine or the like and holding an electronic circuit component by a suction nozzle, and particularly to a method and an apparatus for inspecting the holding performance of the component holding device. is there. Background art
  • Electronic circuit component holding devices that suction and hold electronic circuit components by suction nozzles based on a negative pressure supplied from a negative pressure supply device are widely used in electronic circuit component mounting machines and the like.
  • Electronic circuit component mounting machines generally include a component supply device that supplies electronic circuit components, a board holding device that holds a circuit board such as a printed wiring board, and a component supply device. And a mounting device for mounting on the held circuit board.
  • the mounting device is often provided with an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle.
  • An electronic circuit component holding device equipped with a suction nozzle is an excellent device that can easily and quickly hold and release an electronic circuit component.
  • a nozzle defect such as bending of the suction nozzle, chipping and abrasion, etc.
  • Possibility of insufficient suction holding power of electronic circuit parts by suction nozzle due to various reasons such as clogging of suction hole in suction nozzle, filter in negative pressure supply passage, failure of negative pressure supply device, etc. There is. If the suction holding power is insufficient, the suction nozzle will fail to hold the electronic circuit components supplied by the component supply device. May occur. Therefore, the present applicant has developed a method and a device for detecting a component holding device provided with a suction nozzle, and has applied for a patent. That is described in Japanese Patent Application Laid-Open No. 10-126997.
  • This test method uses a negative pressure tester.
  • a detector main body and (b) a detection hole rotatably mounted on the inspection device main body, wherein a plurality of detection holes having different inner diameters are provided on a contact surface capable of contacting a suction surface of the suction nozzle.
  • a negative pressure sensor for detecting a negative pressure in the detection passage.
  • the electronic circuit component holding device is capable of mounting a plurality of types of suction nozzles with different inside diameters of suction holes, and the detection hole forming member is manually rotated according to the suction nozzle whose component holding performance is to be inspected. And a detection hole is selected.
  • the suction surface of the suction nozzle is brought into contact with the contact surface on which the selected detection hole is open, and a negative pressure is supplied to the suction nozzle from the negative pressure supply device. Is detected by the negative pressure sensor. Then, the quality of the component holding performance of the electronic component holding device is determined based on the detected negative pressure. Disclosure of the invention
  • the present invention has been made with a view to further improving the inspection method and the inspection device for the electronic circuit component holding device, and the present invention has the following aspects.
  • a component holding performance inspection method and a component holding performance inspection device can be obtained.
  • each aspect is divided into sections, each section is numbered, and if necessary, the other section numbers are cited. This is for the purpose of facilitating the understanding of the present invention, and should not be construed as limiting the technical features and combinations thereof described in this specification to those described in the following sections. .
  • the items need not always be adopted together. It is possible to select and adopt only some of the items. ,
  • a method for inspecting the component holding performance of an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device
  • a detection hole that is opened on a contact surface that can contact the suction surface of the suction nozzle and that can communicate with the suction hole of the suction nozzle when the suction nozzle is in contact with the contact surface;
  • the suction surface of the suction nozzle is brought into contact with the contact surface of the negative pressure detector, and the negative pressure is supplied to the negative pressure supply device.
  • the negative pressure increases the negative pressure of the detection hole.
  • the quality of the component holding performance of the component holding device can be determined more accurately than that of the component holding device.
  • a defect that cannot be detected based on the negative pressure value at only one point in time can be detected based on the negative pressure value at multiple points in time. For example, if the final attained negative pressure value (or steady-state negative pressure value), which is the negative pressure in the final stage (or steady state) at which the negative pressure in the detection hole does not change, is insufficient, the component holding performance is poor.
  • the component holding performance is good.
  • the negative pressure value on the way to reaching the final negative pressure may be insufficient even if the final attained negative pressure is not insufficient.
  • the suction nozzle starts retreating while the suction force of the electronic circuit component by the suction nozzle is still insufficient, and the suction error occurs when the electronic circuit component is not held by the suction nozzle, or is held in an abnormal posture. Abnormal adsorption may occur. Therefore, in this case, the component holding performance should be judged to be insufficient, but it is judged based on the detected negative pressure value only at one point in time (in this example, the detected negative pressure near the steady state). If so, it is impossible.
  • the plurality of negative pressure detection points may be any of a plurality of points in time at which the tendency of the negative pressure increase in the suction hole can be grasped. , Where the elapsed time from the point of contact of the suction surface to the contact surface It is convenient to have several points in time.
  • the contact point of the suction nozzle with the negative pressure detector Is desirably the time when the timing starts. In many cases, it takes a certain time between the start of the suction nozzle approaching the negative pressure tester and the start of the negative pressure supply by the negative pressure supply device. There is a relationship, in which case any of them can be the start of timing.
  • the time at which the suction nozzle starts approaching the negative pressure tester can be used as the timing start time.
  • the component holding performance inspection method wherein the plurality of time points is three or more time points.
  • the plurality of time points may be two time points, but if it is three or more time points, it is possible to more accurately determine the quality of the holding component performance of the electronic circuit component holding device, and the change in the negative pressure of the detection hole in a curved line. As a result, it is possible to obtain an effect of improving the accuracy of estimating the cause when the performance of the holding component is defective. It is also possible to acquire a curve representing the change in the negative pressure of the detection hole (curve representing the relationship between the elapsed time and the detected negative pressure value) and determine the quality of the component holding performance based on the shape of the curve. . In that case, the negative pressure change curve is considered to represent the negative pressure value at an infinite number of times.
  • the determining step includes a comparing step of comparing the negative pressure values of the detection holes at the plurality of time points detected in the detecting step with the preset standard negative pressure values at the plurality of time points.
  • the component holding performance detecting step according to (1) or (2) which is a step of judging the quality of the component holding ability based on the comparison result in the comparing step.
  • a first cause estimating step of estimating the cause of the deterioration of the component holding performance based on a difference in the detected negative pressure values at the plurality of times from the corresponding standard negative pressure values is included (3). 3.
  • a plurality of suction nozzles are inspected using a common negative pressure tester, and in the determination step, part holding performance of some of the plurality of suction nozzles is poor and other suction nozzles are defective. If it is determined that the component holding performance is good for the suction nozzles that are determined to have poor component holding performance, it is estimated that the suction nozzles themselves are defective. If it is determined that is defective, a second cause estimating step of estimating that at least one of the negative pressure supply device and the negative pressure sensor is defective is included in any one of (1) to (4). ⁇ Part holding performance inspection method.
  • the one suction nozzle is defective and component holding is performed for all suction nozzles. If the performance is determined to be poor, the mode in which at least one of the negative pressure supply device and the negative pressure sensor is presumed to be defective is typical of the mode in this section, but is not limited thereto. Absent. According to the features of this section, the failure of the negative pressure supply device and the negative pressure sensor can be distinguished from the failure of the suction nozzle, and the reliability of the component holding performance inspection can be increased.
  • a part of the plurality of suction nozzles is a number of suction nozzles equal to or less than a product of the number of the plurality of suction nozzles and the first set ratio, and is larger than the number of the part nozzles.
  • the features of this section are particularly effective when the number of suction nozzles to be inspected is large. (7)
  • the component holding performance of the electronic circuit component holding device which sucks and holds the electronic circuit components by means of a plurality of types of suction nozzles having suction holes having different inner diameters, is used. A method of testing,
  • a plurality of contact surfaces capable of contacting the suction surfaces of the plurality of types of suction nozzles can communicate with the suction holes of the suction nozzles in a state where the plurality of types of suction nozzles are in contact with the contact surfaces.
  • Each of the suction surfaces of the plurality of types of suction nozzles and the plurality of the suction pressure nozzles The negative pressure is supplied to the negative pressure supply device while making contact with each of the contact surfaces, and the negative pressure supply increases the negative pressure of each of the plurality of detection holes.
  • the inside diameter of the suction hole of the suction nozzle is small, the inside diameter of the detection hole of the negative pressure tester must also be reduced, or it is desirable to make it smaller. In that case, even if the same negative pressure supply device and negative pressure sensor are used, the state of change of the negative pressure in the detection hole is different. Therefore, it is desirable to judge the quality of component holding performance in consideration of this fact.
  • the method described in the next section is an example. Note that the plurality of contact surfaces may be continuous with each other (for example, each part of one plane) or may not be continuous with each other.
  • each of the standard negative pressure values at the plurality of times preset for each of the plurality of types of suction nozzles, and the negative pressure values at the plurality of times detected in the negative pressure detecting step is a comparing step of comparing the components, and determining whether the component holding performance is good or not based on the comparison result in the comparing process.
  • One negative pressure sensor common to the plurality of detection holes is used as the at least one negative pressure sensor, and the one negative pressure sensor and one of the plurality of detection holes are selectively used.
  • the suction surface of the plurality of types of suction nozzles is brought into contact with the contact surface where the detection hole communicating with the negative pressure sensor is opened. Retention performance inspection method.
  • a device for inspecting the component holding performance of an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device, and (a) the suction nozzle (B) a detection hole which is opened in a state in which the suction surface is in contact with the suction surface of the suction nozzle when the suction nozzle is in contact with the suction surface of the suction nozzle;
  • a component holding performance inspection device comprising a negative pressure inspection device having a negative pressure sensor for detecting pressure.
  • a negative pressure detection control unit for causing the negative pressure sensor to detect a negative pressure in the detection hole at a plurality of points in the process of increasing the negative pressure of the negative pressure sensor; (b) detection by the negative pressure sensor under the control of the negative pressure detection control unit
  • a main controller including a determination unit that determines whether the performance of the holding component of the electronic circuit component holding device is good or not based on the negative pressure values at the plurality of points in time.
  • the component holding performance inspection device is suitable for implementing the component holding performance inspection method according to the above (1).
  • the component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (2).
  • the determination unit compares the negative pressure values of the detection holes at the plurality of times detected by the control of the negative pressure detection control unit with the preset standard negative pressure values at the plurality of time points.
  • the component holding performance detecting apparatus according to the above mode (11) or (12), further comprising: a comparing section for performing the following, and determining whether the component holding performance is good or not based on a comparison result by the comparing section.
  • the component holding performance inspection apparatus is suitable for implementing the component holding performance inspection method according to the above (3).
  • the first control device wherein the main control device estimates a cause of a deterioration in component holding performance based on a difference in the detected negative pressure values at the plurality of times from the corresponding standard negative pressure values.
  • the component holding performance inspection apparatus according to this mode is suitable for implementing the component holding performance inspection method according to the above mode (4).
  • the negative pressure detection control section causes the negative pressure sensor to detect the negative pressure for a plurality of suction nozzles, and the main control device controls the plurality of suction nozzles by the determination section. If it is determined that some of the nozzles have poor component holding performance and other suction nozzles have good component holding performance, the suction nozzle itself that is determined to have poor component holding performance is presumed to be defective. If it is determined that the component holding performance is defective for a number of suction nozzles greater than the number of the partial nozzles, a second cause for estimating that at least one of the negative pressure supply device and the negative pressure sensor is defective.
  • the component holding performance inspection device according to any one of (11) to (14), including an estimation unit.
  • the component holding performance inspection device is suitable for implementing the component holding performance inspection method according to the above (5).
  • the negative pressure detection control section causes the negative pressure sensor to detect the negative pressure for a plurality of types of suction nozzles having suction holes having different inner diameters
  • the determination section includes: Based on the negative pressure values at the plurality of times detected for each of the plurality of types of suction nozzles, the quality of the holding component performance of the electronic circuit component holding device including the plurality of types of suction nozzles is determined (11).
  • the component holding performance inspection device is suitable for implementing the component holding performance inspection method according to the above (7).
  • the determination unit is configured to set the standard negative pressure values at the plurality of points in time preset for each of the plurality of types of suction nozzles, and the standard negative pressure values at the plurality of points detected for each of the plurality of types of suction nozzles.
  • the component holding performance detection device according to the above mode (16), further comprising: a comparing unit that performs comparison with each negative pressure value, wherein the quality of the component holding performance is determined based on a comparison result by the comparing unit.
  • the component holding performance inspection device is suitable for implementing the component holding performance inspection method according to the above (S).
  • a device for inspecting component holding performance of an electronic circuit component holding device comprising:
  • a detection hole forming member attached to the inspection device main body so as to be relatively movable, and provided with a plurality of detection holes having different inner diameters on a contact surface capable of contacting the suction surface of the suction nozzle;
  • a detection hole switching device that automatically switches the plurality of detection holes by moving the detection hole forming member in accordance with the type of the suction nozzle to be inspected next among the plurality of types of suction nozzles;
  • a detection passage provided in the inspection device main body so as to be selectively communicated with each of the plurality of detection holes in accordance with the movement of the detection hole forming member;
  • a negative pressure sensor for detecting the negative pressure in the detection passage
  • the inspection device main body, the detection hole forming member, the detection passage, and the negative pressure sensor constitute a negative pressure inspection device in cooperation with a portion of the detection hole switching device attached to the inspection device main body.
  • the detection hole forming members are automatically moved by the detection hole switching device, so that the inner diameters are different from each other.
  • the one corresponding to the inside diameter of the suction hole of the suction nozzle to be inspected next is communicated with the detection passage.
  • the suction surface of the suction nozzle is brought into contact with the contact surface where the suction hole opens, a negative pressure is supplied to the suction hole of the suction nozzle by a negative pressure supply device, and the negative pressure of the detection hole is detected by a negative pressure sensor. Is detected by Therefore, it is possible to easily and quickly perform the holding performance test on a plurality of types of suction nozzles.
  • the detection hole switching device includes a detection hole formation member rotating device that rotates the rotary detection hole formation member to a rotation position where each of the plurality of detection holes communicates with the detection passage (18). Item), the component holding performance inspection device.
  • a detection hole forming member configured to move the detection hole forming member by a driving force of a driving source provided outside the negative pressure detector including the inspection device main body, a detection hole forming member, a detection passage, and a negative pressure sensor; A moving device;
  • a drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
  • the component holding performance inspection apparatus comprising:
  • a detection hole forming member moving device for moving the detection hole forming member by a driving source attached to the inspection device main body;
  • a drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
  • the component holding performance inspection apparatus comprising:
  • a negative pressure supply start control device that starts supplying a negative pressure to the negative pressure supply device in conjunction with a downward movement of the suction nozzle by the nozzle lifting / lowering device;
  • Negative pressure detection that causes the negative pressure sensor to start detecting the negative pressure of the detection hole at a time point having a predetermined fixed relationship with the time point at which the negative pressure supply device starts supplying the negative pressure to the suction nozzle.
  • start controller The component holding performance inspection device according to any one of (10) to (21), including:
  • the negative pressure supply start control device and the negative pressure detection start control device are linked to or associated with the lifting and lowering of the suction nozzle by the nozzle lifting / lowering device to control the start of the negative pressure supply and the negative pressure detection.
  • the negative pressure supply and the negative pressure detection can be easily started at an appropriate time.
  • the nozzle elevating device and the negative pressure supply start control device are often linked, and in such a case, if a negative pressure detection start control device is associated with them, it is sufficient. The configuration of this section is obtained.
  • the detection hole switching device and the negative pressure detection start control device each include a driven member, and the component holding performance inspection device is provided commonly to the driven members, and both driven members are driven.
  • the drive device of the detection hole control device and the negative pressure detection start control device can be used in common, and the cost of the device can be reduced.
  • FIG. 1 is a plan view schematically showing an electronic component mounting system including a component holding performance inspection apparatus according to an embodiment of the present invention.
  • FIG. 2 is a front view (partial cross section) showing a printed wiring board holding hut of the electronic component mounting system.
  • FIG. 3 is a front view (partial cross section) showing a mounting device of the electronic component mounting system.
  • FIG. 4 is an enlarged front view (partially sectioned) showing a main part of the mounting device.
  • FIG. 5 is an enlarged front view (partial cross section) of another main part of the mounting device.
  • FIG. 6 is a front sectional view showing a suction nozzle of the mounting device.
  • FIG. 7 is a front sectional view showing the direction switching valve and the valve switching device of the mounting device.
  • FIG. 8 is a functional block diagram conceptually showing a control device for controlling the electronic component mounting system.
  • FIG. 9 is a right side view of the negative pressure tester in the electronic component mounting system.
  • FIG. 10 is a left side view of the negative pressure detector.
  • FIG. 11 is an enlarged plan view showing a measuring section of the negative pressure tester.
  • FIG. 12 is a front sectional view of the measuring section shown in FIG.
  • FIG. 13 is a bottom view showing the measuring unit shown in FIG.
  • FIG. 14 is a functional block diagram conceptually showing a negative pressure detection control device for controlling the negative pressure tester.
  • FIG. 15 is a flowchart showing an inspection program for inspecting the component holding performance of the component mounting unit in the electronic component mounting system.
  • FIG. 16 is a diagram for explaining the time change of the negative pressure value of the suction nozzle.
  • FIG. 17 is a view conceptually showing a table for performing pass / fail judgment of the suction nozzle.
  • FIG. 18 is a circuit diagram showing a positive pressure / negative pressure supply device in an electronic component mounting system according to another embodiment of the present invention.
  • FIG. 19 is a plan view showing an electronic component mounting system including a component holding performance inspection device according to still another embodiment of the present invention.
  • FIG. 20 is a circuit diagram showing only a portion relevant to the present invention of the control device of the electronic component mounting system.
  • reference numeral 10 indicates a base of the electronic component mounting system 12.
  • a component supply device 14 On the base 10, a component supply device 14, a mounting device 16, and a printed wiring board holding and moving device 18 (hereinafter abbreviated as a wiring board holding and moving device 18) are provided, and an electronic component mounting system 1 2 Are composed.
  • the component supply device 14 includes two component supply tables 20 in the present embodiment. Each of these component supply tables 20 has a feeder support 22 and a plurality of feeders 24 mounted on the feeder support 22. Although the detailed illustration is omitted, the feeder 24 is configured to supply the electronic components in the form of taped electronic components by holding the electronic components on a component holding tape in the present embodiment.
  • the plurality of feeders 24 are arranged such that their component supply units are aligned in a horizontal straight line. It is detachably mounted on the top.
  • a direction parallel to the direction in which the feeders 24 are arranged is defined as an X-axis direction
  • a direction orthogonal thereto is defined as a Y-axis direction.
  • Each component supply table 20 is moved along the guide rail 30 by transmitting the driving force of the support base driving motor 26 as a driving source via the driving force transmission device 28. Moved in the direction. As a result, the component supply units of the plurality of feeders 24 are selectively positioned at the component supply positions.
  • the wiring board holding and moving device 18 moves the printed wiring board holding unit 42, which is a board holding device for holding the printed wiring board 40, which is a kind of circuit board, and the printed wiring board holding unit 42, and moves the printed wiring board.
  • a printed wiring board holding unit moving device 44 which is a substrate holding device moving device for moving 40.
  • the printed wiring board holding unit moving device 44 includes an X-axis slide 52 and a Y-axis slide 60.
  • the X-axis slide 52 is guided by a guide device including a guide rail 50 by an X-axis slide drive motor 46 and a driving force transmission device 48 and is moved in the X-axis direction.
  • the Y-axis slide 60 is moved in the Y-axis direction on the X-axis slide 52 by the Y-axis slide drive motor 54 and the driving force transmission device 56, guided by a planning device including a guide rail 58. Let me do.
  • the Y-axis slide 60 supports the printed wiring board holding unit 42 from below, and the printed wiring board holding unit 42 holds the printed wiring board 40 in a horizontal posture from below.
  • the surface of the printed wiring board 40 is horizontal, and the printed wiring board 40 is moved to an arbitrary position in a horizontal plane parallel to the surface by the movement of the printed wiring board holding unit 42.
  • the printed wiring board holding unit 42 includes a main conveyor 66 as shown in FIG.
  • the main conveyer 66 constitutes a printed wiring board conveyer in cooperation with a carry-in conveyer and a carry-out conveyer (not shown). Hold it and take it out of the system 12 after the installation work is completed.
  • the printed wiring board holding unit 42 further includes a wiring board support device 70 that moves up and down with respect to the main conveyor 72 and supports the printed wiring board 40 from below with support members such as support pins 68.
  • the printed wiring board 'holding unit 42 is constituted by the main conveyor 66, the wiring board support device 70 and the like.
  • a plurality of, in this embodiment, two reference marks are provided on the surface of the printed wiring board 40, and an image is taken by a reference mark camera 74 (see FIG. 1) as an imaging device. Is done.
  • the reference mark camera 74 is a surface imaging device that includes a CCD (charge-coupled device) and a lens system, and obtains a two-dimensional image of a subject at once. I have.
  • reference numeral 100 denotes a frame, which is fixedly provided above the base 10.
  • a rotating shaft 102 is held by the frame 100 so as to be rotatable around a vertical rotating axis.
  • the rotation of the rotating shaft 102 is intermittently rotated by a fixed angle by transmitting the rotation of an intermittent rotation motor 104 (see FIG. 8) as a driving source through an intermittent rotation mechanism not shown. .
  • An intermittent rotating body 106 which is a kind of moving member, is fixed to the lower end of the rotating shaft 102.
  • a plurality of sets of component mounting units 108 are held at equal angular intervals on a circle around the rotation axis of the rotation shaft 102.
  • the plurality of sets of component mounting units 108 are rotated by an angle equal to the above-mentioned holding angle interval with the intermittent rotation of the intermittent rotating body 106, and the component receiving position and the component holding set on the turning locus.
  • a cylindrical cam 110 is fixed to the lower surface of the frame 100.
  • a cam groove (not shown) is formed which opens to the outer peripheral surface, and a pair of rollers 114 attached to the elevating member 112 of each component mounting unit 108 is provided. It is rotatably engaged. The height of the cam groove changes gradually in the circumferential direction.
  • the rollers 114 move in the cam groove. Can be raised and lowered.
  • a plurality of guide blocks 116 are fixed to the outer peripheral surface of the intermittent rotating body 106 at equal angular intervals to constitute a guide device, and guide the ascending and descending members 112 to rise and fall.
  • a cylindrical sleeve 1 18 serving as a support member is fixed to the outer surface of the elevating member 1 1 2, and the rod 1 20 is rotatable around the vertical axis of rotation on the sleeve 1 18. Are fitted so that they cannot move relative to each other.
  • a rotation holder 124 is rotatably held around a horizontal rotation axis via a mounting member 122, and a plurality of suction nozzles 126 are arranged at equal angular intervals. It is held radially.
  • One of the suction nozzles 126 is selectively positioned at a vertically downward use position by rotating the rotary holder 124 by a nozzle selection device (not shown) provided at the nozzle selection position. You. In this use position, the axis of the suction nozzle 126 coincides with the axis of the mouth 120.
  • Each of the plurality of suction nozzles 126 sucks and holds the electronic component 130 (see FIG. 5) by negative pressure, and as shown in FIG. It has a suction tube 1 3 4 fitted to 1 3 2 and a nozzle body 1 32.
  • the plurality of suction nozzles 126 are of different types, but the length of the suction tubes 134 is the same.
  • the suction nozzle 1 26 positioned at the position of use includes a passage provided inside the rod 120, etc., and a directional control valve 1 36, which is a control valve fixed to the sleeve 118, etc. Is connected to a vacuum pump 1338 (see FIG. 7), which is a kind of negative pressure source.
  • connection passage 13 7 that connects the vacuum pump 13 8 to the suction nozzle 12 6 .
  • the directional control valve 13 6, the connection passage 13 7, and the vacuum pump 13 8 have a negative pressure. It constitutes a supply device 13 9 (see Fig. 7).
  • a nozzle elevating device 140 is provided, which is a nozzle axial moving device that moves the nozzle 126 in the axial direction and moves it up and down.
  • the nozzle lifting device 140 has a lifting member 144 and a lifting member driving device 144.
  • the elevating member driving device 144 includes a cam 144 rotating by using the intermittent rotation motor 104 as a drive source, a cam follower 144 following the cam 144, and a movement of the cam follower 144 to elevate the member 144. And a motion transmission device 1 48.
  • the elevating member 144 can move up and down along a guide rail 150 fixed to the cylindrical cam 110.
  • the elevating member 14 2 has a horizontal guide groove 15 2 connected to the cam groove of the cylindrical cam 110 when the elevating member 14 is at the upper end position. Ascending and descending with rollers 1 1 4 engaged By moving the member 142 up and down, the component mounting unit 108 and the suction nozzles 126 are moved up and down.
  • the direction switching valve 1 36 will be described.
  • the directional control valve 1336 has a spool 164 serving as a valve fitted in a valve hole 162 of the housing 160 so as to be relatively movable, and switches the connection passage 1337. Is what you do.
  • a negative pressure port 166, a nozzle port 168 and an atmospheric pressure port 170 are formed in the housing 160 in order from the top.
  • the nozzle port 168 is communicated with the suction nozzle 126 via a passage formed in the mouth 120 or the like.
  • the negative pressure port 166 is connected to the vacuum pump 138 via the connection passage 137.
  • a normally closed solenoid on-off valve 169 is provided in the connection passage 137.
  • the atmospheric pressure port 170 is always in communication with the atmosphere.
  • the directional control valve 13 6 When the spool 16 4 is moved to the lower end position with respect to the housing 16 0, the directional control valve 13 6 is in a negative pressure supply state in which the suction nozzle 12 6 communicates with the vacuum pump 13 38. In this state, a part of the spool 164 projects downward from the lower surface of the housing 160. In addition, when the spool 164 is moved to the rising end position with respect to the housing 160, the directional switching valve 136 is in an atmosphere communication state in which the suction nozzle 126 is communicated with the atmosphere. In this state, a part of the spool 164 projects from the upper surface of the housing 160.
  • the sleeve 118 is provided with a switching pin 174 serving as a switching assist member for assisting the switching of the directional switching valve 136, and corresponds to the component receiving position of the frame 100.
  • a switching lever 176 for switching the direction switching valve 136 is provided at the portion in a stationary manner.
  • the switching pin 174 and the switching lever 176 constitute a valve switching device 178 at the component receiving position.
  • a part corresponding to the component mounting position of the frame 100 includes a valve switching device 180 for switching the directional control valve 136 and a part of the positive pressure supply device 182.
  • the directional control valve 1 36 provided on the sleeve 1 18 and the valve switching device 180 kept at a standstill are such that the directional control valve 1 36 is raised and lowered by the nozzle lifting device 140. Thus, they can be relatively moved up and down.
  • the switching member 192 is held so as to be able to move up and down with respect to the bracket 190.
  • the switching member 1992 is moved upward by the compression coil spring 196 which is an elastic member provided between the spring receiving portion 194 provided on the bracket 190 and the direction switching valve 136. It is urged to approach the spool 16 4.
  • the switching member 1992 is provided with a positive pressure supply passage 198 that opens on the upper surface, which is the surface facing the directional switching valve 1336, and opens to face the aforementioned atmospheric pressure port 170. It is connected to an air pump 202 which is a kind of positive pressure source via a joint member 200 and the like.
  • a normally closed solenoid on-off valve 204 serving as an electromagnetic control valve is provided between the air pump 202 and the coupling member 200 to supply positive pressure (compressed air) to the positive pressure supply passage 198.
  • the switching member 192 makes the directional control valve 136 communicate with the atmosphere, and the positive pressure supply passage 198 is connected to the atmospheric pressure port 170 to be constant.
  • the positive pressure is supplied for a short time, and the release of the electronic component 130 by the suction nozzle 126 is promoted.
  • the electronic component mounting system 12 is controlled by a control device 220 shown in FIG.
  • the control device 220 is mainly composed of a computer 228 having a CPU 224, a ROM 224, a RAM 226 and a bus connecting them.
  • An I / O interface 230 is connected to the path, and various sensors and the like, not shown, are connected to the path.
  • Various actuators such as a support base drive motor 26 are also connected to the input / output interface 230 via a drive circuit 232.
  • the support base driving motors 26 and the like each constitute a driving source, and in this embodiment, each is constituted by a servomotor.
  • the rotational position of the support base driving motor 26 and the like is detected by an encoder, and the motor and the like are controlled based on the detection result.
  • the reference mark camera 74 and the component camera 236 are further connected to the input / output interface 230 via a control circuit 234.
  • the component camera 236 is provided at the component holding posture detection position, and in the illustrated example, is a surface imaging device including a CCD and a lens system similarly to the reference mark camera 74.
  • the drive circuit 232, the control circuit 234 and the computer 228 constitute a control device 220.
  • the electronic component 130 is mounted on the printed wiring board 40 in the RAM 226. For example, various programs, data, and the like, such as a program for executing the program, are stored.
  • a negative pressure detector 250 is detachably attached to one end of the feeder support 22 of the component supply device 14 in the X-axis direction.
  • the tester main body 252 of the negative pressure tester 250 is configured in the same manner as the feeder main body of the feeder 24, has a generally elongated plate shape, and has a lower portion connected to the feeder support base 22. It is provided with an engagement portion 254 for engagement. The description of the engaging portion 254 is omitted because it has a well-known configuration.
  • the negative pressure detector 250 can be attached to and detached from a slot for mounting the feeder 24 formed on the feeder support 22, and can be installed in any slot.
  • the negative pressure detector 250 is a detection hole that is open so that it can communicate with the negative pressure sensor 260 (see FIG. 11) and the suction hole 26 1 of the suction nozzle 1 26 (see FIG. 6).
  • a detection hole forming member 264 formed with a plurality of 262 and one of the plurality of detection holes 262 is selectively positioned at an operation position communicating with the negative pressure sensor 260.
  • a detection hole switching device 26 (see FIG. 9).
  • the detection hole forming member 2 6 4 is formed in a disk shape, and has a plurality of detection holes 2 6 2 opening at the upper surface 2 6 8 which is a contact surface which contacts the suction surface of the suction nozzle 1 3 4 of the suction nozzle 1 2 6 In the illustrated example, 16 are formed.
  • each detection hole 262 is set equal to the inner diameter of the suction hole 261 of the component suction nozzle 126.
  • the detection hole forming member 264 is held intermittently rotatable about a vertical axis in a posture horizontal to the inspection device main body 252.
  • the detection hole switching device 266 includes a rotation drive device 270 for intermittently rotating the detection hole forming member 264.
  • the rotation driving device 270 rotates the detection hole forming member 264 by the driving force of a driving source provided outside the negative pressure inspection device 250.
  • the rotary driving device 270 is operated by the driving force of a driving roller 272 (see FIG. 9) which is a driving member for driving the tape feeder of the feeder 24, and forms a detection hole.
  • the drive roller 272 is provided in the mounting device 16 and is moved up and down in synchronization with the suction nozzle 126 when the suction nozzle 126 sucks the electronic component 130.
  • the driven member 274 driven by the driving roller 272 has a substantially vertical posture. It is provided in.
  • the driven member 274 is provided at a position coinciding with the drive roller 272 in the Y-axis direction, and is driven by levers 276 and 278 that are rotatably attached to the inspection device main body 252. Is held.
  • the upper end of the driven member 274 is connected to one end of the lever 276 so as to be relatively rotatable.
  • the lever 276 is rotatably supported by the inspection device main body 252 at the end opposite to the driven member 274.
  • the lever 278 is provided with a pair of arms 280 and 282 extending in directions orthogonal to each other, of which the free end of the first arm 280 extending in a substantially horizontal direction from the center of rotation.
  • the lower end of the driven member 274 is connected thereto.
  • a parallelogram link is formed by the repeller 2 76, the first arm 280, the driven member 2 74, and a part of the detector main body 2 52, and the driven member 2 7 4 It moves up and down almost vertically while maintaining its posture.
  • a tension coil spring 284 which is an elastic member, is engaged near the free end of the first arm 280, and the link 278 is attached to a direction that rotates the driven member 274 in a direction to raise the driven member 274. I'm going.
  • a stopper 2886 is provided on the inspection device main body 252, and defines a rotation limit of a direction in which the driven member 274 of the lever 2776 is lifted. As a result, the driven member 274 is positioned at its raised end position.
  • a second arm 282 which is the other arm, extends vertically downward from the center of rotation of the lever 278.
  • the free end of the second arm 282 can be moved in a substantially horizontal direction if the repeller 278 is rotated as the driven member 274 moves up and down.
  • This axial movement is transmitted by a connecting rod 2888 to a ratchet apparatus 2900, which is a motion converting apparatus, and is converted into an intermittent rotary motion.
  • the ratchet wheel 292 of the ratchet device 29 is connected to the detection hole forming member 264 by a rotating shaft 298, and rotates integrally.
  • a positioning recess 300 is provided on the outer peripheral surface of the detection hole forming member 260 corresponding to each of the detection holes 260.
  • a positioning claw 304 is provided in the positioning recess 300.
  • the present negative pressure tester 250 further includes a detection instruction device 320 for indicating the timing of starting the negative pressure detection work.
  • the detection instruction device 320 includes a driven member 322 driven by a driving roller 272, and the driven member 322 includes a lever 322 as in the detection hole switching device 266.
  • a parallelogram link is formed in cooperation with 4, 3 26 and the inspection device main body 2 52.
  • a dog 328 is fixedly provided on the driven member 322, and the photomicro sensor 330 is turned on and off in accordance with the elevation of the driven member 322.
  • the negative pressure inspection device 250 is further provided with a control valve return device 332 for returning the direction switching valve 136 to an atmosphere communication state in which the suction nozzle 126 is communicated with the atmosphere.
  • a control valve return device 332 for returning the direction switching valve 136 to an atmosphere communication state in which the suction nozzle 126 is communicated with the atmosphere.
  • the component mounting unit 108 is provided with a valve switching device 180 as a control valve return device. This is because the direction switching valve 1336 can be returned to the atmosphere communication state without turning to the component mounting position.
  • the control valve return device 332 includes a first lever 333 and a second lever 334 that are rotatably attached to the detector main body 252.
  • the action arm 338 is not located at the component receiving position, that is, the component mounting unit 108 at the negative pressure inspection position, but at the component mounting unit 108 stopped at the stop position adjacent to the negative pressure inspection position. Acts on directional valve 1 36 to return it to atmospheric communication.
  • the present negative pressure detector 250 is controlled by a negative pressure detection control device 340 shown in FIG.
  • the negative pressure detection control device 340 includes an internal power supply 342, and similarly to the control device 220, the CPU 222, the ROM 224, the RAM 226, and the bus connecting them. It is mainly composed of a computer 228 equipped with a computer.
  • the input / output interface 230 is connected to the bus.
  • the input / output interface 230 is connected to the photomicrosensor 330 described above and the negative pressure sensor 260 described above. Negative pressure detection by the negative pressure sensor 260 is started according to a change in the output signal of the photomicrosensor 330.
  • the computer 228 starts reading the output value of the negative pressure sensor 260.
  • the input / output interface 230 is also connected to the control device 220 of the electronic component mounting system 12.
  • the RAM 222 obtains the detection value of the negative pressure sensor 260, and based on the obtained detection value, a detection program and a necessary standard value for estimating the state of the suction nozzle 126. And other data are stored.
  • the negative pressure tester 250 is not always connected to the control device 220, but may be connected to the control device 220 as necessary.
  • the fiducial mark camera 74 is positioned so that the fiducial mark is positioned within its imaging range, and the fiducial mark and its surroundings are imaged. The displacement in the direction parallel to the 40 surface is obtained.
  • the mounting device 16 mounts the electronic component 130 on the printed wiring board 40.
  • the intermittent Hi rolling body 106 is intermittently rotated by the intermittent rotating device, and the plurality of component mounting units 108 are sequentially moved to the component receiving position and the like.
  • the component mounting unit 108 is stopped at the component receiving position, and when the electronic component 130 is received, the suction nozzle 126 is lowered by the nozzle lifting device 140.
  • the direction switching valve 1 3 6 is switched to the air communication state, and when the component mounting unit 1 08 descends, the switching pin 1 7 4 switches the switching lever 1 Engage with 76 and rotate its tip.
  • the switching lever 176 engages with the spool 164, moves the spool 164 downward with respect to the housing 160, and moves the directional switching valve 136 from the air communication state to the negative pressure. Switch to supply state. As a result, a negative pressure is supplied to the suction nozzles 126 and the electronic components 130 are discharged.
  • Adsorb Adsorb. After the suction of the electronic component 130, the suction nozzle 1 26 is raised and the swivel is started, and when the switching pin 17 4 is disengaged from the switching lever 17 6, the switching lever 17 6 is Then, it is returned to the original position shown in FIG. 4, and enters a standby state in preparation for entry of the next component mounting unit 108 between the switching pin 174 and the spool 164.
  • the suction nozzle 126 holding the electronic component 130 is moved to the next stop position by the intermittent rotation of the intermittent rotating body 106. When the suction nozzle 126 reaches the component holding posture detection position, the electronic component 130 held by the suction nozzle 126 is imaged by the component camera 236.
  • the imaging data is subjected to image processing, and a calculation of a holding position error of the electronic component 130 by the suction nozzle 126 is performed. Thereafter, if the component mounting unit 108 is moved to the component holding posture correction position, the component mounting unit 108 is rotated around its own axis, and the rotational position error is corrected. Slightly before the component mounting unit 108 reaches the component mounting position, the suction nozzles 126 are lowered by the nozzle elevating device 140, and the electronic components 130 are mounted on the printed wiring board 40. Place.
  • the directional control valve 1336 is switched from the negative pressure supply state to the atmosphere communication state in conjunction with the lowering of the suction nozzles 126.
  • the directional control valve 13 6 fixed to the sleeve 1 18 is also lowered, approaching the valve switching device 18 0, and the switching member 19 2 is moved to the spool 16.
  • the spool 16 4 is pushed by the switching member 19 2 and pushed into the housing 16.
  • the direction switching valve 136 is switched from the negative pressure supply state to the atmosphere communication state.
  • the suction nozzle 1 26 is lowered, the electronic component 130 is placed on the printed wiring board 40, and the directional control valve 13 36 is switched from the negative pressure supply state to the atmosphere communication state.
  • the positive pressure supply passage 170 is connected to the positive pressure supply passage 198, compressed air is blown into the positive pressure supply passage 170, compressed air is supplied to the suction nozzles 126, and electronic components Release of the 130 from the suction nozzles 126 is promoted.
  • step S 1 (hereinafter simply referred to as S 1, the same applies to other steps), the feeder support 22 is moved.
  • the negative pressure inspection device 250 is positioned near the component supply position. Specifically, the negative pressure detector 250 is positioned at a detection hole switching position where its driven member 274 is located immediately below the driving roller 272. Next, in S2, the drive roller 272 is moved up and down to move the driven member 274 up and down, so that the detection hole 262 is switched.
  • the inside diameter of the suction tube 1 34 of the suction nozzle 1 26 to be inspected this time is specified in advance, and the detection hole 26 2 having the same inside diameter is positioned at a communication position communicating with the negative pressure sensor 260.
  • the detection hole forming member 264 is positioned at a predetermined original position by an operator, and the driven member 274 is lowered from that state.
  • the number of times that the detection hole 262 has been changed is counted, and which detection hole 262 is currently selected based on the number of force points (the force that is positioned at the action position). You can see.
  • a selective detection hole specifying device capable of specifying the currently selected detection hole 252 without the assistance of an operator.
  • the negative pressure tester 250 is provided with a rotational position detector for detecting the rotational position of the detection hole forming member 264 or an original position detector for detecting the original rotational position.
  • the negative pressure tester 250 is moved by moving the feeder support base 22 so that the driven member 32 2 is moved under the negative pressure located immediately below the drive roller 27 2. It is positioned at the detection position (the same as the component supply position in the present embodiment).
  • the component mounting unit 108 positioned at the component receiving position is the same as the component receiving operation of receiving the electronic component 130 from the feeder 24 positioned at the component supply position.
  • the component holding unit 108 is operated, and the component holding unit 108 is inspected for the component holding performance.
  • the driving roller 27 is raised and lowered, and accordingly, the dog 3 2 8 is raised and lowered to shield the photomicrosensor 330 from light.
  • the light-blocking timing of the photo microphone mouth sensor 330 is detected as the falling timing of the dog 328, that is, the falling timing of the suction nozzle 126, and the reading of the detection value of the negative pressure sensor 260 is started. Measurement is called).
  • the negative pressure value is read every time a plurality of different preset times have elapsed from the start of the measurement. In the present embodiment, as shown in FIG. 16, four set times are set for one detection, and a negative pressure value is detected each time the set time elapses.
  • This negative pressure detecting operation is continuously performed on the suction nozzles 126 of all the component mounting units 108 of the mounting device 16 having the same diameter.
  • the directional control valve 1 36 set to the negative pressure supply state is returned to the atmosphere communication state by the control valve return device 332.
  • S5 it is asked whether negative pressure detection has been completed for all the suction nozzles 126 whose component holding performance is to be inspected this time. For example, when inspecting a plurality of types of suction nozzles 1 26, if there is a suction nozzle for which negative pressure detection has not been completed, the determination in S5 is NO, and this program is executed once. Ends. Until the inspection is completed for all the suction nozzles 1 26 to be inspected, S 1 or S 5 is repeatedly executed. On the other hand, when the negative pressure detection is completed for all the suction nozzles 1 26, the determination in S5 becomes Y E S and the process proceeds to S6.
  • the detected negative pressure value of each of the suction nozzles 126 is compared with a preset negative pressure value.
  • the ram 226 of the negative pressure detection control device 340 includes a standard negative pressure value that should be detected under normal conditions for the various suction nozzles 126 (hereinafter referred to as “standard”). Is stored in advance for each set time. As shown in Fig. 16, when the suction nozzle 126 is normal, a high negative pressure can be obtained in a relatively short time, and then the pressure gradually decreases relatively slowly toward the value to be finally reached. Increase.
  • the standard value is set based on such knowledge, and in the present embodiment, the standard value is set with a certain width.
  • the cause of the abnormality is estimated based on the change in the detected value. For example, if the suction nozzles 1 26 are clogged, the amount that can be suctioned is limited, so the value to be reached is finally obtained, but it takes time to reach there Tend. On the other hand, if any part is leaked due to deformation or breakage of the suction tube 134 of the suction nozzle 126, a value to be reached cannot be obtained even after a certain period of time.
  • the detection value at the first measurement point is out of the range of the standard value, and If the detected value at the fourth measurement point is within the standard value range (indicated by (mouth) and (c) in Fig. 17), the suction nozzle 1 26 is clogged. It is estimated to be. If the detected values at the first to third measurement points are out of the range of the standard values and only the detected values at the fourth measurement point are normal (indicated by (2) in Fig. 17), It is estimated that the suction nozzles 126 are clogged or leaking. Furthermore, if the detected values are abnormal at all the measurement points (indicated by (e) in the figure), it is estimated that the suction nozzles 126 have leaked.
  • the pass / fail judgment of the negative pressure sensor 260 and the negative pressure supply device 139 is performed based on the pass / fail judgment of each of the suction nozzles 126. If the number of suction nozzles 126 determined to be abnormal is relatively large, the negative pressure sensor 260 or negative pressure supply device 133 There is a high possibility that there is an abnormality. Therefore, for example, if it is assumed that a negative pressure test was performed on 12 suction nozzles 126 this time, it is determined in S8 that all of the suction nozzles 126 are in an abnormal state due to clogging or leakage. It is asked whether the number n of the defective suction nozzles is smaller than a preset value N, which is set in advance. Set value N!
  • Is in the present embodiment, although set to 12 which is the total number of the suction nozzles 126, it may be set to a value less than 12, for example, 10 to 11 may be set. If the number of suction nozzles 126 subjected to the negative pressure test is larger than 12, the number may be equivalent to the total number of the suction nozzles 126, for example, set to a value of 80% or more. May be done.
  • the process proceeds to S10, and the number n of the defective suction nozzles becomes the set value. It is asked whether it is N 2 or less.
  • the worker When it is estimated that the suction nozzle 1 26 has an abnormality due to the negative pressure detection work described above, and the fact is communicated to the worker, the worker performs the suction nozzle 1 2 6 based on the information. Perform 6 cleaning or replacement.
  • the replacement and the cleaning may be automatically performed. For example, dust may be blown off by applying a higher positive pressure to the suction nozzle 126 than when promoting the release of the electronic component 130, and the inside of the nozzle may be mechanically cleaned by an automatic cleaning device. It may be. The latter depends on the former May be executed when the blowing effect is insufficient.
  • the part that executes S6 of the inspection program constitutes the comparison unit
  • the part executing step 7 constitutes a first cause estimating unit
  • the part executing steps S8 to S12 constitutes a second cause estimating unit.
  • a part of the positive pressure supply device 182 is provided in the valve switching device 180 and another part is provided in the directional switching valve 136.
  • the valve switching device and the positive pressure supply device may be provided separately.
  • One embodiment is shown in FIG. Note that components and the like that perform the same operations as those in the above embodiment are given the same reference numerals, and descriptions thereof will be omitted.
  • the suction nozzles 126 are connected to the vacuum pumps 1338 by switching the direction switching valves 402, 404.
  • the air pump 202 is selectively communicated with the atmosphere.
  • the directional control valve 402 is provided in a connection passage 406 connecting the suction nozzle 126 and the vacuum pump 138, and the directional control valve is provided in addition to the suction nozzle 126 and the vacuum pump 138.
  • 404 is connected.
  • the direction switching valve 404 is connected to the air pump 202 and the atmosphere in addition to the direction switching valve 402.
  • the directional control valve 402 is connected to the negative pressure supply state that allows the suction nozzles 126 to communicate with the vacuum pump 138 by moving the valve, and to the atmosphere or the air pump 202 via the directional control valve 404. It can be switched to the communication state. This valve is configured to be maintained at the position where the direction switching valve 402 is moved to the position for switching between the above two states.
  • the direction switching valve 404 is switched between a positive pressure supply state in which the suction nozzles 126 are connected to the air pump 202 to supply a positive pressure, and an atmosphere communication state in which the direction is connected to the atmosphere.
  • the valve element of the directional control valve 404 is urged by a spring in a direction to switch the directional control valve 404 to the atmosphere communication state.
  • the valve switching devices 408, 410 for switching the direction switching valves 402, 404 are provided on the same member indicated by a two-dot chain line, and are used for raising and lowering the suction nozzles 126 by the nozzle lifting device 140. It works in conjunction.
  • the suction nozzle is rotated around one axis by the nozzle turning device. It was moved to the component receiving position and component mounting position to receive and mount electronic components.
  • the XY port bot which is a component holding device moving device or component mounting unit moving device
  • the electronic component may be moved to an arbitrary position parallel to the surface of the circuit board to receive and mount the electronic component.
  • An electronic component mounting system of this type is already known in, for example, Japanese Patent No. 2824378, and will be briefly described.
  • reference numeral 500 denotes the base of the electronic component mounting system 502.
  • the system 502 is configured.
  • the printed wiring board holding device 5 10 is constituted by a device similar to the printed wiring board support device 70 of the printed wiring board holding unit 42 and a part of the wiring board conveyor 5 12, Hold board 40 horizontally.
  • the transport direction of the circuit board conveyor 512 is referred to as an X-axis direction, and a direction orthogonal to the X-axis direction in a horizontal plane is referred to as a Y-axis direction.
  • the component supply devices 504 and 506 are provided on both sides in the Y-axis direction of the wiring board conveyor 512, respectively.
  • One component supply device 506 is a feeder-type component supply device, and is provided in a fixed position.
  • the other component supply device 504 is a tray-type component supply device, and is provided at a fixed position.
  • the mounting device 508 includes a component holding device 514 including a nozzle holder for holding a suction nozzle, and an XY robot 516.
  • the XY robot 516 is provided on the X-axis slide 518 and the X-axis slide 518, which are driven by the X-axis slide 518 and the X-axis slide drive motor 520.
  • the component holding device 514 is attached to the Y-axis slide 524, and is a movable member that can move to any position on the XY coordinate plane.It can rotate around the vertical axis and move up and down in the axial direction.
  • the electronic component 130 is lifted and lowered by the lifting device 530 provided on the movable member, and receives the electronic components 130 from the component supply devices 504 and 506, and the printed wiring board 40 is provided. Attach to The lifting device 530 uses a servomotor as a drive source.
  • the suction nozzle of the component holding device 5 14 is operated by a negative pressure similarly to the suction nozzle 1 26.
  • the electronic component 130 is sucked and released by the supply of positive pressure.
  • the electronic component mounting system 502 includes an electromagnetic directional switching valve 540, instead of the directional switching valve 136 and the valve switching device 178, 180 in the embodiment.
  • a directional switching valve device composed of 542 (which may be a combination of a plurality of electromagnetic on-off valves) is provided.
  • the switching instruction signal to the electromagnetic directional switching valves 540 and 542 is output in synchronization with the operation of the lifting device 530 for raising and lowering the component holding device 514.
  • FIG. 20 shows a portion related to the output of the switching command signal for starting the supply of the negative pressure to the electromagnetic directional control valve 540 which is closely related to the present invention.
  • the signal obtained by delaying the operation start command signal to 530 by the delay circuit 546 for a fixed time is used as the switch command signal to the electromagnetic directional control valve 540.
  • the feeder type component supply device 506 is provided with a negative pressure detector 548 similar to the negative pressure detector 250 in the above embodiment (see FIG. 19). ) Can be attached.
  • the negative pressure tester 548 has a built-in jaw cylinder 550 as a drive source of the detection hole switching device, but does not have a device corresponding to the detection instruction device 320.
  • the reading of the detection value of the negative pressure sensor 260 is started using a switching command signal to the direction switching valve device of the component holding device 514.
  • a switching command signal to the electromagnetic directional switching valve 540 for switching the directional switching valve device to the negative pressure supply state is supplied to the computer 544, and the computer 544 detects the negative pressure sensor 260 in response thereto. Reading of the value is started.
  • the electromagnetic directional switching valve 540 waits for a certain period of time. It is also possible to output a switching command signal to the switch.
  • the computer 544 operates the negative pressure sensor 260 in response to a detection signal of a descent detector (for example, a photo micro sensor can be used) that detects that the component holding device 514 has been lowered to a predetermined position. It is also possible to start reading the detected value of.
  • a descent detector for example, a photo micro sensor can be used

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Abstract

A parts holdability testing device for testing a parts holding device for its holdability, the device being capable of accurately examining whether the parts holdability is good or bad. By a negative pressure sensor communicating with the suction hole in an adsorption nozzle for measuring negative pressure are detected negative pressures at a plurality of time points (preferably three or more time points) different from a time point at which evacuation of the adsorption nozzle is started (S4). The detected negative pressure values are respectively compared with reference negative pressure values set at respective detection time points (S6), and these comparison results are synthetically judged to automatically make an adsorption nozzle parts holdability quality decision (S7) and make a causal factor estimate if the decision shows that the holdability is bad (S8-S12).

Description

明 細 書 部品保持性能検査方法およぴ検查装置 技術分野  Description Part retention performance inspection method and inspection equipment Technical field
本発明は、 電子回路部品装着機等に設けられ、 吸着ノズルにより電子回路部品 を保持する部品保持装置に関するものであり、 特に、 部品保持装置の保持性能を 検査する方法およぴ装置に関するものである。 背景技術  The present invention relates to a component holding device provided in an electronic circuit component mounting machine or the like and holding an electronic circuit component by a suction nozzle, and particularly to a method and an apparatus for inspecting the holding performance of the component holding device. is there. Background art
負圧供給装置から供給される負圧に基づいて吸着ノズルにより電子回路部品を 吸着保持する電子回路部品保持装置は、 電子回路部品装着機等において広く使用 されている。 電子回路部品装着機は、 一般に、 電子回路部品を供給する部品供給 装置と、 プリント配線板等の回路基板を保持する基板保持装置と、 部品供給装置 力 ^電子回路部品を受け取り、 基板保持装置に保持されている回路基板に装着す る装着装置とを含むように構成される。 その装着装置が、 吸着ノズルにより電子 回路部品を吸着保持する電子回路部品保持装置を備えたものとされることが多い のである。  2. Description of the Related Art Electronic circuit component holding devices that suction and hold electronic circuit components by suction nozzles based on a negative pressure supplied from a negative pressure supply device are widely used in electronic circuit component mounting machines and the like. Electronic circuit component mounting machines generally include a component supply device that supplies electronic circuit components, a board holding device that holds a circuit board such as a printed wiring board, and a component supply device. And a mounting device for mounting on the held circuit board. The mounting device is often provided with an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle.
吸着ノズルを備えた電子回路部品保持装置は、 電子回路部品の保持と解放とを 容易かつ迅速に行い得る優れたものであるが、 吸着ノズルの曲がり, 欠損おょぴ 摩耗等のノズル不良や、 吸着ノズル内の吸引孔, 負圧供給通路内のフィルタ等の 詰まりや、 負圧供給装置の故障等、 種々の理由により、 吸着ノズルによる電子回 路部品の吸着保持力が不十分となる可能性がある。吸着保持力が不十分となれば、 吸着ノズルが部品供給装置により供給される電子回路部品の吸着保持に失敗する 吸着ミスや、 吸着はしても予定外の姿勢で吸着してしまう異常吸着等が発生する おそれがある。 そこで、 本出願人は、 吸着ノズルを備えた部品保持装置の検查を 行う方法おょぴ装置を開発し、 特許出願した。 特開平 1 0 _ 1 2 6 0 9 7号公報 に記載のものがそれである。  An electronic circuit component holding device equipped with a suction nozzle is an excellent device that can easily and quickly hold and release an electronic circuit component. However, a nozzle defect such as bending of the suction nozzle, chipping and abrasion, etc. Possibility of insufficient suction holding power of electronic circuit parts by suction nozzle due to various reasons such as clogging of suction hole in suction nozzle, filter in negative pressure supply passage, failure of negative pressure supply device, etc. There is. If the suction holding power is insufficient, the suction nozzle will fail to hold the electronic circuit components supplied by the component supply device. May occur. Therefore, the present applicant has developed a method and a device for detecting a component holding device provided with a suction nozzle, and has applied for a patent. That is described in Japanese Patent Application Laid-Open No. 10-126997.
この検査方法は、 負圧検査器を使用するものであり、 負圧検査器は、 (a)検査 器本体と、 (b)その検査器本体に回転可能に取り付けられ、 前記吸着ノズルの吸 着面と接触可能な接触面に、 内径を互いに異にする複数の検出孔が設けられた検 出孔形成部材と、 (c)前記検査器本体に、 前記検出孔形成部材の前記回転に応じ て前記複数の検出孔の各々と選択的に連通可能に設けられた検出通路と、 (d)そ の検出通路の負圧を検出する負圧センサとを含むものである。 電子回路部品保持 装置は、 吸引孔の内径を互いに異にする複数種類の吸着ノズルが取り付け可能な ものであり、 部品保持性能を検査すべき吸着ノズルに応じて検出孔形成部材が手 動で回転させられ、 検出孔が選択される。 その選択された検出孔が開口している 接触面に、 吸着ノズルの吸着面が接触させられるとともに、 負圧供給装置から吸 着ノズルに負圧が供給され、 その結果、 検出孔に生じる負圧が負圧センサにより 検出される。 そして、 検出負圧に基づいて電子部品保持装置の部品保持性能の良 否が判定される。 発明の開示 This test method uses a negative pressure tester. A detector main body, and (b) a detection hole rotatably mounted on the inspection device main body, wherein a plurality of detection holes having different inner diameters are provided on a contact surface capable of contacting a suction surface of the suction nozzle. (C) a detection passage provided in the inspection device main body so as to be selectively communicated with each of the plurality of detection holes in accordance with the rotation of the detection hole forming member; A negative pressure sensor for detecting a negative pressure in the detection passage. The electronic circuit component holding device is capable of mounting a plurality of types of suction nozzles with different inside diameters of suction holes, and the detection hole forming member is manually rotated according to the suction nozzle whose component holding performance is to be inspected. And a detection hole is selected. The suction surface of the suction nozzle is brought into contact with the contact surface on which the selected detection hole is open, and a negative pressure is supplied to the suction nozzle from the negative pressure supply device. Is detected by the negative pressure sensor. Then, the quality of the component holding performance of the electronic component holding device is determined based on the detected negative pressure. Disclosure of the invention
本発明は、 以上の事情を背景とし、 上記電子回路部品保持装置の検査方法およ ぴ検查装置をさらに改良することを課題としてなされたものであり、 本発明によ つて、 下記各態様の部品保持性能検查方法および部品保持性能検査装置が得られ る。 各態様は請求項と同様に、 項に区分し、 各項に番号を付し、 必要に応じて他 の項の番号を引用する形式で記載する。 これは、 あくまでも本発明の理解を容易 にするためであり、 本明細書に記載の技術的特徴およびそれらの組合わせが以下 の各項に記載のものに限定されると解釈されるべきではない。 また、 一つの項に 複数の事項が記載されている場合、 それら複数の事項を常に一緒に採用しなけれ ばならないわけではない。 一部の事項のみを選択して採用することも可能なので める。 、  In view of the above circumstances, the present invention has been made with a view to further improving the inspection method and the inspection device for the electronic circuit component holding device, and the present invention has the following aspects. A component holding performance inspection method and a component holding performance inspection device can be obtained. As in the claims, each aspect is divided into sections, each section is numbered, and if necessary, the other section numbers are cited. This is for the purpose of facilitating the understanding of the present invention, and should not be construed as limiting the technical features and combinations thereof described in this specification to those described in the following sections. . In addition, when two or more items are described in one section, the items need not always be adopted together. It is possible to select and adopt only some of the items. ,
( 1 ) 負圧供給装置から供給される負圧に基づいて吸着ノズルにより電子回路部 品を吸着保持する電子回路部品保持装置の部品保持性能を検査する方法であつ て、  (1) A method for inspecting the component holding performance of an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device,
前記吸着ノズルの吸着面と接触可能な接触面に、 その接触面に前記吸着ノズル が接触した状態でその吸着ノズルの吸引孔と連通可能な状態で開口する検出孔 と、 その検出孔の負圧を検出する負圧センサとを備えた負圧検査器を準備する準 備工程と、 A detection hole that is opened on a contact surface that can contact the suction surface of the suction nozzle and that can communicate with the suction hole of the suction nozzle when the suction nozzle is in contact with the contact surface; A preparation step of preparing a negative pressure tester provided with a negative pressure sensor for detecting a negative pressure of the detection hole;
前記吸着ノズルの前記吸着面と前記負圧検查器の前記接触面とを接触させると ともに前記負圧供給装置に負圧を供給させ、 その負圧供給により前記検出孔の負 圧が増大する過程の複数時点において前記負圧センサにその検出孔の負圧を検出 させる負圧検出工程と、  The suction surface of the suction nozzle is brought into contact with the contact surface of the negative pressure detector, and the negative pressure is supplied to the negative pressure supply device. The negative pressure increases the negative pressure of the detection hole. A negative pressure detecting step of causing the negative pressure sensor to detect a negative pressure of the detection hole at a plurality of points in the process;
その負圧検出工程において検出された前記複数時点の負圧値に基づいて前記電 子回路部品保持装置の部品保持性能の良否を判定する判定工程と  A judging step of judging the quality of component holding performance of the electronic circuit component holding device based on the negative pressure values at the plurality of times detected in the negative pressure detecting step;
を含むことを特徴とする部品保持性能検査方法。 A component holding performance inspection method characterized by including:
負圧供給装置による負圧供給によって検出孔の負圧が増大する過程の複数時点 において、 負圧センサにより検出された検出孔の負圧値に基づけば、 一時点のみ における負圧値に基づく場合に比較して、 部品保持装置の部品保持性能の良否を 的確に判定することができる。 一時点のみの負圧値に基づいては発見できない不 良も、 複数時点の負圧値に基づけば発見することができるのである。 例えば、 検 出孔内の負圧が変化しなくなる最終段階 (ないし定常状態) における負圧である 最終到達負圧値 (ないし定常負圧値) が不足する場合は、 部品保持性能が不良で あることは明瞭であるが、 最終到達負圧値に不足がないからといって、 必ずしも 部品保持性能が良好であるとは言えない。 例えば、 吸着ノズルの吸引孔に異物が つまっている場合には、 最終到達負圧に不足がなくても、 それに到達する途中の 負圧値が不足することがあるのである。 その場合には、 吸着ノズルによる電子回 路部品の吸着力が未だ不十分であるうちに吸着ノズルの後退が開始され、 電子回 路部品が吸着ノズルに保持されない吸着ミス、 あるいは異常な姿勢で保持される 異常吸着が発生する可能性がある。 したがって、 その場合には部品保持性能は不 足であると判定されるべきなのであるが、 1時点のみの検出負圧値 (この例で は定常状態に近い時点の検出負圧) に基づいて判定される場合には、 それが不可 能なのである。  At multiple points in the process of increasing the negative pressure of the detection hole due to the negative pressure supply by the negative pressure supply device, based on the negative pressure value of the detection hole detected by the negative pressure sensor based on the negative pressure value at only one point in time The quality of the component holding performance of the component holding device can be determined more accurately than that of the component holding device. A defect that cannot be detected based on the negative pressure value at only one point in time can be detected based on the negative pressure value at multiple points in time. For example, if the final attained negative pressure value (or steady-state negative pressure value), which is the negative pressure in the final stage (or steady state) at which the negative pressure in the detection hole does not change, is insufficient, the component holding performance is poor. Although this is clear, just because there is no shortage in the final attained negative pressure value does not necessarily mean that the component holding performance is good. For example, if foreign matter is clogged in the suction hole of the suction nozzle, the negative pressure value on the way to reaching the final negative pressure may be insufficient even if the final attained negative pressure is not insufficient. In this case, the suction nozzle starts retreating while the suction force of the electronic circuit component by the suction nozzle is still insufficient, and the suction error occurs when the electronic circuit component is not held by the suction nozzle, or is held in an abnormal posture. Abnormal adsorption may occur. Therefore, in this case, the component holding performance should be judged to be insufficient, but it is judged based on the detected negative pressure value only at one point in time (in this example, the detected negative pressure near the steady state). If so, it is impossible.
なお、 負圧検出の複数時点は、 吸引孔内における負圧増加の傾向を把握し得る 複数時点であればいかなる時点であってもよいが、 例えば、 負圧供給装置による 負圧供給開始時点や、 吸着面の接触面への接触時点からの経過時間を異にする複 数時点とするのが便利である。 吸着ノズルが負圧検查器に接触させられた後に負 圧供給装置による負圧供給が開始される場合には、 上記経過時間の計時開始時点 を負圧供給装置から吸着ノズルへの負圧供給開始時点とすることが望ましく、 負 圧供給装置による負圧の供給が開始された後に吸着ノズルが負圧検查器に接触さ せられる場合には、 吸着ノズルの負圧検査器への接触時点が計時開始時点とされ ることが望ましい。 し力 し、多くの場合、吸着ノズルの負圧検査器への接近開始, 負圧供給装置による負圧供給開始おょぴ吸着ノズルの負圧検査器への接触の間に は一定の時間的関係があり、 その場合には、 それらのいずれを計時開始時点とす ることも可能である。 吸着ノズルの負圧検査器への接近開始時点を計時開始時点 とすることもできるのである。 Note that the plurality of negative pressure detection points may be any of a plurality of points in time at which the tendency of the negative pressure increase in the suction hole can be grasped. , Where the elapsed time from the point of contact of the suction surface to the contact surface It is convenient to have several points in time. When the negative pressure supply by the negative pressure supply device is started after the suction nozzle is brought into contact with the negative pressure detector, the negative pressure supply from the negative pressure supply device to the suction nozzle is started when the elapsed time is counted. It is desirable to set the starting point, and if the suction nozzle is brought into contact with the negative pressure detector after the negative pressure supply by the negative pressure supply device has started, the contact point of the suction nozzle with the negative pressure detector Is desirably the time when the timing starts. In many cases, it takes a certain time between the start of the suction nozzle approaching the negative pressure tester and the start of the negative pressure supply by the negative pressure supply device. There is a relationship, in which case any of them can be the start of timing. The time at which the suction nozzle starts approaching the negative pressure tester can be used as the timing start time.
( 2 ) 前記複数時点が 3時点以上である (1)項に記載の部品保持性能検査方法。 複数時点は、 2時点でもよいが、 3時点以上とすれば、 電子回路部品保持装置 の保持部品性能の良否をより的確に判定することができ、 また、 検出孔の負圧の 変化を曲線的に把握することが可能となって、 保持部品性能が不良の場合の原因 の推定精度が向上する効果が得られる。 検出孔の負圧変化を表す曲線 (経過時間 と検出された負圧値との関係を表す曲線) を取得し、 その曲線の形状に基づいて 部品保持性能の良否を判定することも可能である。 その場合には、 負圧変化を表 す曲線が無限数時点の負圧値を表すと考えるのである。  (2) The component holding performance inspection method according to (1), wherein the plurality of time points is three or more time points. The plurality of time points may be two time points, but if it is three or more time points, it is possible to more accurately determine the quality of the holding component performance of the electronic circuit component holding device, and the change in the negative pressure of the detection hole in a curved line. As a result, it is possible to obtain an effect of improving the accuracy of estimating the cause when the performance of the holding component is defective. It is also possible to acquire a curve representing the change in the negative pressure of the detection hole (curve representing the relationship between the elapsed time and the detected negative pressure value) and determine the quality of the component holding performance based on the shape of the curve. . In that case, the negative pressure change curve is considered to represent the negative pressure value at an infinite number of times.
( 3 ) 前記判定工程が、 前記検出工程で検出された前記複数時点の検出孔の負圧 値と、 前記複数時点の予め設定された各標準負圧値との比較を行う比較工程を含 み、 その比較工程における比較結果に基づいて部品保持性熊の良否を判定するェ 程である (1)項または (2)項に記載の部品保持性能検出工程。  (3) The determining step includes a comparing step of comparing the negative pressure values of the detection holes at the plurality of time points detected in the detecting step with the preset standard negative pressure values at the plurality of time points. The component holding performance detecting step according to (1) or (2), which is a step of judging the quality of the component holding ability based on the comparison result in the comparing step.
複数時点における検出負圧値と標準負圧値とを比較すれば、 部品保'持性能の良 否を容易にかつ的確に判定することができる。 特に 3時点以上における比較を行 えば、 部品保持性能の良否判定の信頼性が高くなるとともに、 不良が発生した場 合における不良原因の推定が容易となる。  By comparing the detected negative pressure value at a plurality of time points with the standard negative pressure value, it is possible to easily and accurately determine the quality of the component holding performance. In particular, if comparisons are made at three or more points in time, the reliability of the determination of the quality of the component holding performance becomes high, and the cause of the failure when a failure occurs can be easily estimated.
( 4 ) 前記複数時点の検出負圧値のそれらに対応する前記標準負圧値からの外れ 方の違いに基づいて部品保持性能低下の原因を推定する第一原因推定工程を含む (3)項に記載の部品保持性能検査方法。 ( 5 ) 複数の吸着ノズルについて、 共通の負圧検査器を用いて検査を行い、 前記 判定工程において、 前記複数の吸着ノズルのうちの一部のものについて部品保持 性能が不良、他の吸着ノズルについて部品保持性能が良好と判定された場合には、 部品保持性能が不良と判定された吸着ノズル自体が不良と推定し、 前記一部のも のの数より多い数の吸着ノズルについて部品保持性能が不良と判定された場合に は、 前記負圧供給装置と前記負圧センサとの少なくとも一方が不良と推定する第 二原因推定工程を含む (1)項ないし (4)項のいずれかに記载の部品保持性能検査 方法。 (4) A first cause estimating step of estimating the cause of the deterioration of the component holding performance based on a difference in the detected negative pressure values at the plurality of times from the corresponding standard negative pressure values is included (3). 3. The method for inspecting component holding performance described in 2. (5) A plurality of suction nozzles are inspected using a common negative pressure tester, and in the determination step, part holding performance of some of the plurality of suction nozzles is poor and other suction nozzles are defective. If it is determined that the component holding performance is good for the suction nozzles that are determined to have poor component holding performance, it is estimated that the suction nozzles themselves are defective. If it is determined that is defective, a second cause estimating step of estimating that at least one of the negative pressure supply device and the negative pressure sensor is defective is included in any one of (1) to (4).部品 Part holding performance inspection method.
複数の吸着ノズルのうちの 1つについて部品保持性能が不良、 他の吸着ノズル については良好と判定された場合には、 その 1個の吸着ノズルが不良であり、 全 ての吸着ノズルについて部品保持性能が不良と判定された場合には、 負圧供給装 置と負圧センサとの少なくとも一方が不良と推定する態様が本項の態様の代表的 なものであるが、 それに限定されるわけではない。 本項の特徴によれば、 負圧供 給装置や負圧センサの故障と、 吸着ノズルの不良とを分別することができ、 部品 保持性能検査の信頼性が高くなる。  If it is determined that one of the plurality of suction nozzles has poor component holding performance and the other suction nozzles are good, the one suction nozzle is defective and component holding is performed for all suction nozzles. If the performance is determined to be poor, the mode in which at least one of the negative pressure supply device and the negative pressure sensor is presumed to be defective is typical of the mode in this section, but is not limited thereto. Absent. According to the features of this section, the failure of the negative pressure supply device and the negative pressure sensor can be distinguished from the failure of the suction nozzle, and the reliability of the component holding performance inspection can be increased.
( 6 ) 前記複数の吸着ノズルのうちの一部のものが、 前記複数の吸着ノズルの数 と第一設定比率との積以下の数の吸着ノズルであり、 前記一部のものの数より多 い数が、 前記第一設定比率より大きい第二設定比率と前記複数の吸着ノズルの数 との積以上の数である (5)項に記載の部品保持性能検査方法。  (6) A part of the plurality of suction nozzles is a number of suction nozzles equal to or less than a product of the number of the plurality of suction nozzles and the first set ratio, and is larger than the number of the part nozzles. The component holding performance inspection method according to (5), wherein the number is equal to or greater than a product of a second set ratio larger than the first set ratio and the number of the plurality of suction nozzles.
本項の特徴は、 検査対象となる吸着ノズルの数が多い場合に特に有効である。 ( 7 ) 負圧供給装置から供給される負圧に基づいて、 互いに吸引孔の内径を異に する複数種類の吸着ノズルによりそれぞれ電子回路部品を吸着保持する電子回路 部品保持装置の部品保持性能を検査する方法であって、  The features of this section are particularly effective when the number of suction nozzles to be inspected is large. (7) Based on the negative pressure supplied from the negative pressure supply device, the component holding performance of the electronic circuit component holding device, which sucks and holds the electronic circuit components by means of a plurality of types of suction nozzles having suction holes having different inner diameters, is used. A method of testing,
前記複数種類の吸着ノズルの各々の吸着面と接触可能な複数の接触面に、 それ ら接触面に前記複数種類の吸着ノズルがそれぞれ接触した状態でそれら吸着ノズ ルの各吸引孔と連通可能な状態で開口する複数の検出孔と、 それら検出孔の負圧 を検出する少なくとも 1つの負圧センサとを備えた負圧検査器を準備する.準備ェ 程と、  A plurality of contact surfaces capable of contacting the suction surfaces of the plurality of types of suction nozzles can communicate with the suction holes of the suction nozzles in a state where the plurality of types of suction nozzles are in contact with the contact surfaces. Prepare a negative pressure tester including a plurality of detection holes that are opened in a state and at least one negative pressure sensor that detects a negative pressure in the detection holes.
前記複数種類の吸着ノズルの前記吸着面の各々と前記負圧検査器の前記複数の 接触面の各々とを接触させるとともに前記負圧供給装置に負圧を供給させ、 その 負圧供給により前記複数の検出孔の各々の負圧が増大する過程の複数時点におい て前記少なくとも 1つの負圧センサに前記複数の検出孔の各々の負圧を検出させ る負圧検出工程と、 Each of the suction surfaces of the plurality of types of suction nozzles and the plurality of the suction pressure nozzles The negative pressure is supplied to the negative pressure supply device while making contact with each of the contact surfaces, and the negative pressure supply increases the negative pressure of each of the plurality of detection holes. A negative pressure detecting step of causing a pressure sensor to detect a negative pressure of each of the plurality of detection holes;
その負圧検出工程において検出された前記少なくとも複数時点の負圧値に基づ レ、て、 前記複数種類の吸着ノズルを含む前記電子回路部品保持装置の保持部品性 能の良否を判定する判定工程と  A judging step of judging the quality of the holding component performance of the electronic circuit component holding device including the plurality of types of suction nozzles based on the negative pressure values at least at a plurality of times detected in the negative pressure detecting step. When
を含むことを特徴とする部品保持性能検査方法。 A component holding performance inspection method characterized by including:
吸着ノズルの吸引孔の内径が小さければ、 負圧検査器の検出孔の内径も小さく しなければならないか、 あるいは小さくすることが望ましい。 その場合には、 同 じ負圧供給装置および負圧センサを使用しても、 検出孔の負圧の変化状態が異な る。 したがって、 そのことを考慮に入れて部品保持性能の良否を判定することが 望ましい。 次項に記載の方法がその一例である。 なお、 上記複数の接触面は互い に連続したもの (例えば、 一平面の各一部) でもよく、 互いに連続していないも のでもよレ、。  If the inside diameter of the suction hole of the suction nozzle is small, the inside diameter of the detection hole of the negative pressure tester must also be reduced, or it is desirable to make it smaller. In that case, even if the same negative pressure supply device and negative pressure sensor are used, the state of change of the negative pressure in the detection hole is different. Therefore, it is desirable to judge the quality of component holding performance in consideration of this fact. The method described in the next section is an example. Note that the plurality of contact surfaces may be continuous with each other (for example, each part of one plane) or may not be continuous with each other.
( 8 ) 前記判定工程が、 前記複数種類の吸着ノズルの各々について予め設定され た前記複数時点の各標準負圧値と、 前記負圧検出工程で検出された前記複数時点 の各負圧値との比較を行う比較工程を含み、 その比較工程における比較結果に基 づいて部品保持性能の良否を判定する工程である (7)項に記載の部品保持性能検 查方法。  (8) In the determining step, each of the standard negative pressure values at the plurality of times preset for each of the plurality of types of suction nozzles, and the negative pressure values at the plurality of times detected in the negative pressure detecting step. (7) The method for checking component holding performance according to item (7), which includes a comparing step of comparing the components, and determining whether the component holding performance is good or not based on the comparison result in the comparing process.
吸引孔の内径を異にする複数種類の吸着ノズルについて、 それぞれ複数時点の 標準負圧値を設定し、 それらと検出負圧値とを比較すれば、 部品保持性能の良否 判定の信頼性を高めることができる。  For multiple types of suction nozzles with different inside diameters of suction holes, set standard negative pressure values at multiple points in time, and compare them with the detected negative pressure value to increase the reliability of component holding performance judgment. be able to.
( 9 ) 前記少なくとも 1つの負圧センサとして、 前記複数の検出孔に共通の 1つ の負圧センサを使用し、 その 1つの負圧センサと前記複数の検出孔の 1つずつと を選択的に連通させ、 その負圧センサに連通している検出孔が開口している接触 面に前記複数種類の吸着ノズルの各吸着面を接触させる (7)項または (8)項に記 載の部品保持性能検査方法。  (9) One negative pressure sensor common to the plurality of detection holes is used as the at least one negative pressure sensor, and the one negative pressure sensor and one of the plurality of detection holes are selectively used. The suction surface of the plurality of types of suction nozzles is brought into contact with the contact surface where the detection hole communicating with the negative pressure sensor is opened. Retention performance inspection method.
本項の特徴によれば、吸引孔の内径を異にする複数種類の吸着ノズルについて、 部品保持性能の良否検查を容易に行うことができる。 また、 負圧検査器の製造コ ストを低減し得る。 According to the features of this section, for a plurality of types of suction nozzles having different inner diameters of the suction holes, The quality check of the component holding performance can be easily performed. Also, the manufacturing cost of the negative pressure tester can be reduced.
( 1 0 ) 負圧供給装置から供給される負圧に基づいて吸着ノズルにより電子回路 部品を吸着保持する電子回路部品保持装置の部品保持性能を検査する装置であつ て、 (a)前記吸着ノズルの吸着面と接触可能な接触面に、 その接触面に前記吸着 ノズルが接触した状態でその吸着ノズルの吸引孔と連通可能な状態で開口する検 出孔と、 (b)その検出孔の負圧を検出する負圧センサとを備えた負圧検査器を含 むことを特徴とする部品保持性能検査装置。  (10) A device for inspecting the component holding performance of an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device, and (a) the suction nozzle (B) a detection hole which is opened in a state in which the suction surface is in contact with the suction surface of the suction nozzle when the suction nozzle is in contact with the suction surface of the suction nozzle; A component holding performance inspection device comprising a negative pressure inspection device having a negative pressure sensor for detecting pressure.
( 1 1 ) (a)前記吸着ノズルの前記吸着面と前記負圧検査器の前記接触面とを接 触させるとともに前記負圧供給装置に負圧を供給させ、 その負圧供給により前記 検出孔の負圧が増大する過程の複数時点において前記負圧センサにその検出孔の 負圧を検出させる負圧検出制御部と、 (b)その負圧検出制御部の制御により前記 負圧センサにより検出された前記複数時点の負圧値に基づいて前記電子回路部品 保持装置の保持部品性能の良否を判定する判定部とを備えた主制御装置を含む (10)項に記載の部品保持性能検査装置。  (11) (a) The suction surface of the suction nozzle is brought into contact with the contact surface of the negative pressure tester and a negative pressure is supplied to the negative pressure supply device, and the detection hole is supplied by the negative pressure supply. A negative pressure detection control unit for causing the negative pressure sensor to detect a negative pressure in the detection hole at a plurality of points in the process of increasing the negative pressure of the negative pressure sensor; (b) detection by the negative pressure sensor under the control of the negative pressure detection control unit A main controller including a determination unit that determines whether the performance of the holding component of the electronic circuit component holding device is good or not based on the negative pressure values at the plurality of points in time. .
本項の部品保持性能検査装置は、 前記 (1)項に記載の部品保持性能検査方法の 実施に好適なものである。  The component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (1).
( 1 2 )前記複数時点が 3時点以上である(11)項に記載の部品保持性能検査装置。 本項の部品保持性能検査装置は、 前記 (2)項に記載の部品保持性能検査方法の 実施に好適なものである。  (12) The component holding performance inspection device according to the mode (11), wherein the plurality of time points is three or more time points. The component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (2).
( 1 3 ) 前記判定部が、 前記負圧検出制御部の制御により検出された前記複数時 点の検出孔の負圧値と、 前記複数時点の予め設定された各標準負圧値との比較を 行う比較部を有し、 その比較部による比較結果に基づいて部品保持性能の良否を 判定するものである(11)項または(12)項に記載の部品保持性能検出装置。  (13) The determination unit compares the negative pressure values of the detection holes at the plurality of times detected by the control of the negative pressure detection control unit with the preset standard negative pressure values at the plurality of time points. The component holding performance detecting apparatus according to the above mode (11) or (12), further comprising: a comparing section for performing the following, and determining whether the component holding performance is good or not based on a comparison result by the comparing section.
本項の部品保持性能検査装置は、 前記 (3)項に記載の部品保持性能検査方法の 実施に好適なものである。  The component holding performance inspection apparatus according to this section is suitable for implementing the component holding performance inspection method according to the above (3).
( 1 4 ) 前記主制御装置が、 前記複数時点の検出負圧値のそれらに対応する前記 標準負圧値からの外れ方の違レ、に基づいて部品保持性能低下の原因を推定する第 一原因推定部を備えた(13)項に記載の部品保持性能検査装置。 本項の部品保持性能検査装置は、 前記 (4)項に記載の部品保持性能検查方法の 実施に好適なものである。 (14) The first control device, wherein the main control device estimates a cause of a deterioration in component holding performance based on a difference in the detected negative pressure values at the plurality of times from the corresponding standard negative pressure values. The component holding performance inspection device according to item (13), further including a cause estimating unit. The component holding performance inspection apparatus according to this mode is suitable for implementing the component holding performance inspection method according to the above mode (4).
( 1 5 ) 前記負圧検出制御部が、 複数の吸着ノズルについて前記負圧センサに前 記負圧を検出させるものであり、 かつ、 前記主制御装置が、 前記判定部により前 記複数の吸着ノズルのうちの一部のものについて部品保持性能が不良、 他の吸着 ノズルについて部品保持性能が良好と判定された場合には、 部品保持性能が不良 と判定された吸着ノズル自体が不良と推定し、 前記一部のものの数より多い数の 吸着ノズルについて部品保持性能が不良と判定された場合には、 前記負圧供給装 置と前記負圧センサとの少なくとも一方が不良と推定する第二原因推定部を含む (11)項ないし(14)項のいずれかに記載の部品保持性能検査装置。  (15) The negative pressure detection control section causes the negative pressure sensor to detect the negative pressure for a plurality of suction nozzles, and the main control device controls the plurality of suction nozzles by the determination section. If it is determined that some of the nozzles have poor component holding performance and other suction nozzles have good component holding performance, the suction nozzle itself that is determined to have poor component holding performance is presumed to be defective. If it is determined that the component holding performance is defective for a number of suction nozzles greater than the number of the partial nozzles, a second cause for estimating that at least one of the negative pressure supply device and the negative pressure sensor is defective. The component holding performance inspection device according to any one of (11) to (14), including an estimation unit.
本項の部品保持性能検查装置は、 前記 (5)項に記載の部品保持性能検査方法の 実施に好適なものである。  The component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (5).
( 1 6 ) 前記負圧検出制御部が、 互いに吸引孔の内径を異にする複数種類の吸着 ノズルについて前記負圧センサに前記負圧を検出させるものであり、 かつ、 前記 判定部が、 前記複数種類の吸着ノズルの各々について検出された前記複数時点の 負圧値に基づいて、 前記複数種類の吸着ノズルを含む前記電子回路部品保持装置 の保持部品性能の良否を判定するものである(11)項ないし(15)項のレ、ずれかに記 載の部品保持性能検査装置。  (16) The negative pressure detection control section causes the negative pressure sensor to detect the negative pressure for a plurality of types of suction nozzles having suction holes having different inner diameters, and the determination section includes: Based on the negative pressure values at the plurality of times detected for each of the plurality of types of suction nozzles, the quality of the holding component performance of the electronic circuit component holding device including the plurality of types of suction nozzles is determined (11). The component holding performance inspection device described in any of paragraphs) to (15).
本項の部品保持性能検査装置は、 前記 (7)項に記載の部品保持性能検査方法の 実施に好適なものである。  The component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (7).
( 1 7 ) 前記判定部が、 前記複数種類の吸着ノズルの各々について予め設定され た前記複数時点の各標準負圧値と、 前記複数種類の吸着ノズルの各々について検 出された前記複数時点の各負圧値との比較を行う比較部を有し、 その比較部によ る比較結果に基づいて部品保持性能の良否を判定するものである(16)項に記載の 部品保持性能検出装置。  (17) The determination unit is configured to set the standard negative pressure values at the plurality of points in time preset for each of the plurality of types of suction nozzles, and the standard negative pressure values at the plurality of points detected for each of the plurality of types of suction nozzles. The component holding performance detection device according to the above mode (16), further comprising: a comparing unit that performs comparison with each negative pressure value, wherein the quality of the component holding performance is determined based on a comparison result by the comparing unit.
本項の部品保持性能検査装置は、 前記 (S)項に記載の部品保持性能検査方法の 実施に好適なものである。  The component holding performance inspection device according to this section is suitable for implementing the component holding performance inspection method according to the above (S).
( 1 8 ) 負圧供給装置から供給される負圧に基づいて、 互いに吸引孔の内径を異 にする複数種類の吸着ノズルの各々により複数種類の電子回路部品を吸着保持す る電子回路部品保持装置の部品保持性能を検査するための装置であって、 検査器本体と、 (18) Based on the negative pressure supplied from the negative pressure supply device, a plurality of kinds of electronic circuit components are suction-held by each of a plurality of kinds of suction nozzles having suction holes having different inner diameters. A device for inspecting component holding performance of an electronic circuit component holding device, comprising:
その検査器本体に相対移動可能に取り付けられ、 前記吸着ノズルの吸着面と接 触可能な接触面に、 内径を互いに異にする複数の検出孔が設けられた検出孔形成 部材と、  A detection hole forming member attached to the inspection device main body so as to be relatively movable, and provided with a plurality of detection holes having different inner diameters on a contact surface capable of contacting the suction surface of the suction nozzle;
その検出孔形成部材を、 前記複数種類の吸着ノズルのうち次に検査すべきもの の種類に応じて移動させることにより、 前記複数の検出孔の切換えを自動で行う 検出孔切換装置と、  A detection hole switching device that automatically switches the plurality of detection holes by moving the detection hole forming member in accordance with the type of the suction nozzle to be inspected next among the plurality of types of suction nozzles;
前記検査器本体に、 前記検出孔形成部材の前記移動に応じて前記複数の検出孔 の各々と選択的に連通可能に設けられた検出通路と、  A detection passage provided in the inspection device main body so as to be selectively communicated with each of the plurality of detection holes in accordance with the movement of the detection hole forming member;
その検出通路の負圧を検出する負圧センサと  A negative pressure sensor for detecting the negative pressure in the detection passage;
を含み、 前記検査器本体, 前記検出孔形成部材, 前記検出通路および前記負圧セ ンサが前記検出孔切換装置の前記検査器本体に取り付けられた部分と共同して負 圧検査器を構成していることを特徴とする部品保持性能検査装置。 Wherein the inspection device main body, the detection hole forming member, the detection passage, and the negative pressure sensor constitute a negative pressure inspection device in cooperation with a portion of the detection hole switching device attached to the inspection device main body. A component holding performance inspection apparatus characterized in that:
互いに吸引孔の内径を異にする複数種類の吸着ノズルについての保持性能検査 を行う必要がある場合に、 検出孔切換装置により検出孔形成部材が自動で移動さ せられることにより、 内径を互いに異にする複数の検出孔のうち次に検査される べき吸着ノズルの吸引孔の内径に対応するものが検出通路と連通させられる。 そ して、 その吸引孔が開口する接触面に吸着ノズルの吸着面が接触させられ、 その 吸着ノズルの吸引孔に負圧供給装置により負圧が供給され、 検出孔の負圧が負圧 センサにより検出される。 したがって、 複数種類の吸着ノズルについての保持性 能検査を容易に迅速に行うことができる。  When it is necessary to perform a holding performance test on a plurality of types of suction nozzles having different inner diameters of the suction holes, the detection hole forming members are automatically moved by the detection hole switching device, so that the inner diameters are different from each other. Of the plurality of detection holes, the one corresponding to the inside diameter of the suction hole of the suction nozzle to be inspected next is communicated with the detection passage. Then, the suction surface of the suction nozzle is brought into contact with the contact surface where the suction hole opens, a negative pressure is supplied to the suction hole of the suction nozzle by a negative pressure supply device, and the negative pressure of the detection hole is detected by a negative pressure sensor. Is detected by Therefore, it is possible to easily and quickly perform the holding performance test on a plurality of types of suction nozzles.
( 1 9 ) 前記検出孔形成部材が、 回転軸線まわりに回転可能に前記検査器本体に 取り付けられ、 前記回転軸線を中心とする円周上に前記複数の検出孔が形成され た回転型検出孔形成部材であり、 前記検出孔切換装置が、 回転型検出孔形成部材 を、 前記複数の検出孔の各々が前記検出通路と連通する回転位置へ回転させる検 出孔形成部材回転装置を含む(18)項に記載の部品保持性能検査装置。  (19) A rotary detection hole in which the detection hole forming member is attached to the inspection device main body so as to be rotatable around a rotation axis, and wherein the plurality of detection holes are formed on a circumference around the rotation axis. The detection hole switching device includes a detection hole formation member rotating device that rotates the rotary detection hole formation member to a rotation position where each of the plurality of detection holes communicates with the detection passage (18). Item), the component holding performance inspection device.
直線運動する直線運動型検出孔形成部材を採用することも可能であるが、 回転 型検出孔形成部材によれば、 比較小さいスペースに多くの検出孔を形成すること ができる。 また、 検出孔形成部材の移動装置を構成が単純で安価なものとするこ とが容易である。 Although it is possible to adopt a linear motion type detection hole forming member that moves linearly, according to the rotary type detection hole forming member, it is possible to form many detection holes in a relatively small space. Can be. Moreover, it is easy to make the moving device of the detection hole forming member simple and inexpensive.
( 2 0 ) 前記検出孔切換装置が、  (20) The detection hole switching device,
前記検査器本体, 検出孔形成部材, 検出通路およぴ負圧センサを備えた負圧検 査器の外部に設けられた駆動源の駆動力により前記検出孔形成部材を移動させる 検出孔形成部材移動装置と、  A detection hole forming member configured to move the detection hole forming member by a driving force of a driving source provided outside the negative pressure detector including the inspection device main body, a detection hole forming member, a detection passage, and a negative pressure sensor; A moving device;
前記複数種類の吸着ノズルのうち次に検査すべきものの種類の情報に基づいて 前記駆動源を制御する駆動源制御装置と  A drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
を含む(18)項または(19)項に記載の部品保持性能検査装置。 The component holding performance inspection apparatus according to the above mode (18) or (19), comprising:
検出孔形成部材移動装置の駆動源として負圧検査器の外部の駆動源を利用する ため、 装置コストの低減が可能となる。  Since a drive source external to the negative pressure tester is used as a drive source of the detection hole forming member moving device, the cost of the device can be reduced.
( 2 1 ) 前記検出孔切換装置が、  (21) The detection hole switching device is
前記検査器本体に取り付けられた駆動源により前記検出孔形成部材を移動させ る検出孔形成部材移動装置と、  A detection hole forming member moving device for moving the detection hole forming member by a driving source attached to the inspection device main body;
前記複数種類の吸着ノズルのうち次に検査すべきものの種類の情報に基づいて 前記駆動源を制御する駆動源制御装置と  A drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
を含む(18)項または(19)項に記載の部品保持性能検査装置。 The component holding performance inspection apparatus according to the above mode (18) or (19), comprising:
( 2 2 ) 前記吸着ノズルの前記負圧検査器への接近開始時点, 前記負圧供給装置 による負圧供給開始時点, および前記吸着ノズルの前記負圧検査器への接触時点 のいずれかに対して予め定められた一定の関係を有する時点に、 前記負圧センサ に前記検出孔の負圧の検出を開始させる負圧検出開始制御装置を含む(10)項ない し(21)項のいずれかに記載の部品保持性能検查装置。  (22) At the time when the suction nozzle starts approaching the negative pressure tester, when the negative pressure supply device starts to supply negative pressure, and when the suction nozzle comes into contact with the negative pressure tester. (10) or (21) including a negative pressure detection start control device that causes the negative pressure sensor to start detecting a negative pressure in the detection hole at a time point having a predetermined fixed relationship. A component holding performance inspection device according to item 1.
( 2 3 ) 前記吸着ノズルの吸着面を前記負圧検査器の接触面に接触, 離間させる ベく昇降させるノズル昇降装置と、  (23) a nozzle elevating device for bringing the suction surface of the suction nozzle into contact with and separating from the contact surface of the negative pressure tester,
そのノズル昇降装置による吸着ノズルの下降運動に連動して前記負圧供給装置 に負圧の供給を開始させる負圧供給開始制御装置と、  A negative pressure supply start control device that starts supplying a negative pressure to the negative pressure supply device in conjunction with a downward movement of the suction nozzle by the nozzle lifting / lowering device;
前記負圧供給装置による前記吸着ノズルへの負圧供給開始時点に対して予め定 められた一定の関係を有する時点に前記負圧センサに前記検出孔の負圧の検出を 開始させる負圧検出開始制御装置と を含む(10)項ないし (21)項のいずれかに記載の部品保持性能検査装置。 Negative pressure detection that causes the negative pressure sensor to start detecting the negative pressure of the detection hole at a time point having a predetermined fixed relationship with the time point at which the negative pressure supply device starts supplying the negative pressure to the suction nozzle. With start controller The component holding performance inspection device according to any one of (10) to (21), including:
このように、 負圧供給開始制御装置と負圧検出開始制御装置とを、 ノズル昇降 装置による吸着ノズルの昇降と連動ないし関連付けて負圧供給と負圧検出との開 始を制御するものとすれば、 負圧供給と負圧検出とを容易に適切な時点に開始さ せることができる。 また、 電子回路部品装着機においては、 ノズル昇降装置と負 圧供給開始制御装置とが連動させられていることが多く、 その場合には、 それら に負圧検出開始制御装置を関連付ければそれだけで本項の構成が得られる。  In this way, the negative pressure supply start control device and the negative pressure detection start control device are linked to or associated with the lifting and lowering of the suction nozzle by the nozzle lifting / lowering device to control the start of the negative pressure supply and the negative pressure detection. For example, the negative pressure supply and the negative pressure detection can be easily started at an appropriate time. Also, in electronic circuit component mounting machines, the nozzle elevating device and the negative pressure supply start control device are often linked, and in such a case, if a negative pressure detection start control device is associated with them, it is sufficient. The configuration of this section is obtained.
( 2 4 ) 前記検出孔切換装置と前記負圧検出開始制御装置とがそれぞれ被駆動部 材を備え、 かつ、 当該部品保持性能検査装置が、 それら被駆動部材に共通に設け られ、 両被駆動部材を選択的に駆動する駆動部材を備えた駆動装置を含む (22)項 または (23)項に記載の部品保持性能検査装置。  (24) The detection hole switching device and the negative pressure detection start control device each include a driven member, and the component holding performance inspection device is provided commonly to the driven members, and both driven members are driven. The component holding performance inspection device according to the above mode (22) or (23), including a driving device provided with a driving member for selectively driving the member.
本項の特徴によれば、 検出孔制御装置と負圧検出開始制御装置との駆動装置を 兼用とすることができ、 装置コストの低減を図り得る。 図面の簡単な説明  According to the feature of this mode, the drive device of the detection hole control device and the negative pressure detection start control device can be used in common, and the cost of the device can be reduced. BRIEF DESCRIPTION OF THE FIGURES
図 1は本発明の一実施形態である部品保持性能検査装置を備えた電子部品装着 システムを概略的に示す平面図である。  FIG. 1 is a plan view schematically showing an electronic component mounting system including a component holding performance inspection apparatus according to an embodiment of the present invention.
図 2は上記電子部品装着システムのプリント配線板保持ュ-ットを示す正面図 (一部断面) である。  FIG. 2 is a front view (partial cross section) showing a printed wiring board holding hut of the electronic component mounting system.
図 3は上記電子部品装着システムの装着装置を示す正面図(一部断面)である。 図 4は上記装着装置の要部を拡大して示す正面図 (一部断面) である。  FIG. 3 is a front view (partial cross section) showing a mounting device of the electronic component mounting system. FIG. 4 is an enlarged front view (partially sectioned) showing a main part of the mounting device.
図 5は上記装着装置の別の要部を拡大して示す正面図 (一部断面) である。 図 6は上記装着装置の吸着ノズルを示す正面断面図である。  FIG. 5 is an enlarged front view (partial cross section) of another main part of the mounting device. FIG. 6 is a front sectional view showing a suction nozzle of the mounting device.
図 7は上記装着装置の方向切換弁および弁切換装置を抜き出して示す正面断面 図である。  FIG. 7 is a front sectional view showing the direction switching valve and the valve switching device of the mounting device.
図 8は上記電子部品装着システムを制御するための制御装置を概念的に示す機 能プロック図である。  FIG. 8 is a functional block diagram conceptually showing a control device for controlling the electronic component mounting system.
図 9は上記電子部品装着システムにおける負圧検査器の右側面図である。 図 1 0は上記負圧検查器の左側面図である。 図 1 1は上記負圧検査器の測定部を拡大して示す平面図である。 FIG. 9 is a right side view of the negative pressure tester in the electronic component mounting system. FIG. 10 is a left side view of the negative pressure detector. FIG. 11 is an enlarged plan view showing a measuring section of the negative pressure tester.
図 1 2は図 1 1に示す測定部の正面断面図である。  FIG. 12 is a front sectional view of the measuring section shown in FIG.
図 1 3は図 1 1に示す測定部を示す底面図である。  FIG. 13 is a bottom view showing the measuring unit shown in FIG.
図 1 4は上記負圧検査器を制御するための負圧検出制御装置を概念的に示す機 能プロック図である。  FIG. 14 is a functional block diagram conceptually showing a negative pressure detection control device for controlling the negative pressure tester.
図 1 5は前記電子部品装着システムにおける部品装着ュニットの部品保持性能 を検査するための検查プログラムを示すフローチヤ一トである。  FIG. 15 is a flowchart showing an inspection program for inspecting the component holding performance of the component mounting unit in the electronic component mounting system.
図 1 6は吸着ノズルの負圧値の時間変化を説明するための図である。  FIG. 16 is a diagram for explaining the time change of the negative pressure value of the suction nozzle.
図 1 7は吸着ノズルの良否判定を行うためのテーブルを概念的に示す図であ る。  FIG. 17 is a view conceptually showing a table for performing pass / fail judgment of the suction nozzle.
図 1 8は本発明の別の実施形態である電子部品装着システムにおける正圧 ·負 圧供給装置を示す回路図である。  FIG. 18 is a circuit diagram showing a positive pressure / negative pressure supply device in an electronic component mounting system according to another embodiment of the present invention.
図 1 9は本発明のさらに別の実施形態である部品保持性能検査装置を備えた電 子部品装着システムを示す平面図である。  FIG. 19 is a plan view showing an electronic component mounting system including a component holding performance inspection device according to still another embodiment of the present invention.
図 2 0は上記電子部品装着システムの制御装置の本発明に関連の深い部分のみ を取り出して示す回路図である。 発明を実施するための最良の形態  FIG. 20 is a circuit diagram showing only a portion relevant to the present invention of the control device of the electronic component mounting system. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 本発明の実施形態を図面に基づいて詳細に説明する。 図 1において符号 1 0は電子部品装着システム 1 2のベースを示す。 ベース 1 0上には、 部品供給 装置 1 4 , 装着装置 1 6およびプリント配線板保持移動装置 1 8 (以下、 配線板 保持移動装置 1 8と略称する) が設けられ、 電子部品装着システム 1 2を構成し ている。  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In FIG. 1, reference numeral 10 indicates a base of the electronic component mounting system 12. On the base 10, a component supply device 14, a mounting device 16, and a printed wiring board holding and moving device 18 (hereinafter abbreviated as a wiring board holding and moving device 18) are provided, and an electronic component mounting system 1 2 Are composed.
部品供給装置 1 4は、 本実施形態においては 2台の部品供給テーブル 2 0を含 んでいる。 これら部品供給テーブル 2 0はそれぞれ、 フィーダ支持台 2 2と、 フ ィーダ支持台 2 2上に搭载された複数のフィーダ 2 4とを有する。 フィーダ 2 4 は、 詳細な図示は省略するが、 本実施形態では電子部品を部品保持テープに保持 させてテープ化電子部品とした状態で供給するものとされている。 複数のフィー ダ 2 4は、 それの部品供給部が水平な一直線上に並ぶ状態でフィーダ支持台 2 2 上に着脱可能に取り付けられている。 以下、 電子部品装着システム 1 2全体につ いて、 フィーダ 2 4の並びの方向に平行な方向を X軸方向とし、 それと直交する 方向を Y軸方向とする。 各部品供給テーブル 2 0は、 それぞれの駆動源たる支持 台駆動用モータ 2 6の駆動力が駆動力伝達装置 2 8を介して伝達されることによ り、 ガイドレール 3 0に沿って X軸方向に移動させられる。 それにより、 複数の フィーダ 2 4の各部品供給部が部品供給位置に選択的に位置決めされる。 The component supply device 14 includes two component supply tables 20 in the present embodiment. Each of these component supply tables 20 has a feeder support 22 and a plurality of feeders 24 mounted on the feeder support 22. Although the detailed illustration is omitted, the feeder 24 is configured to supply the electronic components in the form of taped electronic components by holding the electronic components on a component holding tape in the present embodiment. The plurality of feeders 24 are arranged such that their component supply units are aligned in a horizontal straight line. It is detachably mounted on the top. Hereinafter, for the entire electronic component mounting system 12, a direction parallel to the direction in which the feeders 24 are arranged is defined as an X-axis direction, and a direction orthogonal thereto is defined as a Y-axis direction. Each component supply table 20 is moved along the guide rail 30 by transmitting the driving force of the support base driving motor 26 as a driving source via the driving force transmission device 28. Moved in the direction. As a result, the component supply units of the plurality of feeders 24 are selectively positioned at the component supply positions.
配線板保持移動装置 1 8は、 回路基板の一種であるプリント配線板 4 0を保持 する基板保持装置たるプリント配線板保持ュニット 4 2と、 プリント配線板保持 ュニット 4 2を移動させ、 プリント配線板 4 0を移動させる基板保持装置移動装 置たるプリント配線板保持ユニット移動装置 4 4とを備えている。 プリント配線 板保持ュニット移動装置 4 4は、 X軸スライド 5 2と Y軸スライド 6 0とを備え ている。 X軸スライド 5 2は、 X軸スライド駆動用モータ 4 6および駆動力伝達 装置 4 8により、 ガイドレール 5 0を含む案内装置に案内されて X軸方向に移動 させられる。 Y軸スライド 6 0は、 X軸スライド 5 2上において、 Y軸スライド 駆動用モータ 5 4および駆動力伝達装置 5 6により、 ガイドレール 5 8を含む案 内装置に案内されて Y軸方向に移動させられる。  The wiring board holding and moving device 18 moves the printed wiring board holding unit 42, which is a board holding device for holding the printed wiring board 40, which is a kind of circuit board, and the printed wiring board holding unit 42, and moves the printed wiring board. And a printed wiring board holding unit moving device 44 which is a substrate holding device moving device for moving 40. The printed wiring board holding unit moving device 44 includes an X-axis slide 52 and a Y-axis slide 60. The X-axis slide 52 is guided by a guide device including a guide rail 50 by an X-axis slide drive motor 46 and a driving force transmission device 48 and is moved in the X-axis direction. The Y-axis slide 60 is moved in the Y-axis direction on the X-axis slide 52 by the Y-axis slide drive motor 54 and the driving force transmission device 56, guided by a planning device including a guide rail 58. Let me do.
Y軸スライド 6 0はプリント配線板保持ュニット 4 2を下方から支持し、 プリ ント配線板保持ュニット 4 2はプリント配線板 4 0を下方から水平な姿勢で保持 する。 プリント配線板 4 0の表面は水平であり、 プリント配線板 4 0はプリント 配線板保持ュニット 4 2の移動により、 表面に平行で水平な移動平面内の任意の 位置へ移動させられる。プリント配線板保持ュニット 4 2は、図 2に示すように、 メインコンペャ 6 6を備えている。 このメインコンペャ 6 6は、 図示しない搬入 コンペャおよび搬出コンペャと共同してプリント配線板コンペャを構成し、 プリ ント配線板 4 0を電子部品装着システム 1 2内に搬入し、 所定の位置に位置決め して保持し、 装着作業終了後にシステム 1 2外へ搬出する。 プリント配線板保持 ユニット 4 2はさらに、 メインコンペャ 7 2に対して昇降し、 支持ピン 6 8等の 支持部材によりプリント配線板 4 0を下方から支持する配線板支持装置 7 0を備 えている。 メインコンペャ 6 6 , 配線板支持装置 7 0等によりプリント配線板'保 持ュニット 4 2が構成されているのである。 プリント配線板 4 0の表面には、 図示は省略するが、 複数、 本実施形態におい ては 2個の基準マークが設けられており、撮像装置たる基準マークカメラ 7 4 (図 1参照) によって撮像される。 図示の例では、 基準マークカメラ 7 4は、 C C D (電荷結合素子) とレンズ系とを備え、 被写体の二次元像を一挙に取得する面撮 像装置とされており、 静止して設けられている。 The Y-axis slide 60 supports the printed wiring board holding unit 42 from below, and the printed wiring board holding unit 42 holds the printed wiring board 40 in a horizontal posture from below. The surface of the printed wiring board 40 is horizontal, and the printed wiring board 40 is moved to an arbitrary position in a horizontal plane parallel to the surface by the movement of the printed wiring board holding unit 42. The printed wiring board holding unit 42 includes a main conveyor 66 as shown in FIG. The main conveyer 66 constitutes a printed wiring board conveyer in cooperation with a carry-in conveyer and a carry-out conveyer (not shown). Hold it and take it out of the system 12 after the installation work is completed. The printed wiring board holding unit 42 further includes a wiring board support device 70 that moves up and down with respect to the main conveyor 72 and supports the printed wiring board 40 from below with support members such as support pins 68. The printed wiring board 'holding unit 42 is constituted by the main conveyor 66, the wiring board support device 70 and the like. Although not shown, a plurality of, in this embodiment, two reference marks are provided on the surface of the printed wiring board 40, and an image is taken by a reference mark camera 74 (see FIG. 1) as an imaging device. Is done. In the illustrated example, the reference mark camera 74 is a surface imaging device that includes a CCD (charge-coupled device) and a lens system, and obtains a two-dimensional image of a subject at once. I have.
装着装置 1 6を図 3ないし図 7に基づいて説明する。 図 3において、 1 0 0は フレームであり、 前記ベース 1 0の上方に固定的に設けられている。 フレーム 1 0 0には回転軸 1 0 2が鉛直な回転軸線まわりに回転可能に保持されている。 回 転軸 1 0 2は、 駆動源たる間欠回転用モータ 1 0 4 (図 8参照) の回転が図示を 省略する間欠回転機構を介して伝達されることにより、 一定角度ずつ間欠回転さ せられる。  The mounting device 16 will be described with reference to FIGS. In FIG. 3, reference numeral 100 denotes a frame, which is fixedly provided above the base 10. A rotating shaft 102 is held by the frame 100 so as to be rotatable around a vertical rotating axis. The rotation of the rotating shaft 102 is intermittently rotated by a fixed angle by transmitting the rotation of an intermittent rotation motor 104 (see FIG. 8) as a driving source through an intermittent rotation mechanism not shown. .
上記回転軸 1 0 2の下端部には、 移動部材の一種である間欠回転体 1 0 6が固 定されている。 間欠回転体 1 0 6には、 回転軸 1 0 2の回転軸線を中心とする一 円周上に複数組の部品装着ュニット 1 0 8が等角度間隔に保持されている。 これ ら複数組の部品装着ュニット 1 0 8は、 間欠回転体 1 0 6の間欠回転につれて、 上記保持角度間隔に等しい角度ずつ旋回させられ、 その旋回軌跡上に設定された 部品受取位置, 部品保持姿勢検出位置, 部品姿勢修正位置, 部品装着位置, ノズ ル選択位置等を含む部品装着ュニット 1 0 8と同数の停止位置に順次停止させら れる。  An intermittent rotating body 106, which is a kind of moving member, is fixed to the lower end of the rotating shaft 102. In the intermittent rotator 106, a plurality of sets of component mounting units 108 are held at equal angular intervals on a circle around the rotation axis of the rotation shaft 102. The plurality of sets of component mounting units 108 are rotated by an angle equal to the above-mentioned holding angle interval with the intermittent rotation of the intermittent rotating body 106, and the component receiving position and the component holding set on the turning locus. The machine stops sequentially at the same number of stop positions as the component mounting unit 108, including the posture detection position, component posture correction position, component mounting position, and nozzle selection position.
フレーム 1 0 0の下面には、 図 3に示すように、 円筒カム 1 1 0が固定されて いる。 円筒カム 1 1 0の下部には、 外周面に開口するカム溝 (図示省略) が形成 され、 各部品装着ュニット 1 0 8の昇降部材 1 1 2に取り付けられた一対ずつの ローラ 1 1 4が回転可能に係合させられている。 このカム溝は高さが周方向にお いて漸変するものであり、 部品装着ユニット 1 0 8は、 前述のように旋回させら れるとき、 ローラ 1 1 4がカム溝内を移動することにより昇降させられる。 間欠 回転体 1 0 6の外周面には、 ガイドプロック 1 1 6が複数等角度間隔に固定され て案内装置を構成しており、 上記昇降部材 1 1 2の昇降を案内する。  As shown in FIG. 3, a cylindrical cam 110 is fixed to the lower surface of the frame 100. At the lower part of the cylindrical cam 110, a cam groove (not shown) is formed which opens to the outer peripheral surface, and a pair of rollers 114 attached to the elevating member 112 of each component mounting unit 108 is provided. It is rotatably engaged. The height of the cam groove changes gradually in the circumferential direction. When the component mounting unit 108 is rotated as described above, the rollers 114 move in the cam groove. Can be raised and lowered. A plurality of guide blocks 116 are fixed to the outer peripheral surface of the intermittent rotating body 106 at equal angular intervals to constitute a guide device, and guide the ascending and descending members 112 to rise and fall.
昇降部材 1 1 2の外面に、 支持部材たる筒状のスリーブ 1 1 8が固定され、 そ のスリーブ 1 1 8に、 ロッド 1 2 0が鉛直な回転軸線まわりに回転可能かつ軸方 向に相対移動不能に嵌合されている。 このロッド 1 2 0の下端部に、 取付部材 1 2 2を介して回転保持体 1 2 4が水平な回転軸線まわりに回転可能に保持され、 それに複数の吸着ノズル 1 2 6が等角度間隔で放射状に保持されている。 これら 吸着ノズル 1 2 6の一つが、 ノズル選択位置に設けられたノズル選択装置 (図示 省略) により回転保持体 1 2 4が回転させられることによって、 選択的に鉛直下 向きの使用位置に位置決めされる。 この使用位置においては、 吸着ノズル 1 2 6 の軸線が口ッド 1 2 0の軸線と一致する。 A cylindrical sleeve 1 18 serving as a support member is fixed to the outer surface of the elevating member 1 1 2, and the rod 1 20 is rotatable around the vertical axis of rotation on the sleeve 1 18. Are fitted so that they cannot move relative to each other. At the lower end of the rod 120, a rotation holder 124 is rotatably held around a horizontal rotation axis via a mounting member 122, and a plurality of suction nozzles 126 are arranged at equal angular intervals. It is held radially. One of the suction nozzles 126 is selectively positioned at a vertically downward use position by rotating the rotary holder 124 by a nozzle selection device (not shown) provided at the nozzle selection position. You. In this use position, the axis of the suction nozzle 126 coincides with the axis of the mouth 120.
複数の吸着ノズル 1 2 6はそれぞれ、 電子部品 1 3 0 (図 5参照) を負圧によ り吸着して保持するものであり、 図 6に 1つを代表的に示すように、 ノズル本体 1 3 2およびノズル本体 1 3 2に嵌合された吸着管 1 3 4を有する。 なお、 図示 の例では、 複数の吸着ノズル 1 2 6は種類は異なるが、 吸着管 1 3 4の長さはい ずれも同じにされている。 使用位置に位置決めされた吸着ノズル 1 2 6は、 図 4 に示すように、 ロッド 1 2 0等の内部に設けられた通路, スリーブ 1 1 8に固定 の制御弁たる方向切換弁 1 3 6等を介して負圧源の一種であるバキュームポンプ 1 3 8 (図 7参照) に接続されている。 これら通路が、 バキュームポンプ 1 3 8 と吸着ノズル 1 2 6とを接続する接続通路 1 3 7を構成し、 方向切換弁 1 3 6と 接続通路 1 3 7とバキュームポンプ 1 3 8とが負圧供給装置 1 3 9 (図 7参照) を構成している。  Each of the plurality of suction nozzles 126 sucks and holds the electronic component 130 (see FIG. 5) by negative pressure, and as shown in FIG. It has a suction tube 1 3 4 fitted to 1 3 2 and a nozzle body 1 32. In the illustrated example, the plurality of suction nozzles 126 are of different types, but the length of the suction tubes 134 is the same. As shown in Fig. 4, the suction nozzle 1 26 positioned at the position of use includes a passage provided inside the rod 120, etc., and a directional control valve 1 36, which is a control valve fixed to the sleeve 118, etc. Is connected to a vacuum pump 1338 (see FIG. 7), which is a kind of negative pressure source. These passages constitute a connection passage 13 7 that connects the vacuum pump 13 8 to the suction nozzle 12 6 .The directional control valve 13 6, the connection passage 13 7, and the vacuum pump 13 8 have a negative pressure. It constitutes a supply device 13 9 (see Fig. 7).
フレーム 1 0 0および円筒カム 1 1 0の部品受取位置と部品装着位置との近傍 部にはそれぞれ、 図 3ないし図 5に示すように部品装着ュ-ット 1 0 8を昇降さ せ、 吸着ノズル 1 2 6を軸方向に移動させて昇降させるノズル軸方向移動装置た るノズル昇降装置 1 4 0が設けられている。 ノズル昇降装置 1 4 0は、 昇降部材 1 4 2と昇降部材駆動装置 1 4 4とを有する。 昇降部材駆動装置 1 4 4は、 前記 間欠回転用モータ 1 0 4を駆動源として回転するカム 1 4 5と、 それに追従する カムフォロワ 1 4 6と、 カムフォロワ 1 4 6の運動を昇降部材 1 4 2に伝達する 運動伝達装置 1 4 8とを備えている。 昇降部材 1 4 2は、 円筒カム 1 1 0に固定 のガイドレール 1 5 0に沿って昇降可能である。 昇降部材 1 4 2には、 それが上 昇端位置にある状態で前記円筒カム 1 1 0のカム溝と連なる水平な案内溝 1 5 2 が形成されており、 この案内溝 1 5 2に前記ローラ 1 1 4が係合した状態で昇降 部材 1 4 2が昇降させられることにより、 部品装着ュニット 1 0 8および吸着ノ ズ レ 1 2 6が昇降させられる。 As shown in Fig. 3 to Fig. 5, the component mounting unit 108 is moved up and down in the vicinity of the component receiving position and the component mounting position of the frame 100 and the cylindrical cam 110, and suction is performed. A nozzle elevating device 140 is provided, which is a nozzle axial moving device that moves the nozzle 126 in the axial direction and moves it up and down. The nozzle lifting device 140 has a lifting member 144 and a lifting member driving device 144. The elevating member driving device 144 includes a cam 144 rotating by using the intermittent rotation motor 104 as a drive source, a cam follower 144 following the cam 144, and a movement of the cam follower 144 to elevate the member 144. And a motion transmission device 1 48. The elevating member 144 can move up and down along a guide rail 150 fixed to the cylindrical cam 110. The elevating member 14 2 has a horizontal guide groove 15 2 connected to the cam groove of the cylindrical cam 110 when the elevating member 14 is at the upper end position. Ascending and descending with rollers 1 1 4 engaged By moving the member 142 up and down, the component mounting unit 108 and the suction nozzles 126 are moved up and down.
前記方向切換弁 1 3 6を説明する。 方向切換弁 1 3 6は、 図 7に示すように、 ハウジング 1 6 0の弁孔 1 6 2に弁子たるスプール 1 6 4が相対移動可能に嵌合 され、 接続通路 1 3 7の切換を行うものである。 ハウジング 1 6 0には上から順 に負圧ポート 1 6 6, ノズルポート 1 6 8および大気圧ポート 1 7 0が形成され ている。 ノズルポート 1 6 8は、 前記口ッド 1 2 0等に形成された通路を介して 吸着ノズル 1 2 6に連通させられている。 負圧ポート 1 6 6は、 前記接続通路 1 3 7を介して前記バキュームポンプ 1 3 8に接続されている。 接続通路 1 3 7に は、 常閉の電磁開閉弁 1 6 9が設けられている。 大気圧ポート 1 7 0は常時大気 に連通させられている。  The direction switching valve 1 36 will be described. As shown in Fig. 7, the directional control valve 1336 has a spool 164 serving as a valve fitted in a valve hole 162 of the housing 160 so as to be relatively movable, and switches the connection passage 1337. Is what you do. A negative pressure port 166, a nozzle port 168 and an atmospheric pressure port 170 are formed in the housing 160 in order from the top. The nozzle port 168 is communicated with the suction nozzle 126 via a passage formed in the mouth 120 or the like. The negative pressure port 166 is connected to the vacuum pump 138 via the connection passage 137. A normally closed solenoid on-off valve 169 is provided in the connection passage 137. The atmospheric pressure port 170 is always in communication with the atmosphere.
スプール 1 6 4力 ハウジング 1 6 0に対して下降端位置へ移動した状態では、 方向切換弁 1 3 6が吸着ノズル 1 2 6をバキュームポンプ 1 3 8に連通させる負 圧供給状態となる。 この状態において、 スプール 1 6 4の一部がハウジング 1 6 0の下面から下方へ突出する。 また、 スプール 1 6 4がハウジング 1 6 0に対し て上昇端位置に移動した状態では、 方向切換弁 1 3 6が吸着ノズル 1 2 6を大気 に連通させる大気連通状態となる。 この状態では、 スプール 1 6 4の一部がハウ ジング 1 6 0の上面から突出する。  When the spool 16 4 is moved to the lower end position with respect to the housing 16 0, the directional control valve 13 6 is in a negative pressure supply state in which the suction nozzle 12 6 communicates with the vacuum pump 13 38. In this state, a part of the spool 164 projects downward from the lower surface of the housing 160. In addition, when the spool 164 is moved to the rising end position with respect to the housing 160, the directional switching valve 136 is in an atmosphere communication state in which the suction nozzle 126 is communicated with the atmosphere. In this state, a part of the spool 164 projects from the upper surface of the housing 160.
前記スリーブ 1 1 8に、 図 4に示すように、 方向切換弁 1 3 6の切換を補助す る切換補助部材たる切換ピン 1 7 4が設けられ、 フレーム 1 0 0の部品受取位置 に対応する部分には、 前記方向切換弁 1 3 6を切り換える切換レバー 1 7 6が静 止して設けられている。 これら切換ピン 1 7 4および切換レバー 1 7 6が部品受 取位置における弁切換装置 1 7 8を構成している。 一方、 フレーム 1 0 0の部品 装着位置に対応する部分には、 図 5に示すように、 方向切換弁 1 3 6を切り換え る弁切換装置 1 8 0と正圧供給装置 1 8 2の一部とが設けられている。 スリーブ 1 1 8に設けられた方向切換弁 1 3 6と、 静止状態に保たれた弁切換装置 1 8 0 とは、 方向切換弁 1 3 6がノズル昇降装置 1 4 0によって昇降させられることに より、 上下方向に相対移動させられる。  As shown in FIG. 4, the sleeve 118 is provided with a switching pin 174 serving as a switching assist member for assisting the switching of the directional switching valve 136, and corresponds to the component receiving position of the frame 100. A switching lever 176 for switching the direction switching valve 136 is provided at the portion in a stationary manner. The switching pin 174 and the switching lever 176 constitute a valve switching device 178 at the component receiving position. On the other hand, as shown in FIG. 5, a part corresponding to the component mounting position of the frame 100 includes a valve switching device 180 for switching the directional control valve 136 and a part of the positive pressure supply device 182. Are provided. The directional control valve 1 36 provided on the sleeve 1 18 and the valve switching device 180 kept at a standstill are such that the directional control valve 1 36 is raised and lowered by the nozzle lifting device 140. Thus, they can be relatively moved up and down.
プラケット 1 9 0のフレーム 1 0 0からの突出端部には、 図 7に示すように、 切換部材 1 9 2がブラケット 1 9 0に対して昇降可能に保持されている。 切換部 材 1 9 2は、 ブラケット 1 9 0に設けられたばね受け部 1 9 4との間に設けられ た弾性部材たる圧縮コイルスプリング 1 9 6により、 上方に、 すなわち方向切換 弁 1 3 6のスプール 1 6 4に接近する向きに付勢されている。 切換部材 1 9 2に は、 方向切換弁 1 3 6と対向する面である上面に開口し、 前述の大気圧ポート 1 7 0に対向して開口する正圧供給通路 1 9 8が設けられており、 継手部材 2 0 0 等を介して正圧源の一種であるエアポンプ 2 0 2に接続されている。 エアポンプ 2 0 2と継手部材 2 0 0との間には、 電磁制御弁たる常閉の電磁開閉弁 2 0 4が 設けられ、 正圧供給通路 1 9 8への正圧 (圧縮エア) の供給を許容, 遮断するよ うにされている。 方向切換弁 1 3 6が下降するとき、 切換部材 1 9 2が方向切換 弁 1 3 6を大気連通状態とするとともに、 正圧供給通路 1 9 8が大気圧ポート 1 7 0に接続され、 一定短時間の間正圧が供給されて吸着ノズル 1 2 6による電子 部品 1 3 0の解放が促進されるようになっているのである。 At the protruding end of the placket 190 from the frame 100, as shown in FIG. The switching member 192 is held so as to be able to move up and down with respect to the bracket 190. The switching member 1992 is moved upward by the compression coil spring 196 which is an elastic member provided between the spring receiving portion 194 provided on the bracket 190 and the direction switching valve 136. It is urged to approach the spool 16 4. The switching member 1992 is provided with a positive pressure supply passage 198 that opens on the upper surface, which is the surface facing the directional switching valve 1336, and opens to face the aforementioned atmospheric pressure port 170. It is connected to an air pump 202 which is a kind of positive pressure source via a joint member 200 and the like. A normally closed solenoid on-off valve 204 serving as an electromagnetic control valve is provided between the air pump 202 and the coupling member 200 to supply positive pressure (compressed air) to the positive pressure supply passage 198. Are allowed and cut off. When the directional control valve 136 descends, the switching member 192 makes the directional control valve 136 communicate with the atmosphere, and the positive pressure supply passage 198 is connected to the atmospheric pressure port 170 to be constant. The positive pressure is supplied for a short time, and the release of the electronic component 130 by the suction nozzle 126 is promoted.
本電子部品装着システム 1 2は、 図 8に示す制御装置 2 2 0によって制御され る。 制御装置 2 2 0は、 C P U 2 2 2 , R OM 2 2 4 , R AM 2 2 6およびそれ らを接続するバスを有するコンピュータ 2 2 8を主体としている。 パスには、 入 出力インタフヱース 2 3 0が接続され、 図示を省略する各種センサ等が接続され ている。 入出力インタフェース 2 3 0にはまた、 駆動回路 2 3 2を介して支持台 駆動用モータ 2 6等の各種ァクチユエータが接続されている。 支持台駆動用モー タ 2 6等はそれぞれ駆動源を構成し、 本実施形態ではいずれもサーボモータによ り構成されている。 なお、 図示は省略するが、 支持台駆動用モータ 2 6等の回転 位置はエンコーダにより検出され、 その検出結果に基づいてモータ等が制御され る。  The electronic component mounting system 12 is controlled by a control device 220 shown in FIG. The control device 220 is mainly composed of a computer 228 having a CPU 224, a ROM 224, a RAM 226 and a bus connecting them. An I / O interface 230 is connected to the path, and various sensors and the like, not shown, are connected to the path. Various actuators such as a support base drive motor 26 are also connected to the input / output interface 230 via a drive circuit 232. The support base driving motors 26 and the like each constitute a driving source, and in this embodiment, each is constituted by a servomotor. Although not shown, the rotational position of the support base driving motor 26 and the like is detected by an encoder, and the motor and the like are controlled based on the detection result.
入出力インタフェース 2 3 0にはさらに、 制御回路 2 3 4を介して前記基準マ ークカメラ 7 4および部品カメラ 2 3 6が接続されている。部品カメラ 2 3 6は、 部品保持姿勢検出位置に設けられており、 図示の例では、 基準マークカメラ 7 4 と同様に C C Dおよびレンズ系を備えて面撮像装置とされている。 これら駆動回 路 2 3 2, 制御回路 2 3 4およびコンピュータ 2 2 8が制御装置 2 2 0を構成し ている。 さらに R AM 2 2 6には、 電子部品 1 3 0をプリント配線板 4 0に装着 するためのプログラム等、 種々のプログラムおよびデータ等が記憶させられる。 前記部品供給装置 1 4のフィーダ支持台 2 2の X軸方向における一方の端に は、 図 1に示すように、 負圧検查器 2 5 0が着脱可能に取り付けられている。 こ の負圧検査器 2 5 0の詳細を図 9ないし図 1 3に示す。 負圧検査器 2 5 0の検査 器本体 2 5 2は、 前記フィーダ 2 4のフィーダ本体と同様に構成されており、 概 して細長い板状を成し、 下部にフィーダ支持台 2 2に係合するための係合部 2 5 4を備えている。 係合部 2 5 4は、 既に良く知られた構成であるので説明を省略 する。 なお、 負圧検查器 2 5 0は、 フィーダ支持台 2 2上に形成されたフィーダ 2 4を搭載するためのスロットに着脱可能であり、 いずれのスロットにでも搭載 可能である。 The reference mark camera 74 and the component camera 236 are further connected to the input / output interface 230 via a control circuit 234. The component camera 236 is provided at the component holding posture detection position, and in the illustrated example, is a surface imaging device including a CCD and a lens system similarly to the reference mark camera 74. The drive circuit 232, the control circuit 234 and the computer 228 constitute a control device 220. In addition, the electronic component 130 is mounted on the printed wiring board 40 in the RAM 226. For example, various programs, data, and the like, such as a program for executing the program, are stored. As shown in FIG. 1, a negative pressure detector 250 is detachably attached to one end of the feeder support 22 of the component supply device 14 in the X-axis direction. Details of the negative pressure tester 250 are shown in FIGS. 9 to 13. The tester main body 252 of the negative pressure tester 250 is configured in the same manner as the feeder main body of the feeder 24, has a generally elongated plate shape, and has a lower portion connected to the feeder support base 22. It is provided with an engagement portion 254 for engagement. The description of the engaging portion 254 is omitted because it has a well-known configuration. The negative pressure detector 250 can be attached to and detached from a slot for mounting the feeder 24 formed on the feeder support 22, and can be installed in any slot.
負圧検查器 2 5 0は、 負圧センサ 2 6 0 (図 1 1参照) と、 吸着ノズル 1 2 6 の吸引孔 2 6 1 (図 6参照) と連通可能な状態で開口する検出孔 2 6 2が複数形 成された検出孔形成部材 2 6 4と、 それら複数の検出孔 2 6 2のうちの一つを選 択的に上記負圧センサ 2 6 0に連通する作用位置に位置決めする検出孔切換装置 2 6 6 (図 9参照) とを有する。 検出孔形成部材 2 6 4は円盤状に形成され、 吸 着ノズル 1 2 6の吸着管 1 3 4の吸着面に接触する接触面たる上面 2 6 8に開口 する検出孔 2 6 2が複数、 図示の例では 1 6個形成されている。 各検出孔 2 6 2 の直径は、 部品吸着ノズル 1 2 6の吸引孔 2 6 1の内径と等しくされている。 検 出孔形成部材 2 6 4は、 検査器本体 2 5 2に対して水平な姿勢で鉛直軸線まわり に間欠回転可能に保持されている。  The negative pressure detector 250 is a detection hole that is open so that it can communicate with the negative pressure sensor 260 (see FIG. 11) and the suction hole 26 1 of the suction nozzle 1 26 (see FIG. 6). A detection hole forming member 264 formed with a plurality of 262 and one of the plurality of detection holes 262 is selectively positioned at an operation position communicating with the negative pressure sensor 260. And a detection hole switching device 26 (see FIG. 9). The detection hole forming member 2 6 4 is formed in a disk shape, and has a plurality of detection holes 2 6 2 opening at the upper surface 2 6 8 which is a contact surface which contacts the suction surface of the suction nozzle 1 3 4 of the suction nozzle 1 2 6 In the illustrated example, 16 are formed. The diameter of each detection hole 262 is set equal to the inner diameter of the suction hole 261 of the component suction nozzle 126. The detection hole forming member 264 is held intermittently rotatable about a vertical axis in a posture horizontal to the inspection device main body 252.
検出孔切換装置 2 6 6は、 検出孔形成部材 2 6 4を間欠回転させる回転駆動装 置 2 7 0を備える。 回転駆動装置 2 7 0は、 負圧検査器 2 5 0の外部に設けられ た駆動源の駆動力により検出孔形成部材 2 6 4を回転させる。 本実施形態におい ては、 回転駆動装置 2 7 0は、 前記フィーダ 2 4のテープ送り装置を駆動する駆 動部材たる駆動ローラ 2 7 2 (図 9参照) の駆動力により作動し、 検出孔形成部 材 2 6 4を回転させる。 駆動ローラ 2 7 2は、 装着装置 1 6に設けられ、 吸着ノ ズル 1 2 6が電子部品 1 3 0を吸着するとき、 吸着ノズル 1 2 6に同期して昇降 させられる。  The detection hole switching device 266 includes a rotation drive device 270 for intermittently rotating the detection hole forming member 264. The rotation driving device 270 rotates the detection hole forming member 264 by the driving force of a driving source provided outside the negative pressure inspection device 250. In the present embodiment, the rotary driving device 270 is operated by the driving force of a driving roller 272 (see FIG. 9) which is a driving member for driving the tape feeder of the feeder 24, and forms a detection hole. Rotate member 2 6 4. The drive roller 272 is provided in the mounting device 16 and is moved up and down in synchronization with the suction nozzle 126 when the suction nozzle 126 sucks the electronic component 130.
上記駆動ローラ 2 7 2により駆動される被駆動部材 2 7 4は、 ほぼ鉛直な姿勢 で設けられている。 被駆動部材 2 7 4は、 Y軸方向において、 駆動ローラ 2 7 2 と一致する位置に設けられ、 検査器本体 2 5 2に回動可能に取り付けられたレバ 一 2 7 6, 2 7 8により保持されている。 具体的には、 被駆動部材 2 7 4の上端 部がレバー 2 7 6の一方の端部に相対回動可能に連結されている。 レバー 2 7 6 は、 被駆動部材 2 7 4とは反対側の端部において検査器本体 2 5 2に回動可能に 支持されている。 レバー 2 7 8は互いに直交する向きに延び出す一対のアーム 2 8 0, 2 8 2を備え、 それらアームのうち、 回転中心からほぼ水平な方向に延び 出す第一アーム 2 8 0の自由端部に、 被駆動部材 2 7 4の下端部が連結されてい る。 レパー 2 7 6 , 第一アーム 2 8 0 , 被駆動部材 2 7 4および検查器本体 2 5 2の一部により、 平行四辺形リンクが構成されており、 被駆動部材 2 7 4は鉛直 な姿勢を保ってほぼ鉛直方向に昇降する。 第一アーム 2 8 0の自由端部近傍に弾 性部材たる引張コイルスプリング 2 8 4が係合させられ、 リンク 2 7 8を被駆動 部材 2 7 4を上昇させる向きに回動する向きに付勢している。 一方、 検査器本体 2 5 2にストッパ 2 8 6が設けられ、 上記レバー 2 7 6の被駆動部材 2 7 4を上 昇させる向きの回動限度を規定している。このことにより、被駆動部材 2 7 4は、 それの上昇端位置に位置決めされる。 The driven member 274 driven by the driving roller 272 has a substantially vertical posture. It is provided in. The driven member 274 is provided at a position coinciding with the drive roller 272 in the Y-axis direction, and is driven by levers 276 and 278 that are rotatably attached to the inspection device main body 252. Is held. Specifically, the upper end of the driven member 274 is connected to one end of the lever 276 so as to be relatively rotatable. The lever 276 is rotatably supported by the inspection device main body 252 at the end opposite to the driven member 274. The lever 278 is provided with a pair of arms 280 and 282 extending in directions orthogonal to each other, of which the free end of the first arm 280 extending in a substantially horizontal direction from the center of rotation. The lower end of the driven member 274 is connected thereto. A parallelogram link is formed by the repeller 2 76, the first arm 280, the driven member 2 74, and a part of the detector main body 2 52, and the driven member 2 7 4 It moves up and down almost vertically while maintaining its posture. A tension coil spring 284, which is an elastic member, is engaged near the free end of the first arm 280, and the link 278 is attached to a direction that rotates the driven member 274 in a direction to raise the driven member 274. I'm going. On the other hand, a stopper 2886 is provided on the inspection device main body 252, and defines a rotation limit of a direction in which the driven member 274 of the lever 2776 is lifted. As a result, the driven member 274 is positioned at its raised end position.
レバー 2 7 8の回動中心から鉛直下向きに他方のアームである第二アーム 2 8 2が延び出している。 第二アーム 2 8 2の自由端は、 被駆動部材 2 7 4の昇降に 伴ってレパー 2 7 8が回動させられれば、 ほぼ水平な方向に移動させられる。 こ の軸方向移動がコネクティングロッド 2 8 8により運動変換装置たるラチエツト 装置 2 9 0に伝達され、 間欠回転運動に変換される。 ラチエツト装置 2 9 0のラ チェットホイール 2 9 2は回転軸 2 9 8により、 前記検出孔形成部材 2 6 4と結 合されており、 一体的に回転する。 検出孔形成部材 2 6 4の外周面には位置決め 凹部 3 0 0力 前記検出孔 2 6 2の各々に対応して設けられており、 この位置決 め凹部 3 0 0に位置決め爪 3 0 4が弾性部材としての圧縮コイルスプリング 3 0 6により係合させられることによって、 検出孔形成部材 2 6 4の逆回転が防止さ れるとともに、 回転停止位置が正確に規定される。 それにより、 複数の検出孔 2 6 2の一つが正確に検出位置に位置決めされ、 通路 3 1 2を経て負圧センサ 2 6 0に連通させられる。 本負圧検査器 2 5 0は、 さらに、 負圧検出作業を開始するタイミングを指示す るための検出指示装置 3 2 0を備える。 検出指示装置 3 2 0は、 駆動ローラ 2 7 2により駆動される被駆動部材 3 2 2を備え、 この被駆動部材 3 2 2は、 検出孔 切換装置 2 6 6におけると同様に、 レバー 3 2 4 , 3 2 6および検査器本体 2 5 2と共同で平行四辺形リンクを構成している。 被駆動部材 3 2 2にはドッグ 3 2 8が固定的に設けられており、 被駆動部材 3 2 2の昇降に応じてフォトマイクロ センサ 3 3 0を O N , O F Fさせる。 A second arm 282, which is the other arm, extends vertically downward from the center of rotation of the lever 278. The free end of the second arm 282 can be moved in a substantially horizontal direction if the repeller 278 is rotated as the driven member 274 moves up and down. This axial movement is transmitted by a connecting rod 2888 to a ratchet apparatus 2900, which is a motion converting apparatus, and is converted into an intermittent rotary motion. The ratchet wheel 292 of the ratchet device 29 is connected to the detection hole forming member 264 by a rotating shaft 298, and rotates integrally. A positioning recess 300 is provided on the outer peripheral surface of the detection hole forming member 260 corresponding to each of the detection holes 260. A positioning claw 304 is provided in the positioning recess 300. By being engaged by the compression coil spring 360 as an elastic member, the reverse rotation of the detection hole forming member 264 is prevented, and the rotation stop position is accurately defined. Thereby, one of the plurality of detection holes 262 is accurately positioned at the detection position, and is communicated with the negative pressure sensor 260 through the passage 312. The present negative pressure tester 250 further includes a detection instruction device 320 for indicating the timing of starting the negative pressure detection work. The detection instruction device 320 includes a driven member 322 driven by a driving roller 272, and the driven member 322 includes a lever 322 as in the detection hole switching device 266. A parallelogram link is formed in cooperation with 4, 3 26 and the inspection device main body 2 52. A dog 328 is fixedly provided on the driven member 322, and the photomicro sensor 330 is turned on and off in accordance with the elevation of the driven member 322.
負圧検査器 2 5 0にはさらに、 方向切換弁 1 3 6を、 吸着ノズル 1 2 6を大気 に連通させる大気連通状態に戻す制御弁戻し装置 3 3 2が設けられている。 これ は、 方向切換弁 1 3 6を、 負圧検査のために一且負圧供給状態に切り換えた後、 部品装着ュニット 1 0 8を、 制御弁戻し装置としての弁切換装置 1 8 0が設けら れている部品装着位置まで旋回させることなく、 方向切換弁 1 3 6を大気連通状 態に戻し得るようにするためである。 制御弁戻し装置 3 3 2は、 検查器本体 2 5 2に回動可能に取り付けられた第一レバー 3 3 3と第二レバー 3 3 4とを備えて いる。 これら両レパー 3 3 3, 3 3 4は第一係合部としての U字形の切欠 3 3 5 と、 第二係合部としてのピン 3 3 6とにより、 互いに逆向きに回動するように係 合させられている。 また、 第一レバー 3 3 3が被駆動部材 3 2 2と連携 (図示の 例では長穴とピンとの係合により) させられており、 被駆動部材 3 2 2の昇降に つれて第一レバー 3 3 3が回動させられ、 第二レバー 3 3 4を回動させる。 第二 レバー 3 3 4は作用アーム 3 3 8を一体的に備えており、 被駆動部材 3 2 2が下 降端位置近傍まで下降したとき、 作用アーム 3 3 8の先端部が方向切換弁 1 3 6 のスプール 1 6 4の下端に係合し、 それを押し上げて、 方向切換弁 1 3 6を、 負 圧供給状態から大気連通状態に戻す。なお、作用アーム 3 3 8は、部品受取位置、 すなわち負圧検査位置になる部品装着ュニット 1 0 8ではなく、 負圧検査位置に 隣接する停止位置に停止している部品装着ュニット 1 0 8の方向切換弁 1 3 6に 作用して、 それを大気連通状態に戻す。  The negative pressure inspection device 250 is further provided with a control valve return device 332 for returning the direction switching valve 136 to an atmosphere communication state in which the suction nozzle 126 is communicated with the atmosphere. This is because, after switching the directional control valve 1336 to the negative pressure supply state for negative pressure inspection, the component mounting unit 108 is provided with a valve switching device 180 as a control valve return device. This is because the direction switching valve 1336 can be returned to the atmosphere communication state without turning to the component mounting position. The control valve return device 332 includes a first lever 333 and a second lever 334 that are rotatably attached to the detector main body 252. These two repellers 3 3 3 and 3 3 4 are rotated in opposite directions by a U-shaped notch 3 3 5 as a first engaging portion and a pin 3 3 6 as a second engaging portion. Have been engaged. In addition, the first lever 3 3 3 is linked with the driven member 3 2 2 (in the illustrated example, by the engagement of the elongated hole and the pin), and the first lever 3 2 3 3 3 is rotated, and the second lever 3 3 4 is rotated. The second lever 3 3 4 is integrally provided with an operation arm 3 38. When the driven member 3 2 2 is lowered to near the lower end position, the distal end of the operation arm 3 3 8 Engage the lower end of 36 spool 16 and push it up to return directional valve 1 36 from negative pressure supply to atmospheric communication. The action arm 338 is not located at the component receiving position, that is, the component mounting unit 108 at the negative pressure inspection position, but at the component mounting unit 108 stopped at the stop position adjacent to the negative pressure inspection position. Acts on directional valve 1 36 to return it to atmospheric communication.
本負圧検查器 2 5 0は、 図 1 4に示す負圧検出制御装置 3 4 0によつて制御さ れる。 負圧検出制御装置 3 4 0は、 内部電源 3 4 2を備え、 前記制御装置 2 2 0 と同様に C P U 2 2 2 , R OM 2 2 4 , R AM 2 2 6およびそれらを接続するバ スを備えるコンピュータ 2 2 8を主体として構成されている。 バスには、 入出力 インタフェース 2 3 0が接続されている。 入出力インタフェース 2 3 0には、 上 記フォトマイクロセンサ 3 3 0および前述の負圧センサ 2 6 0が接続されてい る。 フォトマイクロセンサ 3 3 0の出力信号の変化に応じて負圧センサ 2 6 0に よる負圧の検出が開始される。 例えば、 フォトマイクロセンサ 3 3 0の出力信号 が O F Fから O Nに変化するのに応じて、 コンピュータ 2 2 8による負圧センサ 2 6 0の出力値の読込みが開始されるのである。 入出力ィンタフェース 2 3 0は また、 本電子部品装着システム 1 2の制御装置 2 2 0に接続されている。 R AM 2 2 6には、 負圧センサ 2 6 0の検出値を取得し、 得られた検出値に基づいて吸 着ノズル 1 2 6の状態を推定するための検查プログラムや必要な標準値等のデー タ等が記憶されている。 The present negative pressure detector 250 is controlled by a negative pressure detection control device 340 shown in FIG. The negative pressure detection control device 340 includes an internal power supply 342, and similarly to the control device 220, the CPU 222, the ROM 224, the RAM 226, and the bus connecting them. It is mainly composed of a computer 228 equipped with a computer. The input / output interface 230 is connected to the bus. The input / output interface 230 is connected to the photomicrosensor 330 described above and the negative pressure sensor 260 described above. Negative pressure detection by the negative pressure sensor 260 is started according to a change in the output signal of the photomicrosensor 330. For example, as the output signal of the photomicrosensor 330 changes from OFF to ON, the computer 228 starts reading the output value of the negative pressure sensor 260. The input / output interface 230 is also connected to the control device 220 of the electronic component mounting system 12. The RAM 222 obtains the detection value of the negative pressure sensor 260, and based on the obtained detection value, a detection program and a necessary standard value for estimating the state of the suction nozzle 126. And other data are stored.
なお、 負圧検査器 2 5 0は、 常には制御装置 2 2 0に接続されておらず、 必要 に応じて制御装置 2 2 0に接続されるようにしてもよい。  The negative pressure tester 250 is not always connected to the control device 220, but may be connected to the control device 220 as necessary.
以下、作動を説明する。電子部品装着システム 1 2の部品装着作業については、 良く知られているので簡単に説明する。 プリント配線板 4 0が搬入されれば、 ま ず、 基準マークカメラ 7 4が、 それの撮像範囲内に基準マークが位置するように 位置決めされて、 基準マークとその周辺が撮像され、 プリント配線板 4 0の表面 に平行な方向の位置ずれが取得される。 その後装着装置 1 6による電子部品 1 3 0のプリント配線板 4 0への装着が行われる。 間欠 Hi転体 1 0 6が、 間欠回転装 置により間欠回転させられ、 複数個の部品装着ュニット 1 0 8が順に、 部品受取 位置等へ移動させられる。  Hereinafter, the operation will be described. The component mounting work of the electronic component mounting system 12 will be briefly described because it is well known. When the printed wiring board 40 is loaded, first, the fiducial mark camera 74 is positioned so that the fiducial mark is positioned within its imaging range, and the fiducial mark and its surroundings are imaged. The displacement in the direction parallel to the 40 surface is obtained. After that, the mounting device 16 mounts the electronic component 130 on the printed wiring board 40. The intermittent Hi rolling body 106 is intermittently rotated by the intermittent rotating device, and the plurality of component mounting units 108 are sequentially moved to the component receiving position and the like.
部品装着ュニット 1 0 8が部品受取位置に停止させられ、 電子部品 1 3 0を受 け取る際には、吸着ノズル 1 2 6がノズル昇降装置 1 4 0により下降させられる。 吸着ノズル 1 2 6が部品受取位置に移動するとき、 方向切換弁 1 3 6は大気連通 状態に切り換えられており、 部品装着ュニット 1 0 8が下降する際、 切換ピン 1 7 4が切換レバー 1 7 6に係合してその先端部を回動させる。 その結果、 切換レ バー 1 7 6がスプール 1 6 4に係合して、 スプール 1 6 4をハウジング 1 6 0に 対して下方へ移動させ、 方向切換弁 1 3 6を大気連通状態から負圧供給状態に切 り換える。 それにより、 吸着ノズル 1 2 6に負圧が供給され、 電子部品 1 3 0を 吸着する。 電子部品 1 3 0の吸着後、 吸着ノズル 1 2 6が上昇させられるととも に、 旋回を開始させられ、 切換ピン 1 7 4が切換レバー 1 7 6から外れれば、 切 換レバー 1 7 6は、 図 4に示す原位置に戻され、 次の部品装着ュニット 1 0 8の 切換ピン 1 7 4とスプール 1 6 4との間への進入に備えて待機する状態となる。 電子部品 1 3 0を保持した吸着ノズル 1 2 6は、 間欠回転体 1 0 6の間欠回転 により次の停止位置へ移動させられる。 吸着ノズル 1 2 6が部品保持姿勢検出位 置へ到達すれば、 吸着ノズル 1 2 6により保持された電子部品 1 3 0が部品カメ ラ 2 3 6により撮像される。 そして、 撮像データが画像処理され、 吸着ノズル 1 2 6による電子部品 1 3 0の保持位置誤差の演算等が行われる。 その後、 部品装 着ュニット 1 0 8が部品保持姿勢修正位置へ移動させられれば、 部品装着ュニッ ト 1 0 8が自身の軸線まわりに回転させられて、 回転位置誤差が修正される。 部 品装着ュニット 1 0 8が部品装着位置へ到達する少し手前から、 ノズル昇降装置 1 4 0により吸着ノズル 1 2 6が下降させられて、 電子部品 1 3 0をプリント配 線板 4 0に載置する。 The component mounting unit 108 is stopped at the component receiving position, and when the electronic component 130 is received, the suction nozzle 126 is lowered by the nozzle lifting device 140. When the suction nozzle 1 2 6 moves to the component receiving position, the direction switching valve 1 3 6 is switched to the air communication state, and when the component mounting unit 1 08 descends, the switching pin 1 7 4 switches the switching lever 1 Engage with 76 and rotate its tip. As a result, the switching lever 176 engages with the spool 164, moves the spool 164 downward with respect to the housing 160, and moves the directional switching valve 136 from the air communication state to the negative pressure. Switch to supply state. As a result, a negative pressure is supplied to the suction nozzles 126 and the electronic components 130 are discharged. Adsorb. After the suction of the electronic component 130, the suction nozzle 1 26 is raised and the swivel is started, and when the switching pin 17 4 is disengaged from the switching lever 17 6, the switching lever 17 6 is Then, it is returned to the original position shown in FIG. 4, and enters a standby state in preparation for entry of the next component mounting unit 108 between the switching pin 174 and the spool 164. The suction nozzle 126 holding the electronic component 130 is moved to the next stop position by the intermittent rotation of the intermittent rotating body 106. When the suction nozzle 126 reaches the component holding posture detection position, the electronic component 130 held by the suction nozzle 126 is imaged by the component camera 236. Then, the imaging data is subjected to image processing, and a calculation of a holding position error of the electronic component 130 by the suction nozzle 126 is performed. Thereafter, if the component mounting unit 108 is moved to the component holding posture correction position, the component mounting unit 108 is rotated around its own axis, and the rotational position error is corrected. Slightly before the component mounting unit 108 reaches the component mounting position, the suction nozzles 126 are lowered by the nozzle elevating device 140, and the electronic components 130 are mounted on the printed wiring board 40. Place.
その際、 吸着ノズル 1 2 6の下降に連動して、 方向切換弁 1 3 6が負圧供給状 態から大気連通状態に切り換えられる。 昇降部材 1 4 2が下降させられれば、 ス リーブ 1 1 8に固定の方向切換弁 1 3 6も下降させられ、 弁切換装置 1 8 0に接 近し、 切換部材 1 9 2がスプール 1 6 4に当接する。 昇降部材 1 4 2がさらに下 降させられれば、 スプール 1 6 4が切換部材 1 9 2により押され、 ハウジング 1 6 0内に押し込まれる。 このスプール 1 6 4のハウジング 1 6 0に対する移動に より、 方向切換弁 1 3 6が負圧供給状態から大気連通状態へ切り換えられる。 こ のように吸着ノズル 1 2 6が下降させられ、 電子部品 1 3 0がプリント配線板 4 0に載置されるとともに、 方向切換弁 1 3 6が負圧供給状態から大気連通状態に 切り換えられるとき、 正圧供給通路 1 7 0が正圧供給通路 1 9 8に接続され、 正 圧供給通路 1 7 0に圧縮エアが吹き込まれ、 吸着ノズル 1 2 6に圧縮エアが供給 されて、 電子部品 1 3 0の吸着ノズル 1 2 6からの解放が促進される。  At this time, the directional control valve 1336 is switched from the negative pressure supply state to the atmosphere communication state in conjunction with the lowering of the suction nozzles 126. When the elevating member 14 2 is lowered, the directional control valve 13 6 fixed to the sleeve 1 18 is also lowered, approaching the valve switching device 18 0, and the switching member 19 2 is moved to the spool 16. Contact 4 When the elevating member 14 2 is further lowered, the spool 16 4 is pushed by the switching member 19 2 and pushed into the housing 16. By the movement of the spool 164 with respect to the housing 160, the direction switching valve 136 is switched from the negative pressure supply state to the atmosphere communication state. In this way, the suction nozzle 1 26 is lowered, the electronic component 130 is placed on the printed wiring board 40, and the directional control valve 13 36 is switched from the negative pressure supply state to the atmosphere communication state. At this time, the positive pressure supply passage 170 is connected to the positive pressure supply passage 198, compressed air is blown into the positive pressure supply passage 170, compressed air is supplied to the suction nozzles 126, and electronic components Release of the 130 from the suction nozzles 126 is promoted.
次に負圧検査器 2 5 0の作動について図 1 5にフローチャートで示す検査プロ グラムに基づいて説明する。 本実施形態における負圧検査器 2 5 0による部品保 持性能の検查をするために吸着ノズル 1 2 6の負圧を検出する作業は、 始業時あ るいはノズル交換を含む段取り替え後の電子部品装着システム 1 2の起動時に実 施されるが、 作業中の一定時間ごと、 あるいはいずれかの吸着ノズル 1 2 6につ いて吸着ミスあるいは異常吸着が発生した場合に実行されるようにしてもよい。 作業者の入力により、 あるいは自動で検査の実行が指示されれば、 まず、 ステ ップ S 1 (以下、 単に S 1と称する。 他のステップについても同じ) において、 フィーダ支持台 2 2が移動させられて、 負圧検査器 2 5 0が部品供給位置近傍に 位置決めされる。 具体的には、 負圧検查器 2 5 0が、 それの被駆動部材 2 7 4が 駆動ローラ 2 7 2の真下に位置する検出孔切換位置に位置決めされるのである。 次に S 2において、 駆動ローラ 2 7 2が昇降させられて被駆動部材 2 7 4を昇降 させることにより検出孔 2 6 2が切り換えられる。 今回検査すべき吸着ノズル 1 2 6の吸着管 1 3 4の内径が予め指示されており、 それと同じ内径の検出孔 2 6 2が負圧センサ 2 6 0に連通する連通位置に位置決めされる。 なお、 本実施形態 においては、 検査の開始に先立って、 作業者により検出孔形成部材 2 6 4が予め 定められた原位置に位置決めされ、 その状態から被駆動部材 2 7 4が下降させら れた回数、 すなわち検出孔 2 6 2の変更が行われた回数がカウントされ、 その力 ゥント数により、 現在どの検出孔 2 6 2が選択されているか (作用位置に位置決 めされている力) が判るようになつている。 し力 し、 現在選択されている検出孔 2 5 2の特定を作業者の援助なしで行い得る選択検出孔特定装置を設けることも 可能である。 例えば、 負圧検査器 2 5 0に、 検出孔形成部材 2 6 4の回転位置を 検出する回転位置検出器、 あるいは回転原位置を検出する原位置検出器を設ける のである。 Next, the operation of the negative pressure tester 250 will be described based on the test program shown in the flowchart of FIG. The operation of detecting the negative pressure of the suction nozzles 126 in order to detect the component holding performance by the negative pressure inspection device 250 in the present embodiment is performed at the start of operation. Alternatively, this is performed when the electronic component mounting system 12 is started after the setup change including nozzle replacement, but at regular intervals during the work, or suction error or abnormal suction is detected for any of the suction nozzles 126. It may be executed when it occurs. If the execution of the inspection is instructed by an operator's input or automatically, first, in step S 1 (hereinafter simply referred to as S 1, the same applies to other steps), the feeder support 22 is moved. Then, the negative pressure inspection device 250 is positioned near the component supply position. Specifically, the negative pressure detector 250 is positioned at a detection hole switching position where its driven member 274 is located immediately below the driving roller 272. Next, in S2, the drive roller 272 is moved up and down to move the driven member 274 up and down, so that the detection hole 262 is switched. The inside diameter of the suction tube 1 34 of the suction nozzle 1 26 to be inspected this time is specified in advance, and the detection hole 26 2 having the same inside diameter is positioned at a communication position communicating with the negative pressure sensor 260. In this embodiment, prior to the start of the inspection, the detection hole forming member 264 is positioned at a predetermined original position by an operator, and the driven member 274 is lowered from that state. The number of times that the detection hole 262 has been changed, that is, the number of times that the detection hole 262 has been changed, is counted, and which detection hole 262 is currently selected based on the number of force points (the force that is positioned at the action position). You can see. However, it is also possible to provide a selective detection hole specifying device capable of specifying the currently selected detection hole 252 without the assistance of an operator. For example, the negative pressure tester 250 is provided with a rotational position detector for detecting the rotational position of the detection hole forming member 264 or an original position detector for detecting the original rotational position.
次に、 S 3において、 フィーダ支持台 2 2を移動させることにより負圧検査器 2 5 0が移動させられて、 被駆動部材 3 2 2が駆動ローラ 2 7 2の真下に位置す る負圧検出位置 (本実施形態においては部品供給位置と同じである) に位置決め される。 この状態で、 S 4に進んで、 部品受取位置に位置決めされている部品装 着ュニット 1 0 8力 部品供給位置に位置決めされているフィーダ 2 4から電子 部品 1 3 0を受け取る部品受取動作と同じ動作をさせられ、 それに連動して部品 装着ュニット 1 0 8の部品保持性能の検査が行われる。  Next, in S3, the negative pressure tester 250 is moved by moving the feeder support base 22 so that the driven member 32 2 is moved under the negative pressure located immediately below the drive roller 27 2. It is positioned at the detection position (the same as the component supply position in the present embodiment). In this state, proceeding to S4, the component mounting unit 108 positioned at the component receiving position is the same as the component receiving operation of receiving the electronic component 130 from the feeder 24 positioned at the component supply position. The component holding unit 108 is operated, and the component holding unit 108 is inspected for the component holding performance.
上記動作時には、 駆動ローラ 2 7 2が昇降させられ、 それに伴ってドッグ 3 2 8が昇降させられてフォトマイクロセンサ 3 3 0を遮光する。 このフォトマイク 口センサ 3 3 0の遮光タイミングを、 ドッグ 3 2 8の下降タイミング、 すなわち 吸着ノズル 1 2 6の下降タイミングとして検出し、 負圧センサ 2 6 0の検出値の 読込みが開始 (これを測定開始と称する) される。 具体的には、 測定開始時点か ら、 予め設定された互いに異なる複数の設定時間が経過する毎に、 負圧値が読み 込まれる。 本実施形態においては、 図 1 6に示すように、 1回の検查について 4 つの設定時間が設定され、 各設定時間が経過する毎に負圧値が検出される。 この 負圧検出作業は、 装着装置 1 6の全ての部品装着ュニット 1 0 8の吸着ノズル 1 2 6のうち同径のものについて連続的に行われる。 また、 負圧検出のために、 負 圧供給状態とされた方向切換弁 1 3 6は前記制御弁戻し装置 3 3 2により大気連 通状態に戻される。 In the above operation, the driving roller 27 is raised and lowered, and accordingly, the dog 3 2 8 is raised and lowered to shield the photomicrosensor 330 from light. The light-blocking timing of the photo microphone mouth sensor 330 is detected as the falling timing of the dog 328, that is, the falling timing of the suction nozzle 126, and the reading of the detection value of the negative pressure sensor 260 is started. Measurement is called). Specifically, the negative pressure value is read every time a plurality of different preset times have elapsed from the start of the measurement. In the present embodiment, as shown in FIG. 16, four set times are set for one detection, and a negative pressure value is detected each time the set time elapses. This negative pressure detecting operation is continuously performed on the suction nozzles 126 of all the component mounting units 108 of the mounting device 16 having the same diameter. In addition, to detect the negative pressure, the directional control valve 1 36 set to the negative pressure supply state is returned to the atmosphere communication state by the control valve return device 332.
次に S 5において、 今回部品保持性能を検査すべき全ての吸着ノズル 1 2 6に ついて負圧の検出が終了したか否かが問われる。 例えば、 複数種類の吸着ノズル 1 2 6について検査する場合であって、 負圧検出が終了していない吸着ノズルが 存在する場合には、 S 5の判定が N Oとなり、 本プログラムの 1回の実行が終了 する。 検査すべき全ての吸着ノズル 1 2 6について検査が終了するまで、 S 1な いし S 5が繰り返し実行されるのである。 これに対して、 全ての吸着ノズル 1 2 6について負圧検出が終了した場合には、 S 5の判定が Y E Sとなり S 6に進む。  Next, in S5, it is asked whether negative pressure detection has been completed for all the suction nozzles 126 whose component holding performance is to be inspected this time. For example, when inspecting a plurality of types of suction nozzles 1 26, if there is a suction nozzle for which negative pressure detection has not been completed, the determination in S5 is NO, and this program is executed once. Ends. Until the inspection is completed for all the suction nozzles 1 26 to be inspected, S 1 or S 5 is repeatedly executed. On the other hand, when the negative pressure detection is completed for all the suction nozzles 1 26, the determination in S5 becomes Y E S and the process proceeds to S6.
S 6において、 各吸着ノズル 1 2 6の負圧の検出値と予め設定された負圧値と が比較される。 具体的には、 負圧検出制御装置 3 4 0の R AM 2 2 6には、 各種 の吸着ノズル 1 2 6について、 正常な場合に検出されるべき標準的な負圧値 (以 下、 標準値と称する) が設定時間ごとに予め記憶されている。 図 1 6に示すよう に、 吸着ノズル 1 2 6が正常な場合には、 比較的短い時間で高い負圧が得られ、 その後比較的緩やかに最終的に到達すべき値に向かつて負圧が増大する。 このよ うな知見に基づいて、 上記標準値が設定されているのであり、 本実施形態におい ては、 標準値は幅を持たせて設定されている。 検出値と標準値とを比較すること により、各測定点において、検出値が標準値の範囲内にあるか否かが判定される。 次 S 6の比較の結果に基づいて、 S 7において、 図 1 7に示す良否判定テープ ルに従って、 吸着ノズル 1 2 6の良否判定および異常原因の推定が行われる。 図 1 7において、 〇は検出値が標準値の範囲内にある場合を示し、 Xは検出値が標 準値の範囲外にある場合を示す。 図示の例では、 全ての測定点において、 検出値 が標準値の範囲内にある場合 (図 1 7に (ィ) で示す場合) に吸着ノズル 1 2 6 が正常であると判定される。 それに対して、 4つの測定点のうち検出値が標準値 の範囲内にないものが少なくとも 1つある場合には、 何らかの部品保持性能不良 (異常) があると判定される。 In S6, the detected negative pressure value of each of the suction nozzles 126 is compared with a preset negative pressure value. Specifically, the ram 226 of the negative pressure detection control device 340 includes a standard negative pressure value that should be detected under normal conditions for the various suction nozzles 126 (hereinafter referred to as “standard”). Is stored in advance for each set time. As shown in Fig. 16, when the suction nozzle 126 is normal, a high negative pressure can be obtained in a relatively short time, and then the pressure gradually decreases relatively slowly toward the value to be finally reached. Increase. The standard value is set based on such knowledge, and in the present embodiment, the standard value is set with a certain width. By comparing the detected value with the standard value, it is determined whether or not the detected value is within the range of the standard value at each measurement point. Next, based on the result of the comparison in S6, in S7, the quality of the suction nozzles 126 and the cause of the abnormality are estimated in accordance with the quality determination table shown in FIG. Figure In 17, 〇 indicates the case where the detected value is within the range of the standard value, and X indicates the case where the detected value is outside the range of the standard value. In the illustrated example, at all the measurement points, when the detected value is within the standard value range (indicated by (a) in FIG. 17), it is determined that the suction nozzles 126 are normal. On the other hand, if there is at least one of the four measurement points whose detected value is not in the range of the standard value, it is determined that there is some defective component holding performance (abnormal).
何らかの異常があると判定された場合に、 検出値の変化に基づいて異常原因が 推定される。 例えば、 吸着ノズル 1 2 6に詰まりが生じている場合には、 吸引で きる量が制限されるため、 最終的には、 到達すべき値が得られるが、 そこに到達 するまでに時間がかかる傾向がある。 一方、 吸着ノズル 1 2 6の吸着管 1 3 4の 変形や、 破損によりいずれかの部位に漏れが生じている場合には、 一定時間が経 過しても到達すべき値が得られない。 このような知見に基づいて、 本実施形態に おいては、 何らかの異常があると判定された場合であって、 少なくとも第一測定 点における検出値が標準値の範囲から外れていて、 第三およぴ第四測定点におけ る検出値が標準値の範囲内にある場合 (図 1 7に (口), (ハ) で示す場合) に は、 吸着ノズル 1 2 6に詰まりが生じていると推定される。 また、 第一ないし第 三測定点における検出値が標準値の範囲から外れていて、 第四測定点における検 出値のみが正常である場合 (図 1 7に (二) で示す場合) には、 吸着ノズル 1 2 6に詰まりまたは漏れが生じていると推定される。 さらに、 全ての測定点におい て検出値が異常である場合 (図に (ホ) で示す場合) には、 吸着ノズル 1 2 6に 漏れが生じていると推定される。  If it is determined that there is any abnormality, the cause of the abnormality is estimated based on the change in the detected value. For example, if the suction nozzles 1 26 are clogged, the amount that can be suctioned is limited, so the value to be reached is finally obtained, but it takes time to reach there Tend. On the other hand, if any part is leaked due to deformation or breakage of the suction tube 134 of the suction nozzle 126, a value to be reached cannot be obtained even after a certain period of time. Based on such knowledge, in the present embodiment, when it is determined that there is some abnormality, at least the detection value at the first measurement point is out of the range of the standard value, and If the detected value at the fourth measurement point is within the standard value range (indicated by (mouth) and (c) in Fig. 17), the suction nozzle 1 26 is clogged. It is estimated to be. If the detected values at the first to third measurement points are out of the range of the standard values and only the detected values at the fourth measurement point are normal (indicated by (2) in Fig. 17), It is estimated that the suction nozzles 126 are clogged or leaking. Furthermore, if the detected values are abnormal at all the measurement points (indicated by (e) in the figure), it is estimated that the suction nozzles 126 have leaked.
次に、 それら吸着ノズル 1 2 6それぞれの良否判定に基づいて、 負圧センサ 2 6 0およぴ負圧供給装置 1 3 9の良否判定が行われる。 異常があると判定された 吸着ノズル 1 2 6の数が比較的多い場合には、 個々の吸着ノズル 1 2 6が異常で あるよりも、負圧センサ 2 6 0や負圧供給装置 1 3 9に異常がある可能性が高レ、。 そこで、 例えば、 今回 1 2個の吸着ノズル 1 2 6について負圧検査が行われたと 仮定すると、 S 8において、 全ての吸着ノズル 1 2 6のうち、 詰まりや漏れなど により異常状態であると判定された不良吸着ノズルの数 nが、 予め設定された設 定値 N ,より小さいか否かが問われる。 設定値 N!は、 本実施形態においては、 吸着ノズル 1 2 6の全個体数である 1 2に設定されているが、 1 2未満の値でも よく、 例えば、 1 0ないし 1 1に設定されてもよい。 また、 負圧検査が行われた 吸着ノズル 1 2 6の数が 1 2よりも多い場合には、 その吸着ノズル 1 2 6の総数 に相当する数でもよく、 例えば 8 0 %以上の数に設定されてもよい。 Next, the pass / fail judgment of the negative pressure sensor 260 and the negative pressure supply device 139 is performed based on the pass / fail judgment of each of the suction nozzles 126. If the number of suction nozzles 126 determined to be abnormal is relatively large, the negative pressure sensor 260 or negative pressure supply device 133 There is a high possibility that there is an abnormality. Therefore, for example, if it is assumed that a negative pressure test was performed on 12 suction nozzles 126 this time, it is determined in S8 that all of the suction nozzles 126 are in an abnormal state due to clogging or leakage. It is asked whether the number n of the defective suction nozzles is smaller than a preset value N, which is set in advance. Set value N! Is, in the present embodiment, Although set to 12 which is the total number of the suction nozzles 126, it may be set to a value less than 12, for example, 10 to 11 may be set. If the number of suction nozzles 126 subjected to the negative pressure test is larger than 12, the number may be equivalent to the total number of the suction nozzles 126, for example, set to a value of 80% or more. May be done.
今回の検査において不良であると判定された不良吸着ノズルの数 nが 1 2であ ると仮定すると、 S 8の判定が N Oとなり、 S 9に進んで、 負圧センサ 2 6 0お よび負圧供給装置 1 3 9の少なくとも一方が異常であると推定され、 その旨が作 業者に報知される。  Assuming that the number n of the defective suction nozzles determined to be defective in this inspection is 1 2, the determination of S 8 is NO, the process proceeds to S 9, and the negative pressure sensor 260 It is estimated that at least one of the pressure supply devices 139 is abnormal, and the operator is notified to that effect.
それに対して、 不良吸着ノズルの数 nが設定値 N , ( = 1 2 ) より小さい場合 には、 S 8の判定が Y E Sとなり、 S 1 0に進んで、 不良吸着ノズルの数 nが設 定値 N 2以下であるか否かが問われる。 設定値 N 2は上述の設定値 N , より小さ い数に設定されており、 本実施形態においては 1とされている。 不良吸着ノズル の数 nが設定値 N 2 (= 1 ) 以下である場合には、 S 1 0の判定が Y E Sとなり S 1 1に進んで、個々の吸着ノズル 1 2 6について異常が生じていると推定され、 異常が生じた吸着ノズル 1 2 6を示す識別記号と S 7において推定された異常の 原因とが作業者に報知される。 On the other hand, if the number n of the defective suction nozzles is smaller than the set value N, (= 1 2), the determination of S8 becomes YES, the process proceeds to S10, and the number n of the defective suction nozzles becomes the set value. It is asked whether it is N 2 or less. The set value N2 is set to a smaller number than the above set value N, and is set to 1 in the present embodiment. If the number n of defective suction nozzles is equal to or less than the set value N 2 (= 1), the determination of S 10 is YES, the process proceeds to S 11, and an abnormality has occurred in each of the suction nozzles 1 26. The worker is notified of the identification symbol indicating the suction nozzle 126 in which the abnormality has occurred and the cause of the abnormality estimated in S7.
それに対して、 不良吸着ノズルの数 nが設定値 N 2 ( = 1 ) より大きい場合に は、 S 1 2に進んで、 その旨が作業者に報知される。 このような場合には、 吸着 ノズル 1 2 6に異常がある場合と、 負圧センサ 2 6 0または負圧供給装置に異常 がある場合との両方が考えられるので、 他の情報等に基づいて作業者が判断する ようにされている。 なお、 S 1 2において作業者に判断を委ねる代わりに自動的 に推定を行うフローを作成して利用してもよい。 以上で本プログラムの 1回の実 行が終了する。 On the other hand, when the number n of the defective suction nozzles is larger than the set value N 2 (= 1), the process proceeds to S 12 and the operator is notified of that. In such a case, both the case where the suction nozzle 126 is abnormal and the case where the negative pressure sensor 260 or the negative pressure supply device is abnormal can be considered. Workers are to make decisions. Instead of leaving the judgment to the operator in S12, a flow for automatically estimating the flow may be created and used. This completes one execution of this program.
上記負圧検出作業により吸着ノズル 1 2 6に異常が生じていると推定され、 そ の旨が作業者に伝達された場合には、 作業者は、 その情報に基づいて、 吸着ノズ ル 1 2 6の清掃、 または交換作業を行う。 なお、 交換や清掃作業が自動的に実行 されるようにしてもよい。 例えば、 吸着ノズル 1 2 6に前記電子部品 1 3 0の解 放促進時よりも強い正圧をかけて埃等を吹き飛ばすようにしてもよく、 自動清掃 装置によりノズル内部を機械的に清掃するようにしてもよい。 後者は、 前者によ る吹飛ばし効果が不十分である場合に実行されるようにしてもよい。 When it is estimated that the suction nozzle 1 26 has an abnormality due to the negative pressure detection work described above, and the fact is communicated to the worker, the worker performs the suction nozzle 1 2 6 based on the information. Perform 6 cleaning or replacement. The replacement and the cleaning may be automatically performed. For example, dust may be blown off by applying a higher positive pressure to the suction nozzle 126 than when promoting the release of the electronic component 130, and the inside of the nozzle may be mechanically cleaned by an automatic cleaning device. It may be. The latter depends on the former May be executed when the blowing effect is insufficient.
以上の説明から明らかなように、 本実施形態においては、 負圧検出制御装置 3 4 0のコンピュータ 2 2 8であって、 検査プログラムの S 6を実行する部分が比 較部を構成し、 S 7を実行する部分が第一原因推定部を構成し、 S 8ないし S 1 2を実行する部分が第二原因推定部を構成している。  As is clear from the above description, in the present embodiment, in the computer 228 of the negative pressure detection control device 340, the part that executes S6 of the inspection program constitutes the comparison unit, The part executing step 7 constitutes a first cause estimating unit, and the part executing steps S8 to S12 constitutes a second cause estimating unit.
上記実施形態においては、 正圧供給装置 1 8 2の一部が弁切換装置 1 8 0に設 けられ、 別の一部が方向切換弁 1 3 6に設けられていたが、 方向切換弁おょぴ弁 切換装置と正圧供給装置とは別々に設けられてもよい。 その一実施形態を図 1 8 に示す。 なお、 上記実施形態における作用と同じ作用を為す構成要素等には、 同 一の符号を付して説明を省略する。 本実施形態の装着装置 4 0 0においては、 図 1 8に概略的に示すように、 吸着ノズル 1 2 6は、 方向切換弁 4 0 2, 4 0 4の 切換えにより、 バキュームポンプ 1 3 8とエアポンプ 2 0 2と大気とに選択的に 連通させられる。  In the above embodiment, a part of the positive pressure supply device 182 is provided in the valve switching device 180 and another part is provided in the directional switching valve 136. The valve switching device and the positive pressure supply device may be provided separately. One embodiment is shown in FIG. Note that components and the like that perform the same operations as those in the above embodiment are given the same reference numerals, and descriptions thereof will be omitted. In the mounting device 400 of the present embodiment, as schematically shown in FIG. 18, the suction nozzles 126 are connected to the vacuum pumps 1338 by switching the direction switching valves 402, 404. The air pump 202 is selectively communicated with the atmosphere.
方向切換弁 4 0 2は、 吸着ノズル 1 2 6とバキュームポンプ 1 3 8とを接続す る接続通路 4 0 6に設けられ、 吸着ノズル 1 2 6およびバキュームポンプ 1 3 8 の他、 方向切換弁 4 0 4が接続されている。 方向切換弁 4 0 4は、 方向切換弁 4 0 2の他、エアポンプ 2 0 2および大気に接続されている。方向切換弁 4 0 2は、 弁子の移動により、 吸着ノズル 1 2 6をバキュームポンプ 1 3 8に連通させる負 圧供給状態と、 方向切換弁 4 0 4を介して大気あるいはエアポンプ 2 0 2に連通 させる状態とに切り換えられる。 この弁子は、 方向切換弁 4 0 2を上記 2つの状 態に切り換える位置に移動させられれば、 その位置に維持されるように構成され ている。  The directional control valve 402 is provided in a connection passage 406 connecting the suction nozzle 126 and the vacuum pump 138, and the directional control valve is provided in addition to the suction nozzle 126 and the vacuum pump 138. 404 is connected. The direction switching valve 404 is connected to the air pump 202 and the atmosphere in addition to the direction switching valve 402. The directional control valve 402 is connected to the negative pressure supply state that allows the suction nozzles 126 to communicate with the vacuum pump 138 by moving the valve, and to the atmosphere or the air pump 202 via the directional control valve 404. It can be switched to the communication state. This valve is configured to be maintained at the position where the direction switching valve 402 is moved to the position for switching between the above two states.
方向切換弁 4 0 4は、 吸着ノズル 1 2 6をエアポンプ 2 0 2に連通させ、 正圧 を供給する正圧供給状態と、大気に連通させる大気連通状態とに切り換えられる。 方向切換弁 4 0 4の弁子は、 ばねにより、 方向切換弁 4 0 4を大気連通状態に切 り換える向きに付勢されている。 方向切換弁 4 0 2, 4 0 4を切り換える弁切換 装置 4 0 8, 4 1 0は、 二点鎖線で示す同じ部材に設けられ、 ノズル昇降装置 1 4 0による吸着ノズル 1 2 6の昇降に連動して作動する。  The direction switching valve 404 is switched between a positive pressure supply state in which the suction nozzles 126 are connected to the air pump 202 to supply a positive pressure, and an atmosphere communication state in which the direction is connected to the atmosphere. The valve element of the directional control valve 404 is urged by a spring in a direction to switch the directional control valve 404 to the atmosphere communication state. The valve switching devices 408, 410 for switching the direction switching valves 402, 404 are provided on the same member indicated by a two-dot chain line, and are used for raising and lowering the suction nozzles 126 by the nozzle lifting device 140. It works in conjunction.
以上の各実施形態において、 吸着ノズルは、 ノズル旋回装置により一軸線周り に旋回させられて部品受取位置および部品装着位置へ移動させられ、 電子部品の 受け取りと装着とを行うようにされていたが、 部品保持装置移動装置ないし部品 装着ュニット移動装置たる X Y口ボットにより、 回路基板の表面に平行な任意の 位置に移動させられて、電子部品の受け取りおよび装着を行うようにしてもよい。 なお、 この種の電子部品装着システムは、 例えば、 特許第 2 8 2 4 3 7 8号公報 等において既に知られているので、 簡単に説明する。 In each of the above embodiments, the suction nozzle is rotated around one axis by the nozzle turning device. It was moved to the component receiving position and component mounting position to receive and mount electronic components.However, the XY port bot, which is a component holding device moving device or component mounting unit moving device, The electronic component may be moved to an arbitrary position parallel to the surface of the circuit board to receive and mount the electronic component. An electronic component mounting system of this type is already known in, for example, Japanese Patent No. 2824378, and will be briefly described.
図 1 9において符号 5 0 0は電子部品装着システム 5 0 2のベースを表す。 ベ ース 5 0 0上に、 部品供給装置 5 0 4 , 5 0 6, 装着装置 5 0 8, プリント配線 板保持装置 5 1 0および配線板コンペャ 5 1 2等が設けられ、 電子部品装着シス テム 5 0 2が構成されている。 プリント配線板保持装置 5 1 0は、 前記プリント 配線板保持ュニット 4 2のプリント配線板支持装置 7 0と同様の装置と配線板コ ンべャ 5 1 2の一部とにより構成され、 プリント配線板 4 0を水平に保持する。 配線板コンペャ 5 1 2の搬送方向を X軸方向とし、 水平面内において X軸方向と 直交する方向を Y軸方向と称する。  In FIG. 19, reference numeral 500 denotes the base of the electronic component mounting system 502. On the base 500, there are provided a component supply device 504, 506, a mounting device 508, a printed wiring board holding device 510, a wiring board conveyor 511, etc., and an electronic component mounting system. The system 502 is configured. The printed wiring board holding device 5 10 is constituted by a device similar to the printed wiring board support device 70 of the printed wiring board holding unit 42 and a part of the wiring board conveyor 5 12, Hold board 40 horizontally. The transport direction of the circuit board conveyor 512 is referred to as an X-axis direction, and a direction orthogonal to the X-axis direction in a horizontal plane is referred to as a Y-axis direction.
部品供給装置 5 0 4, 5 0 6は、 配線板コンペャ 5 1 2の Y軸方向の両側にそ れぞれ設けられている。 一方の部品供給装置 5 0 6は、 フィーダ型部品供給装置 であって、 位置を固定して設けられている。 他方の部品供給装置 5 0 4は、 トレ ィ型部品供給装置とされ、 位置を固定して設けられている。  The component supply devices 504 and 506 are provided on both sides in the Y-axis direction of the wiring board conveyor 512, respectively. One component supply device 506 is a feeder-type component supply device, and is provided in a fixed position. The other component supply device 504 is a tray-type component supply device, and is provided at a fixed position.
装着装置 5 0 8は、 吸着ノズルを保持するノズルホルダを含む部品保持装置 5 1 4および X Yロボット 5 1 6を備えている。 X Yロボット 5 1 6は、 X軸スラ イド 5 1 8、 X軸スライド駆動用モータ 5 2 0を駆動源とする X軸スライド移動 装置 5 2 2、 X軸スライ ド 5 1 8上に設けられた Y軸スライ ド 5 2 4、 Y軸スラ ィド駆動用モータ 5 2 6を駆動源とする Y軸スライド移動装置 5 2 8を含む。 部 品保持装置 5 1 4は、 Y軸スライ ド 5 2 4に取り付けられ、 X Y座標面上の任意 の位置へ移動可能な可動部材に、 鉛直軸線まわりに回転可能に、 かつ、 軸方向に 昇降可能に設けられており、 可動部材に設けられた昇降装置 5 3 0により昇降さ せられて、 部品供給装置 5 0 4 , 5 0 6から電子部品 1 3 0を受け取り、 プリン ト配線板 4 0に装着する。昇降装置 5 3 0は、サーボモータを駆動源としている。 部品保持装置 5 1 4の吸着ノズルは、 前記吸着ノズル 1 2 6と同様に、 負圧によ り電子部品 1 3 0を吸着し、 正圧の供給により解放する。 The mounting device 508 includes a component holding device 514 including a nozzle holder for holding a suction nozzle, and an XY robot 516. The XY robot 516 is provided on the X-axis slide 518 and the X-axis slide 518, which are driven by the X-axis slide 518 and the X-axis slide drive motor 520. Includes Y-axis slide 524 and Y-axis slide moving device 528 using Y-axis slide drive motor 526 as a drive source. The component holding device 514 is attached to the Y-axis slide 524, and is a movable member that can move to any position on the XY coordinate plane.It can rotate around the vertical axis and move up and down in the axial direction. The electronic component 130 is lifted and lowered by the lifting device 530 provided on the movable member, and receives the electronic components 130 from the component supply devices 504 and 506, and the printed wiring board 40 is provided. Attach to The lifting device 530 uses a servomotor as a drive source. The suction nozzle of the component holding device 5 14 is operated by a negative pressure similarly to the suction nozzle 1 26. The electronic component 130 is sucked and released by the supply of positive pressure.
電子部品装着システム 5 0 2は、 図 2 0に示すように、 前記実施形態における 方向切換弁 1 3 6 , 弁切換装置 1 7 8 , 1 8 0の代わりに、 電磁方向切換弁 5 4 0 , 5 4 2から成る方向切換弁装置 (複数の電磁開閉弁の組合わせから成るもの とすることもできる) を備えている。 電磁方向切換弁 5 4 0 , 5 4 2への切換指 令信号は、 部品保持装置 5 1 4を昇降させる昇降装置 5 3 0の作動と同期して出 される。 図 2 0には、 本発明と関連が深い電磁方向切換弁 5 4 0への負圧供給開 始のための切換指令信号の出力に関連する部分を示すが、 コンピュータ 5 4 4か ら昇降装置 5 3 0への作動開始指令信号が遅延回路 5 4 6により一定時間遅延さ せられた信号が、 電磁方向切換弁 5 4 0への切換指令信号とされるのである。 ま た、 フィーダ型の部品供給装置 5 0 6には、 フィーダ 2 4の代わりに前記実施形 態における負圧検查器 2 5 0と類似の負圧検查器 5 4 8 (図 1 9参照) が取り付 け可能である。 ただし、 負圧検査器 5 4 8は、 検出孔切換装置の駆動源としてェ ァシリンダ 5 5 0を内蔵している一方、 検出指示装置 3 2 0に相当するものは備 えていない。 負圧センサ 2 6 0の検出値の読込開始は、 部品保持装置 5 1 4の方 向切換弁装置への切換指令信号を利用して行われる。 方向切換弁装置を負圧供給 状態に切り換えるための電磁方向切換弁 5 4 0への切換指令信号がコンピュータ 5 4 4に供給され、 それに応じてコンピュータ 5 4 4による負圧センサ 2 6 0の 検出値の読込みが開始されるようになっているのである。  As shown in FIG. 20, the electronic component mounting system 502 includes an electromagnetic directional switching valve 540, instead of the directional switching valve 136 and the valve switching device 178, 180 in the embodiment. A directional switching valve device composed of 542 (which may be a combination of a plurality of electromagnetic on-off valves) is provided. The switching instruction signal to the electromagnetic directional switching valves 540 and 542 is output in synchronization with the operation of the lifting device 530 for raising and lowering the component holding device 514. FIG. 20 shows a portion related to the output of the switching command signal for starting the supply of the negative pressure to the electromagnetic directional control valve 540 which is closely related to the present invention. The signal obtained by delaying the operation start command signal to 530 by the delay circuit 546 for a fixed time is used as the switch command signal to the electromagnetic directional control valve 540. In addition, instead of the feeder 24, the feeder type component supply device 506 is provided with a negative pressure detector 548 similar to the negative pressure detector 250 in the above embodiment (see FIG. 19). ) Can be attached. However, the negative pressure tester 548 has a built-in jaw cylinder 550 as a drive source of the detection hole switching device, but does not have a device corresponding to the detection instruction device 320. The reading of the detection value of the negative pressure sensor 260 is started using a switching command signal to the direction switching valve device of the component holding device 514. A switching command signal to the electromagnetic directional switching valve 540 for switching the directional switching valve device to the negative pressure supply state is supplied to the computer 544, and the computer 544 detects the negative pressure sensor 260 in response thereto. Reading of the value is started.
なお、 コンピュータ 5 4 4自身が、 昇降装置 5 3 0へ部品保持装置 5 1 4の下 降を開始させるべき旨の指令を出した後、 一定時間の経過を待って電磁方向切換 弁 5 4 0への切換指令信号を出すようにすることも可能である。 また、 部品保持 装置 5 1 4が所定の位置まで下降したことを検出する下降検出器 (例えばフォト マイクロセンサを使用し得る) の検出信号に応じて、 コンピュータ 5 4 4が負圧 センサ 2 6 0の検出値の読込みを開始するようにすることも可能である。  After the computer 544 itself issues a command to the elevating device 530 to start descending the component holding device 514, the electromagnetic directional switching valve 540 waits for a certain period of time. It is also possible to output a switching command signal to the switch. In addition, the computer 544 operates the negative pressure sensor 260 in response to a detection signal of a descent detector (for example, a photo micro sensor can be used) that detects that the component holding device 514 has been lowered to a predetermined position. It is also possible to start reading the detected value of.
以上、 本発明のいくつかの実施形態を詳細に説明したが、 これらは例示に過ぎ ず、 本発明は、 前記 〔発明の開示〕 の項に記載された態様を始めとして、 当業者 の知識に基づいて種々の変更、 改良を施した形態で実施することができる。  As described above, some embodiments of the present invention have been described in detail, but these are merely examples, and the present invention is based on the knowledge of those skilled in the art, including the embodiments described in the section of [Disclosure of the Invention]. Various modifications and improvements can be made based on this.

Claims

請 求 の 範 囲 The scope of the claims
1 . 負圧供給装置から供給される負圧に基づいて吸着ノズルにより電子回路部品 を吸着保持する電子回路部品保持装置の部品保持性能を検査する方法であって、 前記吸着ノズルの吸着面と接触可能な接触面に、 その接触面に前記吸着ノズル が接触した状態でその吸着ノズルの吸引孔と連通可能な状態で開口する検出孔 と、 その検出孔の負圧を検出する負圧センサとを備えた負圧検査器を準備する準 備工程と、 1. A method for inspecting the component holding performance of an electronic circuit component holding device that suctions and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device, the method comprising: A detection hole which is opened to be able to communicate with a suction hole of the suction nozzle when the suction nozzle is in contact with the contact surface, and a negative pressure sensor which detects a negative pressure of the detection hole. Preparation process for preparing a negative pressure tester equipped with
前記吸着ノズルの前記吸着面と前記負圧検查器の前記接触面とを接触させると ともに前記負圧供給装置に負圧を供給させ、 その負圧供給により前記検出孔の負 圧が増大する過程の複数時点において前記負圧センサにその検出孔の負圧を検出 させる負圧検出工程と、  The suction surface of the suction nozzle is brought into contact with the contact surface of the negative pressure detector, and the negative pressure is supplied to the negative pressure supply device. The negative pressure increases the negative pressure of the detection hole. A negative pressure detecting step of causing the negative pressure sensor to detect a negative pressure of the detection hole at a plurality of points in the process;
その負圧検出工程において検出された前記複数時点の負圧値に基づいて前記電 子回路部品保持装置の部品保持性能の良否を判定する判定工程と  A judging step of judging the quality of component holding performance of the electronic circuit component holding device based on the negative pressure values at the plurality of times detected in the negative pressure detecting step;
を含むことを特徴とする部品保持性能検査方法。 A component holding performance inspection method characterized by including:
2 . 前記複数時点が 3時点以上である請求の範囲第 1項に記載の部品保持性能検 查方法。  2. The method for detecting component holding performance according to claim 1, wherein the plurality of time points are three or more time points.
3 . 前記判定工程が、 前記検出工程で検出された前記複数時点の検出孔の負圧値 と、前記複数時点の予め設定された各標準負圧値との比較を行う比較工程を含み、 その比較工程における比較結果に基づいて部品保持性能の良否を判定する工程で ある 請求の範囲第 1項または第 2項に記載の部品保持性能検出工程。  3. The determination step includes a comparison step of comparing the negative pressure values of the detection holes at the plurality of times detected in the detection step with the preset standard negative pressure values at the plurality of time points, 3. The component holding performance detecting step according to claim 1 or 2, which is a step of determining whether the component holding performance is good or not based on a comparison result in the comparing step.
4 . 前記複数時点の検出負圧値のそれらに対応する前記標準負圧値からの外れ方 の違いに基づいて部品保持性能低下の原因を推定する第一原因推定工程を含む請 求の範囲第 3項に記載の部品保持性能検查方法。 4. The range of the request including a first cause estimation step of estimating a cause of the deterioration of the component holding performance based on a difference in the detected negative pressure values at the plurality of time points from the corresponding standard negative pressure value. Item 3. The component retention performance inspection method described in item 3.
5 . 複数の吸着ノズルについて、 共通の負圧検査器を用いて検查を行い、 前記判 定工程において、 前記複数の吸着ノズルのうちの一部のものについて部品保持性 能が不良、 他の吸着ノズルについて部品保持性能が良好と判定された場合には、 部品保持性能が不良と判定された吸着ノズル自体が不良と推定し、 前記一部のも のの数より多い数の吸着ノズルについて部品保持性能が不良と判定された場合に は、 前記負圧供給装置と前記負圧センサとの少なくとも一方が不良と推定する第 二原因推定工程を含む請求の範囲第 1項ないし第 4項のいずれかに記載の部品保 持性能検査方法。 5. A plurality of suction nozzles are inspected using a common negative pressure tester, and in the determination step, part holding performance of some of the plurality of suction nozzles is poor, When it is determined that the component holding performance of the suction nozzle is good, the suction nozzle itself whose component holding performance is determined to be defective is estimated to be defective, and the component is determined for the number of suction nozzles larger than the number of some of the suction nozzles. If the holding performance is determined to be poor The component holding performance inspection method according to any one of claims 1 to 4, further comprising a second cause estimating step of estimating that at least one of the negative pressure supply device and the negative pressure sensor is defective. .
6 . 前記複数の吸着ノズルのうちの一部のものが、 前記複数の吸着ノズルの数と 第一設定比率との積以下の数の吸着ノズルであり、 前記一部のものの数より多い 数が、 前記第一設定比率より大きレ、第二設定比率と前記複数の吸着ノズルの数と の積以上の数である請求の範囲第 5項に記載の部品保持性能検査方法。  6. Some of the plurality of suction nozzles are suction nozzles whose number is equal to or less than a product of the number of the plurality of suction nozzles and a first set ratio, and a number greater than the number of the some nozzles is 6. The component holding performance inspection method according to claim 5, wherein the number is larger than the first set ratio and is equal to or larger than the product of the second set ratio and the number of the plurality of suction nozzles.
7 . 負圧供給装置から供給される負圧に基づいて、 互いに吸引孔の内径を異にす る複数種類の吸着ノズルによりそれぞれ電子回路部品を吸着保持する電子回路部 品保持装置の部品保持性能を検査する方法であって、  7. The component holding performance of the electronic circuit component holding device that sucks and holds each electronic circuit component by a plurality of types of suction nozzles having suction holes with different inner diameters based on the negative pressure supplied from the negative pressure supply device. A method for inspecting
前記複数種類の吸着ノズルの各々の吸着面と接触可能な複数の接触面に、 それ ら接触面に前記複数種類の吸着ノズルがそれぞれ接触した状態でそれら吸着ノズ ルの各吸引孔と連通可能な状態で開口する複数の検出孔と、 それら検出孔の負圧 を検出する少なくとも 1つの負圧センサとを備えた負圧検査器を準備する準備ェ 程と、  A plurality of contact surfaces capable of contacting the suction surfaces of the plurality of types of suction nozzles can communicate with the suction holes of the suction nozzles in a state where the plurality of types of suction nozzles are in contact with the contact surfaces. A step of preparing a negative pressure tester including a plurality of detection holes that are opened in a state, and at least one negative pressure sensor that detects a negative pressure of the detection holes;
前記複数種類の吸着ノズルの前記吸着面の各々と前記負圧検査器の前記複数の 接触面の各々とを接触させるとともに前記負圧供給装置に負圧を供給させ、 その 負圧供給により前記複数の検出孔の各々の負圧が増大する過程の複数時点におい て前記少なくとも 1つの負圧センサに前記複数の検出孔の各々の負圧を検出させ る負圧検出工程と、  Each of the suction surfaces of the plurality of types of suction nozzles is brought into contact with each of the plurality of contact surfaces of the negative pressure tester, and a negative pressure is supplied to the negative pressure supply device. A negative pressure detecting step of causing the at least one negative pressure sensor to detect the negative pressure of each of the plurality of detection holes at a plurality of times during the process of increasing the negative pressure of each of the detection holes;
その負圧検出工程において検出された前記少なくとも複数時点の負圧値に基づ いて、 前記複数種類の吸着ノズルを含む前記電子回路部品保持装置の保持部品性 能の良否を判定する判定工程と  A determining step of determining, based on the negative pressure values at least at the plurality of times detected in the negative pressure detecting step, whether or not the holding component performance of the electronic circuit component holding device including the plurality of types of suction nozzles is good or bad;
を含むことを特徴とする部品保持性能検查方法。 A method for detecting component holding performance, comprising:
8 . 前記判定工程が、 前記複数種類の吸着ノズルの各々について予め設定された 前記複数時点の各標準負圧値と、 前記負圧検出工程で検出された前記複数時点の 各負圧値との比較を行う比較工程を含み、 その比較工程における比較結果に基づ レ、て部品保持性能の良否を判定する工程である請求の範囲第 7項に記載の部品保 持性能検査方法。 8. The determining step includes: setting a standard negative pressure value at each of the plurality of times preset for each of the plurality of types of suction nozzles; and a negative pressure value at the plurality of times detected in the negative pressure detecting step. 8. The component holding performance inspection method according to claim 7, comprising a comparison step of performing a comparison, wherein the step of determining whether the component holding performance is good or not based on the comparison result in the comparison step.
9 . 前記少なくとも 1つの負圧センサとして、 前記複数の検出孔に共通の 1つの 負圧センサを使用し、 その 1つの負圧センサと前記複数の検出孔の 1つずつとを 選択的に連通させ、 その負圧センサに連通している検出孔が開口している接触面 に前記複数種類の吸着ノズルの各吸着面を接触させる請求の範囲第 7項または 第 8項に記載の部品保持性能検查方法。 9. One negative pressure sensor common to the plurality of detection holes is used as the at least one negative pressure sensor, and the one negative pressure sensor is selectively communicated with each of the plurality of detection holes. 9. The component holding performance according to claim 7, wherein each of the suction surfaces of the plurality of types of suction nozzles is brought into contact with a contact surface where a detection hole communicating with the negative pressure sensor is open. Inspection method.
1 0 . 負圧供給装置から供給される負圧に基づいて吸着ノズルにより電子回路部 品を吸着保持する電子回路部品保持装置の部品保持性能を検査する装置であつ て、 (a)前記吸着ノズルの吸着面と接触可能な接触面に、 その接触面に前記吸着 ノズルが接触した状態でその吸着ノズルの吸引孔と連通可能な状態で開口する検 出孔と、 (b)その検出孔の負圧を検出する負圧センサとを備えた負圧検査器を含 むことを特徴とする部品保持性能検査装置。  10. A device for inspecting the component holding performance of an electronic circuit component holding device that sucks and holds an electronic circuit component by a suction nozzle based on a negative pressure supplied from a negative pressure supply device, and (a) the suction nozzle (B) a detection hole which is opened in a state in which the suction surface is in contact with the suction surface of the suction nozzle when the suction nozzle is in contact with the suction surface of the suction nozzle; A component holding performance inspection device comprising a negative pressure inspection device having a negative pressure sensor for detecting pressure.
1 1 . (a)前記吸着ノズルの前記吸着面と前記負圧検査器の前記接触面とを接触 させるとともに前記負圧供給装置に負圧を供給させ、 その負圧供給により前記検 出孔の負圧が増大する過程の複数時点において前記負圧センサにその検出孔の負 圧を検出させる負圧検出制御部と、 (b)その負圧検出制御部の制御により前記負 圧センサにより検出された前記複数時点の負圧値に基づいて前記電子回路部品保 持装置の保持部品性能の良否を判定する判定部とを備えた主制御装置を含む請求 の範囲第 1 0項に記載の部品保持性能検査装置。  11. (a) The suction surface of the suction nozzle is brought into contact with the contact surface of the negative pressure tester, and a negative pressure is supplied to the negative pressure supply device. A negative pressure detection control unit for causing the negative pressure sensor to detect the negative pressure of the detection hole at a plurality of points in the process of increasing the negative pressure; and (b) detecting the negative pressure by the negative pressure sensor under control of the negative pressure detection control unit. 10. The component holding device according to claim 10, further comprising: a main control device including: a determination unit that determines whether the performance of the holding component of the electronic circuit component holding device is good or not based on the negative pressure values at the plurality of times. Performance inspection device.
1 2 . 前記複数時点が 3時点以上である請求の範囲第 1 1項に記載の部品保持性  12. The component holding ability according to claim 11, wherein the plurality of time points is three or more time points.
1 3 . 前記判定部が、 前記負圧検出制御部の制御により検出された前記複数時点 の検出孔の負圧値と、 前記複数時点の予め設定された各標準負圧値との比較を行 う比較部を有し、 その比較部による比較結果に基づいて部品保持性能の良否を判 定するものである請求の範囲第 1 1項または第 1 2項に記載の部品保持性能検出 13. The determination unit compares the negative pressure values of the detection holes at the plurality of times detected by the control of the negative pressure detection control unit with the preset standard negative pressure values at the plurality of times. The component holding performance detection device according to claim 11 or 12, further comprising a comparing unit for judging the quality of the component holding performance based on a comparison result by the comparing unit.
1 4 . 前記主制御装置が、 前記複数時点の検出負圧値のそれらに対応する前記標 準負圧値からの外れ方の違いに基づいて部品保持性能低下の原因を推定する第一 原因推定部を備えた請求の範囲第 1 3項に記載の部品保持性能検査装置。 14. The first cause estimation in which the main control device estimates the cause of the deterioration of the component holding performance based on a difference in the detected negative pressure values at the plurality of time points from the standard negative pressure value corresponding thereto. 14. The component holding performance inspection device according to claim 13, comprising a part.
1 5 . 前記負圧検出制御部が、 複数の吸着ノズルについて前記負圧センサに前記 負圧を検出させるものであり、 かつ、 前記主制御装置が、 前記判定部により前記 複数の吸着ノズルのうちの一部のものについて部品保持性能が不良、 他の吸着ノ ズルについて部品保持性能が良好と判定された場合には、 部品保持性能が不良と 判定された吸着ノズル自体が不良と推定し、 前記一部のものの数より多い数の吸 着ノズルについて部品保持性能が不良と判定された場合には、 前記負圧供給装置 と前記負圧センサとの少なくとも一方が不良と推定する第二原因推定部を含む請 求の範囲第 1 1項ないし第 1 4項のいずれかに記載の部品保持性能検査装置。15. The negative pressure detection control unit controls the negative pressure sensor for a plurality of suction nozzles. The main controller detects the negative pressure, and the determination unit determines that the component holding performance of some of the plurality of suction nozzles is poor and the component holding performance of the other suction nozzles is poor. If determined to be good, the suction nozzles that were determined to have poor component holding performance were presumed to be defective, and component holding performance was determined to be poor for a number of suction nozzles greater than the number of some of the suction nozzles. In the case, the component according to any one of claims 11 to 14, which includes a second cause estimating unit that estimates that at least one of the negative pressure supply device and the negative pressure sensor is defective. Retention performance inspection device.
1 6 . 前記負圧検出制御部が、 互いに吸引孔の内径を異にする複数種類の吸着ノ ズルについて前記負圧センサに前記負圧を検出させるものであり、 かつ、 前記判 定部が、 前記複数種類の吸着ノズルの各々について検出された前記複数時点の負 圧値に基づいて、 前記複数種類の吸着ノズルを含む前記電子回路部品保持装置の 保持部品性能の良否を判定するものである請求の範囲第 1 1項ないし第 1 5項の いずれかに記載の部品保持性能検査装置。 16. The negative pressure detection control unit causes the negative pressure sensor to detect the negative pressure for a plurality of types of suction nozzles having different inner diameters of the suction holes, and the determination unit includes: The quality of the holding component performance of the electronic circuit component holding device including the plurality of types of suction nozzles is determined based on the negative pressure values at the plurality of times detected for each of the plurality of types of suction nozzles. The component holding performance inspection device according to any one of paragraphs 11 to 15 of the item.
1 7 . 前記判定部が、 前記複数種類の吸着ノズルの各々について予め設定された 前記複数時点の各標準負圧値と、 前記複数種類の吸着ノズルの各々について検出 された前記複数時点の各負圧値との比較を行う比較部を有し、 その比較部による 比較結果に基づいて部品保持性能の良否を判定するものである請求の範囲第 1 6 項に記載の部品保持性能検出装置。  17. The determination unit sets the standard negative pressure values at the plurality of times preset for each of the plurality of types of suction nozzles and the negative pressures at the plurality of times detected for each of the plurality of types of suction nozzles. 17. The component holding performance detection device according to claim 16, further comprising a comparing unit that compares the pressure value with the pressure value, wherein the quality of the component holding performance is determined based on a result of the comparison by the comparing unit.
1 8 . 負圧供給装置から供給される負圧に基づいて、 互いに吸引孔の内径を異に する複数種類の吸着ノズルの各々により複数種類の電子回路部品を吸着保持する 電子回路部品保持装置の部品保持性能を検査するための装置であって、  18. An electronic circuit component holding device that suctions and holds a plurality of types of electronic circuit components by means of a plurality of types of suction nozzles having suction holes having mutually different inner diameters based on the negative pressure supplied from the negative pressure supply device. An apparatus for inspecting component holding performance,
検査器本体と、  Inspection device body,
その検査器本体に相対移動可能に取り付けられ、 前記吸着ノズルの吸着面と接 触可能な接触面に、 内径を互いに異にする複数の検出孔が設けられた検出孔形成 部材と、  A detection hole forming member attached to the inspection device main body so as to be relatively movable, and provided with a plurality of detection holes having different inner diameters on a contact surface capable of contacting the suction surface of the suction nozzle;
その検出孔形成部材を、 前記複数種類の吸着ノズルのうち次に検査すべきもの の種類に応じて移動させることにより、 前記複数の検出孔の切換えを自動で行う 検出孔切換装置と、  A detection hole switching device that automatically switches the plurality of detection holes by moving the detection hole forming member in accordance with the type of the suction nozzle to be inspected next among the plurality of types of suction nozzles;
前記検査器本体に、 前記検出孔形成部材の前記移動に応じて前記複数の検出孔 の各々と選択的に連通可能に設けられた検出通路と、 The plurality of detection holes are provided in the inspection device main body in accordance with the movement of the detection hole forming member. A detection passage provided selectively communicable with each of the
その検出通路の負圧を検出する負圧センサと  A negative pressure sensor for detecting the negative pressure in the detection passage;
を含み、 前記検査器本体, 前記検出孔形成部材, 前記検出通路おょぴ前記負圧セ ンサが前記検出孔切換装置の前記検査器本体に取り付けられた部分と共同して負 圧検査器を構成していることを特徴とする部品保持性能検查装置。 Wherein the inspection device main body, the detection hole forming member, the detection passage and the negative pressure sensor cooperate with a portion of the detection hole switching device attached to the inspection device main body to form a negative pressure inspection device. A component holding performance inspection device characterized by comprising.
1 9 . 前記検出孔形成部材が、 回転軸線まわりに回転可能に前記検査器本体に取 り付けられ、 前記回転軸線を中心とする円周上に前記複数の検出孔が形成された 回転型検出孔形成部材であり、前記検出孔切換装置が、回転型検出孔形成部材を、 前記複数の検出孔の各々が前記検出通路と連通する回転位置へ回転させる検出孔 形成部材回転装置を含む請求の範囲第 1 8項に記載の部品保持性能検査装置。  19. The rotary detection wherein the detection hole forming member is rotatably attached to the inspection device main body around a rotation axis, and the plurality of detection holes are formed on a circumference centered on the rotation axis. The detection hole switching device, wherein the detection hole switching device includes a detection hole formation member rotating device that rotates a rotary detection hole formation member to a rotation position where each of the plurality of detection holes communicates with the detection passage. Item 18. A component holding performance inspection device according to Item 18.
2 0 . 前記検出孔切換装置が、 20. The detection hole switching device,
前記検査器本体, 検出孔形成部材, 検出通路および負圧センサを備えた負圧検 查器の外部に設けられた駆動源の駆動力により前記検出孔形成部材を移動させる 検出孔形成部材移動装置と、  A detecting hole forming member moving device for moving the detecting hole forming member by a driving force of a driving source provided outside a negative pressure detector provided with the inspection device main body, a detecting hole forming member, a detection passage, and a negative pressure sensor. When,
前記複数種類の吸着ノズルのうち次に検査すべきものの種類の情報に基づいて 前記駆動源を制御する駆動源制御装置と  A drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
を含む請求の範囲第 1 8項または第 1 9項に記載の部品保持性能検査装置。 10. The component holding performance inspection device according to claim 18 or 19, comprising:
2 1 . 前記検出孔切換装置が、 2 1. The detection hole switching device is
前記検査器本体に取り付けられた駆動源により前記検出孔形成部材を移動させ る検出孔形成部材移動装置と、  A detection hole forming member moving device for moving the detection hole forming member by a driving source attached to the inspection device main body;
前記複数種類の吸着ノズルのうち次に検査すべきものの種類の情報に基づいて 前記駆動源を制御する駆動源制御装置と  A drive source control device that controls the drive source based on information on the type of the nozzle to be inspected next among the plurality of types of suction nozzles;
を含む請求の範囲第 1 8項または第 1 9項に記載の部品保持性能検査装置。 10. The component holding performance inspection device according to claim 18 or 19, comprising:
2 2 . 前記吸着ノズルの前記負圧検査器への接近開始時点, 前記負圧供給装置に よる負圧供給開始時点, および前記吸着ノズルの前記負圧検査器への接触時点の V、ずれかに対して予め定められた一定の関係を有する時点に、 前記負圧センサに 前記検出孔の負圧の検出を開始させる負圧検出開始制御装置を含む請求の範囲第 1 0項ないし第 2 1項のいずれかに記載の部品保持性能検査装置。 22. V at the time when the suction nozzle starts approaching the negative pressure tester, the time when the negative pressure supply device starts the negative pressure supply, and the time when the suction nozzle comes into contact with the negative pressure tester, Claims 10 to 21 include a negative pressure detection start control device that causes the negative pressure sensor to start detecting a negative pressure in the detection hole at a point in time that has a predetermined fixed relationship with respect to A component holding performance inspection device according to any one of the above items.
2 3 . 前記吸着ノズルの吸着面を前記負圧検査器の接触面に接触, 離間させるぺ く昇降させるノズル昇降装置と、 23. Contact and separate the suction surface of the suction nozzle with the contact surface of the negative pressure tester. A nozzle elevating device for raising and lowering
そのノズル昇降装置による吸着ノズルの下降運動に連動して前記負圧供給装置 に負圧の供給を開始させる負圧供給開始制御装置と、  A negative pressure supply start control device that starts supplying a negative pressure to the negative pressure supply device in conjunction with a downward movement of the suction nozzle by the nozzle lifting / lowering device;
前記負圧供給装置による前記吸着ノズルへの負圧供給開始時点に対して予め定 められた一定の関係を有する時点に前記負圧センサに前記検出孔の負圧の検出を 開始させる負圧検出開始制御装置と  Negative pressure detection that causes the negative pressure sensor to start detecting the negative pressure of the detection hole at a time point having a predetermined relationship with the time point at which the negative pressure supply device starts supplying the negative pressure to the suction nozzle. With start controller
を含む請求の範囲第 1 0項ないし第 2 1項のいずれかに記載の部品保持性能検  The component holding performance inspection according to any one of claims 10 to 21 including:
2 4 . 前記検出孔切換装置と前記負圧検出開始制御装置とがそれぞれ被駆動部材 を備え、 かつ、 当該部品保持性能検查装置が、 それら被駆動部材に共通に設けら れ、 両被駆動部材を選択的に駆動する駆動部材を備えた駆動装置を含む請求の範 囲第 2 2項または第 2 3項に記載の部品保持性能検査装置。 24. The detection hole switching device and the negative pressure detection start control device each include a driven member, and the component holding performance detection device is provided in common for the driven members, and both the driven members are provided. The component holding performance inspecting device according to claim 22 or 23, further comprising a driving device including a driving member that selectively drives the member.
PCT/JP2004/004570 2003-04-04 2004-03-30 Parts holdability testing method and testing device WO2004091275A1 (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008060463A (en) * 2006-09-01 2008-03-13 Yamaha Motor Co Ltd Mounting machine, mounting line, and air blow method of mounting machine
JP2011243884A (en) * 2010-05-20 2011-12-01 Fuji Mach Mfg Co Ltd Component packaging system
CN110954633A (en) * 2018-09-26 2020-04-03 株式会社岛津制作所 Sample conveying device
EP3764762A4 (en) * 2018-03-09 2021-03-24 Fuji Corporation Component mounter
JP2021091486A (en) * 2015-02-09 2021-06-17 株式会社寺岡精工 Sticking device and packaging device including sticking device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020147305A (en) * 2019-03-12 2020-09-17 株式会社イシダ Adsorption device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07283599A (en) * 1994-04-08 1995-10-27 Seikosha Co Ltd Fixing apparatus for printed board
JPH10126097A (en) * 1996-09-02 1998-05-15 Fuji Mach Mfg Co Ltd Electric part carrier having vaccum chuck inspecting function, vacuum chuck inspection device and method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07283599A (en) * 1994-04-08 1995-10-27 Seikosha Co Ltd Fixing apparatus for printed board
JPH10126097A (en) * 1996-09-02 1998-05-15 Fuji Mach Mfg Co Ltd Electric part carrier having vaccum chuck inspecting function, vacuum chuck inspection device and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008060463A (en) * 2006-09-01 2008-03-13 Yamaha Motor Co Ltd Mounting machine, mounting line, and air blow method of mounting machine
JP2011243884A (en) * 2010-05-20 2011-12-01 Fuji Mach Mfg Co Ltd Component packaging system
JP2021091486A (en) * 2015-02-09 2021-06-17 株式会社寺岡精工 Sticking device and packaging device including sticking device
JP7125795B2 (en) 2015-02-09 2022-08-25 株式会社寺岡精工 APPLICATION DEVICE AND PACKAGING APPARATUS WITH APPLICATION DEVICE
EP3764762A4 (en) * 2018-03-09 2021-03-24 Fuji Corporation Component mounter
CN110954633A (en) * 2018-09-26 2020-04-03 株式会社岛津制作所 Sample conveying device

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