WO2004081617A2 - Chalcogenide glass constant current device, and its method of fabrication and operation - Google Patents
Chalcogenide glass constant current device, and its method of fabrication and operation Download PDFInfo
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- WO2004081617A2 WO2004081617A2 PCT/US2004/007514 US2004007514W WO2004081617A2 WO 2004081617 A2 WO2004081617 A2 WO 2004081617A2 US 2004007514 W US2004007514 W US 2004007514W WO 2004081617 A2 WO2004081617 A2 WO 2004081617A2
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- constant current
- layer
- negative
- chalcogenide glass
- voltage
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- 239000005387 chalcogenide glass Substances 0.000 title claims description 138
- 238000004519 manufacturing process Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 153
- 230000007423 decrease Effects 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims description 64
- 239000002184 metal Substances 0.000 claims description 64
- 150000004770 chalcogenides Chemical group 0.000 claims description 54
- 229910052709 silver Inorganic materials 0.000 claims description 39
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 38
- 239000004332 silver Substances 0.000 claims description 37
- 239000011521 glass Substances 0.000 claims description 32
- KDSXXMBJKHQCAA-UHFFFAOYSA-N disilver;selenium(2-) Chemical group [Se-2].[Ag+].[Ag+] KDSXXMBJKHQCAA-UHFFFAOYSA-N 0.000 claims description 21
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 19
- 229910052721 tungsten Inorganic materials 0.000 claims description 19
- 239000010937 tungsten Substances 0.000 claims description 19
- QIHHYQWNYKOHEV-UHFFFAOYSA-N 4-tert-butyl-3-nitrobenzoic acid Chemical compound CC(C)(C)C1=CC=C(C(O)=O)C=C1[N+]([O-])=O QIHHYQWNYKOHEV-UHFFFAOYSA-N 0.000 claims description 18
- 230000015556 catabolic process Effects 0.000 claims description 18
- 239000004020 conductor Substances 0.000 claims description 16
- 229910052711 selenium Inorganic materials 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 229910052699 polonium Inorganic materials 0.000 claims description 11
- 229910052717 sulfur Inorganic materials 0.000 claims description 11
- 229910052714 tellurium Inorganic materials 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 230000003247 decreasing effect Effects 0.000 claims description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 3
- 239000011669 selenium Substances 0.000 description 52
- 230000006399 behavior Effects 0.000 description 28
- 230000015572 biosynthetic process Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 6
- -1 for instance Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- YRXWPCFZBSHSAU-UHFFFAOYSA-N [Ag].[Ag].[Te] Chemical compound [Ag].[Ag].[Te] YRXWPCFZBSHSAU-UHFFFAOYSA-N 0.000 description 2
- 229910052946 acanthite Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 229910001923 silver oxide Inorganic materials 0.000 description 2
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 2
- 229940056910 silver sulfide Drugs 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- GNWCVDGUVZRYLC-UHFFFAOYSA-N [Se].[Ag].[Ag] Chemical compound [Se].[Ag].[Ag] GNWCVDGUVZRYLC-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052798 chalcogen Inorganic materials 0.000 description 1
- 150000001787 chalcogens Chemical class 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000013144 data compression Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical compound [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052986 germanium hydride Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- HZEBHPIOVYHPMT-UHFFFAOYSA-N polonium atom Chemical compound [Po] HZEBHPIOVYHPMT-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- KMIOJWCYOHBUJS-HAKPAVFJSA-N vorolanib Chemical compound C1N(C(=O)N(C)C)CC[C@@H]1NC(=O)C1=C(C)NC(\C=C/2C3=CC(F)=CC=C3NC\2=O)=C1C KMIOJWCYOHBUJS-HAKPAVFJSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/32—Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
- C03C3/321—Chalcogenide glasses, e.g. containing S, Se, Te
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0011—RRAM elements whose operation depends upon chemical change comprising conductive bridging RAM [CBRAM] or programming metallization cells [PMCs]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C27/00—Electric analogue stores, e.g. for storing instantaneous values
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/041—Modification of switching materials after formation, e.g. doping
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8416—Electrodes adapted for supplying ionic species
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8825—Selenides, e.g. GeSe
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
Definitions
- the present invention relates to a constant current device, and more specifically, to a constant current device formed of chalcogenide materials.
- chalcogenide glass being investigated for memory use is germanium-selenide (Ge x Se 100 . x ).
- the chalcogenide glass has an associated layer for supplying a metal, which becomes incorporated with the glass matrix to change resistance states.
- the associated layer may be a layer of silver or a layer of silver- selenide (Ag 2 Se).
- the invention provides a two-terminal constant current device formed of a chalcogenide glass material, and its method of formation and operation.
- the device comprises a metal-containing layer formed adjacent at least one chalcogenide glass layer which is biased into a constant current state.
- the constant current device maintains a constant current over a range of applied voltages.
- the invention provides a constant current device and a method of forming and operating such a device in which at least one layer of silver-selenide is formed between a first germanium-selenide layer and a second germanium-selenide layer. These layers are provided between a first and a second electrode.
- a bias voltage is applied to the electrodes sufficient to place the device in a constant current state.
- the constant current device maintains a constant current over a range of applied voltages.
- the invention provides a constant current device and a method of forming and operating such a device in which at least one layer of silver-selenide is formed between a first germanium-selenide layer, a layer of silver, and a second germanium-selenide layer. These layers are provided between a first and a second electrode. A bias voltage is applied to the electrodes sufficient to place the device in a constant current state. The constant current device maintains a constant current over a range of applied voltages.
- the invention provides a constant current device and a method of forming and operating such a device in which at least one metal- containing layer, such as silver, is formed on a chalcogenide glass layer such as a germanium-selenide layer. A bias voltage is applied to the layers sufficient to place the device in a constant current state. The constant current device maintains a constant current over a range of applied voltages.
- the invention provides a constant current device and a method of forming and operating such a device in which at least one metal- containing layer, such as silver-selenide, is formed with a chalcogenide glass layer such as a germanium-selenide layer, and a layer of silver. A bias voltage is applied to these layers sufficient to place the device in a constant current state. The constant current device maintains a constant current over a range of applied voltages.
- the invention provides a method of converting a device that has been exhibiting memory behavior comprised of at least one chalcogenide glass layer and a metal-containing layer, for example, of silver or silver- selenide to a constant current device. A bias voltage is applied to the layers sufficient to place the device in a constant current state. The constant current device maintains a constant current over a range of applied voltages.
- the invention provides a method of altering the current characteristics of a constant current device formed with at least one chalcogenide glass layer by manipulation of an applied bias voltage.
- the invention provides a method of resetting or raising the current characteristics of a constant current device formed with at least one chalcogenide glass layer to a prior state by manipulation of an applied bias voltage.
- FIG. 1 illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a first embodiment ofthe invention.
- FIG. la illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a first exemplary embodiment of the first embodiment of the invention.
- FIG. lb illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a second exemplary embodiment ofthe first embodiment of the invention.
- FIG. lc illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a third exemplary embodiment of the first embodiment ofthe invention.
- FIG. Id illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with yet another exemplary embodiment ofthe first embodiment ofthe invention
- FIG. 2 illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a second embodiment of the invention.
- FIG. 2a illustrates a cross-sectional view of a chalcogenide glass constant current device fabricated in accordance with a first exemplary embodiment of the second embodiment ofthe invention.
- FIG. 2b illustrates a cross -sectional view of a chalcogenide glass constant current device fabricated in accordance with a second exemplary embodiment ofthe second embodiment ofthe invention.
- FIG. 3 is a graph illustrating a current-voltage (I-V) curve of a chalcogenide constant current device constructed in accordance with the invention.
- FIG. 4 is a graph illustrating the application of different positive voltages to decrease a constant current device's constant current amplitude.
- FIG. 5 is a graph illustrating the constant current achieved as a result of applying the voltage illustrated in FIG. 4 to a chalcogenide constant current device.
- FIG. 6 is a graph illustrating the breakdown voltage of a chalcogenide constant current device.
- FIG. 7 is a graph illustrating the I-V characteristics of a chalcogenide constant current device after a bias voltage described with reference to FIGS. 5-6 is applied.
- FIG. 8 is a graph illustrating the original positive voltages applied to a chalcogenide constant current device and the resulting constant current I-V characteristics.
- FIG. 9 illustrates a computer system incorporating a chalcogenide constant current device formed in accordance with the invention.
- substrate used in the following description may include any supporting structure including but not limited to a glass, plastic, or semiconductor substrate that has an exposed substrate surface.
- a semiconductor substrate should be understood to include silicon, silicon- on-insulator (SOI), silicon-on-sapphire (SOS), doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures which may not be silicon-based.
- SOI silicon- on-insulator
- SOS silicon-on-sapphire
- doped and undoped semiconductors epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures which may not be silicon-based.
- silver is intended to include not only elemental silver, but silver with other trace metals or in various alloyed combinations with other metals as is known in the semiconductor industry, as long as such silver alloy is conductive, and as long as the physical and electrical properties of the silver remain unchanged.
- silver-selenide is intended to include various species of silver-selenide, including some species which may have a slight excess or deficit of silver, for instance, Ag 2 Se, Ag 2+x Se, and Ag 2 . x Se.
- chalcogenide glass is intended to include glasses that comprise an element from group VIA (or group 16) ofthe periodic table.
- Group VIA elements also referred to as chalcogens, include sulfur (S), selenium (Se), tellurium (Te), polonium (Po), and oxygen (O).
- the present invention is directed toward chalcogenide glass constant current devices and their methods of formation and operation.
- the chalcogenide constant current structures disclosed herein can be utilized for any number of applications where a constant current is needed over a range of applied voltages.
- FIGS. 1-9 illustrate exemplary embodiments of a chalcogenide constant current device 100 and 101, and its method of formation and operation, in accordance with the invention.
- FIG. 1 depicts a first embodiment of a chalcogenide constant current device constructed in accordance with the invention.
- a first electrode 2 is formed over a substrate 1.
- the first electrode 2 may comprise any conductive material so long as the constant current device's electrical properties are not altered.
- various metals such as, one or more of tungsten, nickel, tantalum, aluminum, platinum, or titanium nitride among many others.
- the first electrode 2 can comprise a conductively-doped semiconductive material.
- care must be used since some metals, such as Ag, Au, or Cu, may migrate into a subsequently deposited glass layer and alter the electrical behavior of the constant current device.
- the first electrode 2 is described as comprising tungsten (W).
- FIG. 1 illustrates a first electrode 2 provided on substrate 1, it should be appreciated that additional layers may be provided beneath electrode 2, between it and the substrate 1.
- a semiconductor substrate containing circuit layers covered with an insulating layer can be provided below first electrode 2 if desired. The presence of additional underlying layers between electrode 2 and substrate 1 does not affect the utility ofthe invention.
- a first chalcogenide glass layer 4 is formed over the first conductive electrode 2.
- the chalcogenide glass layer 4 is electrically coupled to electrode 2.
- the first chalcogenide glass layer 4 is preferably a germanium-selenide glass having a Ge x Se 100 . x stoichiometry.
- the stoichiometric range for the first chalcogenide glass layer 4 is from about Ge 18 Se 82 to about Ge 43 Se 57 , but is preferably from about Ge 25 Se 7S to about Ge 40 Se 60 , and is more preferably about Ge 40 Se 60 .
- the first chalcogenide glass layer 4 has a thickness that ranges from about 150 Angstroms (A) to about 400 A. Preferably, the first chalcogenide glass layer 4 has a thickness of about 250 A to about 300 A. For purposes of a simplified description, the first chalcogenide glass layer 4 is described further below as a Ge 40 Se 60 layer.
- the first chalcogenide glass layer 4 acts as a glass backbone and allows a metal- containing layer, such as a silver-selenide or a chalcogenide-doped with silver (Ag) layer, to be directly formed thereon.
- the formation of the first chalcogenide glass layer 4, having a stoichiometric composition, such as Ge 40 Se 60 in accordance with one exemplary embodiment ofthe invention, can be accomplished by any suitable method. For instance, evaporation, co-sputtering germanium and selenium in the appropriate ratios, sputtering using a germanium-selenide target having the desired stoichiometry, or chemical vapor deposition with stoichiometric amounts of GeH 4 and SeH 2 gases (or various compositions of these gases), which result in a germanium-selenide film ofthe desired stoichiometry, are non-limiting examples of methods which can be used to form the first chalcogenide glass layer 4.
- any suitable metal- containing layer 6 may be used so long as it contains an adequate source of metal ions, which can move in and out of chalcogenide glass layers during device operation.
- the metal-containing layer 6 may be silver.
- Other suitable metal-containing layers 6 include all chalcogenide layers doped Ag such as chalcogenides O, S, Se, Te, and Po.
- Silver sulfide, silver oxide, and silver telluride, for example, among others, are all suitable silver-chalcogenides that may be used as metal- containing layer 6.
- FIG. 1 illustrates that the metal-containing layer 6 is in contact with the upper surface ofthe first chalcogenide glass layer 4; however, intervening layers may also be provided between layers 4 and 6, as long as they permit the resulting device to operate in a constant current mode.
- Metal-containing layer 6 is formed to a thickness that ranges from about 200 A to about 2000 A. Preferably, the metal- containing layer 6 is about 600 A thick.
- FIG. 1 illustrates that the second chalcogenide glass layer 8 is in contact with the upper surface ofthe metal- containing layer 6; however, intervening layers may also be provided between layers 6 and 8, so long as they permit the resulting device to operate in a constant current mode.
- the second chalcogenide glass layer 8 is preferably a germanium- selenide glass having a Ge x Se 100 . x stoichiometry.
- the stoichiometric range for the second chalcogenide glass layer 8 is from about Ge 18 Se 82 to about Ge 43 Se 57 ⁇ preferably from about Ge 25 Se 75 to about Ge 40 Se 60 , and is more preferably about Ge 40 Se 60 .
- the second chalcogenide glass layer 8 preferably has a thickness that ranges from about 50 A to about 500 A. More preferably, the second chalcogenide glass layer 8 is about 150 A thick.
- first chalcogenide glass layer 4 and second chalcogenide glass layer 8 are described- above as having a stoichiometry similar to each other, e.g., about Ge 40 Se 60 , it should be appreciated that the first chalcogenide glass layer 4 and the second chalcogenide glass layer 8 can possess different stoichiometries from each other, and they can even be different glasses.
- the first chalcogenide glass layer 4 can possess a stoichiometry of Ge 40 Se ⁇ o while the second chalcogenide glass layer 8 can possess a stoichiometry of Ge 25 Se 75 .
- the second chalcogenide glass layer 8 is described further below as having a stoichiometry of Ge 40 e 60 .
- the formation of the second chalcogenide glass layer 8 can be accomplished by any suitable method as described above with reference to formation of the first chalcogenide glass layer 4.
- layer 9 such as Ag
- layer 9 can be provided above the second chalcogenide glass layer 8.
- layer 9 can be provided above (FIG. lb) or below (FIG. lc) metal- containing layer 6, e.g., Ag 2 Se, rather than above the second chalcogenide glass layer 8 (FIG. la).
- layer 9 is preferably an Ag layer that is less than or equal to about 500 A thick, and more preferably is an Ag layer that is approximately 200 A thick.
- Layer 9 can be deposited using any techniques well-known in the art. It is not ideal to have an Ag source provided strictly by electrode 10. Accordingly, care must be taken to limit the Ag source for long-term temperature stability and endurance. The presence of layer 9 addresses this concern. However, the presence of layer 9 is not required.
- a constant current device can be fabricated where a third glass layer 7, analogous to glass layer 8, can be provided between layer 9 and the top electrode 10.
- layer 9 is preferably an Ag layer that is less than or equal to about 500 A thick, and more preferably is an Ag layer that is approximately 200 A thick.
- a second electrode 10 is formed over the second chalcogenide glass layer 8, to complete the formation of the chalcogenide constant current device 100.
- the second electrode 10 may comprise any conductive material so long as the constant current device's electrical properties are not altered.
- various metals such as, one or more of tungsten, nickel, tantalum, aluminum, platinum, silver, or titanium nitride among many others.
- care must be used since some metals, such as Ag, Au, or Cu, may migrate into a subsequently deposited glass layer and alter the electrical behavior ofthe constant current device.
- the second electrode 10 can comprise a conductively- doped semiconductive material.
- FIG. 1 illustrates that the second electrode 10 is in contact with an upper surface ofthe second chalcogenide glass layer 8; however, intervening layers may also be provided between layers 8 and 10, as long as they permit the resulting device to operate in a constant current mode.
- first electrode 2 and the second electrode 10 can comprise the same material or different materials.
- first electrode 2 and second electrode 10 can each be made of tungsten, or preferably, the first electrode 2 can comprise tungsten and the second electrode 10 can comprise silver.
- a negative electrical pulse of absolute amplitude greater than the erase potential ofthe device is applied to structure 100 in order to have the device exhibit constant current behavior.
- a structure 100 fabricated as shown in FIG. 1 can be operated as a normal PCBAM memory device.
- the device 100 can be read when a potential of approximately 100 mV is applied across conductors 10 and 2, a voltage of approximately 250 mV or greater is applied across conductors 10 and 2 to write it, and a negative potential of absolute amplitude greater than approximately negative 80 mV is applied to conductors 10 and 2 to erase it.
- a first exemplary structure 100 was formed in accordance with the
- FIG. 1 embodiment ofthe invention in which the first electrode 2 comprised tungsten, the first chalcogenide glass layer 4 comprised a Ge 40 Se 60 layer about 300 A thick, the metal-containing layer 6 comprised an Ag 2 Se layer about 600 A thick, the second chalcogenide glass layer 8 comprised a Ge 40 Se 60 layer about 150 A thick, and the second electrode 10 comprised an Ag electrode.
- FIG. 3 illustrates a constant current of about negative 8 ⁇ A across a voltage range of about -100 mV to about -800 mV
- the exact constant current value and voltage range will depend upon the structural properties ofthe device, such as the precise composition and thickness of layers 4, 6, and 8, and the total amount of metal, e.g., silver, present in the chalcogenide layer 4.
- first chalcogenide layer 4 and second chalcogenide layer 8 do not have to possess the same stoichiometries, nor do the first chalcogenide layer 4 and second chalcogenide layer 8 have to possess the same thickness.
- a constant current device 100 fabricated as described with reference to FIG. 1 can be of any geometric shape as desired or needed for a particular application.
- a constant current device was fabricated in accordance with a FIG. 1 embodiment ofthe invention in which the first electrode 2 comprised tungsten, the first chalcogenide layer 4 comprised a Ge 40 Se 60 glass about 300 A thick, the metal-containing layer 6 comprised an Ag 2 Se layer about 600 A thick, the second glass layer 8 comprised a Ge 25 Se 75 glass about 150 A thick, and the second electrode 10 comprised tungsten.
- the second exemplary structure Similar to the first exemplary device, the second exemplary structure
- the constant current observable voltage range was at least approximately 700 V once a negative electrical 30 ns pulse in the range of about -1.0 V to about -2.0 V was applied across conductors 10 and 2.
- first electrode 2 comprising tungsten
- layer 4 comprising Ge 40 Se 60 glass about 150 A thick
- metal-containing layer 6 comprising Ag 2 Se about 600 A thick
- glass layer 8 comprising Ge 40 Se 60 glass about 150 A thick
- second electrode 10 comprising silver.
- a negative 8 ns electrical pulse of about negative 800 mV (-800 mV) was then applied to the fabricated device.
- this device also exhibited constant current behavior rather than memory behavior.
- the fabricated device maintained a constant current over an applied negative voltage range of at least approximately 700 mV, specifically from about -100 mV to about -800 mV, after a negative 8 ns electrical pulse of about -800 mV was applied across electrodes 10 and 2 to convert the structure to a constant current mode.
- the total amount of silver present in the device seems to affect the magnitude ofthe negative potential that needs to be applied to switch a device 100 into constant current mode.
- FIG. 2 shows another exemplary embodiment ofthe invention and its method of formation.
- the FIG. 2 embodiment illustrates a first electrode 2 provided over a substrate 1.
- the first electrode 2 may comprise any ofthe conductive materials listed above for the same electrode as in the FIG. 1 embodiment.
- the first electrode 2 is described as tungsten (W). Similar to the FIG. 1 embodiment, additional layers may be provided between electrode 2 and substrate 1.
- a chalcogenide glass layer 4 is formed over the first electrode 2.
- the chalcogenide glass layer 4 is preferably a germanium-selenide glass having a Ge x Se 100 . x stoichiometry.
- the stoichiometric range for the chalcogenide glass layer 4 is from about Ge 18 Se 82 to about Ge 43 Se 57 , is preferably from about Ge 25 Se 75 to about Ge 40 Se 60 , and is more preferably about Ge 40 Se 60 .
- the chalcogenide glass layer 4 has a thickness that ranges from about 150 A to about 400 A.
- the chalcogenide glass layer 4 in the FIG. 2 embodiment has a thickness of about 250 A to about 300 A.
- the formation ofthe chalcogenide glass layer 4, having a stoichiometric composition, such as Ge 40 Se 60 in accordance with one exemplary embodiment ofthe invention, can be accomplished by any ofthe methods described above for forming glass layers 4 or 8 of FIG. 1.
- any suitable metal- containing layer 6 may be used so long as it contains an adequate source of metal ions, e.g., silver, which can move in and out of chalcogenide glass layer 4 during device operation.
- the metal- containing layer 6 may be silver.
- Other suitable metal-containing layers include all chalcogenide layers containing Ag, e.g., chalcogenides O, S, Se, Te, and Po.
- Silver sulfide, silver oxide, and silver telluride for example, among others, are all suitable silver-chalcogenides that may be used as metal-containing layer 6, e.g., a chalcogenide layer containing Ag.
- Metal-containing layer 6 can be formed by any of the methods described above in connection with forming metal-containing layer 6 ofthe FIG. 1 embodiment.
- FIG. 2 illustrates that the metal-containing layer 6 is in contact with the upper surface ofthe chalcogenide glass layer 4; however, intervening layers may be present below metal-containing layer 6 so long as they do not prevent operation ofthe FIG. 2 structure in a constant current mode.
- Metal- containing layer 6 is formed to a thickness that ranges from about 200 A to about 2000 A. Preferably, the metal- containing layer 6 is about 600 A thick.
- layer 9 such as Ag
- an additional layer 9 similar to the FIG. 2a embodiment, can be provided below metal- containing layer 6, between the first chalcogenide layer 4 and metal- containing layer 6.
- layer 9 is preferably an Ag layer that is less than or equal to 500 A thick, and more preferably an Ag layer that is approximately 200 A thick. Similar to the concerns for the exemplary FIG. la-Id embodiments, care must be taken to limit the Ag source for long-term temperature stability and endurance. The presence of layer 9 addresses this concern. Again, the presence of layer 9 is not required.
- a second electrode 10 is formed over the metal- containing layer 6 to complete the formation of the chalcogenide constant current device 101, in accordance with the second embodiment.
- FIG. 2 is described without intervening layers between the metal-containing layer 6 and the second electrode 10, intervening layers may be present so long as they do not prevent operation ofthe FIG. 2 structure in a constant current mode.
- the second electrode 10 may comprise any ofthe materials described above for electrode 10 in the FIG. 1 embodiment.
- the second electrode 10 of FIG. 2 when the second electrode 10 of FIG. 2 is in direct contact with metal-containing layer 6, the second electrode 10 should preferably not comprise silver unless it is sputtered onto an Ag 2 Se layer acting as metal- containing layer 6.
- first electrode 2 and the second electrode 10 of FIG. 2 can comprise the same material or different materials.
- first electrode 2 and second electrode 10 can each be made of tungsten, or alternatively, the first electrode 2 can comprise tungsten and the second electrode 10 can comprise silver.
- a negative electrical potential of sufficient magnitude can be applied across electrodes 10 and 2 to cause the device to exhibit constant current behavior.
- a device fabricated as shown in FIG. 2 can be operated as a normal PCRAM memory device.
- the device in DC operation, the device can be read when a potential of approximately 100 mV is applied across conductors 10 and 2, a voltage of approximately 250 mV or greater is applied across conductors 10 and 2 to write it, and a negative potential of absolute amplitude greater than approximately negative 80 mV is applied to conductors 10 and 2 to erase it.
- a constant current device was fabricated in which the first electrode 2 comprised tungsten, the first layer 4 comprised a Ge 40 Se 60 glass about 300 A thick, the metal-containing layer 6 comprised an Ag 2 Se layer about 600 A thick, and the second electrode 10 comprised tungsten.
- a negative electrical 30 ns potential of 1.5 V (-1.5 V) was applied to the fabricated exemplary device. As a result, this device exhibited constant current behavior rather than memory behavior. It was further found that applying an electrical negative 30 ns potential that ranged from about -1.0 V to about -2.0 V to the fabricated device also generated constant current behavior. However, when a more positive electrical pulse than -1.0 V was applied, for example, a negative 900 mV, 30 ns pulse, it was observed that this did not convert the exemplary device 101 into a constant current mode.
- the exemplary device 101 maintained a constant current over an applied negative voltage range of about -100 mV to about -800 mV. Accordingly, the constant current observable voltage range is at least approximately 700 mV once a negative voltage in the range of about -1.0 V to about -2.0 V is applied across conductors 10 and 2.
- first electrode 2 comprising tungsten
- layer 4 comprising Ge 40 Se 60 glass about 150 A thick
- metal-containing layer 6 comprising Ag 2 Se about 600 A thick
- second electrode 10 comprising silver.
- a negative potential of 800 mV (-800 mV) with a 8 ns pulse was applied to the fabricated device.
- this device also exhibited constant current behavior rather than memory behavior.
- the total amount of silver present in the device 101 seems to affect the magnitude ofthe negative potential that needs to be applied to switch a device into constant current mode.
- the fabricated device maintained a constant current over an applied negative voltage range of at least approximately 700 mV, specifically from about -100 mV to about -800 mV, when a negative electrical potential of about -800 mV was applied across electrodes 10 and 2.
- the FIG. 2 embodiment can be of any geometric shape depending upon the desired or needed application.
- devices 100 and 101 fabricated in accordance with the embodiments ofthe present invention which normally exhibit PCRAM memory behavior, can be permanently converted to a constant current device by applying a negative voltage across the device in excess of the negative voltage required to switch the device from a memory device to a constant current device. Stated another way, applying a significantly more negative electrical pulse than the device's erase potential converts the memory device into a constant current device. It was also observed that the greater the amount of Ag present in the constant current devices 100 and 101, a larger absolute amplitude, negative potential 8 ns pulse or a pulse of larger absolute amplitude at various widths could also be applied to devices 100 and 101 to induce constant current behavior.
- devices 100 and 101 fabricated in accordance with the invention can be operated as a constant current device without first operating as a memory device, upon application of a negative electrical pulse sufficient to place the device in a constant current mode of operation.
- devices 100 and 101 fabricated in accordance with the invention may be operated as a memory device without first operating then as a constant current device by application of voltages below the threshold required to place the device in a constant current mode.
- the device upon application of a negative pulse sufficient to place the memory device in a constant current mode of operation, the device converts to a constant current mode and remains in that state even when voltage is removed.
- the invention provides methods for changing and resetting the current level which passes through constant current devices 100 and 101 such as described in FIGS. 1 and 2, when in a constant current operation mode.
- FIG. 1 is described below in reference to FIG. 3, comprises a bottom tungsten electrode 2, a Ge 40 Se 60 first glass layer 4 about 300 A thick, a Ag 2 Se layer 6 about 600 A thick, a Ge 40 Se 60 second glass layer 8 about 150 A thick, and a top silver electrode 10.
- the structure 100 of FIG. 1 is in a constant current mode and a DC voltage in the range of approximately 0 to approximately -1.0 V is applied across electrodes 10 and 2, the device has the current/voltage curve (I/V curve) as illustrated in FIG. 3.
- FIG. 3 illustrates an observed region A beyond about -800 mV where the constant current value of -8 ⁇ A begins to decline for the constant current devices of the invention. Stated in another way, region A is where the constant current value is no longer maintained at -8 ⁇ A. It has been observed that Region A corresponds to a reset region or breakdown area of a chalcogenide constant current device 100. Specifically, when structure 100 is in constant current operation mode, as depicted in FIG. 3, the constant current value of the device can be reset to its initial constant current value, for example -8 ⁇ A, by applying a more negative voltage greater than the negative voltage threshold ofthe device. The initial constant current value is the initial current value of the chalcogenide structure when it is first switched to exhibit constant current behavior.
- a constant current device can prematurely degrade if the applied potential is increased too much above the point where the constant current device starts to reduce the constant current value as illustrated in FIG. 3.
- the degradation ofthe constant current device can eventually lead to DNR behavior.
- the increase in the constant current's value can occur with a repeated pulse of similar or less amplitude as initially used to cause the device to exhibit constant current behavior.
- a constant current device will not reset to its initial constant current value.
- the constant current device's function is killed.
- a more preferable method of resetting a constant current device's constant current value is applying a more positive electrical potential.
- the constant current level is depicted as -8 ⁇ A
- the constant current value will vary depending upon the thickness of the glass stack fabricated in accordance with the embodiments of FIGS. 1 and 2, and also depending upon the total amount of Ag in devices 100 and 101.
- region A is observed beyond about -800 mV in FIG. 3, region A's location can also vary, e.g., be greater or less than the value depicted in FIG. 3, depending upon the thickness ofthe glass stack, total amount of silver, and applied negative voltage.
- the device maintains a constant current of at least 700 mV, the thickness ofthe glass stack, total amount of silver, and magnitude ofthe applied negative voltage, will also affect the device's range for maintaining a constant current value, e.g., a constant current device can possess a greater constant current range than depicted.
- FIG. 3 corresponds to a negative breakdown voltage which can be applied to a constant current structure 100 or 101 to reset the structure's constant current value to the original value observed when structures 100 or 101 was initially switched to constant current mode.
- FIG. 3 also illustrates a method for changing the constant current value of device 100.
- Applicants have discovered that applying a negative potential, up to a certain value increases the constant current's amplitude. Repeated current pulses of similar or less amplitude can further increase the constant current's amplitude. The negative potential necessary to increase the constant current's amplitude will vary depending upon the structural characteristics ofthe constant current device Conversely, applying a positive potential decreases the constant current's amplitude. Similarly, repeated current pulses of similar or less amplitude can further decrease the constant current's amplitude. Again, the positive potential necessary to decrease the constant current's amplitude will vary depending on the structural characteristics ofthe constant current device. Further details are provided below.
- FIG. 5 illustrates a constant current limit 61, after a positive voltage 60, e.g., V x is applied to structure 100 that is larger than the Vt shown in FIG. 4.
- V ⁇ s which can be applied to constant current structure 100 can be of a larger absolute amplitude than positive Vt voltage 60.
- graph 61 corresponds to the applied positive Vt voltage 60 of FIG. 4
- graph 71 corresponds to the applied positive voltage 70 of FIG. 4
- graph 81 corresponds to the applied positive voltage 80 of FIG. 4.
- FIG. 4 illustrates only a small number of V s that can be applied to induce a larger constant current value, e.g., decreasing the constant current's amplitude.
- FIG. 5 illustrates only a small number of constant current values that can result from an applied positive voltage to structure 100 operating in constant current mode. Further, FIG.
- the invention provides a method of increasing or resetting the high constant current value achieved with the methods described previously in reference to FIGS. 4 and 5.
- a voltage more negative than a negative threshold voltage (Vt) needs to be applied to structure 100.
- This voltage is also known as the breakdown voltage ofthe device. For purposes of a simplified description, this voltage is described as V 2 .
- FIG. 6 illustrates in region A (analogous to region A of FIG. 3), the breakdown voltage of a constant current device 100 utilizing the constant current limit graph 60 of FIG. 5.
- a negative threshold voltage (V 2 ) is applied at a voltage slightly more negative than the upper voltage limit range for the existing constant current level, defined as the breakdown voltage of the device.
- FIG. 6 illustrates that negative 800 mV (-800 mV) is about the upper voltage limit range for the existing constant current value of structure 100. Therefore, a V 2 must be applied that is slightly more negative than -800 mV as FIG. 6 illustrates. Specifically, the breakdown voltage of constant current device 100 is provided by Region A, which is slightly more negative than -800 mV. [0097] Accordingly, FIG. 6 illustrates applying V 2 which is more negative than about -800 mV to constant current structure 100. Preferably, a more negative V 2 of equal to or greater than -1.0 V is applied to reset the constant current value of structure 10 . 0.
- FIG. 3 illustrates that the constant current's upper voltage limit range is approximately -800 mV for constant current structure 100.
- a slightly more negative V 2 is applied. This is illustrated by Region A.
- the exact breakdown voltage and the amplitude of this negative signal e.g., V 2 , will vary depending upon the thickness of the glass layers and the amount of Ag within the constant current device. Further, applying a more negative electrical signal than -800 mV serves to increase the constant current's negative value.
- applying a V 2 which corresponds to the breakdown voltage of the constant current device raises the existing constant current value, e.g., the existing constant current value becomes more negative or increases the constant current's amplitude.
- applying a more negative voltage that corresponds to region A of FIGS. 3 and 6, can either reset the constant current limit of structure 100 to the original constant current limit or at least raise the constant current value, e.g., make more negative, ofthe constant current device as FIG. 7 illustrates.
- repeated current pulses of similar or less amplitude can further increase the constant current's amplitude as desired.
- FIG. 7 illustrates that the constant current value of structure 100 is raised, e.g., from about -8 ⁇ A as FIG. 6 illustrates, to about negative 800 nA (-800 nA).
- a new higher constant current value is achieved, e.g., more negative constant current value.
- the higher constant current value achieved corresponds to the original negative constant current value ofthe constant current device.
- the constant current value is significantly higher, e.g., more negative.
- a breakdown voltage within region A (which will vary as described above for each constant current device) that ranges from about -800 mV to about -2.0 V be applied to a constant current device such as devices 100 and 101 to reset or raise their constant current values, e.g., make more negative.
- a more negative V 2 greater than -2.0 V typically results in the constant current device being destroyed, this is not always the case.
- This value e.g., -2.0 V may vary depending upon the thickness of the layers within the constant current device. For instance, the thicker the device, a more negative V 2 may be applied e.g., more negative than -2.0 V without destroying the device. Further, applying a more negative V 2 greater than -2.0 V may result in the device resetting to a very low constant current value at which point the device can be pulsed and programmed as a constant current source again rather than destroying the device. Again, this is dependent on the thickness ofthe layers present in the constant current device. Thus, in one aspect, applying a more negative V 2 greater than -2.0 V can result in the device resetting to a low constant current value.
- the methods disclosed above allow a constant current device's constant current level to be changed and reset. Changing or resetting the constant current value is non-destructive to the chalcogenide constant current device 100 or 101. Therefore, the constant current limit's value can be decreased, e.g., made more positive than the original constant current level ofthe constant current device by applying a Vj voltage, and conversely, the constant current level can be reset or raised, e.g., made more negative than the original constant current value. It should be appreciated that the methods ofthe present invention are applicable to any constant current device and not limited to devices 100 and 101 constructed in accordance with FIGS. 1 and 2.
- the invention also provides a method of utilizing a constant current device such that it functions as an analog memory device.
- This specific aspect provides a method of examining the constant current values which were applied to a constant current device. Once these constant current values are determined, the positive voltages, e.g., V l5 that were applied to achieve the constant current values can also be determined. In turn, these values can be read such that a memory state can correspond to each constant current value.
- the constant current device can be read such that a plurality of memory states can be stored. Each memory state corresponds to a specific constant current value. For instance, repeated current pulses of similar or less amplitude can further increase or decrease the constant current's amplitude. Each of these values can be read and stored for an analog assortment of varying states.
- FIG. 8 illustrates the method for reading the constant current values of a constant current device such that it functions as an analog memory device.
- a constant current device such that it functions as an analog memory device.
- V ⁇ positive voltage
- FIG. 4 illustrates the constant current device
- FIG. 5 illustrates the constant current amplitude decrease
- Applying a positive voltage such as lines 60, 70, and 80 of FIG.
- FIG. 8 graphically illustrates V a , V b , and V c .
- V a the positive voltage which was applied to achieve V a , V b , and V c can be determined.
- the constant current value V a allows the calculation of the positive V ⁇ that was applied to cause V a .
- V b and V c allow the calculation ofthe positive V : that was applied to cause V b and V c .
- Each corresponding constant current value, V a , V b , and V c for instance, can then be stored as a separate memory state for the device.
- the embodiments described above refer to the formation of only one chalcogenide constant current structure 100 or 101, it must be understood that the invention contemplates the formation of any number of such chalcogenide constant current structures.
- a plurality of chalcogenide constant current structures can be fabricated and provided and operated with a plurality of elements as a non-limiting example.
- the chalcogenide glass constant current structure 100 or 101 can be utilized in many electronic devices.
- the methods and operation ofthe structures disclosed above can be used in any device whenever it is desired to have a constant current maintaining device that maintains a constant current over a wide range of applied voltages.
- a typical processor based system which includes a constant current device according to the present invention is illustrated generally at 500 in FIG. 9.
- a processor based system is exemplary of a system having digital circuits which could include constant current devices. Without being limiting, such a system could include a computer system, camera system, scanner, machine vision, vehicle navigation, video phone, surveillance system, auto focus system, star tracker system, motion detection system, image stabilization system and data compression system for high-definition television, all of which can utilize the present invention.
- a processor based system such as a computer system, for example generally comprises a central processing unit (CPU) 544, for example, a microprocessor, that communicates with an input/output (I/O) device 546 over a bus 552.
- the constant current device 542 also communicates with the system over bus 552.
- the computer system 500 also includes random access memory (RAM) 548, and, in the case of a computer system may include peripheral devices such as a floppy disk drive 554 and a compact disk (CD) ROM drive 556 which also communicate with CPU 544 over the bus 552.
- Constant current device 542 is preferably constructed as an integrated circuit containing at least one chalcogenide glass layer and a metal- containing layer, as previously described with respect to FIGS. 1-&. It may also be desirable to integrate the processor 554, constant current device 542 and memory 548 on a single IC chip.
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CN2004800123595A CN1784642B (en) | 2003-03-12 | 2004-03-12 | Chalcogenide constant current device,and its method of fabrication and operation |
JP2006507104A JP5047612B2 (en) | 2003-03-12 | 2004-03-12 | CHALCOGENIDE GLASS CONSTANT ELEMENT, ITS MANUFACTURING AND OPERATION METHOD |
EP04720352A EP1609034A2 (en) | 2003-03-12 | 2004-03-12 | Chalcogenide glass constant current device, and its method of fabrication and operation |
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US10/386,028 US6813178B2 (en) | 2003-03-12 | 2003-03-12 | Chalcogenide glass constant current device, and its method of fabrication and operation |
US10/386,028 | 2003-03-12 |
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- 2004-03-12 WO PCT/US2004/007514 patent/WO2004081617A2/en active Application Filing
- 2004-06-28 US US10/876,664 patent/US6912147B2/en not_active Expired - Lifetime
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2005
- 2005-01-13 US US11/033,873 patent/US7315465B2/en not_active Expired - Lifetime
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2007
- 2007-01-17 US US11/653,883 patent/US7542319B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000048196A1 (en) | 1999-02-11 | 2000-08-17 | Arizona Board Of Regents | Programmable microelectronic devices and methods of forming and programming same |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011101025A (en) * | 2005-02-28 | 2011-05-19 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JP2007067403A (en) * | 2005-08-30 | 2007-03-15 | Ovonyx Inc | Method of shaping phase-change layer in phase-change memory cell |
US20120298946A1 (en) * | 2005-08-30 | 2012-11-29 | Michele Magistretti | Shaping a Phase Change Layer in a Phase Change Memory Cell |
US9337422B2 (en) | 2013-04-05 | 2016-05-10 | Korea Institute Of Science And Technology | Chalcogenide switching device using germanium and selenium and manufacturing method thereof |
Also Published As
Publication number | Publication date |
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TWI253683B (en) | 2006-04-21 |
KR100721778B1 (en) | 2007-05-25 |
US20040233728A1 (en) | 2004-11-25 |
EP1864951A3 (en) | 2008-05-21 |
CN101807666A (en) | 2010-08-18 |
US20070201255A1 (en) | 2007-08-30 |
US7315465B2 (en) | 2008-01-01 |
WO2004081617B1 (en) | 2005-11-10 |
CN1784642B (en) | 2010-04-28 |
US6912147B2 (en) | 2005-06-28 |
US20050133778A1 (en) | 2005-06-23 |
JP5047612B2 (en) | 2012-10-10 |
EP1609034A2 (en) | 2005-12-28 |
CN1784642A (en) | 2006-06-07 |
KR100766678B1 (en) | 2007-10-15 |
US20040179390A1 (en) | 2004-09-16 |
EP1864951A2 (en) | 2007-12-12 |
KR20070028544A (en) | 2007-03-12 |
KR20050108388A (en) | 2005-11-16 |
CN101807666B (en) | 2015-03-18 |
US6813178B2 (en) | 2004-11-02 |
JP2006522477A (en) | 2006-09-28 |
TW200426918A (en) | 2004-12-01 |
WO2004081617A3 (en) | 2005-09-29 |
US7542319B2 (en) | 2009-06-02 |
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