WO2004075310A3 - Solid-state piezoelectric motion transducer - Google Patents

Solid-state piezoelectric motion transducer Download PDF

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Publication number
WO2004075310A3
WO2004075310A3 PCT/US2004/004042 US2004004042W WO2004075310A3 WO 2004075310 A3 WO2004075310 A3 WO 2004075310A3 US 2004004042 W US2004004042 W US 2004004042W WO 2004075310 A3 WO2004075310 A3 WO 2004075310A3
Authority
WO
WIPO (PCT)
Prior art keywords
motion
motion transducer
solid
state piezoelectric
generating
Prior art date
Application number
PCT/US2004/004042
Other languages
French (fr)
Other versions
WO2004075310A2 (en
Inventor
Peter J Schiller
Original Assignee
Triad Sensors Inc
Peter J Schiller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triad Sensors Inc, Peter J Schiller filed Critical Triad Sensors Inc
Publication of WO2004075310A2 publication Critical patent/WO2004075310A2/en
Publication of WO2004075310A3 publication Critical patent/WO2004075310A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

The present invention provides a solid-state piezoelectric motion transducer device formed by thin films. The motion transducer is used for generating an electrical signal output proportional to motion quantities such as acceleration, vibration, and rotation. The motion transducer is also used for generating motion in response to applied electrical input signals. The precision thin-film piezoelectric elements (13-20) are configured and arranged on a semi-rigid structure (1, 7) with a high degree of symmetry, thereby providing improved correlation between the electrical input or output signal quantities and the associated mechanical motion.
PCT/US2004/004042 2003-02-13 2004-02-12 Solid-state piezoelectric motion transducer WO2004075310A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44718903P 2003-02-13 2003-02-13
US60/447,189 2003-02-13

Publications (2)

Publication Number Publication Date
WO2004075310A2 WO2004075310A2 (en) 2004-09-02
WO2004075310A3 true WO2004075310A3 (en) 2005-02-03

Family

ID=32908415

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/004042 WO2004075310A2 (en) 2003-02-13 2004-02-12 Solid-state piezoelectric motion transducer

Country Status (1)

Country Link
WO (1) WO2004075310A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6098461A (en) * 1994-09-28 2000-08-08 Wacoh Corporation Acceleration sensor using piezoelectric element
US20020040602A1 (en) * 1994-12-29 2002-04-11 Kazuhiro Okada Multi-axial angular velocity sensor
JP2002350138A (en) * 2001-05-28 2002-12-04 Wacoh Corp Detector of both of acceleration and angular velocity
WO2004015429A1 (en) * 2002-08-08 2004-02-19 Triad Sensors, Inc. Solid-state vibrating acceleration sensor device and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6098461A (en) * 1994-09-28 2000-08-08 Wacoh Corporation Acceleration sensor using piezoelectric element
US20020040602A1 (en) * 1994-12-29 2002-04-11 Kazuhiro Okada Multi-axial angular velocity sensor
JP2002350138A (en) * 2001-05-28 2002-12-04 Wacoh Corp Detector of both of acceleration and angular velocity
WO2004015429A1 (en) * 2002-08-08 2004-02-19 Triad Sensors, Inc. Solid-state vibrating acceleration sensor device and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 04 2 April 2003 (2003-04-02) *

Also Published As

Publication number Publication date
WO2004075310A2 (en) 2004-09-02

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