WO2004057408A3 - Deformable-mirror cooling - Google Patents

Deformable-mirror cooling Download PDF

Info

Publication number
WO2004057408A3
WO2004057408A3 PCT/GB2003/005530 GB0305530W WO2004057408A3 WO 2004057408 A3 WO2004057408 A3 WO 2004057408A3 GB 0305530 W GB0305530 W GB 0305530W WO 2004057408 A3 WO2004057408 A3 WO 2004057408A3
Authority
WO
WIPO (PCT)
Prior art keywords
pair
conduit
substrate
deformable
actuators
Prior art date
Application number
PCT/GB2003/005530
Other languages
French (fr)
Other versions
WO2004057408A2 (en
Inventor
Michael Stewart Griffith
Nicholas John Archer
Leslie Charles Laycock
Original Assignee
Bea Systems Plc
Michael Stewart Griffith
Nicholas John Archer
Leslie Charles Laycock
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0230038A external-priority patent/GB0230038D0/en
Priority claimed from GB0230040A external-priority patent/GB0230040D0/en
Priority claimed from GB0310421A external-priority patent/GB0310421D0/en
Application filed by Bea Systems Plc, Michael Stewart Griffith, Nicholas John Archer, Leslie Charles Laycock filed Critical Bea Systems Plc
Priority to AU2003295133A priority Critical patent/AU2003295133A1/en
Publication of WO2004057408A2 publication Critical patent/WO2004057408A2/en
Publication of WO2004057408A3 publication Critical patent/WO2004057408A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

This invention relates to a deformable mirror that is provided with cooling. A deformable mirror is provided comprising a reflective surface provided on a substrate and supported by a pair of actuators; wherein the pair of actuators are hollow thereby to define a conduit with a pair of openings for access to the conduit, the substrate has a passage with a pair of orifices for access to the passage, an opening of each of the pair of actuators being in fluid communication with one of the orifices of the substrate such that, in use, a cooling circuit is provided where fluid coolant may flow through the conduit of one actuator into the passage of the substrate and out through the conduit of the other actuator.
PCT/GB2003/005530 2002-12-23 2003-12-18 Deformable-mirror cooling WO2004057408A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003295133A AU2003295133A1 (en) 2002-12-23 2003-12-18 Deformable-mirror cooling

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GB0230038A GB0230038D0 (en) 2002-12-23 2002-12-23 Deformable-mirror holder
GB0230038.2 2002-12-23
GB0230040.8 2002-12-23
GB0230040A GB0230040D0 (en) 2002-12-23 2002-12-23 Deformable-mirror cooling
GB0310421.3 2003-04-30
GB0310421A GB0310421D0 (en) 2002-12-23 2003-04-30 Deformable-mirror cooling

Publications (2)

Publication Number Publication Date
WO2004057408A2 WO2004057408A2 (en) 2004-07-08
WO2004057408A3 true WO2004057408A3 (en) 2004-11-11

Family

ID=32685760

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/005530 WO2004057408A2 (en) 2002-12-23 2003-12-18 Deformable-mirror cooling

Country Status (2)

Country Link
AU (1) AU2003295133A1 (en)
WO (1) WO2004057408A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109656015B (en) * 2019-01-25 2021-04-13 中国工程物理研究院激光聚变研究中心 Method for improving wavefront distortion correction precision of optical system

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007038872A1 (en) * 2007-08-16 2009-02-26 Seereal Technologies S.A. Imaging device for influencing incident light
EP2189832A1 (en) * 2008-11-20 2010-05-26 BAE Systems PLC Deformable Mirror Suspension
US8699113B2 (en) 2008-11-20 2014-04-15 Bae Systems Plc Deformable mirror suspension
FR3096511B1 (en) * 2019-05-22 2021-07-02 Amplitude Systemes Optical component mount and associated light beam control system
DE102020210026A1 (en) * 2020-08-07 2022-02-10 Carl Zeiss Smt Gmbh Projection exposure system with temperature control device
DE102022203395A1 (en) 2022-04-06 2023-04-06 Carl Zeiss Smt Gmbh EUV mirror, optical system and method for operating an optical system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657358A (en) * 1985-08-23 1987-04-14 Itek Corporation Cooled deformable mirror
US5037190A (en) * 1990-07-27 1991-08-06 Litton Systems, Inc. Fusible link actuators for deformable mirrors
US5535043A (en) * 1994-08-22 1996-07-09 Hughes Aircraft Company Replaceable actuator assembly for optical mirror with kinematic mount

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657358A (en) * 1985-08-23 1987-04-14 Itek Corporation Cooled deformable mirror
US5037190A (en) * 1990-07-27 1991-08-06 Litton Systems, Inc. Fusible link actuators for deformable mirrors
US5535043A (en) * 1994-08-22 1996-07-09 Hughes Aircraft Company Replaceable actuator assembly for optical mirror with kinematic mount

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IKRAMOV A V ET AL: "BIMORPH ADAPTIVE MIRROR", SOVIET JOURNAL OF QUANTUM ELECTRONICS, AMERICAN INSTITUTE OF PHYSICS. WOODBURY, NY, US, vol. 22, no. 2, 1 February 1992 (1992-02-01), pages 163 - 166, XP000273608 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109656015B (en) * 2019-01-25 2021-04-13 中国工程物理研究院激光聚变研究中心 Method for improving wavefront distortion correction precision of optical system

Also Published As

Publication number Publication date
AU2003295133A1 (en) 2004-07-14
WO2004057408A2 (en) 2004-07-08
AU2003295133A8 (en) 2004-07-14

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