WO2004053780A1 - Dispositif et procede pour la detection d'emissions photoniques de transistors - Google Patents

Dispositif et procede pour la detection d'emissions photoniques de transistors Download PDF

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Publication number
WO2004053780A1
WO2004053780A1 PCT/US2003/038616 US0338616W WO2004053780A1 WO 2004053780 A1 WO2004053780 A1 WO 2004053780A1 US 0338616 W US0338616 W US 0338616W WO 2004053780 A1 WO2004053780 A1 WO 2004053780A1
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Prior art keywords
photon
transistor
photons
integrated circuit
emissions
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PCT/US2003/038616
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English (en)
Inventor
Romain Desplats
Philippe Perdu
Ketan J. Shah
Theodore Lundquist
Cathy Kardach
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Credence Systems Corporation
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Priority to AU2003297662A priority Critical patent/AU2003297662A1/en
Publication of WO2004053780A1 publication Critical patent/WO2004053780A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2846—Fault-finding or characterising using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's

Definitions

  • the present invention involves an apparatus and method for detecting photon emissions from one or more transistors, and more particularly involves an apparatus and method for rapidly discriminating between background photon emissions and transistor photon emissions, automatically identifying one or more transistors from photon emission data, and generating timing information for the identified transistors.
  • the present invention also involves an apparatus and method for processing integrated circuit computer aided design layout data to identify transistors and define photon emission detection channels as a function of the identified transistors.
  • CMOS transistors in various logical arrangements to perform the functions of the IC.
  • the physical size of CMOS transistors is continually shrinking, and gate length as small as 0.13 microns is becoming common. Testing such small discrete elements of an IC is difficult or impossible to perform by physically probing the IC. Moreover, physically probing the IC can easily damage it.
  • CMOS circuits (hereafter "the '545 patent") entitled “Noninvasive Optical Method for Measuring Internal Switching and Other Dynamic Properties of CMOS Circuits,” which is hereby incorporated by reference in its entirety as though fully set forth herein.
  • Fig. A (Background) is a diagram of a CMOS transistor 10 emitting photons 12.
  • the ⁇ 545 patent describes a technology that can detect and record the location and time of photon emissions from a switching CMOS transistor.
  • a commercially available probe system that employs aspects of the technology described in the ⁇ 545 patent is the NPTest or Schlumberger LOS PICA (Picosecond Imaging Circuit Analysis) probe system.
  • CMOS transistors in particular, can emit light when current flows in the channel region.
  • the high fields ⁇ 105 V/cm
  • the high energy electrons have some probability of losing this energy in the form of photons.
  • photon emission is generally synchronous with current flowing in the channel in the presence of high electric fields.
  • Fig. B (Background) is a diagram illustrating an example of a photon emission image from the LDS PICA probe system.
  • the image of photon emission data is shown overlaid on a laser scanning microscope (LSM) image of the IC for which the photon emission data was collected.
  • the portion of the IC shown in the LSM image is a four-line inverter block 14 comprising 20 CMOS transistor pairs.
  • a CMOS inverter comprises a complementary pair of an NMOS (or n-channel) transistor and a PMOS (or p-channel) transistor.
  • the dark generally vertical lines correspond with CMOS transistor pairs 16 in the inverter chain.
  • one portion of the top first line of the inverter chain comprises a first CMOS transistor pair 18 with a first p-channel region 20 arranged above a first n-channel region 22, and one portion of the second line, below the first line, comprises a second CMOS transistor pair 24 with a second n-channel region 26 arranged above a second p-channel region 28.
  • the n-channel regions of the inverters tend to emit more photons than the p-channel regions.
  • the bright areas 30 surrounded by dark rings are clusters of photon emissions on the image of the photon emission data.
  • a high concentration of photon emissions 32 appears adjacent the n-channel regions (22, 26) of the first and second CMOS transistor pairs (16, 24).
  • a person viewing the photon emission data overlaid on the LSM image might assume that the high concentration of photon emissions adjacent the transistors were emitted by the two transistors.
  • Some probe systems employing the "545 patent technology include a time and position resolved photon counting multiplier tube (PMT) to detect single photon emissions from a transistor.
  • PMT photon counting multiplier tube
  • 7 1 1 switching event is in the range of 10 " to 10 " photons per switching event per ⁇ m of gate width.
  • the quantum efficiency of the available PMT detectors is poor in the near infrared spectrum, but is higher in the visible spectrum.
  • Processing an IC to collect photon emissions involves removing some, but not all, of the silicon 34 (see Fig. A) over the transistor. The remaining silicon allows transmission of some near infrared spectrum, but blocks the visible spectrum. Thus, the transistors in an IC must perform millions of switches before it is likely that even one photon from each of the transistors is detected.
  • probe systems To exacerbate the very low probability of detecting a photon from a transistor, probe systems also detect background noise photons coming from the probe system itself and from other sources. Thus, transistor photon emissions are mixed with background photon emissions. In many instances, probe systems require the detection of 10 million photons or more (both from transistors and background) before a user can discern whether photons may be attributed to transistors or background. The detection of 10 million or more photons may take hours or days, which in some instances may be prohibitively long.
  • the photon emission data collected by a probe system may be used to determine the timing characteristics of transistors.
  • photon emission is synchronous with current flowing in the channel in the presence of high electric fields. Stated another way, photons are only emitted from a CMOS transistor when it is switching. Thus, the emission of photons from a transistor can be used to extract timing information about the transistor.
  • the probe system may be used to generate a histogram of the time when photon emissions were detected.
  • One drawback of conventional probe systems is that they lack the ability to process the photon emission data to automatically identify photons that were emitted by transistors.
  • GUI graphical user interface
  • Fig. C illustrates a histogram of the timing pattern for the photons within the channel illustrated in Fig. B.
  • the histogram shows ten photon emission peaks 38 every 10 nanoseconds or so. Each photon emission peaks comprises between about 160 and 200 detected photons at the various time intervals.
  • the histogram also shows numerous other photon emission detections. Because photons emitted from transistors occur at regular intervals and in generally the same location, when enough photon emissions are detected (e.g., 10 million or more) a pattern of photon emission peaks (photon emissions that occurred at about the same time in the same area) may emerge over the background noise for a well-defined channel. Thirty-six million photons were collected to generate the image illustrated in Fig.
  • the user may assume that the photon emissions detected at a regular interval are from one or more switching transistors.
  • the timing pattern of the photon emission peaks may be used to determine the switching frequency of the transistor, the time when the transistor switched, and may be compared to other transistor photon emission histograms.
  • Implementations of the present invention dramatically reduce the time required to acquire a sufficient number of transistor emitted photons to extract useful information.
  • Implementations of the present invention can be used to rapidly discriminate between photons emitted from transistors and background photon emissions.
  • Implementations of the present invention may also be used to rapidly extract transistor timing information.
  • data acquisition times can be reduced from several hours or days, to only several minutes. With such reductions in acquisition time, emission data from an entire IC may be obtained in the time it would take to obtain data for only a single discrete area of an IC, and probe systems may be used to acquire data for numerous ICs in the time it would take to acquire data for a single IC.
  • chip makers can bring new products to market faster than with conventional probe systems, can identify and rectify faults faster than with conventional probe systems, and can realize numerous other advantages.
  • Implementations of the present invention also automatically identify transistors from photon emission data. Upon automatic identification of transistors, histograms for all identified transistors may be automatically generated. This eliminates the need for a user to visually determine which photon data might be from a transistor, manually select the photon emission data, and then generate a histogram. Moreover, the number of photons required to obtain highly accurate transistor timing information is dramatically reduced.
  • On aspect of the present invention involves a method for analyzing photon emission data to discriminate between photons emitted from a transistor and photons emitted from other sources, the photon emission data comprising a first photon emission and at least one second photon emission, each photon emission comprising a spatial component corresponding with the space where each photon was detected and a temporal component corresponding with the time when each photon was detected.
  • the method comprises correlating the first photon emission with the at least one second photon emission; and assigning a weight to the first photon emission as a function of the operation of correlating.
  • the operation of correlating the photon emissions may further comprise comparing the spatial component of the first photon emission with the spatial component of the at least one second photon emission to determine if the spatial components are within a spatial range.
  • the operation of correlating the photon emissions may further comprise comparing the temporal component of the first photon emission with the temporal component of the at least one second photon emission to determine if the temporal components are within a temporal range.
  • the operation of assigning a weight to the first photon emission may comprise assigning one weight value for each of the at least one second photon emissions that are spatially correlated, that are temporally correlated, or that are both spatially and temporally correlated.
  • Another aspect of the present invention involves a method for analyzing photon emissions to discriminate between photons emitted from a transistor and photons emitted from other sources, the photon emissions collected from a transistor using a detector having a transit time spread, the collected photon emissions comprising a spatial component and a temporal component corresponding with the space where each photon was detected and the time when each photon was detected.
  • the method comprises receiving an indication of a group of photon emission data, the group being a subset of the collected photon emission data; processing the group of photon emission data to provide at least one temporal subgroup of photons having similar temporal characteristics; and determining a likelihood that photons within the temporal subgroup were emitted by a transistor.
  • the group of photon emission data may comprises a spatial subset of the collected photon emission data wherein the spatial subset of the collected photon emission data comprises each photon emission within a spatial range.
  • the operation of processing the group of photon emission data to provide at least one temporal subgroup of photons having similar temporal characteristics may further involve aggregating photon emissions in discrete time bins, or convolving the group of photon emission data with a normalized gate function, a triangle function, a Gaussian function, or the like.
  • the operation of determining a likelihood that photons within the temporal subgroup were emitted by a transistor may further involve N-level thresholding or probability thresholding as described herein.
  • Another aspect of the present invention involves a method for analyzing photon emissions collected from a transistor discriminate between photons emitted from a transistor and photons emitted from other sources, the collected photon emissions comprising a spatial component and a temporal component corresponding with the space where each photon was detected and the time when each photon was detected.
  • the method comprises spatially correlating the collected photon emissions data; temporally correlating the collected photon emission data; and determining a likelihood that all or a portion of the spatially correlated photon emission data originated from a transistor photon emission.
  • the spatial correlation may involve a method for autochanneling as discussed with reference to Figs. 15 and 16.
  • the temporal correlation may involve the operations discussed with reference to Figs. 3A - 3B, or may involved some of the operations discussed with reference to Figs. 9 and 11.
  • the likelihood operation may involve the operations discussed with reference to Figs. 3A-3B and/or the operations discussed with reference to Figs. 5A-5C.
  • the likelihood operations may also involve assigning a weight to the photons as a function of the spatial and or temporal correlations.
  • aspects of the present invention may also involve any of the operations and methods described with reference to Figs. 1-16, individually or in combination.
  • aspects of the present invention involve the method for autochanneling described with reference to Figs. 15 and 16.
  • a probe system or other system or apparatus conforming to the present invention may comprise program code, which when executed, performs some or all of the operations, alone or in combination, discussed in regard to the above described methods, or discussed in the detailed description set forth below.
  • the program code may be implemented in non- volatile memory.
  • Yet another aspect of the invention involves a method for reducing diagnostic time of a photon detecting integrated circuit tester.
  • the method involves processing a CAD database associated with an integrated circuit and defining at least one CAD layer from the CAD database, the at least one CAD layer identifying at least one expected photon emission source of the integrated circuit.
  • the method may further comprises the operation of aligning the tester with the at least one CAD layer to correlate the tester with the at least one expected photon emission source.
  • the method may also further comprise identifying photon emissions from the at least one expected photon emission source, the photon emissions detected by the tester during operation of the integrated circuit.
  • the operation of identifying photon emissions from the at least one expected photon emission source comprises receiving photon emission through the a semiconductor substrate of the integrated circuit. Operation may be through a test loop, h another aspect of the invention, the method involves determining at least one operating characteristic of the at least one expected photon emission source. In one implementation, the operation of determining the at least one operating characteristic comprises determining timing measurements employing a single photon counting technique. In yet another aspect of the invention, the method comprises comparing the at least one operating characteristic of the at least one expected photon emission source with a simulation of the operating integrated circuit. The simulation may be in an optical waveform format or in a voltage level format.
  • the expected emission may be from a transistor, such as a PMOS, NMOS, jFET, and pFET type transistor.
  • the operation of comparing the operating characteristics of the least one transistor includes identifying transistors that are and are not working in accordance with the simulation, identifying emission peaks of transistors that are or are not present in the simulation, identifying differences between operating characteristics of the at least one expected photon emission source and the simulation.
  • the operation of determining the at least one operating characteristic of the at least one expected photon emission source comprises determining a commutation timing of the at least one transistor.
  • the tester employing aspects of the present invention may comprise an optical detector, a laser scanning microscope, a picosecond imaging circuit analysis detector, a static emission detector, a superconducting single photon detector, and the like.
  • Another aspect of the present invention involves a method of processing an integrated circuit CAD database for use in testing the integrated circuit with an imaging optical detector comprising: identifying the location of at least one transistor in the integrated circuit CAD database; and defining at least one photon detection location as a function of the location of the at least one transistor.
  • the method may further involve identifying a location of a gate associated with the at least one transistor, identifying the location of a source associated with the at least one transistor, identifying the location of a drain associated with the at least one transistor.
  • the method may further define the operation of defining at least one photon detection location as a function of the locations of the at least one transistor comprises defining at least one photon detection location as a function of the location the gate, the drain, and the source or the at least one transistor.
  • the at least one transistor may be a PMOS transistor, a NMOS transistor, jFET, pFET, etc.
  • the method may involve identifying whether the at least one photon detection location is associated with the PMOS or the NMOS transistor.
  • the operation of identifying the location of the at least one transistor in the integrated circuit CAD database may be performed using at least one Boolean operation.
  • the integrated circuit CAD database information comprises an identification of a NMOS gate, a NMOS drain, and a NMOS source.
  • the NMOS gate information includes a polysilicon polygon layer and a P substrate polygon layer
  • the NMOS drain information includes an N diffusion polygon layer and a P substrate polygon layer
  • the NMOS source layer includes an N diffusion polygon layer and a P substrate polygon layer.
  • the operation of identifying the location of the at least one transistor in the integrated circuit CAD database is performed using at least one Boolean operation further includes the operation of applying at least one Boolean operation to the NMOS gate information.
  • the NMOS Boolean operation may comprise:
  • NMOS gate Polysilicon polygon layer AND Psubstrate polygon layer;
  • NMOS Drain and Source Ndiffusion polygon layer AND Psubstrate polygon layer.
  • the method may further involves the operation of generating a CAD file with NMOS layer information as a function of the at least one Boolean operation.
  • the integrated circuit CAD database information further comprises an identification of a PMOS gate, a PMOS drain, and a PMOS source.
  • the PMOS gate information includes a polysilicon polygon layer and an Nwell polygon layer
  • the PMOS drain information includes a Pdiffusion polygon layer and a Nwell polygon layer
  • the NMOS source layer includes an Pdiffusion polygon layer and a Nwell polygon layer.
  • the operation of identifying the location of the at least one transistor in the integrated circuit CAD database is performed using at least one Boolean operation further includes the operation of applying the at least one Boolean operation to the PMOS gate information.
  • the PMOS Boolean operation may include:
  • PMOS gate Polysilicon polygon layer AND Nwell polygon layer
  • PMOS Drain and Source Pdiffusion polygon layer AND Nwell polygon layer.
  • a CAD file may be generated with NMOS layer information as a function of the at least one Boolean operation.
  • the at least one photon detection location comprises a generally rectangular photon emission detection window.
  • the generally rectangular window may define an area associated with at least a portion of a gate region of a MOS transistor.
  • the generally rectangular window may further define an area associated with at least a portion of the gate region of a MOS transistor and an adjacent pinch-off region.
  • the method may involve scaling the generally rectangular window.
  • the generally rectangular window may be scaled in the range of between about 2 microns and about 3 microns.
  • the generally rectangular window may be symmetrically scaled.
  • the method may further involve: testing the integrated circuit with an optical detector comprising: obtaining an image of the integrated circuit; aligning the image with the CAD database information for the integrated circuit; aligning the at least one photon detection location with the location of the at least one transistor; and detecting photon emission in the at least one photon detection location during operation of the integrated circuit.
  • the method may further comprise examining photon emissions in the at least one photon detection location, obtaining photon emissions during operation of the integrated circuit in a test loop.
  • the optical detector comprises an imaging optical detector.
  • the imaging optical detector may comprise a picosecond imaging circuit analysis detector.
  • the method may further comprise comparing the photon emissions detected in the at least one photon detection location during operation of the integrated circuit with at least one expected result.
  • the operation of comparing the photon emissions detected in the at least one photon detection location during operation of the integrated circuit with at least one expected result further comprises determining faults and defects of the integrated circuit, debugging the design of the integrated circuit, separating design errors and process defects, and identifying an inaccurate model of the integrated circuit.
  • FIG. 1 is a diagram illustrating a CMOS transmitter emitting photons
  • Fig. B (Background) is a diagram of an image of photon emission data taken from a conventional probe system, the photon emission data overlaid on a laser scanning microscope diagram, the diagram further illustrating a manually defined channel around one concentration of photon emissions;
  • Fig. C (Background) is a histogram of the photon emission data within the channel illustrated in Fig. A, the histogram having time defined along the x-axis and the number of photons defined along the y-axis;
  • Fig. 1 is a block diagram of a probe system, in accordance with one embodiment of the present invention.
  • Fig. 2 is a flowchart illustrating the operations involved in a method for analyzing photon emission data to determine the likelihood that the photons were emitted by a transistor, in accordance with one embodiment of the present invention
  • Fig. 3 A is a flowchart illustrating a method for processing photon emission data to account for jitter in the detector by aggregating photon emissions in time bins, in accordance with one embodiment of the present invention
  • Fig. 3B is a flowchart illustrating a method for processing photon emission data to account for jitter in the detector by convolving the photon emission data with a triangle function, Guasssian function, or the like, in accordance with one embodiment of the present invention
  • Fig. 3C is a flowchart illustrating a method for processing photon emission data to account for jitter in the detector by convolving the photon emission data with a normalized gate function, in accordance with one embodiment of the present invention
  • Fig. 4 A is a diagram illustrating a histogram of photon emission recordation timing, the diagram further illustrating a plurality of time bins, in accordance with one embodiment of the present invention
  • Fig. 4B is a diagram of the histogram of Fig. 4A, after the photons are collected in the time bin and summed, in accordance with one embodiment of the present invention
  • Fig. 5A is a flowchart illustrating a method for determining a likelihood that photons were emitted by a transistor, in accordance with one embodiment of the present invention
  • Fig. 5B is a flowchart illustrating an alternative method for determining a likelihood that photons were emitted by a transistor, in accordance with one embodiment of the present invention
  • Fig. 5C is a flowchart illustrating a second alternative method for determining a likelihood that photons were emitted by a transistor, in accordance with one embodiment of the present invention
  • Fig. 6 is a graph illustrating the confidence or probability relationship between the background photon emission of a probe system detector and the number of photons detected in a discrete time period, in accordance with one embodiment of the present invention
  • Fig. 7 A is a histogram of the number of photons collected at various time points for a portion of 80,000 total collected photons at a sampling rate of 2.5 ps, for 0.18 um CMOS technology arranged in an inverter configuration running a test sequence at 100 MHz in a 100 ns loop;
  • Fig. 7B is a histogram of the photon emission data illustrated in Fig. 7 A processed in accordance with the method of Fig. 3 A;
  • Fig. 7C is a histogram of the photon emission data illustrated in Fig. 7A processed in accordance with the method of Fig. 3C;
  • Fig. 7D is a histogram of the photon emission data illustrated in Fig. 7A processed in accordance with the methods of Fig. 3 A and Fig. 5 A
  • Fig. 7E is a histogram of the photon emission data illustrated in Fig. 7 A processed in accordance with the methods of Fig. 3C and Fig. 5B;
  • Fig. 8 is a flowchart illustrating a method for automatically identifying transistors from photon emission data and obtaining histogram data for the identified transistors by correlating photons spatially, temporally, or spatially and temporally, in accordance with one embodiment of the present invention
  • Fig. 9 is a flowchart illustrating a method for assigning a weight to a photon emission as a function of the spatial correlation with other photons, a function of the temporal correlation with other photons, and as a function of the spatial and temporal correlation with other photons, in accordance with one embodiment of the present invention
  • Fig. 10A is a diagram illustrating one method for spatially correlating photon emissions, in accordance with one embodiment of the present invention.
  • Fig. 10B is a diagram illustrating one method for temporally correlating photon emissions, in accordance with one embodiment of the present invention
  • Fig. 11 is a flowchart illustrating a method of assigning a weight to a photon emission as a function of the spatial and temporal correlation with other photons, in accordance with one embodiment of the present invention
  • Fig. 12A is a diagram illustrating a method for spatially and temporally correlating photon emissions, in accordance with one embodiment of the present invention
  • Fig. 12B is a diagram illustrating a second method for spatially and temporally correlating photon emissions, in accordance with one embodiment of the present invention
  • Fig. 13 is a flowchart illustrating a method for establishing a threshold value, photons having a weight above which are attributed to transistor emissions, in accordance with one embodiment of the present invention
  • Fig. 14A is a histogram illustrating photon emissions around one discrete time point for conventionally obtained photon emission data
  • Fig. 14B is a histogram illustrating photon emissions around one discrete point for photon emission data correlated in accordance with the method illustrated in Fig. 13;
  • Fig. 15 is a flowchart illustrating the operations involved in a method for auto channeling, in accordance with one embodiment of the present invention.
  • Fig. 16 is a diagram illustrating the method for auto channeling described with reference to Fig. 15;
  • Fig. 17 is a flowchart illustrating the operations involved in an alternative method for auto channeling or automatically defining a photon emission window as a function of processing an IC CAD database, in accordance with one embodiment of the present invention
  • Fig. 18 is a simulation image of an NMOS device during commutation, the simulation image illustrating the high electric field and electron velocity in the region between the gate and drain where photon emissions may occur;
  • Fig. 19A is a CAD polygon layer diagram for a CMOS inverter
  • Fig. 19B is a section view of Fig. 19 A;
  • Fig. 19C is a schematic diagram of the inverter of Fig. 19C;
  • Fig. 20 is a representative diagram illustrating the scaling or resizing of a photon detection window.
  • the discrimination between transistor photon emissions and background photon emissions can be used to identify a likelihood that photons were emitted from a transistor, identify a single transistor, identify many transistors in an entire IC or a portion of an IC, and extract timing information for the transistor or transistors. With this information, it is possible to determine whether transistors and circuits are functioning properly and determine whether a test has been properly configured.
  • Fig. 1 is a schematic block diagram illustrating a diagnostic and testing optical imaging probe system 100 (hereafter “probe system”) for gathering and recording photon emissions from one or more complimentary metal oxide semiconductor (CMOS) transistors in an IC.
  • probe system optical imaging probe system 100
  • CMOS complimentary metal oxide semiconductor
  • One such probe system that may employ aspects of the present invention is described in U.S. Patent 5,940,545 entitled “Noninvasive Optical Method for Measuring Internal Switching and Other Dynamic Properties of CMOS circuits.”
  • a commercially available probe system that may employ aspects of the present invention is the NPTest or Schlumberger IDS PICA (Picosecond Imaging Circuit Analysis) probe system.
  • the probe system detects and records the time and position of photons being emitted from switching CMOS transistors.
  • the probe system 100 includes an IC imaging station 102 that provides optical image data of an IC under test.
  • the probe system 100 also includes a testing platform 104 that provides a testing sequence to the IC under test.
  • the testing sequence provides a known signal pattern at the inputs of the IC that generates a known output pattern at the outputs of a properly functioning IC. Due to the low probability of detecting a photon emission, the testing sequence may be looped for a period of time.
  • the IC under test executes various operations, which involves the commutation or switching of CMOS transistors.
  • the IC imaging station 102 is configured to detect the emitted photon, and transmit the spatial location and the time at which it received the photon to an acquisition electronics platform 106.
  • a graphical user interface (GUI) 108 is accessible through a workstation connected with the probe system 100. The GUI may be used to manipulate photon emission data collected by the IC imaging station 102.
  • the IC imaging station 102 includes a detector that has a field of view of 4096 pixels by 4096 pixels, which may be used to obtain photon emission data for an IC area of about 160 microns by 160 microns.
  • Such an area may include any number of discrete CMOS transistors.
  • the physical dimensions of CMOS transistor gate lengths are constantly shrinking. Currently, a CMOS transistor gate length may be as small as 0.13 microns. Hence, taking into account some space between transistors and the presence of ring guards, there could be thousands of CMOS transistors in the 160 micron by 160 micron portion of the IC within the field of view.
  • the field of view includes an x-axis (the horizontal axis) and a y-axis (the vertical axis).
  • the pixel location that captures an emitted photon includes an x- position and y-position.
  • the (x, y) position where the photon is detected is transmitted to the acquisition electronics 106.
  • the probe system 100 captures the time (t) at which the photon is detected, which is also transmitted to the acquisition electronics 106.
  • the pixel location associated with the capture of an emitted photon is above the transistor that emitted it.
  • the photon may not be detected directly above the portion of the transistor that emitted the photon because the photon may be emitted at an angle.
  • the time at which a photon is detected may be offset by the jitter of the detector.
  • the exact spatial and temporal location that a photon is detected may be different than the location and time of its transmission.
  • Fig. 2 is a flowchart illustrating the operations involved in a method for analyzing photon emission data captured by the probe system to discriminate between transistor photon emissions and background photon emissions, in accordance with one embodiment of the invention.
  • the method described with reference to Fig. 2 and other related figures and Fig. 8 and other related figures may be generally considered as methods for event detection.
  • the various methods described herein are discussed with reference to implementation in the probe system of Fig. 1.
  • the method illustrated in the Fig. 2 flowchart along with the other methods described herein, all in accordance with various aspects of the present invention, may also be implemented as executable software code.
  • the code may be adapted to run on the workstation connected with the probe system, run on a server connected to a network accessible by one or more processing devices, and on a standalone processing device (such as a personal computer, workstation, or the like).
  • the code may also be recorded on a computer readable medium, such as a floppy disk, CD-ROM, RAM, ROM, and the like.
  • a probe system employing aspects of the present invention may provide a conventional timing mode, which causes the probe system to obtain enough photon data to extract precise timing information for an IC under test as is known in the art, and an event detection mode configured to execute one or more of the methods described herein, alone or in combination, which causes the probe system to obtain enough photon data to determine whether a transistor is switching.
  • a probe system may employ a timing mode configured to cause the probe system to obtain photon data and process the photon data in accordance with an embodiment of the invention rather than conventional methods.
  • the probe system 100 obtains spatial and temporal characteristics for the photons detected while an IC is being operated (200).
  • a test sequence is run in a loop on the IC under test.
  • the IC imaging station 102 collects all photons from switching transistors and background emissions during the test sequence.
  • the photon emission data includes spatial and temporal characteristics for each photon detected by the detector while the IC is being tested.
  • the spatial information is provided as an x- coordinate and a y-coordinate corresponding with the pixel location that detected the photon.
  • the temporal information is provided as a time (t) value corresponding with the time that the photon was detected.
  • the field of view of the detector may include a thousand or more CMOS transistors.
  • the channel may be defined by using a mouse manipulated pointer to draw a rectangle around an area of an image generated as a function of the photon emission data.
  • the channel area is bounded by a range of x- values and a range of y-values, and all of the photons having an x- alue and y-value within the channel are included in the channel.
  • the subgroup or channel may be defined through a method for identifying transistors from photon emission data discussed below with reference to Figs. 8-16.
  • the methods described herein with regard to Figs. 2-7E process a subgroup of all of the photon emission data.
  • the methods described below with regard to Figs. 8-15 may process all of the photon emission data.
  • the photon emission data collected by the IC imaging station may be analyzed in accordance with the methods described herein while the testing sequence is running and photon emissions are being collected by the IC imaging station or the data may be analyzed after the testing loop has been completed.
  • the system processes the group of photon emissions to account for errors in the identification of the time at which the photons were detected (220).
  • an embodiment of the invention may take into account the background photon emission characteristics of the detector used to collect the photon emission data. Generally, if the background emission characteristics are understood, then the system may compare the photons in a particular group with the expected background photon emission characteristics and determine whether photons in the group are a part of the background emission or were likely emitted by transistors.
  • the spatial sub grouping of the photon emission data is processed to account for errors in the identification of the time at which a photon was detected (220).
  • Photon detectors such as the PMT detector used in the IDS PICA system, have some error in the identification of the time at which a photon was detected, which is referred to as TTS (transmit time spread) or "jitter.”
  • TTS transmit time spread
  • jitter a photon that arrives at the detector at time t may be identified as having been received at some time before t or after t.
  • Figs. 3A, 3B, and 3C are flowcharts illustrating various different ways to process photon emission data (referred to as "processed photon data") to account for the photon emission detection timing errors introduced by jitter.
  • Fig. 3A, 3B, and 3C are flowcharts illustrating various different ways to process photon emission data (referred to as "processed photon data") to account for the photon emission detection timing errors introduced by jitter.
  • FIG. 3 A is a flowchart illustrating a method involving the summation of photons falling with defined blocks of time.
  • Fig. 3B illustrates the application of various filters to process photon emission data.
  • Fig. 3C illustrates a method involving the convolution of photon emission data with a normalized gate function.
  • the methods discussed with reference to Figs. 3A-3C may alone provide event detection, in accordance with one embodiment of the invention.
  • further processing of the photon emission data in accordance with the methods described with reference to Figs. 5 A, 5B, and 5C may also be performed to provide event detection.
  • a flowchart is shown illustrating the operations involved in one method for processing the photon emission to account for the timing errors introduced by jitter.
  • the system segments the spatially grouped photon emission data into one or more discrete time bins (300).
  • the system then aggregates all of the photon emissions falling within one of the time bins (310).
  • Fig. 4A illustrates an example of a histogram for photon emission detection 110 and the time of their detection and a graphical illustration of a set of time bins 112.
  • a time bin defines a continuous range of time within the total range of time for the photon emission data being processed.
  • a plurality of time bins are defined such that all of the time bins account for at least the total range of time for the photon emission data being processed. For example, if a test sequence is run on an IC in a loop of 100 ns (nanoseconds), then the total range for the photon emission data collected for the IC will be 0 to 100 ns.
  • the time bins may also be defined so that they overlap, h a detector with a 75 ps jitter, for example, the temporal recordation of photons emitted at the same time in the loop, may actually be recorded within 37.5 ps on either side of the actual detection.
  • photons emitted from a single transistor at nearly the same time may be recorded within a range of 75 ps.
  • the present inventors recognized that background emissions are randomly spread about photon emission data both spatially and temporally. Thus, it is unlikely that there will be a high concentration of photon emission detections attributable to background in a discrete location spatially or temporally. Photons emitted from a transistor, however, are emitted from a spatially located transistor and at a temporal interval. Thus, even though photons may be deflected, emit at an angle, and emit from different spots on the transistor and even in the presence of jitter, photons emitted from a transistor are likely to be fairly closely grouped in both space and time. If a transistor photon emission occurs at the boundary between two time bins, then the photon might not be grouped with other photons emitted from the transistor. Thus, in some implementations of the present invention that employ time bins to compensate for error introduced by the detector, the time bins are defined in an overlapping manner so that transistor photon emissions might be grouped with other related transistor photon emissions.
  • each time bin has a 10 ps overlap with adjacent time bins. These time bins are arranged beginning from time zero and extending along the 100 ns loop of the histogram.
  • the first time bin 114 includes 0 ps to 75 ps
  • the second time bin 116 includes 65 ps to 140 ps
  • the third time bin 118 includes 130 ps to 205 ps, etc.
  • the arrangement of time bins shown in Fig. 4 A is just one possible arrangement, h another example, a time bin is defined as the same size as the jitter of the detector.
  • the time bins are defined around the sampling time points at the size of the jitter. If the sampling rate is 2.5 ps and the jitter is 80 ps, then the time bins would be 80 ps wide and centered around each sampling location. For 100 ns loop of photon emission data, the first time bin centered around the first sampling location (0 ps) would include 0 to 40 ps, the second time bin centered around the second sampling time (2.5 ps) would include 0 to 42.5 ps, the third time bin centered around the third sampling time (5 ps) would include 0 to 45 ps, etc.
  • program code running on the workstation implementing the present invention aggregates the photons in each time bin (310).
  • the aggregation is the sum of the photons in each bin. Therefore, if there are four photons in a time bin, then the time bin is associated with four photons.
  • the grouping and summation of photons in time bins compensates for the jitter introduced by the detector by capturing most or all of the photon emissions from a particular transistor in one time bin as opposed to being distributed across multiple discrete points.
  • Fig. 4B illustrates an example of the photon emission data associated with the histogram of Fig. 4A, after the photon emission data has been binned and summarized.
  • Two features of the binning and summarization operations are illustrated in Fig. 4B.
  • Fig. 4B it can be seen that in the seventh time bin 120, the three photons 126 are summed and centered in the time bin.
  • Second, in the overlap 128 between the eleventh 130 and twelfth 132 time bin (Fig.
  • the original data has one two-photon emission peakl34.
  • Fig. 4B due to the location of the two photon emission peak 134 in the overlap region 128, it can be seen that this emission peak 136 in the eleventh time bin 130 is summed with a second one-photon emission peak and centered in the eleventh time bin. It can also be seen that this emission peak was centered in the twelfth time bin.
  • the processed photon data is in condition for further processing to determine the likelihood that the photons were emitted by a transistor.
  • a flowchart is shown illustrating the operation involved in applying any one of various filters to the photon emission data to provide processed photon emission data accounting for the jitter in the detector.
  • filtering the photon emission data is a means to account for the timing errors introduced by jitter.
  • the filtering of the photon emission data comprises the convolution of the photon emission data with a specified function to obtain processed photon emission data (320).
  • the photon emission data is convolved with a triangle function with a full- width half maximum (FWHM) of 80 ps to provide processed photon emission data.
  • FWHM full- width half maximum
  • the photon emission data is convolved with a Gaussian function with a FWHM of 80 ps to provide processed photon emission data. Both filters perform low passband filtering to smooth the data. In a time region with transistor photon emissions spread within the TTS of the detector, the convolution will have the effect of averaging the emissions to raise them above the level of background emissions.
  • a flowchart is shown illustrating the operation involved in convolving the photon emission data with a normalized gate function (330), which provides processed photon emission data accounting for the jitter in the detector.
  • the convolution of the photon emission data with a normalized gate function is configured to provide a summation of the photons in a time window of 80 ps centered around each sampling point, which provides results similar to the binning and summation method discussed with reference to Fig. 3 A.
  • the binning and summing operation aggregates the photons in a time bin, so four photons detected at four sampling points within the bin, may become a single four photon count emission peak at one sampling point at the center of the bin.
  • the convolution of the processed photon emission data with a gate function in contrast would provide four, four- photon peaks at each of the sampling points where the unprocessed one-photon emission peaks exist.
  • Event detection involves the determination of whether a photon or photons were emitted by a transistor.
  • the processed photon emission data is further processed to determine the likelihood that all or some of the photons within the group (e.g., the defined channel region) were emitted by a transistor.
  • the determination of whether the photon emission data originated from a transistor involves a statistical analysis of the processed photon emission data that provides the likelihood or a probability that the photons were emitted from a transistor.
  • Figs. 5A-5C each illustrate a method for determining the likelihood or probability that all or part of the photon emission data is from a transistor.
  • Fig. 5 A illustrates a method of defining an N-threshold level above which the photons in the channel are likely emitted from a transistor.
  • Figs. 5B and 5C each illustrate a method of obtaining a probability that the photons within the channel were emitted by a transistor.
  • the methods in Figs. 5A-5C, along with the methods described earlier, provide various ways to rapidly discriminate between transistor photon emissions and background photon emissions.
  • a flowchart is shown illustrating the operations involved in obtaining a threshold level (N) above which photons are likely attributable to transistor emissions (referred to as "N-level thresholding").
  • the background photon emission level (background level) is determined (500).
  • the background level is the sum of the photons emitted from the detector and the photons arising from other background emission sources.
  • the photons arising from other background sources tends to be very weak and in some instances it may be assumed that the background level is only attributable to the detector. If a fairly short acquisition time is implemented so that most of the photons detected are from background emissions, then the background level may be estimated as the mean or the median of the number of photons in each time bin for data processed in accordance with the binning and summing operations described with reference to Fig. 3 A, or the number of photons at each sampling point for data processed through convolving the data as described with reference to Figs. 3B or 3C.
  • the noise level in the background emission is determined (505).
  • the noise can be evaluated by computing the standard deviation of the processed photon emission data.
  • the noise is the standard deviation in the number of photons in each time bin.
  • the noise is the standard deviation in the number of photons at each sampling point.
  • An integer "n” may be applied to the noise to adjust the threshold level to provide a greater or lesser certainty that photons detected above the threshold level may be attributed to transistor emissions (540).
  • the threshold level is determined (515).
  • the threshold value ( ⁇ ) is a function of the background levels and the noise, and defines a value above which photons are likely attributable to transistor emissions.
  • the noise involves the standard deviation of the background emission levels. Thus, if an n- value of three (3) is chosen, this would represent three times the standard deviation of the noise (three-sigma).
  • a threshold value of ⁇ with a three-sigma standard deviation, the confidence is 99.9% that photons above the threshold ⁇ are attributable to transistor emissions.
  • the variation in background photon emissions (or noise) is a small value, then the signals attributable to photon emissions will be quickly recognized in the processed photon emission data above the background emissions.
  • n- value may be used, which will reduce the threshold level. With a lower threshold level, it will take less time to acquire sufficient transistor photon emissions to exceed the threshold and have a high confidence level or likelihood that the photons were emitted by a transistor.
  • a larger n-value might be used to obtain the same confidence that the photon emissions are attributable to a transistor. Thus, greater background emission noise can result in longer acquisition times to reach a high confidence level (e.g., 99.9%).
  • a flowchart is shown illustrating the operations involved in determining a probability or likelihood that all or some photons in the processed photon data were emitted by a transistor.
  • This probability determination involves Poisson statistics. For any set of processed photon emission data, it is possible to determine the mean background photon emissions for the processed photon data and compute the probability of having N photons from background emissions. If it is assumed that the distribution of background photon emissions follows Poisson statistics, then the probability of having N photons attributable to background emissions (of the detector TTS wide) is given by:
  • the total number of photons detected (N) while the IC was being tested is determined (520).
  • the mean ( ⁇ ) or the median of the background photon emissions is determined (525).
  • the mean or the median of the background photon emissions is the mean or median of the number of photons in each time bin.
  • the mean or the median is taken for the number of photons at each sampling point.
  • the probability of the photons having been emitted from a transistor may be displayed (540).
  • the probability may be displayed collectively for the photons aggregated in a time bin, or may be displayed individually for the photon processed in accordance with the methods of Fig. 3B or Fig. 3C.
  • a higher probability that the photons were emitted by a transistor translates into a higher confidence that the photon emissions are attributable to a transistor and not background emission.
  • a cutoff may be applied to the probability to only display photons that meet or exceed the cutoff (545).
  • the cutoff is defined such that the probability of having photons below the cutoff level that are due to background emissions is so low that it is likely that some or all of the photons are attributable to transistor emissions.
  • the cutoff level is adjustable, in one example a photon emission is considered likely if:
  • Pr(N B ackground) ⁇ 0.1%, Or Pr(N T ransistor) 99.9%
  • the cutoff is set at 99.9%, so only photons with a 99.9% probability of having been emitted by a transistor are kept and displayed either in a photon index or histogram, or both. For example, if there are eight photons in the time bin and the probability of those photons being attributable to only background emissions is less than 0.1%, then the binned photon value will exceed the cutoff and be displayed.
  • the photon emission data may be processed with the bin width defined as the jitter or the TTS, ⁇ t ⁇ , of the detector. With a bin width equal to the jitter width, the average number of background emissions per bin is equal to:
  • a M R dk ' T acq dk T /At TTS
  • R dk dark counts/s (in the signal channel) ("dark count” refers to photons emitted by the detector)
  • SNR signal-to-noise ratio
  • the system can determine the average background photon emission for the processed photon data (570).
  • the average number of bins with more than N photons (580) is then equal to:
  • n(N) is the probability that the bin with ⁇ photons. are attributable to background emissions, so 1 - n(N) is the probability that the ⁇ photon bin is attributable to transistor emissions.
  • Fig. 6 is a graph illustrating 1 - n(N) as a function of the background emission rate of the detector.
  • the graph in Fig. 6 shows that as the background emission rate increases, more photon emissions must be collected to achieve a given likelihood that the photons were emitted by a transistor.
  • Fig. 7 A is a histogram of a full-sampling of data taken at a sampling rate of 2.5 ps for a 0.18um CMOS inverter chain, running a test sequence at 100 Mhz.
  • the y-axis is photon detections, and the x-axis is time in nanoseconds (ns).
  • the sequence runs for 100 ns (1x10 " second) before repeating in a loop.
  • the x-axis is thus 100 ns.
  • the clock cycle is 10 ns (0.1x10 "7 second).
  • a switching event can be expected every 10 ns.
  • the 80,000 photons collected for the full-sample data were obtained in 2 minutes 45 seconds.
  • Fig. 7B illustrates a histogram of the full-sample data illustrated in Fig. 7 A after the binning and summing operations of Fig. 3A are performed.
  • the data was processed with each time bin being 80 ps wide and having a 10 ps overlap with the adjacent time bin.
  • Referring to Fig. 7 A having the full sample data shows an emission peak at 20 ns (two photons), 40 ns (three photons), 50 ns (two photons), 70 ns (two photons), 80 ns (three photons), and 90 ns (two photons). Emission peaks, however, are not shown at 0 ns, 10 ns, 30 ns, and 60 ns.
  • the binned and summed data shown in Fig. 7B illustrates more pronounced emission peaks at each of the cycle points (i.e., 10 ns, 20 ns, etc.).
  • a properly functioning switching transistor emits photons at the cycle points.
  • no emission peak is shown in the full-sample data whereas an emission peak of six photons is shown in the binned and summed data.
  • a two photon emission peak is shown, whereas a ten photon emission peak is shown at the 70 ns time period in Fig. 7B.
  • the emergence of the emission peaks in the binned and summed data of Fig. 7B is a result of the high concentration of photons around the time period when a transistor switches. For example, due to jitter, around or at the 10 ns time period, there is likely to be several emissions very closely spaced but not exactly at the same sampling point. When these points are summed in a bin around the 10 ns period, the photon emission peak emerges as shown in the histogram for the binned and summed data. The photon emission peak includes six photons, thus there were six photons closely spaced together in the 80 ps time bin centered at the 10 ns sampling point. Fig.
  • 7C illustrates a histogram for the full-sample emission data convolved with a normalized gate function.
  • the results of the convolution with the normalized gate function are similar to the results for the binned and summed data.
  • the emission peaks for both the binned and summed data and the combined data are more pronounced than the full-sample data.
  • both the binning and summing operation or the convolution with a normalized gate function to obtain processed photon data might be used alone for event detection, in accordance with the present invention. Both of these methods, however, may lead to the detection of false events unless a sufficient number of photons are collected or a cutoff level is appropriately determined. For example, in Fig. 7B, there is a peak between the 10 ns sampling point and the 20 ns sampling point and between the 20 ns sampling point and 30 ns sampling point. If a cutoff level of one photon were used, then these two events may be falsely detected as transistor emissions. In Fig. 7C, a false event between the 10 ns and 20 ns sampling point and the 20 ns and 30 ns sampling point can also be seen if a cutoff of one photon were used.
  • Fig. 7D illustrates a histogram of the full-sample data of Fig. 7 A processed using the N-level thresholding method described with reference to Fig. 5A. hi this histogram, peaks at each of the 10 ns cycle points are clearly shown. An N-threshold level is illustrated as the dashed line near the bottom of the histogram. The N- threshold level was determined with an n- value of six thus providing a 99.999% probability or confidence level that photons above the dashed line are attributable to transistor emissions.
  • Fig. 7E is a histogram illustrating the full-sample data processed using probability level thresholding.
  • a photon threshold level of three was set above which any peak emerging could be attributable to transistor emissions with a 99.999% probability.
  • any emission peak rising above the N-threshold level or the probability level there is a 99.999% likelihood that these peaks are due to transistor emissions.
  • N-level thresholding and probability thresholding in conjunction with processing the photon emission data provides a more accurate indication of transistor emissions in a shorter time period than the processed photon data alone (Fig. 7B, 7C).
  • Figs. 1-7E involve the processing of a discrete set or group of the photon emission data to identify a transistor or transistors and to extract timing information.
  • the following embodiments of the present invention discussed with reference to Figs. 8-16 in some instances, involve the processing of the entire set of photon emission data to identify a transistor or transistors and to extract timing information. It will be recognized that some aspects, operations, and features may be useful in various combinations of the embodiments.
  • the embodiments of the present invention discussed hereafter involve discriminating between photon emitted by transistors and photons emitted by other background sources by processing of the photon emission data to correlate photons spatially and temporally.
  • the correlation may provide for rapid identification of photons emitted from switching transistors and for rapid extraction of accurate timing information for the switching transistors.
  • the correlation may also provide for auto channeling of transistors in the photon image data.
  • the correlation may be applied to photon emission data from a single switching transistor or for photon emission data from numerous switching transistors.
  • a conventional probe systems require the user to manually identify the photon emission data in the field of view for which to obtain timing information. This is performed by using GUI of the workstation to define a channel around the photons to analyze. Besides having to manually identify the photons to analyze, such conventional systems oftentimes require a substantial amount of time to obtain sufficient photon emission data so that the photons emitted from transistors are identifiable over the background emissions and so that useful timing information may be extracted. Implementations of the present invention rapidly and automatically identify transistors in the field of view, and rapidly extract transistor photon emission data from the identified transistor useful in timing analysis. Fig.
  • the IC imaging station 102 obtains photon emissions from an operating IC and the acquisition electronics 106 records the photon emission data in a database or other memory structure. Each recorded photon emission includes, in one example, both a spatial (x, y) and temporal (t) component. hi other implementations of the present invention, photon emission data obtained with a superconducting single photon detector may be analyzed.
  • Such a detector is described in copending and commonly owned application number 09/628,116 filed on July 28, 2000, titled "Superconducting single photon detector,” which is hereby incorporated by reference as though fully set forth herein, hi some instances, data collected with a single photon detector will only have a time component. These detectors have very little background emissions; thus, they are able to rapidly extract precise photon emission timing information.
  • the single photon detector may be arranged to obtain photon emission data at the same time as the detector of the probe system 100.
  • Embodiments conforming to the present invention may be used to correlate data from the single photon detector with photon emission data from the detector of the probe system 100.
  • each transistor in the field of view is identified (810).
  • the transistors are identified by correlating the photons recorded in the field of view with other photons in the field of view. The correlation may use only the spatial characteristics of the photons, only the temporal characteristics of the photons, or both.
  • Probe systems detect both random background photon emissions and photon emissions from switching transistors. Implementations of the present invention automatically discriminate between background emissions and transistor emissions to identify transistors in the field of view. Generally, photon emissions that are closely correlated in space may be associated with a transistor rather than background. Moreover, photon emissions that are closely correlated in time may also be associated with a transistor rather background.
  • aspects of the present invention utilize the correlation of photons in space, in time, or both in space and time, to identify photons that are likely emitted from a transistor rather than background sources, and thereby identify transistors in the field of view.
  • the correlated photons may then be used to generate accurate timing histograms for the detected transistors (820).
  • the correlation of the photon data tends to provide dense clusters of photons at the commutation points of the transistor. By comparing the timing intervals between the clusters, the switching time of the transistors may be identified. Fig.
  • each photon is analyzed to determine if it correlates with other recorded photons either spatially, temporally, or both.
  • the number of spatially and/or temporally correlated photons is used to generate a weighting that is applied to the selected photon.
  • the system obtains photon emission data for an IC within the field of view of the detector.
  • a test sequence that causes the transistors to switch states is run on the IC at a known frequency.
  • switching states may cause CMOS transistors to emit a photon.
  • the probability of a transistor emitting a photon during a single switching event is extremely small. In some instances, the probability of detecting a near infrared photon for each switching event ranges between 10 "7 to 10 "11 photons per switching event per ⁇ m of gate width.
  • the test sequence may be repeated in a loop so that some photon emissions from each of the transistors in the field of view will likely be detected.
  • each recorded photon emission includes an associated x-component, y-component, and time component.
  • the field of view for the NPTest LOS PICA probe system includes an x-region or horizontal region that is 4096 pixels wide and a y-region or vertical region that is 4096 pixels high.
  • the x-component of the recorded photon emission data corresponds with the position or pixel location along the x-axis where the photon is detected.
  • the y-component of the recorded photon emission data corresponds with the position or pixel location along the y-axis where the photon is detected.
  • the time component of the recorded photon emission data corresponds with the time during a particular loop when the photon is emitted or recorded.
  • each of the recorded photons are correlated with other recorded photons.
  • the operations illustrated in Fig. 9, relate to correlating one photon with the other recorded photons. The operations may be repeated as many times as necessary to process all of the recorded photons in the collected photon emission data. In other implementations, it is possible to identify a subset of all of the recorded photons, and only correlate those photons with other photon in the same subset. Such a subset may also be identified as a spatial subset, a temporal subset, or both. Depending on the configuration of the system, operations may be performed while the test sequence is running on the IC, immediately after the test sequence is complete, or at any time after the test sequence is run and the photon emission data has been recorded.
  • the system or the user selects one particular photon to analyze (900). Typically, the system runs the correlation on all photons in the photon emission data. Next, the system analyzes the selected photon to determine if any of the other photons in the field of view spatially correlate with the selected photon (910). In one implementation of the present invention, to spatially correlate the selected photon with other photons in the photon emission data, the system determines the number of photons within a set spatial area surrounding the selected photon.
  • Fig. 10A is a diagram illustrating one way that photons maybe spatially correlated.
  • the system determines the number of photons in an area 20 pixels by 20 pixels centered on the selected photon 140.
  • the three photons 142 in the area 10 pixels above and below the selected photon and 10 pixels to either side of the selected photon will be counted and considered to spatially correlate with the selected photon 140.
  • the two photons 144 outside this area will not correlate with the selected photon.
  • the spatial correlation area used to determine which photons are correlated with the selected photon may be adjusted according to the any number of factors. Generally, one objective is to define the spatial correlation area so that it likely encompasses photos emitted from the selected transistor, but does not likely encompass photos emitted from other nearby transistors. Any number of factors may effect the spatial location at which photons emitted from the selected photon are detected, such as, the size of the transistor, the size of the channel region in the transistor, the current flow through the channel region, the switching voltage of the transistor, the spatial separation of transistors in the IC, the noise in the system, or end the angle at which photons are emitted from the transistor.
  • the number of photons located in the spatial correlation area is used to generate a weight for the selected photon.
  • the selected photon is associated with one weight point.
  • the spatial weight for the selected photon is four.
  • only the number of photons in the spatial correlation area is used to generate the weight.
  • the temporal relationship with other photons is not used to determine the weight.
  • background photons are detected in a spatially random pattern.
  • the present inventors recognized that if there is a high concentration of photons in a particular spatial area, then those photons may be associated with transistor emission rather than background emissions.
  • the system further determines if any of the photons in the photon emission data temporally correlate with the selected photon (920). To temporally correlate photons, the system determines the number of photons in a set temporal area surrounding the selected photon.
  • the temporal correlation area or range may be defined in any number of ways. For example, the temporal area may be set at 50 ps. In this example, any photon that is detected either 25 ps before or 25 ps after the selected photon, is correlated with the selected photon.
  • the jitter of the detector may be used to define the temporal area in which to correlate photons.
  • the temporal area by which to correlate photons is set at 80 ps.
  • Fig. 10B is a diagram illustrating one way that photons are temporally correlated.
  • the diagram at Fig. 10B corresponds with the diagram at Fig. 10A.
  • each photon that is temporally correlated with the selected photon is used to generate a temporal weight for the selected photon.
  • the temporal weight for the selected photon is three.
  • only the number of photons in the temporal correlation area is used to generate the weight. The spatial relationship is not used.
  • an overall weight may be assigned to the selected photon that is a function of the spatial and temporal weights (930).
  • the weight whether described with reference to operation 930 or operation 1120, provides an indication of the likelihood that the photon was emitted from a transistor.
  • the overall weight is the sum of the spatial weight and the temporal weight.
  • the spatial weight is four (4) and the temporal weight is three (3), then the overall weight is seven (7).
  • the spatial correlation and the temporal correlation are completed independently, and the overall weight is the summation of the two independent weight determinations.
  • the overall weight may be assigned as the lesser or greater of the spatial and temporal weight.
  • the overall weight would be three (3) or four (4), respectively. It is possible that some photons will be only correlated in space or in time, but not in both.
  • the correlation of the spatial and temporal characteristics of neighboring photons is performed so that photons must be within a certain spatial range and a certain temporal range. As with the method of Fig. 9, the correlation discriminates between photons emitted from transistors and background sources.
  • Fig. 11 illustrates a flowchart of the operation involved in one method for performing temporal and spatial correlation of photons within photon emission data, in accordance with the present invention.
  • a particular photon from all of the photons within the photon emission data is selected for spatial and temporal correlation (1100).
  • the operations involved in correlating a photon with other photons may be repeated until all of the photons in the photon emission data are processed.
  • the selected photon is then compared to other photons within the photon emission data to determine how many photons are within a set distance and time (1110).
  • the size of the correlation distance and time may be set to any number of different ranges.
  • the distance or spatial correlation may be set at 20 pixels and the temporal correlation set at 80 ps.
  • Fig. 12A illustrates spatial correlation and temporal correlation centered around the selected photon 150.
  • the spatial correlation defines a 20 pixel (x-component) by 20 pixel (y-component) square centered on the selected photon.
  • any photons within 10 pixels above, below, or to either side of the selected pixel will be considered spatial correlated.
  • the temporal correlation is defined as a range of time between 40 ps before the detection of the selected photon and 40 ps after the detection of the selected photon.
  • the spatial and temporal range define a cube centered on the selected photon.
  • the spatial correlation may define a 20 pixel by 20 pixel square, with the selected photon 150 in the upper left corner of the square.
  • the temporal correlation may define a 80 ps range only ahead of the time at which the selected photon was detected.
  • the spatial and temporal range define a cube within the selected photon in a corner.
  • the correlation might be arranged in other ways, such as detecting photons up and to the left of selected photon and only behind the selected photon (not shown).
  • the photons within both the spatial and temporal ranges of the selected photon are used to weight the selected photon (1120).
  • the weight for the selected photon is three.
  • the weight for the selected photon is two.
  • the transistors in the field of view may be identified (operations 940 and 1130, respectively).
  • the assigned weight generally provides an indication of the probability that the photon was emitted by a transistor.
  • the weight may be used to discriminate between photons emitted by a transistor and background photons.
  • a threshold or cutoff valve may be applied to only display photons with a certain weight.
  • all of the photons from the photon emission data are displayed in colors according to weight.
  • a color may be assigned to each weight, or colors may be assigned to various ranges of weight.
  • all photons with a weight of four will be red and all photons with a weight of only one will be white.
  • the red photons will likely be from a transistor and will stand out from the white photons.
  • the contrast between the colors will provide the user with an indication of where the functioning switching transistors in the photon emission data are located.
  • the weighted photon emission data may be processed in other ways. Fig.
  • FIG. 13 is a flowchart illustrating one example of the operations for establishing and applying a threshold to a set of photon emission data to further identify transistors.
  • photons with a weight either spatial, temporal, or some combination of spatial and temporal, meeting or exceeding a threshold value are associated with a transistor, and all photons having a weight less than the threshold value are associated with background noise.
  • the threshold value may be based on anecdotal information, statistical analysis of the photon emission characteristics of the transistors being analyzed, and by other means. Referring to Fig. 13, in one example, the system determines the highest weight for any of the photons in the field of view (1300).
  • the threshold is set as a percentage of the highest weight (1310). For example, the threshold value may be set at 20% of the highest weight value. Thus, if the highest weight for any photon in the field of view is 15, then the threshold value is set at three.
  • each photon having a weight of equal to or greater than the threshold value is associated with a transistor (1320).
  • each photon having a weight of three or more is associated with a transistor.
  • all photons associated with a transistor may be displayed in the spatial location, i.e., at the same x and y pixel location, that they were detected, and each photon having a weight of two or less is not displayed.
  • event photons may be displayed with one color, and background photons displayed with a second color. In a histogram, only photons exceeding the threshold are displayed.
  • Correlated photon data may also provide very accurate timing information for the transistors associated with the photon emission data. Moreover, such accurate timing data may be provided in a period of time considerably less than the same accuracy of timing data that is provided from conventional probe systems.
  • Fig, 14A is an illustration of photon emission data 164 provided by a conventional probe system.
  • the photon emission data 164 is for one commutation point 166 of a switching transistor. Due to the jitter of the detector, photon emissions are detected in a range of the jitter around the commutation point. To extract timing information from the histogram, a centroid 168 is determined for all of the photon emissions within the range of the jitter for the detector. To obtain enough photon emissions to obtain an accurate centroid the system must be run long enough in order to detect numerous photon transistor emissions.
  • Fig. 14B illustrates a histogram for correlated photon emission data. Due to the weighting of photon emissions in both space and time, a well defined photon emission peak 170 emerges with very few photon detections. In this example, three photons 172 are correlated in both space and time at the commutation point 166 for the transistor. Because the three photons 172 are correlated in both space and time, each will receive a weight of three. Without correlation in both space and time, each would have a value of only one and thus would not arise above the background photon emission level. Being weighted, however, each value is three times the background emission level. As with the raw histogram data, the centroid of the three weighted photon emissions may be determined.
  • This centroid may be compared with the centroid of other emission peaks to extract the precise timing information for the transistor associated with the histogram, hi this example, only three photon emissions for the transistor are required in order to extract precise timing information, hi the example illustrated in Fig. 14A, fifty-one photon emissions are detected before accurate timing information can be extracted.
  • the number of photon emissions required for conventional systems to extract timing information may vary. Nonetheless, the number of photon emissions tends to be dramatically more than is required with the correlation methods described herein.
  • the present invention also involves a method for automatically channeling photon emission data. Auto channeling analyzes the correlated photon emission data to identify spatially and temporally related clusters of photons.
  • the photons are considered to have been emitted from a transistor.
  • a rectangle is drawn around the cluster of photon emissions.
  • a user manipulating a GUI may define a rectangle, i.e., channel, around a suspected group of photons that were emitted from a transistor.
  • a tremendous number of photons have to be collected in order for a large enough concentration of photons to emerge from the background emissions.
  • photons closely correlated in space and time have much higher weights than photons that are not correlated in space and time.
  • Fig. 15 is a flowchart illustrating the operations involved in auto channeling, in accordance with one embodiment of the present invention.
  • Fig. 16 is a diagram illustrating a search of the photon emission data to identify clusters of photons having a weight exceeding the threshold value above which photon emissions are attributable to transistor emissions.
  • a cube around the photon is defined (1640).
  • the cube includes a spatial range (x-range, y-range) and a temporal range, hi one example, the x-range and y-range are each 20 pixels and the time range is 80 ps.
  • the first corner of the cube is defined as Xphoton-io pixels, y P hoton-40 pixels, p oton-40 ps-
  • the photon occupies the center of the cube and the x, y and t axes extend in all direction from the photon.
  • spatially and temporally correlated photon emission data may also be used to extract accurate timing data for each of the identified transistors in much less time than is typical for conventional probe systems.
  • Photons emitted from a transistor tend to be clustered in both space and time. Thus, in most situations, transistor photon emissions from the same transistor will have the same or nearly the same weight after the spatial and temporal correlation methodologies discussed above are applied.
  • the present invention also involves an alternative apparatus and method for automatically defining a channel or window where transistor-emitted photons are expected.
  • Integrated circuit (IC) configurations are defined in a computer aided design (CAD) layout, which defines the functional elements of the IC, such as transistors, various interconnections of the functional elements, and other aspects of the IC.
  • CAD layout data includes numerous layers, such as polysilicon, diffusion, and the like, involving the physical make-up and configuration of the various functional element, etc.
  • One aspect of the present invention involves manipulation or processing of an IC CAD layout to extract infonnation about the locations of transistors in the IC.
  • a photon detection window or channel may be automatically generated as a function of the transistor location. During operation of the IC, emitted photons are detected. However, in one implementation, only the photons detected in the window area are analyzed. Numerous channels may be defined to analyze numerous associated transistors. Some or all of the photons detected in the channel may be attributed to the associated transistor rather than other transistors or noise.
  • FIG. 17 is a flowchart illustrating one method in accordance with the present invention.
  • IC CAD layout data for a target IC is identified (1700).
  • the target IC being the IC to be tested, also commonly referred to as a device under test (DUT).
  • the CAD layout data for the target IC is then processed to identify transistors (1710).
  • one or more separate CAD files may be generated that only includes indicia of the location of transistors.
  • This file may be referred to as a "virtual CAD layer," as it does not include all of the layers of the CAD database or file of an IC, but rather includes a representation or derivation of a subset of the layers.
  • CAD layout data contains proprietary information.
  • the file may be provided to third parties (such as a third party testing facility contracted to test an IC) for testing the IC without disclosing all of the proprietary information.
  • third parties such as a third party testing facility contracted to test an IC
  • the processed CAD data may not contain any proprietary information.
  • photon emission windows may be automatically generated (1720).
  • photons may be emitted by a transistor during commutation or switching.
  • photons tend to be emitted from the region between the gate and the drain (sometimes referred to as the "pinch-off region).
  • photons tend to be emitted from the region between the gate and drain.
  • Figure 18 illustrates a simulation diagram for an NMOS transistor in saturation, such as during a commutation. At the top of the diagram, the source, the gate, and the drain are shown.
  • the electric field obtains its highest strength (i.e., >lxl0 6 V/cm). Additionally, in the gate and drain junction the electrons also reach their highest velocity (i.e., between lxlO 9 CM/S and 8.5xl0 9 CM/S).
  • the exact process by which photons are emitted by commutating transistor is unknown. It is believed that high electric fields that exist in the pinch-off region between the gate and the drain (NMOS) accelerate electrons to high energy. Electrons accelerated to this high energy state (sometimes referred to as "hot electrons”) may emit a photon.
  • photon detection windows or channels may be defined to particularly identify the region of MOS transistors where photon emissions may occur, e.g., at or near the pinch-off region.
  • photon detection window By aligning the photon detection window with photons detected from an IC, such as with an NPTest IDS PICA (Picosecond Imaging Circuit Analysis) technology, NPTest system using SSPD (Superconducting Single Photon Detection) technology, and the like, transistor emitted photons may be differentiated from background noise rapidly, and photons may be rapidly correlated with specific transistors.
  • the NPTest DS PICA system provides coordinate or spatial information (i.e., x and y coordinate) about the detected photons as well as timing or temporal information about the detected photons.
  • coordinate or spatial information i.e., x and y coordinate
  • timing or temporal information about the detected photons.
  • specific transistors will switch at known times and may emit a photon synchronously with the switching or commutation of the transistor.
  • the proper operation of a transistor may be determined.
  • photon detection windows are automatically defined to identify the transistor regions where photon emissions are likely to be generated.
  • the pinch-off region associated with photon emissions is located at, near, or adjacent to the gate.
  • the pinch-off region associated with photon detection is typically at the drain side of the gate
  • the pinch off region associated with photon detection is typically at the drain side of the gate.
  • Figures 19A and 19B illustrate a top view and a front section view taken along lines 19A-19B of Fig. 19A, respectively, of a CAD layout for a CMOS inverter 1900.
  • CMOS inverter layout is presented for purposes of providing an illustration of one layout that may be processed and used in IC testing in accordance with one implementation of the present invention, but should not be construed as limiting the present invention to only processing a CMOS inverter, CMOS inverters of the particular configuration of Fig. 19A or with the particular layout of Fig. 19 A.
  • Figure 19C illustrates a schematic view of the CMOS inverter of Figs. 19A and 19B. Referring to Fig. 19C, a PMOS transistor 1902 and a NMOS transistor 1904 are shown in an inverter configuration. Referring to Figs. 19A-19C, the PMOS transistor includes a drain 1906, a gate 1908, and a source 1910.
  • the NMOS transistor also includes a drain 1912, a gate 1914, and a source 1916.
  • VDD Voltage Drain-Drain
  • VSS Voltage Source-Source
  • the input 1918 to the inverter is connected to the gates (1908, 1914) of both devices.
  • the drains (190, 1912) of the NMOS and PMOS transistors (1904, 1902) are interconnected.
  • the output 1920 of the inverter is connected to the drain (1906, 1912) of both devices.
  • the CAD layout information for an IC contains layers corresponding to the functional structures and organization of the IC.
  • the layout is typically in the form of polygons corresponding to each layer. Alone or in combination, the polygons define the functional structures, interconnections, and the like that define an IC.
  • CMOS inverter 1900 of Figs. 19 A a PMOS layout is shown at the top of the diagram and a NMOS layout is shown at the bottom of the diagram.
  • the directional indictors “up,” “down,” “left,” and “right” are used herein to conveniently refer to the Fig. 19 drawing elements and others herein, but are not meant to limit any aspects of the invention to the particular directional indicator used.
  • the PMOS device is shown with an N well layer 1922 over a P substrate layer 1924.
  • the NMOS device does not include the N well layer. Referring to Fig.
  • the PMOS and NMOS gates (1908, 1914) are defined by a generally horizontally elongate rectangular Polysilicon layer polygon (1926, 1928).
  • diffusion layers 1930 defining a drain (1932, 1934) and a source (1936, 1938) polygon for each of the PMOS and NMOS devices, respectively.
  • contact polygons 1940 In the drain and source polygons are contact polygons 1940.
  • the PMOS source contact polygon 1940A is connected with a metal 1 layer 1942 defining an interconnection with VDD.
  • the NMOS source contact polygon 1940B is also connected with a second metal 1 layer 1944 defining an interconnection with VSS.
  • a third metal 1 layer 1946 defines an interconnection between the drain contact polygons 1930 of the PMOS and NMOS transistors.
  • a fourth metal 1 layer 1948 defines an inteconnection between the PMOS and NMOS gate polygons.
  • a metal 2 layer 1950 is connected with the fourth metal 1 layer to define the input connection to both gates.
  • a second metal 2 layer 1952 is connected with the third metal 1 layer to define the output connection from both sources.
  • the CAD layout information is processed to separate the CMOS transistors from other structures making up an IC.
  • the gate (1926, 1928), source (1936, 1938) and drain(1932, 1934) polygons are distinguished from the other layers of the CMOS inverter.
  • a partial or complete CAD file or database for an IC is processed using Boolean logic operations, to identify transistors.
  • CMOS photon emissions are typically emitted at the junction between the gate and drain (NMOS) or between the drain and gate (PMOS).
  • a photon detection window 1954 is automatically generated from the CAD layout information to focus photon analysis at the appropriate emission region.
  • the following Boolean operations may be employed:
  • the NMOS polysilicon gate layer 1928 is adjacent the P substrate layer 1924.
  • the Gate (NMOS) Boolean operation generally identifies a first NMOS photon detection region around the NMOS Polysilicon gate layer 1928.
  • the first region around the gate layer encompasses the area where photon emission may be expected 1980 as well as areas above and below.
  • a transistor, whether NMOS or PMOS, also includes the gate and drain structures.
  • the Drain/Source (NMOS) Boolean operation identifies the drain 1912 and source 1916 for an NMOS device. Both the drain and source are defined by N diffusion and P substrate layers.
  • a second NMOS photon detection region around the source and drain may be identified by the boundary between the diffusion layer 1930and the P substrate 1924.
  • This second region encompasses the area where photon emission may be expected as well as areas to the left and right.
  • the first region or the second region may alone define a photon detection window.
  • the intersection of the first NMOS photon detection region and the second NMOS photon detection region region define a base NMOS photon detection window 1960.
  • a center of the base photon detection window is arranged about midway along the longitudinal center line of the gate layer 1928 and about midway between the source portion of the diffusion layer 1930 and the drain portion of the diffusion layer 1930.
  • the photon detection window generally defines a rectangle, in this example, with the center as described.
  • the right boundary of the window is aligned with the pinch-off region between the drain and gate and the left boundary is aligned with the pinch-off region between the gate and source (i.e., where emissions are expected 1960).
  • the PMOS polysilicon gate layer 1926 is adjacent the N well layer 1922.
  • the Gate (PMOS) Boolean operation identifies a first PMOS photon detection region around the polysilicon gate layer 1926.
  • the first region around the polysilicon gate layer encompasses the area where photon emissions may occur 1962 as well as areas above and below.
  • the drain and source are both defined by N diffusion and P well layer.
  • the Drain/Source (PMOS) Boolean operation identifies a second PMOS photon detection region around the source and drain at the boundary between the diffusion layer 1930 and the N well layer 1922.
  • the second region encompasses the area where photon emissions may be expected as well as areas to the left and the right.
  • the first region and the second region may alone define a photon detection window.
  • the intersection of the first PMOS photon detection region and the second PMOS photon detection region defines a PMOS base photon detection window 1962.
  • the photon detection window generally defines a rectangle in this example. The left boundary of the window is aligned with the pinch-off region between the PMOS gate and source, and the right boundary of the window is aligned with the pinch-off region between the PMOS gate and drain.
  • the above-described Boolean operations identify base photon detection windows (1960, 1962) around the mid-area of the NMOS and PMOS gates adjacent the pinch-off regions.
  • the target photon detection region for either NMOS or PMOS type transistors is in the pinch-off regions adjacent the intersection of the gate and drain, or gate and source, respectively.
  • the base photon detection windows (1960, 1962) are scaled-up to encompass the pinch-off regions.
  • Fig. A Background
  • photons are not necessarily emitted perpendicularly from the substrate.
  • photons may experience some deflection at the IC surface.
  • Fig. B Background photon emissions appear as contours 30.
  • scaling of the base photon detection window also encompasses angularly emitted photons and some deflected photons.
  • the base photon detection window also encompasses angularly emitted photons and some deflected photons.
  • the base photon detection window also encompasses angularly
  • the 1958 is scaled in both the X (gate width) and Y (gate height) direction to define a scaled window 1964.
  • the X direction is deducted based upon the presence of a drain and source to either side of the gate.
  • the Y direction is orthogonal to the X direction.
  • the window is scaled symmetrically so the location the drain and source is not important.
  • the scaling may be symmetrical to define a photon emission window of 2 microns X 2 microns, 2 microns X 3 microns, 3 microns X 2 microns.
  • SL defines the minimum separation between two objects in order to differentiate between the two objects. Thus, if the separation exceeds SL, then the two objects can be separately recognized.
  • NA numerical aperture
  • the above-described issues involving resolution are also involved in providing motivation to scale the base photon detection window. Referring again to Fig. 17, to use photon emissions to obtain information about a target device or device under test (DUT), the photon emission channels are aligned with the location on a photon detector arranged to detect photon emissions from the DUT (1730).
  • a testing device such as an IDS PICA tool or the like, may be arranged to both obtain an LSM (laser scanning microscope) or other type image of a DUT as well as obtain photon emissions from a DUT.
  • LSM laser scanning microscope
  • a complete CAD file or the virtual CAD layer file defined in accordance with aspects of the present invention for the DUT may be aligned with the LSM image, typically by overlaying the CAD data with the image which is precisely aligned to reference points of the CAD, with the corresponding points of the LSM image.
  • the testing device also include a photon detector that may be selected to be precisely aligned with the LSM image by a deflector, which directs optics to either the LSM or photon detector.
  • photon emissions from an operating DUT are received by the photon detector.
  • the photon detector determines timing information about the transistor associated with the photon detection window. With the timing information, it is possible to determine proper or improper operation of the transistor.
  • the automatically defined photon emission windows may be used alone to rapidly identify photons attributable to transistor emission and not noise, dark counts, or the like. Moreover, the photons detected in the area of the photon emission windows may also be processed in accordance with the various methods discussed with references to Figs. 1 - 16 to further reduce the time of identifying photons attributable transistor emissions.

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Abstract

L'invention concerne un système, un dispositif et un procédé pour l'analyse de données d'émissions photoniques (1700) visant à faire la distinction entre les photons émis par des transistors et les photons émis par des sources de fond. L'analyse consiste à traiter des données CAO de circuit intégré pour identifier les transistors dans ces données (1710, 1720, 1730, 1740, 1750). Elle peut ensuite consister à utiliser des opérateurs booléens pour traiter les données CAO afin d'identifier en particulier, par exemple via un canal, l'emplacement des grilles NMOS et PMOS, l'emplacement du drain et de la source, ou telle ou telle combinaison d'emplacements de grille, drain et source, permettant ensuite d'identifier la zone de pincement.
PCT/US2003/038616 2002-12-05 2003-12-05 Dispositif et procede pour la detection d'emissions photoniques de transistors WO2004053780A1 (fr)

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WO2010106277A1 (fr) * 2009-03-18 2010-09-23 Centre National D'etudes Spatiales Procede de traitement d'image pour l'analyse de circuits intergres, et systeme de mise en oeuvre du procede
JPWO2021005892A1 (fr) * 2019-07-10 2021-01-14

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US6891363B2 (en) 2002-09-03 2005-05-10 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US7038442B2 (en) 2002-09-03 2006-05-02 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US7323862B2 (en) 2002-09-03 2008-01-29 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US7439730B2 (en) 2002-09-03 2008-10-21 Dcg Systems, Inc. Apparatus and method for detecting photon emissions from transistors
WO2010106277A1 (fr) * 2009-03-18 2010-09-23 Centre National D'etudes Spatiales Procede de traitement d'image pour l'analyse de circuits intergres, et systeme de mise en oeuvre du procede
FR2943442A1 (fr) * 2009-03-18 2010-09-24 Centre Nat Etd Spatiales Procede de traitement de l'emission de photons dynamique pour l'analyse de circuits integres, et systeme de mise en oeuvre du procede
JP2012521028A (ja) * 2009-03-18 2012-09-10 サントル ナシオナル デチュード スパシアル 集積回路の解析のために動的光子放射を処理する方法及びこの方法を実行するためのシステム
JPWO2021005892A1 (fr) * 2019-07-10 2021-01-14
WO2021005892A1 (fr) * 2019-07-10 2021-01-14 浜松ホトニクス株式会社 Procédé et dispositif d'inspection de dispositif à semi-conducteur et dispositif d'inspection de dispositif à semi-conducteur
JP7401543B2 (ja) 2019-07-10 2023-12-19 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置
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