WO2004023109A1 - Method and apparatus for measuring particle diameter distribution of powder - Google Patents
Method and apparatus for measuring particle diameter distribution of powder Download PDFInfo
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- WO2004023109A1 WO2004023109A1 PCT/JP2003/011250 JP0311250W WO2004023109A1 WO 2004023109 A1 WO2004023109 A1 WO 2004023109A1 JP 0311250 W JP0311250 W JP 0311250W WO 2004023109 A1 WO2004023109 A1 WO 2004023109A1
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- Prior art keywords
- particle size
- size distribution
- supercritical
- fluid
- powder
- Prior art date
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- 239000002245 particle Substances 0.000 title claims abstract description 307
- 239000000843 powder Substances 0.000 title claims abstract description 103
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000012530 fluid Substances 0.000 claims abstract description 171
- 239000000443 aerosol Substances 0.000 claims abstract description 144
- 239000000725 suspension Substances 0.000 claims abstract description 53
- 239000006185 dispersion Substances 0.000 claims description 27
- 238000000149 argon plasma sintering Methods 0.000 claims description 17
- 230000007613 environmental effect Effects 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 12
- 239000007921 spray Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000007865 diluting Methods 0.000 claims description 7
- 238000010790 dilution Methods 0.000 claims description 5
- 239000012895 dilution Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- -1 and subsequently Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000008016 vaporization Effects 0.000 abstract description 3
- 238000005054 agglomeration Methods 0.000 abstract 3
- 230000002776 aggregation Effects 0.000 abstract 3
- 239000011164 primary particle Substances 0.000 description 22
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 238000000691 measurement method Methods 0.000 description 7
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 6
- 239000004926 polymethyl methacrylate Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 238000007599 discharging Methods 0.000 description 5
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- XUMBMVFBXHLACL-UHFFFAOYSA-N Melanin Chemical compound O=C1C(=O)C(C2=CNC3=C(C(C(=O)C4=C32)=O)C)=C2C4=CNC2=C1C XUMBMVFBXHLACL-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000003703 image analysis method Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
Definitions
- the present invention relates to a method and apparatus for measuring a particle size distribution of a powder.
- the most fundamental factor regarding the properties of the powder is the size of the particles.
- an image analysis method using an electron microscope is known as a method for measuring the particle size distribution of a powder.
- this method disintegrates and disperses the powder completely into primary particles, and furthermore, it is difficult to obtain a statistically reliable sample number, and the obtained data is unreliable.
- powders of several microns or less show high cohesion irrespective of the material, and under normal environmental conditions, a plurality of primary particles aggregate to form higher-order aggregates. Normal. Therefore, in various particle size distribution measurement methods, the powder behaves not as primary particles but as a group of particles, and the obtained particle size distribution loses the characteristics of the particle size distribution of the primary particles. A very prominent particle size distribution of the group may result.
- the light scattering method using a light scattering type particle counter (JIS B9921 light scattering type automatic particle counter) used in the field of aerosol, a differential electric mobility analyzer (DMA) (E. 0. Knutson and K T. After particle size selection by Whitby, Journal of Aerosol Science, 6 (1975) 443-452.
- DMA differential electric mobility analyzer
- the electric mobility method based on the combined use of DMA / CNC is widely used as an accurate particle size distribution measurement method.
- the light scattering method using a light scattering type particle counter irradiates aerosol particles with light, From the distribution state, the particle size distribution is measured.
- the electric mobility method based on the combination of DMA / CNC selects only aerosol particles having a specific narrow range of electric mobility using the classification device, DMA, and then uses the counting device, CNC, to perform classification. Vapors such as alcohol are condensed using particles as nuclei, aerosol particles are counted by an optical method, and the particle size distribution is measured.
- the problem to be solved by the present invention is to provide a highly accurate particle size distribution of agglomerated powder by measuring the particle size distribution of the aerosol particles as aerosol particles in which the agglomerated powder is well dispersed in the gas phase. It is to provide a measuring method of.
- a conventionally known method of measuring aerosol particles is applied to the aerosol particles thus obtained. That is, by applying a known measurement method of aerosol particles to the aerosol particles obtained by the method for producing novel aerosol particles, the aerosol particles obtained by the aerosol particle production method are actually primary particles or close to primary particles. Thus, aerosol particles in a good dispersion state can be obtained, and the particle size distribution of primary particles forming an aggregate or a state close to the primary particles can be measured.
- a method for measuring the particle size distribution of dispersed aerosol particles in a dispersed state such as a light scattering method using a light scattering type particle counter or an electric mobility method using a combination of DMA / CNC, should be used. Can be.
- the supercritical fluid which is formed by suspending the cohesive powder in the supercritical fluid, is released under environmental conditions that evaporate the supercritical fluid.
- a method for measuring a particle size distribution of a powder comprising measuring a particle size distribution of aerosol particles in a state where a cohesive powder is generated and dispersed in a vaporized gas.
- the supercritical suspension fluid formed by suspending the cohesive powder in the supercritical fluid is The supercritical fluid is released under the environmental conditions that evaporate, and the aerosol particles in a state in which a cohesive powder is generated and dispersed in a gas in which the supercritical fluid is vaporized from the supercritical suspension fluid are irradiated with light,
- the supercritical fluid which is formed by suspending the cohesive powder in the supercritical fluid, is released under environmental conditions that evaporate the supercritical fluid, and the supercritical fluid is converted from the supercritical fluid. Aerosol particles in a state in which a cohesive powder is generated and dispersed in a vaporized gas are classified into only particles having a specific electric mobility, and subsequently, the vapors such as alcohol are condensed using the classified particles as nuclei.
- Suspending the coagulable powder in the supercritical fluid comprising: a supply means for supplying the supercritical fluid, a supply means for supplying the coagulable powder, and a discharge means for discharging the formed supercritical suspension fluid.
- the supercritical suspension fluid formation tank to be turbidized, and the supercritical suspension fluid discharged from the supercritical suspension fluid formation tank are released under the environmental conditions where the supercritical fluid is vaporized.
- Aerosol particle generating and dispersing means for generating and dispersing aerosol particles in a state where the cohesive powder is dispersed, and aerosol particles generating and dispersing the cohesive powder in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid
- An apparatus for measuring the particle size distribution of powder comprising: means for measuring the particle size distribution of powder.
- An aerosol particle generation and dispersion tank for generating and dispersing and storing aerosol particles in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid, and subsequently, an aerosol particle provided with a means for extracting aerosol particles.
- the powder particle size distribution measuring device according to the above (7), wherein the particle size distribution is measured.
- Aerosol particle generating and dispersing means for generating and dispersing aerosol particles in a state where cohesive powder is dispersed in a vaporized supercritical fluid, and supercritical fluid being vaporized from a supercritical suspended fluid Aerosol particles in which a cohesive powder is generated and dispersed in a gas that has been classified are classified into particles having a specific electric mobility only, and then the vapors such as alcohol are condensed using the classified particles as nuclei,
- FIG. 1 is a schematic diagram of a powder particle size distribution measuring device of the present invention.
- FIG. 2 is a schematic view of another powder particle size distribution measuring device of the present invention.
- Fig. 3 shows the appearance of glass particles observed with an optical microscope.
- Fig. 4 shows the appearance of polymethyl methacrylate particles observed with an optical microscope.
- 3 (a) and 3 (b) show aggregates at the time of supply, and (b) shows primary particles after generation and dispersion.
- FIG. 1 The apparatus shown in FIG. 1 is configured as follows.
- the supercritical suspension fluid forming tank 1 is provided with a supply means for supplying the supercritical fluid via the flow rate adjusting means 5. 4. It has a supply means 3 for supplying the cohesive powder and a discharge means 6 for discharging the formed supercritical suspension fluid.
- aerosol particles are generated by releasing a supercritical fluid under environmental conditions to vaporize and forming aerosol particles from a supercritical suspension fluid in a gas in which the supercritical fluid is vaporized.
- the dispersing means 8 supplies the supercritical fluid discharged from the supercritical suspending fluid forming tank 1 via the flow rate adjusting means 7 to the supercritical fluid under the environmental conditions in which the supercritical fluid is vaporized.
- the aerosol particles are generated with the cohesive powder dispersed in the released and vaporized supercritical fluid.
- the generation and dispersion means 8 may be configured to include a generation and dispersion means such as a spray nozzle or an impact nozzle.
- a generation and dispersion means such as a spray nozzle or an impact nozzle.
- the spray nozzle sprays the supercritical suspension fluid as fine mist, and in the case of impact, the fluid through the spray nozzle collides with a flat plate and bends the direction of the flow, so that crushing and It removes aggregates remaining without being converted into primary particles, and as a result, provides good aerosol particle Generation dispersion is possible.
- a dilution gas can be supplied as needed.
- the diluting gas from which impurities were removed by the diluting gas supply means at the gas fill rate was controlled at a flow rate controlled by the flow rate adjusting means.
- the aerosol particles that are supplied to the two-fluid nozzle and thus generated and dispersed are diluted according to the amount of the supplied diluting gas, and as a result, it is possible to obtain air-mouth sol particles having a controlled concentration.
- the aerosol particles in a state where the agglomerated powder is generated and dispersed are flown into the particle size distribution measuring means 14 as a sample gas together with the gas obtained by evaporating the supercritical fluid, and the particle size distribution is measured.
- the device in FIG. 2 is configured as follows.
- Supercritical suspension fluid forming tank 1 which is the same as that in Fig. 1 above, connected to this, air port sol particle generation / dispersion tank 9 for generating air port sol particles, and aerosol particle supply for taking out air port sol particles Means 13 are comprised.
- the aerosol particle generation and dispersion tank 9 a supercritical suspension fluid obtained by suspending the cohesive powder in a supercritical fluid is released under environmental conditions that evaporate the supercritical fluid, and Aerosol particles are formed in a gas obtained by evaporating a supercritical fluid.
- the aerosol particle generation / dispersion tank 9 has a generation / dispersion means 8 for supplying the formed supercritical suspension fluid and generating / dispersing the sol particles at the air port, and a discharge means 11 for discharging the aerosol particles.
- the aerosol particles are supplied to the aerosol particle supply means 13 for taking out the aerosol particles via the flow rate adjusting means 12 following the discharge means 11 for discharging the aerosol particles, and are taken out.
- the generation and dispersion means 8 may be configured to include a generation and dispersion means such as a spray nozzle or an impact nozzle.
- Spray nozzles are used for supercritical fluid suspension Sprayed as fine mist, and furthermore, the impact was reduced by colliding the fluid through the spray nozzle against a flat plate and bending the direction of the flow, resulting in agglomerates remaining without crushing or primary particles with sufficient inertia As a result, good generation and dispersion of aerosol particles can be achieved.
- a dilution gas can be supplied as needed.
- the diluent gas, from which impurities have been removed by the gas filter, is supplied to the aerosol particle generation / dispersion tank 9 at a flow rate controlled by the flow rate adjusting means. Accordingly, the aerosol particles generated and dispersed are diluted according to the amount of the supplied diluting gas, and as a result, aerosol particles having a controlled concentration can be obtained. Also, the generation concentration of aerosol particles can be controlled in the same manner by using a two-fluid nozzle provided with a dilution gas supply means in the generation / dispersion means 8.
- the aerosol particles in a state where the agglomerated powder is generated and dispersed are flown into the particle size distribution measuring means 14 as a sample gas together with the gas obtained by evaporating the supercritical fluid, and the particle size distribution is measured.
- the supercritical suspension fluid forming tank 1 is as follows.
- the supercritical fluid can be appropriately selected and used. Specific examples include carbon dioxide, nitrous oxide, ethane, propane, ethylene, chlorofluorocarbon alternative, and water.
- the purified carbon dioxide, ethane, ethylene, alternative chlorofluorocarbon, etc. is heated and pressurized to a critical state, and is converted into a supercritical fluid by the supercritical fluid supply means 4 and the flow control means 5 by the supercritical fluid supply means 4. It is supplied to the critical fluid suspension formation tank 1.
- the supercritical suspension fluid forming tank 1 for example, a high-speed mixer using a stirring blade or a stirrer, or a suspension mixed with stirring by using and installing an ultrasonic generator.
- a turbid fluid can also be obtained.
- the contact with the supercritical fluid due to the suspension removes the cause of the cohesive force on the powder, or the degree of cohesion is greatly reduced, and the cohesive powder is broken.
- the cohesive powder to be subjected to the particle size distribution measurement is supplied to the supercritical fluid forming tank 1 by the cohesive powder supply means 3.
- the cohesive powder include styrene, acrylate, methyl acrylate, and other polymers or copolymers obtained from vinyl monomers, and epoxy resins, phenol resins, melanin resins, polyamide resins, and silicone resins. And organic substances such as particles of various polymers or copolymers, and inorganic substances such as particles of various metals, nonmetals, and ceramics.
- various substances can be used without specific restrictions or limitations depending on the constituent raw materials, shapes, and the like.
- the supercritical fluid supply means 4 is provided with a flow rate adjusting means 5. Further, the supercritical suspension fluid forming tank 1 has a temperature control jacket 2 around it so that the supercritical fluid can be kept in a supercritical state or a subsupercritical state.
- the supercritical fluid is a supercritical fluid that means a fluid in a supercritical state
- a supercritical state is a supercritical state that exceeds a critical temperature and a critical pressure, as well as a critical temperature and a critical pressure.
- the state is slightly lower than the above, the state change occurs in a very short time, and includes the subcritical state that can be handled almost in the same way as the above supercritical fluid. Subcritical fluid.
- the temperature is 30 to 80 ° C, preferably 30 to 50 ° C, and the pressure is 40 to 400 atm, preferably 100 to 100 atm. It needs to be maintained at ⁇ 300 atm.
- the supercritical fluid which is formed by suspending a cohesive powder in a supercritical fluid, is released under environmental conditions that vaporize the supercritical fluid, and the air port sol is dissolved in a gas in which the supercritical fluid is vaporized. Particles are generated and dispersed.
- the supercritical suspension fluid obtained in the above step is discharged through the supercritical suspension fluid discharge means 6.
- the aerosol particles are generated and dispersed by an aerosol particle generation / dispersion means 8 formed by a nozzle, and supplied to an aerosol particle generation / dispersion tank 9.
- the two-fluid nozzle formed by the double pipe can be used.c This release allows the cohesive powder suspended in the supercritical fluid to The abrupt volume expansion of the supercritical fluid that has entered gaps causes the disintegration of the agglomerated powder, the formation of primary particles, or the further disintegration and refinement, resulting in the formation of aerosol particles in the vaporized gas of the supercritical fluid. It can be generated and dispersed as aerosol particles.
- a temperature control jacket 10 is provided around the aerosol particle generation / dispersion tank 9. The temperature control jacket 10 has only to have a temperature control function capable of compensating for a temperature change, and a material and a shape suitable for the function are selected and used.
- the method of taking out the aerosol particles generated in the aerosol particle generation / dispersion tank 9 in the preceding step and supplying the aerosol particles and the aerosol particle supply means 13 are as follows.
- the aerosol particles generated in the generated aerosol particle dispersion tank 9 are taken out and used as needed.
- the aerosol particles are discharged through the aerosol particle discharge means 11, the flow rate is adjusted by the flow rate adjustment means 12, and the aerosol particles are taken out from the aerosol particle supply means 13 and used.
- the supercritical fluid As a result of releasing the supercritical suspension fluid formed by suspending the cohesive powder in the supercritical fluid obtained under the present invention under environmental conditions for vaporizing the supercritical fluid, the supercritical fluid is vaporized.
- the agglomerated powder can be crushed, turned into primary particles, or further crushed and refined in a mixed gas, so that aerosol particles can be obtained.
- Particle size distribution measuring means 14 includes (1) a particle size distribution measuring method by a light scattering method using a light scattering type particle counter, and (2) a particle size distribution measuring method by an electric mobility method using a combination of DMA / CNC. The method for measuring the particle size distribution is adopted.
- the light scattering method using a light scattering particle counter irradiates aerosol particles with light and measures the particle size distribution based on the distribution state of the scattered light.
- the sample gas containing aerosol particles is sucked and passed through the area irradiated by the stabilized light source.
- the light scattered forward or side by the individual aerosol particles is condensed on a photoelectric element such as a photomultiplier tube and converted into a pulsed electric signal.
- the peak value of the pulse signal is proportional to the amount of scattered light, and by utilizing the fact that the amount of scattered light and the particle size of the aerosol particles are in a fixed relationship, the particle size is selected and analyzed by analyzing the pulse peak value.
- the particle size distribution of the aerosol particles can be measured by counting the number of pulsated pulses.
- Positively and negatively charged particles or uncharged particles move in the direction of the electric field at their respective moving speeds, but also move in the axial direction, which is the direction of flow of the clean gas between the cylindrical electrodes. If a slit is provided at an arbitrary position on the inner cylindrical electrode and only the particles that reach the slit are taken out, those particles are only particles with a constant electric mobility, that is, particles with a uniform particle size.
- the particle size of the classified particles can be changed by adjusting the voltage applied to the cylindrical electrode.
- the classified particles are passed through supersaturated steam such as alcohol in the pipe of CNC which is a counting device, Vapors are condensed using particles as nuclei to increase the particle size, and the grown particles are irradiated with light, and the particles are counted from the scattered light. Aerosol particles can be classified by DMA and counted by CNC to measure the particle size distribution.
- a glass particle having an average particle diameter of 10 mg of primary particles is fed into the supercritical suspension fluid forming tank 1 from the cohesive powder supply means 3 and the temperature is 4 from the supercritical fluid supply means 4.
- Supercritical carbon dioxide at 0 ° C and a pressure of 100 atm was introduced and suspended.
- the glass particles at the time of feeding are high-order aggregates having a size of several tens to several hundreds / zm.
- the suspension is discharged from the supercritical suspension fluid discharge means 6 through the flow rate control means 7 through the aerosol particle generation and dispersion means 8 comprising a spray nozzle having an equivalent orifice diameter of 0.13 mm, and the aerosol is discharged.
- Particles were generated and dispersed.
- glass particles that were high-order aggregates of several tens to several hundreds were generated as air-ported zeolite particles dispersed in highly concentrated primary particles. It was confirmed that it had an average particle size of m.
- glass particles generated and dispersed as aerosol particles were deposited on slide glass and observed with an optical microscope to confirm that they were dispersed to primary particles.
- FIG. 3 (a) shows the state of the aggregate of the glass particles at the time of supply as observed by an optical microscope
- FIG. 3 (b) shows the state of the glass particles generated and dispersed according to the present example. .
- polymethyl methacrylate particles in which 1 O mg of primary particles have an average particle size of about 1 zm are charged into the supercritical suspension fluid forming tank 1 from the cohesive powder supply means 3, Supercritical carbon dioxide having a temperature of 40 ° C. and a pressure of 100 atm was introduced from the supercritical fluid supply means 4 and suspended therein.
- the polymethylmethacrylate particles are high-order aggregates of several tens to several hundreds of zm in size.
- the suspension is discharged from the supercritical suspension fluid discharging means 6 via the flow rate adjusting means 7 to 0.1.
- Aerosol particles generated and dispersed by the aerosol particle generation / dispersion means 8 composed of a spray nozzle having an equivalent orifice diameter of 3 mm were generated and dispersed.
- polymethyl methyl acrylate particles which were high-order aggregates of several tens to several hundreds of meters, were generated as aerosol particles dispersed in highly concentrated primary particles. It was confirmed that the particles had a mu average particle size of m.
- polymethyl methacrylate particles generated and dispersed as aerosol particles were deposited on slide glass, observed with an optical microscope, and confirmed to have been dispersed to primary particles.
- FIG. 4 (a) shows the state of aggregates of polymethyl methacrylate particles at the time of supply as observed by an optical microscope
- FIG. 4 (b) shows polymethyl methacrylate dispersed and generated according to the present example. The appearance of particles is shown.
- the aerosol particles obtained by disintegrating and dispersing the cohesive powder in the gas phase by the method for measuring the particle size distribution of the powder according to the present invention are used in the field of aerosol.
- the particle size distribution measurement method it is possible to measure the particle size distribution of a powder composed of aerosol particles with high accuracy.
- the powder particle size distribution measuring apparatus of the present invention good aerosol particles obtained by disintegrating and dispersing a cohesive powder in a gas phase have a particle size used in the field of aerosol.
- the distribution measuring device a highly accurate device for measuring the particle size distribution of powder composed of aerosol particles can be obtained.
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Abstract
A method for measuring the particle diameter distribution of a powder, which comprises suspending a powder prone to agglomeration in a supercritical fluid to form a supercritical suspension fluid, releasing the fluid under such a condition to vaporize the fluid to prepare an aerosol in which the powder prone to agglomeration is dispersed in a gas formed by vaporizing the supercritical fluid from the supercritical suspension fluid, and measuring the particle diameter distribution of aerosol particles in the aerosol; and an apparatus for practicing the method. The method allows highly precise measurement of the particle diameter distribution of a powder prone to agglomeration, through the measurement of the particle diameter distribution of the above novel aerosol particles.
Description
明 細 書 粉体の粒径分布測定方法及びその装置 技術分野 Description Method for measuring particle size distribution of powder and its apparatus
本発明は、 粉体の粒径分布測定方法及びその装置に関するものである。 背景技術 The present invention relates to a method and apparatus for measuring a particle size distribution of a powder. Background art
材料開発におけるキーファクタ一のひとつは、 その原材料である粉体の特性で ある。 その粉体の諸特性に関する最も基本的な因子は、 粒子の大きさである。 例 えば、 粉体の粒径分布測定法として、 電子顕微鏡による画像解析法が知られてい る。 しかしながら、 この方法は粉体を完全に一次粒子にまで解砕、 分散させ、 さ らに統計的に信頼できるサンプル数を得ることが難しく、 得られるデ一夕は信頼 性に欠ける。 One of the key factors in material development is the characteristics of the raw material powder. The most fundamental factor regarding the properties of the powder is the size of the particles. For example, an image analysis method using an electron microscope is known as a method for measuring the particle size distribution of a powder. However, this method disintegrates and disperses the powder completely into primary particles, and furthermore, it is difficult to obtain a statistically reliable sample number, and the obtained data is unreliable.
一般に、 数ミクロン以下の粉体は、 その材質を問わず、 高い凝集性を示し、 通 常の環境条件下では、 複数の一次粒子が凝集して高次の凝集体を形成しているの が普通である。 そのため、 粉体は、 種々の粒径分布測定法において、 一次粒子と してではなく、 粒子群として挙動し、 得られる粒径分布は、 一次粒子の粒径分布 の特徴が失われて、 粒子群の非常にプロ一ドな粒径分布となることがある。 In general, powders of several microns or less show high cohesion irrespective of the material, and under normal environmental conditions, a plurality of primary particles aggregate to form higher-order aggregates. Normal. Therefore, in various particle size distribution measurement methods, the powder behaves not as primary particles but as a group of particles, and the obtained particle size distribution loses the characteristics of the particle size distribution of the primary particles. A very prominent particle size distribution of the group may result.
一方、 エアロゾルの分野で用いられている光散乱式粒子計数器 (JIS B9921 光 散乱式自動粒子計数器) による光散乱法、 微分型電気移動度分析器 (DMA) (E. 0. Knutson and K. Τ. Whitby, Journal of Aerosol Science, 6 (1975) 443 -452. )による粒 径選別後に凝縮核式粒子計数器 (CNC) (W. C. Hinds, Aerosol Technology, Wiley Interscience(1982) )による粒子計数を行うことによる DMA/CNC組合せによる電気 移動度法などは、 精度のよい粒径分布測定法として広く利用されている。 光散乱 式粒子計数器による光散乱法は、 エアロゾル粒子に光を照射して、 その散乱光の
分布状態をから、 その粒径分布を測定するものである。 DMA/CNC組合せによる 電気移動度法は、 分級装置である DMAにより、 特定の狭い範囲の電気移動度を有 するエアロゾル粒子のみを選別し、 その後続けて、 計数装置である CNCにより、 分級後の粒子を核としてアルコールなどの蒸気を凝縮させ、 光学的手法によりェ ァロゾル粒子を計数し、 その粒径分布を測定するものである。 On the other hand, the light scattering method using a light scattering type particle counter (JIS B9921 light scattering type automatic particle counter) used in the field of aerosol, a differential electric mobility analyzer (DMA) (E. 0. Knutson and K T. After particle size selection by Whitby, Journal of Aerosol Science, 6 (1975) 443-452. The electric mobility method based on the combined use of DMA / CNC is widely used as an accurate particle size distribution measurement method. The light scattering method using a light scattering type particle counter irradiates aerosol particles with light, From the distribution state, the particle size distribution is measured. The electric mobility method based on the combination of DMA / CNC selects only aerosol particles having a specific narrow range of electric mobility using the classification device, DMA, and then uses the counting device, CNC, to perform classification. Vapors such as alcohol are condensed using particles as nuclei, aerosol particles are counted by an optical method, and the particle size distribution is measured.
しかしながら、 前記のように、 従来のエアロゾル粒子は一次粒子の状態のもの が得にくいこともあって、 粒子群として挙動し、 得られる粒径分布は、 一次粒子 の粒径分布の特徴が失われて、 粒子群の非常にブロードな粒径分布となり、 必ず しも十分な測定結果が得られているとはいえない状態であった。 However, as described above, conventional aerosol particles behave as a particle group because it is difficult to obtain primary aerosol particles, and the obtained particle size distribution loses the characteristics of the particle size distribution of primary particles. As a result, the particle population had a very broad particle size distribution, and sufficient measurement results could not always be obtained.
粉体試料が十分に分散されていない状態に対して粒径分布を測定するためにデ —夕の信頼性や再現性の観点から十分でなく、 気相において凝集性粉体を良好に 分散させたエアロゾル粒子を得ることができれば、 満足する凝集性粉体の粒径分 布測定が可能になると考えられ、 できるだけ一次粒子の状態のエアロゾル粒子を 得る技術の確立が重要な課題となっている。 発明の開示 In order to measure the particle size distribution in a state where the powder sample is not sufficiently dispersed, it is not sufficient from the viewpoint of reliability and reproducibility in the evening, and the cohesive powder is dispersed well in the gas phase. It is thought that if aerosol particles can be obtained, it will be possible to measure the particle size distribution of the cohesive powder to a satisfactory extent, and the establishment of technology to obtain aerosol particles in the primary particle state as much as possible has become an important issue. Disclosure of the invention
本発明が解決しょうとする課題は、 凝集性粉体を気相において良好に分散させ たエアロゾル粒子として、 そのエアロゾル粒子の粒径分布を測定することによる 高精度な凝集性粉体の粒径分布の測定方法を提供することである。 The problem to be solved by the present invention is to provide a highly accurate particle size distribution of agglomerated powder by measuring the particle size distribution of the aerosol particles as aerosol particles in which the agglomerated powder is well dispersed in the gas phase. It is to provide a measuring method of.
本発明者らは前記課題について鋭意検討し、 以下の知見を得て本発明を完成さ せた。 Means for Solving the Problems The present inventors diligently studied the above problem and obtained the following findings to complete the present invention.
凝集性粉体を超臨界流体中に懸濁させると、 超臨界流体との接触によって、 粉 体に凝集力を与えている原因が除去され、 或いは凝集性の程度が大幅に緩和され て凝集性粉体が解砕を起こすとともに、 その超臨界懸濁流体を、 超臨界流体を気 化させる環境条件下に放出すると、 状態変化に際して大きな膨張力を得ることが でき、その状態変化に伴って発生する大きな膨張力を用いて凝集性粉体に対して、
解砕を起こすことができ、 膨張の程度によって急激に一次粒子化又は更なる解砕 微細化された良好な分散状態のエアロゾル粒子を得る方法を開発できることを見 出した。 When the cohesive powder is suspended in a supercritical fluid, the cause of the cohesive force is removed by contact with the supercritical fluid, or the degree of cohesiveness is greatly reduced, and the cohesiveness is reduced. When the powder is disintegrated and the supercritical suspension fluid is released under environmental conditions that evaporate the supercritical fluid, a large expansion force can be obtained when the state changes, and it is generated with the state change Against a cohesive powder using a large expansion force It has been found that it is possible to develop a method for obtaining aerosol particles which can be disintegrated and rapidly become primary particles or further disintegrated and finely divided depending on the degree of expansion, and which are in a well-dispersed state.
このようにして得られるエアロゾル粒子に対して、 従来から知られているエア ロゾル粒子の測定方法を適用する。 すなわち、 前記新規なエアロゾル粒子の生成 方法により得られるエアロゾル粒子に、 エアロゾル粒子の公知の測定方法を適用 することにより、前記エアロゾル粒子製造方法により得られるエアロゾル粒子は、 実際に、 一次粒子あるいはそれに近いものであり、 良好な分散状態のエアロゾル 粒子を得ることができ、 凝集体を形成している一次粒子あるいはそれに近い状態 のものの粒径分布を測定することができる。 このような測定方法には、 光散乱式 粒子計数器による光散乱法や DMA/CNC組合せによる電気移動度法などの分散さ れた状態のエア口ゾル粒子の粒径分布測定方法を利用することができる。 A conventionally known method of measuring aerosol particles is applied to the aerosol particles thus obtained. That is, by applying a known measurement method of aerosol particles to the aerosol particles obtained by the method for producing novel aerosol particles, the aerosol particles obtained by the aerosol particle production method are actually primary particles or close to primary particles. Thus, aerosol particles in a good dispersion state can be obtained, and the particle size distribution of primary particles forming an aggregate or a state close to the primary particles can be measured. For such a measurement method, a method for measuring the particle size distribution of dispersed aerosol particles in a dispersed state, such as a light scattering method using a light scattering type particle counter or an electric mobility method using a combination of DMA / CNC, should be used. Can be.
本発明によれば、 以下の発明が提供される。 According to the present invention, the following inventions are provided.
( 1 ) 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超臨界流体を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を 気化させた気体中で凝集性粉体が発生分散された状態のエアロゾル粒子の粒径分 布を測定することを特徴とする粉体の粒径分布測定方法。 (1) The supercritical fluid, which is formed by suspending the cohesive powder in the supercritical fluid, is released under environmental conditions that evaporate the supercritical fluid. A method for measuring a particle size distribution of a powder, comprising measuring a particle size distribution of aerosol particles in a state where a cohesive powder is generated and dispersed in a vaporized gas.
( 2 ) 超臨界懸濁流体から超臨界流体を気化させた気体中でエア口ゾル粒子を 発生分散及び貯蔵し、 取り出してエアロゾル粒子の粒径分布を測定することを特 徴とする前記 ( 1 ) 記載の粉体の粒径分布測定方法。 (2) The method described in (1), characterized in that aerosol particles are generated and dispersed in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid, stored, taken out, and the particle size distribution of the aerosol particles is measured. ) The method for measuring the particle size distribution of powder described in the above.
( 3 ) エアロゾル粒子の発生分散を噴霧又はィンパク夕一処理により行うこと を特徴とする前記 ( 1 ) 又は (2 ) 記載の粉体の粒径分布測定方法。 (3) The method for measuring the particle size distribution of a powder according to the above (1) or (2), wherein the generation and dispersion of the aerosol particles is carried out by spraying or impinging.
( 4 ) エアロゾル粒子に希釈用ガスを供給し、 得られるエアロゾル粒子濃度を 制御し、 粒径分布を測定することを特徴とする前記 ( 1 )、 (2 ) 又は (3 ) 記 載の粉体の粒径分布測定方法。 (4) The powder as described in (1), (2) or (3) above, wherein a dilution gas is supplied to the aerosol particles, the obtained aerosol particle concentration is controlled, and the particle size distribution is measured. Particle size distribution measurement method.
( 5 ) 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、
超臨界流体'を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を 気化させた気体中で凝集性粉体を発生分散された状態のエアロゾル粒子に光を照 射し、 得られる散乱光から、 光散乱法により粒径分布を測定することを特徴とす る前記 ( 1 ) 、 ( 2 ) 、 ( 3 ) 又は ( 4 ) 記載の粉体の粒径分布測定方法。 (5) The supercritical suspension fluid formed by suspending the cohesive powder in the supercritical fluid is The supercritical fluid is released under the environmental conditions that evaporate, and the aerosol particles in a state in which a cohesive powder is generated and dispersed in a gas in which the supercritical fluid is vaporized from the supercritical suspension fluid are irradiated with light, The method for measuring the particle size distribution of powder according to the above (1), (2), (3) or (4), wherein the particle size distribution is measured from the obtained scattered light by a light scattering method.
( 6 ) 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超臨界流体を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を 気化させた気体中で凝集性粉体を発生分散された状態のエアロゾル粒子を特定の 電気移動度を有する粒子のみに分級し、 その後続けて、 分級後の粒子を核として アルコールなどの蒸気を凝縮させ、 光学的手法により粒子を計数し、 電気移動度 法により粒径分布を測定することを特徴とする前記 ( 1 ) 、 (2 ) 、 (3 ) 又は ( 4 ) 記載の粉体の粒径分布測定方法。 (6) The supercritical fluid, which is formed by suspending the cohesive powder in the supercritical fluid, is released under environmental conditions that evaporate the supercritical fluid, and the supercritical fluid is converted from the supercritical fluid. Aerosol particles in a state in which a cohesive powder is generated and dispersed in a vaporized gas are classified into only particles having a specific electric mobility, and subsequently, the vapors such as alcohol are condensed using the classified particles as nuclei. The particle size of the powder according to (1), (2), (3) or (4), wherein the particles are counted by an optical method, and the particle size distribution is measured by an electric mobility method. Distribution measurement method.
( 7 ) 超臨界流体を供給する供給手段、 凝集性粉体を供給する供給手段及び形 成される超臨界懸濁流体を排出する排出手段を有する、 凝集性粉体を超臨界流体 中に懸濁させる超臨界懸濁流体形成槽と、 超臨界懸濁流体形成槽から排出された 超臨界懸濁流体を、 超臨界流体が気化させる環境条件下に放出させ、 気化された 超臨界流体中に凝集性粉体が分散された状態でエアロゾル粒子を発生分散させる エアロゾル粒子発生分散手段、 及び超臨界懸濁流体から超臨界流体を気化させた 気体中で凝集性粉体を発生分散させたエアロゾル粒子の粒径分布を測定する手段 からなることを特徴とする粉体の粒径分布測定装置。 (7) Suspending the coagulable powder in the supercritical fluid, comprising: a supply means for supplying the supercritical fluid, a supply means for supplying the coagulable powder, and a discharge means for discharging the formed supercritical suspension fluid. The supercritical suspension fluid formation tank to be turbidized, and the supercritical suspension fluid discharged from the supercritical suspension fluid formation tank are released under the environmental conditions where the supercritical fluid is vaporized. Aerosol particle generating and dispersing means for generating and dispersing aerosol particles in a state where the cohesive powder is dispersed, and aerosol particles generating and dispersing the cohesive powder in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid An apparatus for measuring the particle size distribution of powder, comprising: means for measuring the particle size distribution of powder.
( 8 ) 超臨界懸濁流体から超臨界流体を気化させた気体中でエアロゾル粒子を 発生分散及び貯蔵するエアロゾル粒子発生分散槽及び、 これに続いて、 エアロゾ ル粒子取り出し手段を設けたエアロゾル粒子の粒径分布を測定することを特徴と する前記 (7 ) 記載の粉体の粒径分布測定装置。 (8) An aerosol particle generation and dispersion tank for generating and dispersing and storing aerosol particles in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid, and subsequently, an aerosol particle provided with a means for extracting aerosol particles. The powder particle size distribution measuring device according to the above (7), wherein the particle size distribution is measured.
( 9 ) エアロゾル粒子の発生分散を行うための噴霧ノズル又はィンパク夕一な どの発生分散手段が設けられているエアロゾル粒子の粒径分布を測定することを 特徴とする前記 (7 ) 又は (8 ) 記載の粉体の粒径分布測定装置。
( 1 0 ) エアロゾル粒子の発生濃度を制御するための希釈用ガス供給手段が設 けられているエア口ゾル粒子の粒径分布を測定することを特徴とする前記( 7 )(9) The method according to (7) or (8), wherein the particle size distribution of aerosol particles provided with means for generating and dispersing aerosol particles, such as a spray nozzle or an impactor, is measured. An apparatus for measuring the particle size distribution of the powder described in the above. (10) The method according to the above (7), wherein the particle size distribution of the air port sol particles provided with a diluting gas supply means for controlling the generation concentration of the aerosol particles is measured.
( 8 ) 又は (9 ) 記載の粉体の粒径分布測定装置。 (8) or the apparatus for measuring the particle size distribution of powder according to (9).
( 1 1 ) 凝集性粉体を超臨界流体中に懸濁させる超臨界懸濁流体形成槽と、 超 臨界懸濁流体形成槽から排出された超臨界懸濁流体を、 超臨界流体が気化させる 環境条件下に放出させ、 気化された超臨界流体中に凝集性粉体が分散された状態 でエアロゾル粒子を発生分散させるエアロゾル粒子発生分散手段、 及び超臨界懸 濁流体から超臨界流体を気化させた気体中で凝集性粉体を発生分散させたエア口 ゾル粒子に光を照射し、 得られる散乱光から光散乱法により粒径分布を測定する 手段からなることを特徴とする前記 (7 ) 、 (8 ) 、 (9 ) 又は ( 1 0 ) 記載の 粉体の粒径分布測定装置。 (11) Supercritical fluid forming tank for suspending coagulable powder in supercritical fluid, and supercritical fluid vaporizing supercritical suspending fluid discharged from supercritical suspending fluid forming tank Aerosol particle generating and dispersing means for generating and dispersing aerosol particles in a state in which cohesive powder is dispersed in a vaporized supercritical fluid, and evaporating a supercritical fluid from a supercritical suspended fluid (7) The method according to the above (7), further comprising: irradiating light to the sol particles of the aerosol in which the cohesive powder is generated and dispersed in the gas, and measuring the particle size distribution from the obtained scattered light by a light scattering method. (8), (9) or (10).
( 1 2 ) 凝集性粉体を超臨界流体中に懸濁させる超臨界懸濁流体形成槽と、 超 臨界懸濁流体形成槽から排出された超臨界懸濁流体を、 超臨界流体が気化させる 環境条件下に放出させ、 気化された超臨界流体中に凝集性粉体が分散された状態 でエアロゾル粒子を発生分散させるエアロゾル粒子発生分散手段、 及び超臨界懸 濁流体から超臨界流体を気化させた気体中で凝集性粉体を発生分散させたエア口 ゾル粒子を特定の電気移動度を有する粒子のみに分級し、 その後続けて、 分級後 の粒子を核としてアルコールなどの蒸気を凝縮させ、 光学的手法により粒子を計 数し、 電気移動度法により粒径分布を測定する手段からなることを特徴とする前 記 ( 7 ) 、 ( 8 ) 、 ( 9 ) 又は ( 1 0 ) 記載の粉体の粒径分布測定装置。 図面の簡単な説明 (12) The supercritical fluid forms a supercritical suspension fluid for suspending the cohesive powder in the supercritical fluid, and the supercritical fluid vaporizes the supercritical suspension fluid discharged from the supercritical suspension fluid formation tank. Aerosol particle generating and dispersing means for generating and dispersing aerosol particles in a state where cohesive powder is dispersed in a vaporized supercritical fluid, and supercritical fluid being vaporized from a supercritical suspended fluid Aerosol particles in which a cohesive powder is generated and dispersed in a gas that has been classified are classified into particles having a specific electric mobility only, and then the vapors such as alcohol are condensed using the classified particles as nuclei, The method according to the above (7), (8), (9) or (10), comprising means for counting particles by an optical method and measuring the particle size distribution by an electric mobility method. Body particle size distribution measuring device. BRIEF DESCRIPTION OF THE FIGURES
第 1図は、 本発明の粉体の粒径分布測定装置の概略図である。 FIG. 1 is a schematic diagram of a powder particle size distribution measuring device of the present invention.
第 2図は、 本発明の他の粉体の粒径分布測定装置の概略図である。 FIG. 2 is a schematic view of another powder particle size distribution measuring device of the present invention.
第 3図は、 光学顕微鏡により観察したガラス粒子の様子である。 Fig. 3 shows the appearance of glass particles observed with an optical microscope.
第 4図は、 光学顕微鏡により観察したポリメチルメタクリレート粒子の様子であ
る o Fig. 4 shows the appearance of polymethyl methacrylate particles observed with an optical microscope. O
第 3図及び第 4図の (a ) は供給時点の凝集体を、 又 (b ) は、 発生分散後の一 次粒子を示している。 発明を実施するための最良の形態 3 (a) and 3 (b) show aggregates at the time of supply, and (b) shows primary particles after generation and dispersion. BEST MODE FOR CARRYING OUT THE INVENTION
本発明をより詳細に説明するために、 添付の図面に従ってこれを説明する。 第 1図の装置は、 以下のように構成されている。 The present invention will be described in more detail with reference to the accompanying drawings. The apparatus shown in FIG. 1 is configured as follows.
凝集性粉体を超臨界流体中に懸濁させて超臨界懸濁流体を形成するための超臨 界懸濁流体形成槽 1及びこれに接続するエア口ゾル粒子を得るエア口ゾル粒子発 生分散手段 8、 及びエアロゾル粒子の粒径分布測定を行うための粒径分布測定手 段 1 4から構成される。 A supercritical suspension fluid forming tank 1 for suspending the cohesive powder in a supercritical fluid to form a supercritical suspension fluid, and aerosol particles generation for obtaining aerosol particles connected thereto. It comprises a dispersing means 8 and a particle size distribution measuring means 14 for measuring the particle size distribution of the aerosol particles.
凝集性粉体を超臨界流体中に懸濁させて超臨界懸濁流体を形成するため、 超臨 界懸濁流体形成槽 1は、 超臨界流体を、 流量調整手段 5を経て供給する供給手段 4、 凝集性粉体を供給する供給手段 3及び形成される超臨界懸濁流体を排出する 排出手段 6を有する。 In order to form a supercritical suspension fluid by suspending the cohesive powder in the supercritical fluid, the supercritical suspension fluid forming tank 1 is provided with a supply means for supplying the supercritical fluid via the flow rate adjusting means 5. 4. It has a supply means 3 for supplying the cohesive powder and a discharge means 6 for discharging the formed supercritical suspension fluid.
また、 超臨界流体を気化させる環境条件下に放出し、 超臨界流体を気化させた 気体中で超臨界懸濁流体からエア口ゾル粒子を形成することによりエア口ゾル粒 子を得るエアロゾル粒子発生分散手段 8は、 超臨界懸濁流体形成槽 1から排出さ れた超臨界懸濁流体が流量調整手段 7を介して供給され、 発生分散手段 8から超 臨界流体は気化される環境条件下に放出され、 気化された超臨界流体中に凝集性 粉体が分散された状態でエア口ゾル粒子を発生させる。 In addition, aerosol particles are generated by releasing a supercritical fluid under environmental conditions to vaporize and forming aerosol particles from a supercritical suspension fluid in a gas in which the supercritical fluid is vaporized. The dispersing means 8 supplies the supercritical fluid discharged from the supercritical suspending fluid forming tank 1 via the flow rate adjusting means 7 to the supercritical fluid under the environmental conditions in which the supercritical fluid is vaporized. The aerosol particles are generated with the cohesive powder dispersed in the released and vaporized supercritical fluid.
また、 発生分散手段 8において、 例えば、 噴霧ノズル又はインパク夕一などの 発生分散手段を備えた装置構成にしてもよい。 噴霧ノズルは、 超臨界懸濁流体を 微霧として噴霧し、 さらにインパク夕一は、 噴霧ノズルを介した流体を平板にぶ つけ、 流れの方向を曲げることによって、 十分な慣性を有する解砕や一次粒子化 せずに残った凝集体を取り除くものであり、 その結果、 エアロゾル粒子の良好な
発生分散ができる。 Further, the generation and dispersion means 8 may be configured to include a generation and dispersion means such as a spray nozzle or an impact nozzle. The spray nozzle sprays the supercritical suspension fluid as fine mist, and in the case of impact, the fluid through the spray nozzle collides with a flat plate and bends the direction of the flow, so that crushing and It removes aggregates remaining without being converted into primary particles, and as a result, provides good aerosol particle Generation dispersion is possible.
また、 発生分散手段 8において、 例えば、 得られるエアロゾル粒子濃度を調節 する必要がある場合には、 必要に応じて希釈ガスを供給することができる。 発生 分散手段 8に希釈用ガス供給手段を備えた 2流体ノズルを用い、 希釈用ガス供給 手段によって、 ガスフィル夕一で不純物が除去された希釈用ガスが、 流量調整手 段で制御された流量で 2流体ノズルに供給され、 従って発生分散するエアロゾル 粒子が、 供給された希釈用ガスの量に応じて希釈され、 その結果、 濃度が制御さ れたェァ口ゾル粒子を得ることができる。 Further, in the generation / dispersion means 8, for example, when it is necessary to adjust the concentration of the obtained aerosol particles, a dilution gas can be supplied as needed. Using a two-fluid nozzle equipped with a diluting gas supply means in the generating and dispersing means 8, the diluting gas from which impurities were removed by the diluting gas supply means at the gas fill rate was controlled at a flow rate controlled by the flow rate adjusting means. The aerosol particles that are supplied to the two-fluid nozzle and thus generated and dispersed are diluted according to the amount of the supplied diluting gas, and as a result, it is possible to obtain air-mouth sol particles having a controlled concentration.
そして、 凝集性粉体を発生分散させた状態のエアロゾル粒子は、 超臨界流体を 気化させた気体ともに試料気体として粒径分布測定手段 1 4に流入させ、 粒径分 布測定を行う。 The aerosol particles in a state where the agglomerated powder is generated and dispersed are flown into the particle size distribution measuring means 14 as a sample gas together with the gas obtained by evaporating the supercritical fluid, and the particle size distribution is measured.
第 2図の装置は、 以下のように構成されている。 The device in FIG. 2 is configured as follows.
前記第 1図の場合と同じである超臨界懸濁流体形成槽 1、 これに接続するエア口 ゾル粒子を発生させるエア口ゾル粒子発生分散槽 9及びエア口ゾル粒子を取り出 すエアロゾル粒子供給手段 1 3から構成される。 Supercritical suspension fluid forming tank 1 which is the same as that in Fig. 1 above, connected to this, air port sol particle generation / dispersion tank 9 for generating air port sol particles, and aerosol particle supply for taking out air port sol particles Means 13 are comprised.
エアロゾル粒子発生分散槽 9では、 凝集性粉体を超臨界流体中に懸濁させて得 られる超臨界懸濁流体を、 超臨界流体を気化させる環境条件下に放出し、 超臨界 懸濁流体から超臨界流体を気化させた気体中でエアロゾル粒子を形成する。 エアロゾル粒子発生分散槽 9は、 形成される超臨界懸濁流体を供給し、 エア口 ゾル粒子を発生分散させる発生分散手段 8及びエアロゾル粒子を排出する排出手 段 1 1を有する。 In the aerosol particle generation and dispersion tank 9, a supercritical suspension fluid obtained by suspending the cohesive powder in a supercritical fluid is released under environmental conditions that evaporate the supercritical fluid, and Aerosol particles are formed in a gas obtained by evaporating a supercritical fluid. The aerosol particle generation / dispersion tank 9 has a generation / dispersion means 8 for supplying the formed supercritical suspension fluid and generating / dispersing the sol particles at the air port, and a discharge means 11 for discharging the aerosol particles.
エアロゾル粒子を取り出すエアロゾル粒子供給手段 1 3には、 前記エアロゾル 粒子を排出する排出手段 1 1に続き流量調節手段 1 2を介してエアロゾル粒子が 供給され、 取り出される。 The aerosol particles are supplied to the aerosol particle supply means 13 for taking out the aerosol particles via the flow rate adjusting means 12 following the discharge means 11 for discharging the aerosol particles, and are taken out.
また、 発生分散手段 8において、 例えば、 噴霧ノズル又はインパク夕一などの 発生分散手段を備えた装置構成にしてもよい。 噴霧ノズルは、 超臨界懸濁流体を
微霧として噴霧し、 さらにインパク夕一は、 噴霧ノズルを介した流体を平板にぶ つけ、 流れの方向を曲げることによって、 十分な慣性を有する解砕や一次粒子化 せずに残った凝集体を取り除くものであり、 その結果、 エアロゾル粒子の良好な 発生分散ができる。 Further, the generation and dispersion means 8 may be configured to include a generation and dispersion means such as a spray nozzle or an impact nozzle. Spray nozzles are used for supercritical fluid suspension Sprayed as fine mist, and furthermore, the impact was reduced by colliding the fluid through the spray nozzle against a flat plate and bending the direction of the flow, resulting in agglomerates remaining without crushing or primary particles with sufficient inertia As a result, good generation and dispersion of aerosol particles can be achieved.
また、 エアロゾル粒子発生分散槽 9において、 例えば、 得られるエアロゾル粒 子濃度を調節する必要がある場合には、 必要に応じて希釈ガスを供給することが できる。 エアロゾル粒子発生分散槽 9に、 希釈用ガス供給手段によって、 ガスフ ィル夕—で不純物が除去された希釈用ガスが、 流量調整手段で制御された流量で エア口ゾル粒子発生分散槽 9に供給され、従って発生分散するエアロゾル粒子が、 供給された希釈用ガスの量に応じて希釈され、 その結果、 濃度が制御されたエア ロゾル粒子を得ることができる。 また、 発生分散手段 8に希釈用ガス供給手段を 備えた 2流体ノズルを用いても同様にエアロゾル粒子の発生濃度を制御すること ができる。 In the aerosol particle generation / dispersion tank 9, for example, when it is necessary to adjust the concentration of the obtained aerosol particles, a dilution gas can be supplied as needed. The diluent gas, from which impurities have been removed by the gas filter, is supplied to the aerosol particle generation / dispersion tank 9 at a flow rate controlled by the flow rate adjusting means. Accordingly, the aerosol particles generated and dispersed are diluted according to the amount of the supplied diluting gas, and as a result, aerosol particles having a controlled concentration can be obtained. Also, the generation concentration of aerosol particles can be controlled in the same manner by using a two-fluid nozzle provided with a dilution gas supply means in the generation / dispersion means 8.
そして、 凝集性粉体を発生分散させた状態のエアロゾル粒子は、 超臨界流体を 気化させた気体ともに試料気体として粒径分布測定手段 1 4に流入させ、 粒径分 布測定を行う。 The aerosol particles in a state where the agglomerated powder is generated and dispersed are flown into the particle size distribution measuring means 14 as a sample gas together with the gas obtained by evaporating the supercritical fluid, and the particle size distribution is measured.
凝集性粉体を超臨界流体中に懸濁させて超臨界懸濁流体を形成するため、 超臨 界懸濁流体形成槽 1については、 以下の通りである。 In order to form a supercritical suspension fluid by suspending the cohesive powder in the supercritical fluid, the supercritical suspension fluid forming tank 1 is as follows.
超臨界流体には、適宜選択して用いることができる。具体的には、二酸化炭素、 亜酸化窒素、 ェタン、 プロパン、 エチレン、 代替フロン、 水などを挙げることが できる。 The supercritical fluid can be appropriately selected and used. Specific examples include carbon dioxide, nitrous oxide, ethane, propane, ethylene, chlorofluorocarbon alternative, and water.
フィル夕を介して清浄化された二酸化炭素、 ェタン、 エチレン、 代替フロンな どを臨界状態に加熱加圧し、 超臨界流体として、 超臨界流体供給手段 4により、 流量調整手段 5を介して、 超臨界流体懸濁形成槽 1に供給される。 The purified carbon dioxide, ethane, ethylene, alternative chlorofluorocarbon, etc., is heated and pressurized to a critical state, and is converted into a supercritical fluid by the supercritical fluid supply means 4 and the flow control means 5 by the supercritical fluid supply means 4. It is supplied to the critical fluid suspension formation tank 1.
また、 超臨界懸濁流体形成槽 1内には、 例えば、 攪拌羽根や攪拌子を用いる高 速ミキサーや、 超音波発生装置を設置して用いることによって攪拌混合された懸
濁流体を得ることもできる。 Further, in the supercritical suspension fluid forming tank 1, for example, a high-speed mixer using a stirring blade or a stirrer, or a suspension mixed with stirring by using and installing an ultrasonic generator. A turbid fluid can also be obtained.
この懸濁による超臨界流体との接触によって、 粉体に凝集力を与えている原因 が除去され、或いは凝集性の程度が大幅に緩和されて凝集性粉体が解碎を起こす。 粒径分布測定の対象となる凝集性粉体は、 凝集性粉体供給手段 3により、 超臨 界懸濁流体形成槽 1に供給される。 凝集性粉体としては、 スチレン、 アクリル酸 エステル、 メ夕クリル酸エステル、 その他のビニルモノマ一から得られる重合体 または共重合体、 並びにエポキシ樹脂、 フエノール樹脂、 メラニン樹脂、 ポリア ミ ド樹脂、 シリコーン樹脂などの種々の重合体または共重合体の粒子などの有機 物質、 更には各種金属、 非金属、 セラミックスの粒子などの無機物質をあげるこ とが出来る。 この凝集性粉体は、 構成原料、 形状などによる特定の制約や限定は なく、 種々な物質を用いることができる。 The contact with the supercritical fluid due to the suspension removes the cause of the cohesive force on the powder, or the degree of cohesion is greatly reduced, and the cohesive powder is broken. The cohesive powder to be subjected to the particle size distribution measurement is supplied to the supercritical fluid forming tank 1 by the cohesive powder supply means 3. Examples of the cohesive powder include styrene, acrylate, methyl acrylate, and other polymers or copolymers obtained from vinyl monomers, and epoxy resins, phenol resins, melanin resins, polyamide resins, and silicone resins. And organic substances such as particles of various polymers or copolymers, and inorganic substances such as particles of various metals, nonmetals, and ceramics. As the cohesive powder, various substances can be used without specific restrictions or limitations depending on the constituent raw materials, shapes, and the like.
超臨界流体供給手段 4は、 流量調節手段 5が設けられている。 また、 超臨界懸 濁流体形成槽 1は、 その周囲に調温ジャケット 2を有し、 超臨界流体を超臨界状 態又は亜超臨界状態に保たれるようにする。 The supercritical fluid supply means 4 is provided with a flow rate adjusting means 5. Further, the supercritical suspension fluid forming tank 1 has a temperature control jacket 2 around it so that the supercritical fluid can be kept in a supercritical state or a subsupercritical state.
超臨界流体は、 超臨界流体とは超臨界状態の流体を意味し、 また、 超臨界状態 とは臨界温度、 臨界圧力を超えた、 いわゆる超臨界状態のほか、 そのような臨界 温度、 臨界圧力をわずかに下回るような状態であるが、 状態変化が極めて短時間 に起こるため、 上記の超臨界流体とほぼ同様の取り扱いができるような亜臨界状 態も含み、 超臨界流体には亜臨界状態の亜臨界流体も含むものとする。 The supercritical fluid is a supercritical fluid that means a fluid in a supercritical state, and a supercritical state is a supercritical state that exceeds a critical temperature and a critical pressure, as well as a critical temperature and a critical pressure. Although the state is slightly lower than the above, the state change occurs in a very short time, and includes the subcritical state that can be handled almost in the same way as the above supercritical fluid. Subcritical fluid.
超臨界流体として二酸化炭素を用いる場合には、 温度が 3 0〜8 0 °C、 好まし くは、 3 0 ~ 5 0 °C、 圧力が 4 0〜4 0 0 a t m、 好ましくは 1 0 0〜 3 0 0 a t mに維持されることが必要である。 When carbon dioxide is used as the supercritical fluid, the temperature is 30 to 80 ° C, preferably 30 to 50 ° C, and the pressure is 40 to 400 atm, preferably 100 to 100 atm. It needs to be maintained at ~ 300 atm.
凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超臨界 流体を気化させる環境条件下に放出し、 超臨界流体を気化させた気体中でエア口 ゾル粒子を発生分散させる。 The supercritical fluid, which is formed by suspending a cohesive powder in a supercritical fluid, is released under environmental conditions that vaporize the supercritical fluid, and the air port sol is dissolved in a gas in which the supercritical fluid is vaporized. Particles are generated and dispersed.
前記の工程で得られる超臨界懸濁流体は、 超臨界懸濁流体排出手段 6を経て排
出され、 流量供給手段 7により流量調節が行われ、 ノズルにより形成されるエア ロゾル粒子発生分散手段 8において、 エアロゾル粒子を発生分散させ、 エアロゾ ル粒子発生分散槽 9に供給される。 ノズルについては、 超臨界懸濁流体を噴霧す る単管により形成されるノズル、 または、 超臨界懸濁流体の他に、 得られるエア ロゾル粒子の濃度を調節する必要がある場合には、 必要に応じて希釈用ガスを供 給することができる 2重管により形成される 2流体ノズルを用いることができる c この放出により、 超臨界流体中に懸濁した凝集性粉体は、 粒子間の間隙などに 入り込んだ超臨界流体が急激に体積膨張することにより、 凝集性粉体の解砕、 一 次粒子化又は更なる解砕微細化が起こり、 超臨界流体の気化気体中にエアロゾル 粒子を発生させることができ、 エアロゾル粒子として分散することができる。 エアロゾル粒子発生分散槽 9の周囲には、 調温ジャケット 1 0を有する。 調温 ジャケット 1 0は、 温度変化を補償できる調温機能を有するものであればよく、 その作用に見合う材料及び形状のものを選択して利用する。 The supercritical suspension fluid obtained in the above step is discharged through the supercritical suspension fluid discharge means 6. The aerosol particles are generated and dispersed by an aerosol particle generation / dispersion means 8 formed by a nozzle, and supplied to an aerosol particle generation / dispersion tank 9. For nozzles, a nozzle formed by a single tube that sprays a supercritical suspension fluid, or if the concentration of aerosol particles obtained in addition to the supercritical suspension fluid needs to be adjusted, it is necessary. The two-fluid nozzle formed by the double pipe can be used.c This release allows the cohesive powder suspended in the supercritical fluid to The abrupt volume expansion of the supercritical fluid that has entered gaps causes the disintegration of the agglomerated powder, the formation of primary particles, or the further disintegration and refinement, resulting in the formation of aerosol particles in the vaporized gas of the supercritical fluid. It can be generated and dispersed as aerosol particles. A temperature control jacket 10 is provided around the aerosol particle generation / dispersion tank 9. The temperature control jacket 10 has only to have a temperature control function capable of compensating for a temperature change, and a material and a shape suitable for the function are selected and used.
前工程のエアロゾル粒子発生分散槽 9で発生させたエアロゾル粒子を取り出し、 エアロゾル粒子を供給する方法及びエアロゾル粒子供給手段 1 3は、 以下の通り である。 The method of taking out the aerosol particles generated in the aerosol particle generation / dispersion tank 9 in the preceding step and supplying the aerosol particles and the aerosol particle supply means 13 are as follows.
生成したエア口ゾル粒子発生分散槽 9で発生するエア口ゾル粒子は、 必要に応 じて取り出して利用される。 エアロゾル粒子放出手段 1 1を経て排出され、 流量 調整手段 1 2により流量調節が行われ、 エアロゾル粒子供給手段 1 3から、 エア ロゾル粒子は取り出され、 利用される。 The aerosol particles generated in the generated aerosol particle dispersion tank 9 are taken out and used as needed. The aerosol particles are discharged through the aerosol particle discharge means 11, the flow rate is adjusted by the flow rate adjustment means 12, and the aerosol particles are taken out from the aerosol particle supply means 13 and used.
本発明で得られる、 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界 懸濁流体を、 超臨界流体を気化させる環境条件下に放出する結果、 超臨界流体を 気化させた気体中で凝集性粉体の解碎、 一次粒子化又は更なる解砕微細化が起こ り、 エアロゾル粒子を得ることができる。 As a result of releasing the supercritical suspension fluid formed by suspending the cohesive powder in the supercritical fluid obtained under the present invention under environmental conditions for vaporizing the supercritical fluid, the supercritical fluid is vaporized. The agglomerated powder can be crushed, turned into primary particles, or further crushed and refined in a mixed gas, so that aerosol particles can be obtained.
得られたエアロゾル粒子は、 超臨界流体の気化気体とともに試料気体として粒 径分布測定手段 1 4に流入させ、 その粒径分布を測定する。
粒径分布測定手段 1 4は、 ( 1 ) 光散乱式粒子計数器による光散乱法による粒 径分布測定法や (2 ) DMA/CNC組合せによる電気移動度法による粒径分布の測 定方法などの粒径分布の測定方法が採用される。 The obtained aerosol particles flow into the particle size distribution measuring means 14 as a sample gas together with the vaporized gas of the supercritical fluid, and the particle size distribution is measured. Particle size distribution measuring means 14 includes (1) a particle size distribution measuring method by a light scattering method using a light scattering type particle counter, and (2) a particle size distribution measuring method by an electric mobility method using a combination of DMA / CNC. The method for measuring the particle size distribution is adopted.
光散乱式粒子計数器による光散乱法は、 エアロゾル粒子に光を照射して、 その 散乱光の分布状態から、 その粒径分布を測定するものである。 エアロゾル粒子を 含む試料気体を吸引し、 安定化された光源による照射領域を通過させる。 このと き個々のエアロゾル粒子によって前方又は側方に散乱される光を光電子増倍管な ど光電素子に集光し、 パルス状電気信号に変換する。 パルス信号の波高値は散乱 光量に比例し、 また、 散乱光量とエアロゾル粒子の粒径とが一定の関係にあるこ とを利用して、 パルス波高値の分析によって粒径を選別し、 且つ、 選別したパル スの個数を計数することによってエアロゾル粒子の粒径分布を測定することがで ぎる。 The light scattering method using a light scattering particle counter irradiates aerosol particles with light and measures the particle size distribution based on the distribution state of the scattered light. The sample gas containing aerosol particles is sucked and passed through the area irradiated by the stabilized light source. At this time, the light scattered forward or side by the individual aerosol particles is condensed on a photoelectric element such as a photomultiplier tube and converted into a pulsed electric signal. The peak value of the pulse signal is proportional to the amount of scattered light, and by utilizing the fact that the amount of scattered light and the particle size of the aerosol particles are in a fixed relationship, the particle size is selected and analyzed by analyzing the pulse peak value. The particle size distribution of the aerosol particles can be measured by counting the number of pulsated pulses.
DMA/CNC組合せによる電気移動度法は、 分級装置である DMAにより、 特定の 狭い範囲の電気移動度を有するエアロゾル粒子のみを選別し、 続けて、 計数装置 である CNCにより、 分級後の粒子を核としてアルコールなどの蒸気を凝縮させ、 光学的手法によりエア口ゾル粒子を計数し、その粒径分布を測定するものである。 エアロゾル粒子を含む試料気体を放射線等によるイオン発生場を通過させること によって粒子に電荷を与える。この帯電粒子を分級装置である DMAの 2重円筒電 極で形成した電場内に外円筒沿いに導入する。 一方、 粒子を含まない清浄ガスが 整流状態で円筒電極間を流れている。 正、 負に帯電した粒子または無帯電粒子は それそれの移動速度をもって電界方向に移動するが、 同時に円筒電極間の清浄ガ スの流れの方向である軸方向にも移動する。 内円筒電極の任意の位置にスリット を設け、 そこに到達する粒子のみを外部に取り出せば、 それらの粒子は電気移動 度が一定の粒子のみ、 すなわち粒径の揃った粒子であることになる。 分級後の粒 子の粒径は、 円筒電極への印加電圧を調節することで変化できる。 分級された粒 子は、 計数装置である CNCの管内のアルコール等の過飽和蒸気中を通過させ、 粒
子を核として蒸気を凝縮させて粒径を増大させ、 成長した粒子に光を照射して、 その散乱光から粒子を計数する。エアロゾル粒子は、 DMAで分級し、 CNCで計数 することで、 その粒径分布を測定することができる。 In the electromobility method using a combination of DMA / CNC, only the aerosol particles having a specific narrow range of electric mobility are selected by a classification device, DMA, and the classified particles are then processed by a counting device, CNC. Vapors such as alcohol are condensed as nuclei, the number of aerosol particles is counted by an optical method, and the particle size distribution is measured. The sample gas containing aerosol particles is passed through an ion generation field caused by radiation or the like to give charges to the particles. These charged particles are introduced along the outer cylinder into the electric field formed by the double cylinder electrode of DMA, which is a classifier. On the other hand, clean gas containing no particles flows between the cylindrical electrodes in a rectified state. Positively and negatively charged particles or uncharged particles move in the direction of the electric field at their respective moving speeds, but also move in the axial direction, which is the direction of flow of the clean gas between the cylindrical electrodes. If a slit is provided at an arbitrary position on the inner cylindrical electrode and only the particles that reach the slit are taken out, those particles are only particles with a constant electric mobility, that is, particles with a uniform particle size. The particle size of the classified particles can be changed by adjusting the voltage applied to the cylindrical electrode. The classified particles are passed through supersaturated steam such as alcohol in the pipe of CNC which is a counting device, Vapors are condensed using particles as nuclei to increase the particle size, and the grown particles are irradiated with light, and the particles are counted from the scattered light. Aerosol particles can be classified by DMA and counted by CNC to measure the particle size distribution.
以下に実施例により、 より詳細に本発明の内容について説明する。 Hereinafter, the contents of the present invention will be described in more detail with reference to examples.
実施例 1 Example 1
超臨界懸濁流体形成槽 1に凝集性粉体供給手段 3から、 1 0 m gの一次粒子が 数/ mの平均粒径を有するガラス粒子を投入し、 超臨界流体供給手段 4から温度 が 4 0 °C、 圧力が 1 0 0 a t mの超臨界二酸化炭素を流入して懸濁させた。 供給 時点のガラス粒子は、 数十から数百/ z mの大きさの高次の凝集体である。 A glass particle having an average particle diameter of 10 mg of primary particles is fed into the supercritical suspension fluid forming tank 1 from the cohesive powder supply means 3 and the temperature is 4 from the supercritical fluid supply means 4. Supercritical carbon dioxide at 0 ° C and a pressure of 100 atm was introduced and suspended. The glass particles at the time of feeding are high-order aggregates having a size of several tens to several hundreds / zm.
この懸濁液を超臨界懸濁流体排出手段 6から流量調整手段 7を介して、 0 . 1 3 mmの相当オリフィス径を有する噴霧ノズルで構成されるエアロゾル粒子発生 分散手段 8から放出し、 エアロゾル粒子を発生分散させた。 光散乱式粒子計数器 により、 数十から数百 の大きさの高次の凝集体であったガラス粒子は、 高濃 度の一次粒子にまで分散したエア口ゾ'ル粒子として発生し、 数 mの平均粒径を 有していることを確認した。 さらに、 エアロゾル粒子として発生分散したガラス 粒子をスライ ドガラス上に沈着させ、 光学顕微鏡により観察し、 一次粒子にまで 分散したことを確認した。第 3図(a) には、 光学顕微鏡により観察した供給時点 のガラス粒子の凝集体の様子を、 第 3図 (b ) には、 本実施例により発生分散さ れたガラス粒子の様子を示す。 The suspension is discharged from the supercritical suspension fluid discharge means 6 through the flow rate control means 7 through the aerosol particle generation and dispersion means 8 comprising a spray nozzle having an equivalent orifice diameter of 0.13 mm, and the aerosol is discharged. Particles were generated and dispersed. By the light scattering type particle counter, glass particles that were high-order aggregates of several tens to several hundreds were generated as air-ported zeolite particles dispersed in highly concentrated primary particles. It was confirmed that it had an average particle size of m. Furthermore, glass particles generated and dispersed as aerosol particles were deposited on slide glass and observed with an optical microscope to confirm that they were dispersed to primary particles. FIG. 3 (a) shows the state of the aggregate of the glass particles at the time of supply as observed by an optical microscope, and FIG. 3 (b) shows the state of the glass particles generated and dispersed according to the present example. .
実施例 2 Example 2
実施例 1と同様にして、 超臨界懸濁流体形成槽 1に凝集性粉体供給手段 3から 1 O m gの一次粒子が約 1 z mの平均粒径を有するポリメチルメタクリレート粒 子を投入し、 超臨界流体供給手段 4から温度が 4 0 °C、 圧力が l O O a t mの超 臨界二酸化炭素を流入して懸濁させた。 供給時点のポリメチルメ夕クリレ一ト粒 子は、 数十から数百 z mの大きさの高次の凝集体である。 In the same manner as in Example 1, polymethyl methacrylate particles in which 1 O mg of primary particles have an average particle size of about 1 zm are charged into the supercritical suspension fluid forming tank 1 from the cohesive powder supply means 3, Supercritical carbon dioxide having a temperature of 40 ° C. and a pressure of 100 atm was introduced from the supercritical fluid supply means 4 and suspended therein. At the time of supply, the polymethylmethacrylate particles are high-order aggregates of several tens to several hundreds of zm in size.
この懸濁液を超臨界懸濁流体排出手段 6から流量調整手段 7を介して、 0 . 1
3 mmの相当オリフィス径を有する噴霧ノズルで構成されるエアロゾル粒子発生 分散手段 8から放出し、 エアロゾル粒子を発生分散させた。 光散乱式粒子計数器 により、 数十から数百 mの大きさの高次の凝集体であったポリメチルメ夕クリ レート粒子は、 高濃度の一次粒子にまで分散したエアロゾル粒子として発生し、 約 1 mの牟均粒径を有していることを確認した。 さらに、 エアロゾル粒子とし て発生分散したポリメチルメタクリレ一ト粒子をスライ ドガラス上に沈着させ、 光学顕微鏡により観察し、一次粒子にまで分散したことを確認した。第 4図(a ) には、 光学顕微鏡により観察した供給時点のポリメチルメタクリレート粒子の凝 集体の様子を、 第 4図 (b ) には、 本実施例により発生分散されたポリメチルメ 夕クリレ一ト粒子の様子を示す。 The suspension is discharged from the supercritical suspension fluid discharging means 6 via the flow rate adjusting means 7 to 0.1. Aerosol particles generated and dispersed by the aerosol particle generation / dispersion means 8 composed of a spray nozzle having an equivalent orifice diameter of 3 mm were generated and dispersed. Using a light scattering particle counter, polymethyl methyl acrylate particles, which were high-order aggregates of several tens to several hundreds of meters, were generated as aerosol particles dispersed in highly concentrated primary particles. It was confirmed that the particles had a mu average particle size of m. In addition, polymethyl methacrylate particles generated and dispersed as aerosol particles were deposited on slide glass, observed with an optical microscope, and confirmed to have been dispersed to primary particles. FIG. 4 (a) shows the state of aggregates of polymethyl methacrylate particles at the time of supply as observed by an optical microscope, and FIG. 4 (b) shows polymethyl methacrylate dispersed and generated according to the present example. The appearance of particles is shown.
産業上の利用可能性 Industrial applicability
以上のように、 本発明にかかる粉体の粒径分布測定方法により、 凝集性粉体を 気相中に解砕、 分散させて得られる良好なエアロゾル粒子に、 エアロゾルの分野 で用いられている粒径分布測定法を用いることによって、 高精度なエアロゾル粒 子からなる粉体の粒径分布の測定が可能になる。 As described above, the aerosol particles obtained by disintegrating and dispersing the cohesive powder in the gas phase by the method for measuring the particle size distribution of the powder according to the present invention are used in the field of aerosol. By using the particle size distribution measurement method, it is possible to measure the particle size distribution of a powder composed of aerosol particles with high accuracy.
また、本発明の粉体の粒径分布測定装置によれば、凝集性粉体を気相中に解砕、 分散させて得られる良好なエアロゾル粒子に、 エアロゾルの分野で用いられてい る粒径分布測定装置を用いることによって、 高精度なエアロゾル粒子からなる粉 体の粒径分布の測定装置が得られる。
Further, according to the powder particle size distribution measuring apparatus of the present invention, good aerosol particles obtained by disintegrating and dispersing a cohesive powder in a gas phase have a particle size used in the field of aerosol. By using the distribution measuring device, a highly accurate device for measuring the particle size distribution of powder composed of aerosol particles can be obtained.
Claims
1 . 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超 臨界流体を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を気 化させた気体中で凝集性粉体が発生分散された状態のエアロゾル粒子の粒径分布 を測定することを特徴とする粉体の粒径分布測定方法。 1. Supercritical fluid, which is formed by suspending a cohesive powder in a supercritical fluid, is released under environmental conditions that evaporate the supercritical fluid. A method for measuring the particle size distribution of aerosol particles, wherein the particle size distribution of aerosol particles in a state in which a cohesive powder is generated and dispersed in a gasified gas.
2 . 超臨界懸濁流体から超臨界流体を気化させた気体中でエアロゾル粒子を発 生分散及び貯蔵し、 取り出してエア口ゾル粒子の粒径分布を測定することを特徴 とする請求の範囲第 1項記載の粉体の粒径分布測定方法。 2. The aerosol particles are generated and dispersed in a gas obtained by evaporating a supercritical fluid from a supercritical suspension fluid, stored, taken out, and the particle size distribution of the aerosol particles is measured. The method for measuring the particle size distribution of powder according to claim 1.
3 . エアロゾル粒子の発生分散を噴霧又はィンパク夕一処理により行うことを 特徴とする請求の範囲第 1項又は第 2項記載の粉体の粒径分布測定方法。 3. The method for measuring the particle size distribution of powder according to claim 1 or 2, wherein the generation and dispersion of aerosol particles is carried out by spraying or impact treatment.
4 . エアロゾル粒子に希釈用ガスを供給し、 得られるエアロゾル粒子濃度を制 御し、 粒径分布を測定することを特徴とする請求の範囲第 1項、 第 2項又は第 3 項記載の粉体の粒径分布測定方法。 4. The powder according to claim 1, 2 or 3, wherein a dilution gas is supplied to the aerosol particles, the concentration of the obtained aerosol particles is controlled, and the particle size distribution is measured. A method for measuring the particle size distribution of a body.
5 . 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超 臨界流体を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を気 化させた気体中で凝集性粉体を発生分散された状態のエアロゾル粒子に光を照射 し、 得られる散乱光から、 光散乱法により粒径分布を測定することを特徴とする 請求の範囲第 1項、 第 2項、 第 3項又は第 4項記載の粉体の粒径分布測定方法。 5. Release the supercritical suspension fluid formed by suspending the cohesive powder in the supercritical fluid under environmental conditions that vaporize the supercritical fluid, and evaporate the supercritical fluid from the supercritical suspension fluid. Irradiating light to the aerosol particles in a state in which the cohesive powder is generated and dispersed in the gasified gas, and measuring the particle size distribution from the obtained scattered light by a light scattering method. 4. The method for measuring a particle size distribution of a powder according to paragraph 1, paragraph 2, paragraph 3, or paragraph 4.
6 . 凝集性粉体を超臨界流体中に懸濁させて形成される超臨界懸濁流体を、 超 臨界流体を気化させる環境条件下に放出し、 超臨界懸濁流体から超臨界流体を気 化させた気体中で凝集性粉体を発生分散された状態のエアロゾル粒子を特定の電 気移動度を有する粒子のみに分級し、 その後続けて、 分級後の粒子を核としてァ ルコールなどの蒸気を凝縮させ、 光学的手法により粒子を計数し、 電気移動度法 により粒径分布を測定することを特徴とする請求の範囲第 1項、 第 2項、 第 3項 又は第 4項記載の粉体の粒径分布測定方法。 6. The supercritical fluid, which is formed by suspending the cohesive powder in the supercritical fluid, is released under environmental conditions that vaporize the supercritical fluid, and the supercritical fluid is vaporized from the supercritical fluid. Aerosol particles in a state in which cohesive powder is generated and dispersed in the gasified gas are classified into only particles having a specific electric mobility, followed by a vapor such as alcohol using the classified particles as nuclei. Wherein the particles are counted by an optical method and the particle size distribution is measured by an electric mobility method. A method for measuring the particle size distribution of a body.
7 . 超臨界流体を供給する供給手段、 凝集性粉体を供給する供給手段及び形成
される超臨界懸濁流体を排出する排出手段を有する、 凝集性粉体を超臨界流体中 に懸濁させる超臨界懸濁流体形成槽と、 超臨界懸濁流体形成槽から排出された超 臨界懸濁流体を、 超臨界流体が気化させる環境条件下に放出させ、 気化された超 臨界流体中に凝集性粉体が分散された状態でエアロゾル粒子を発生分散させるェ ァロゾ 'ル粒子発生分散手段、 及び超臨界懸濁流体から超臨界流体を気化させた気 体中で凝集性粉体を発生分散させたエアロゾル粒子の粒径分布を測定する手段か らなることを特徴とする粉体の粒径分布測定装置。 7. Supply means for supplying a supercritical fluid, supply means for supplying a cohesive powder, and formation A supercritical suspending fluid forming tank for suspending the cohesive powder in the supercritical fluid, and a supercritical fluid discharged from the supercritical suspending fluid forming tank. An aerosol particle generating and dispersing means for releasing a suspension fluid under environmental conditions in which the supercritical fluid is vaporized, and generating and dispersing aerosol particles in a state where the cohesive powder is dispersed in the vaporized supercritical fluid. , And means for measuring the particle size distribution of aerosol particles in which a cohesive powder is generated and dispersed in a gas in which a supercritical fluid is vaporized from a supercritical suspension fluid. Diameter distribution measuring device.
8 . 超臨界懸濁流体から超臨界流体を気化させた気体中でエアロゾル粒子を発 生分散及び貯蔵するエアロゾル粒子発生分散槽及び、 これに続いて、 エアロゾル 粒子取り出し手段を設けたエアロゾル粒子の粒径分布を測定することを特徴とす る請求の範囲第 7項記載の粉体の粒径分布測定装置。 8. Aerosol particle generating and dispersing tank for generating and dispersing and storing aerosol particles in a gas obtained by evaporating a supercritical fluid from a supercritical suspending fluid, and subsequently, aerosol particles provided with aerosol particle extracting means. 9. The powder particle size distribution measuring device according to claim 7, wherein the particle size distribution is measured.
9 . エアロゾル粒子の発生分散を行うための噴霧ノズル又はィンパクターなど の発生分散手段が設けられているエアロゾル粒子の粒径分布を測定することを特 徴どする請求の範囲第 7項又は第 8項記載の粉体の粒径分布測定装置。 9. Claims 7 or 8 characterized by measuring the particle size distribution of aerosol particles provided with a generating and dispersing means such as a spray nozzle or impactor for generating and dispersing aerosol particles. An apparatus for measuring the particle size distribution of the powder described in the above.
1 0 . エアロゾル粒子の発生濃度を制御するための希釈用ガス供給手段が設け られているエアロゾル粒子の粒径分布を測定することを特徴とする請求の範囲第 7項、 第 8項又は第 9項記載の粉体の粒径分布測定装置。 10. The particle size distribution of the aerosol particles provided with a diluting gas supply means for controlling the generation concentration of the aerosol particles is measured, wherein the particle size distribution of the aerosol particles is measured. Item 3. A powder particle size distribution measuring apparatus according to the above item.
1 1 . 凝集性粉体を超臨界流体中に懸濁させる超臨界懸濁流体形成槽と、 超臨 界懸濁流体形成槽から排出された超臨界懸濁流体を、 超臨界流体が気化させる環 境条件下に放出させ、 気化された超臨界流体中に凝集性粉体が分散された状態で エアロゾル粒子を発生分散させるエアロゾル粒子発生分散手段、 及び超臨界懸濁 流体から超臨界流体を気化させた気体中で凝集性粉体を発生分散させたエアロゾ ル粒子に光を照射し、 得られる散乱光から光散乱法により粒径分布を測定する手 段からなることを特徴とする請求の範囲第 7項、 第 8項、 第 9項又は第 1 0項記 載の粉体の粒径分布測定装置。 1 1. Supercritical fluid formation tank for suspending coagulable powder in supercritical fluid, and supercritical fluid vaporizes supercritical suspension fluid discharged from supercritical suspension fluid formation tank Aerosol particle generation and dispersion means for generating and dispersing aerosol particles in a state where cohesive powder is dispersed in a vaporized supercritical fluid, and supercritical fluid is vaporized from supercritical suspension fluid Aerosol particles in which a coagulable powder is generated and dispersed in the gas, and a method for measuring the particle size distribution from the obtained scattered light by a light scattering method. An apparatus for measuring the particle size distribution of powder as described in paragraph 7, 8, 9, or 10.
1 2 . 凝集性粉体を超臨界流体中に懸濁させる超臨界懸濁流体形成槽と、 超臨
界懸濁流体形成槽から排出された超臨界懸濁流体を、 超臨界流体が気化させる環 境条件下に放出させ、 気化された超臨界流体中に凝集性粉体が分散された状態で エアロゾル粒子を発生分散させるエアロゾル粒子発生分散手段、 及び超臨界懸濁 流体から超臨界流体を気化させた気体中で凝集性粉体を発生分散させたエアロゾ ル粒子を特定の電気移動度を有する粒子のみに分級し、 その後続けて、 分級後の 粒子を核としてアルコールなどの蒸気を凝縮させ、 光学的手法により粒子を計数 し、 電気移動度法により粒径分布を測定する手段からなることを特徴とする請求 の範囲第 7項、 第 8項、 第 9項又は第 1 0項記載の粉体の粒径分布測定装置。
12. Supercritical fluid forming tank for suspending cohesive powder in supercritical fluid The supercritical fluid discharged from the boundary suspension fluid formation tank is released under the environmental conditions in which the supercritical fluid vaporizes, and the aerosol is dispersed with the cohesive powder dispersed in the vaporized supercritical fluid. Aerosol particle generating and dispersing means for generating and dispersing particles, and only particles having a specific electric mobility of aerosol particles in which a cohesive powder is generated and dispersed in a gas obtained by evaporating a supercritical fluid from a supercritical suspending fluid It is characterized by comprising means for condensing vapors such as alcohol with the particles after classification as nuclei, counting the particles by an optical method, and measuring the particle size distribution by an electric mobility method. 10. The powder particle size distribution measuring device according to claim 7, wherein the particle size distribution of the powder is measured.
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WO (1) | WO2004023109A1 (en) |
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US7806968B2 (en) * | 2007-10-16 | 2010-10-05 | Horiba Ltd. | Calibration unit for volatile particle remover |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0399248A (en) * | 1989-09-06 | 1991-04-24 | Air Prod And Chem Inc | Particle diameter measuring method using condensed nuclear counting method |
JPH08104830A (en) * | 1994-10-03 | 1996-04-23 | Nippon Paint Co Ltd | Production of fine particles for coating |
JPH08113652A (en) * | 1994-08-24 | 1996-05-07 | Nippon Paint Co Ltd | Production of fine polymer particle |
JPH10192670A (en) * | 1996-12-27 | 1998-07-28 | Inoue Seisakusho:Kk | Dispersion and dispersing apparatus utilizing supercritical state |
JPH10206302A (en) * | 1997-01-21 | 1998-08-07 | Nippon Kagaku Kogyo Kk | Fine particle dispersion method, fine particle dispersion device and particle size distribution measuring device |
JP2000009630A (en) * | 1998-06-18 | 2000-01-14 | Tonichi Computer Applications Kk | Ct image forming particle size distribution measuring apparatus |
-
2002
- 2002-09-04 JP JP2002258340A patent/JP3991099B2/en not_active Expired - Lifetime
-
2003
- 2003-09-03 AU AU2003261907A patent/AU2003261907A1/en not_active Abandoned
- 2003-09-03 WO PCT/JP2003/011250 patent/WO2004023109A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0399248A (en) * | 1989-09-06 | 1991-04-24 | Air Prod And Chem Inc | Particle diameter measuring method using condensed nuclear counting method |
JPH08113652A (en) * | 1994-08-24 | 1996-05-07 | Nippon Paint Co Ltd | Production of fine polymer particle |
JPH08104830A (en) * | 1994-10-03 | 1996-04-23 | Nippon Paint Co Ltd | Production of fine particles for coating |
JPH10192670A (en) * | 1996-12-27 | 1998-07-28 | Inoue Seisakusho:Kk | Dispersion and dispersing apparatus utilizing supercritical state |
JPH10206302A (en) * | 1997-01-21 | 1998-08-07 | Nippon Kagaku Kogyo Kk | Fine particle dispersion method, fine particle dispersion device and particle size distribution measuring device |
JP2000009630A (en) * | 1998-06-18 | 2000-01-14 | Tonichi Computer Applications Kk | Ct image forming particle size distribution measuring apparatus |
Also Published As
Publication number | Publication date |
---|---|
AU2003261907A1 (en) | 2004-03-29 |
JP3991099B2 (en) | 2007-10-17 |
JP2004093515A (en) | 2004-03-25 |
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