WO2004019048A1 - Micromechanical component - Google Patents

Micromechanical component Download PDF

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Publication number
WO2004019048A1
WO2004019048A1 PCT/DE2003/000591 DE0300591W WO2004019048A1 WO 2004019048 A1 WO2004019048 A1 WO 2004019048A1 DE 0300591 W DE0300591 W DE 0300591W WO 2004019048 A1 WO2004019048 A1 WO 2004019048A1
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WO
WIPO (PCT)
Prior art keywords
spiral spring
spring
acceleration
spring element
substrate
Prior art date
Application number
PCT/DE2003/000591
Other languages
German (de)
French (fr)
Inventor
Dirk Ullmann
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to US10/523,187 priority Critical patent/US7275434B2/en
Priority to DE50313240T priority patent/DE50313240D1/en
Priority to EP03709653A priority patent/EP1529217B1/en
Priority to JP2004529670A priority patent/JP2005534939A/en
Publication of WO2004019048A1 publication Critical patent/WO2004019048A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers

Definitions

  • the invention relates to a micromechanical component, in particular an acceleration sensor, with a substrate, at least one spring device and at least one seismic mass, the spring device being connected to the substrate at a first end and to the mass at a second end .
  • the stiffness (spring constant) of the spring device is designed such that an acceleration relative to the substrate, in particular parallel to a surface of the substrate, can cause movement of the mass relative to the substrate.
  • micromechanical component is already known from DE 100 12 960 AI.
  • micromechanical acceleration sensor that can be produced in the technology of silicon and surface micromechanics (OMM).
  • Acceleration sensors and in particular micromechanical acceleration sensors in the technology of surfaces or Volume micro-mechanics are gaining ever larger market segments in the automotive equipment sector and are increasingly replacing the previously used piezoelectric acceleration sensors.
  • the known micromechanical acceleration sensors usually function in such a way that the resiliently mounted seismic mass device, which can be deflected in at least one direction by an external acceleration, changes a capacitance at a deflection associated therewith Differential capacitor device causes, which is a measure of the acceleration.
  • a differential capacitor device with a comb structure made of moving and fixed electrodes that is parallel to the surface of the substrate is described in the aforementioned publication. The deflection can also be verified using another suitable measurement method.
  • the sensitivity of such known micromechanical acceleration sensors for the measured variable acceleration can currently only be set essentially by the stiffness of the spring bearing of the seismic mass, that is to say by the spring constant to be selected beforehand.
  • a high sensitivity means that the linear restoring forces of the springs are small, so that the component can only be used as a low-g sensor due to its correspondingly low load capacity.
  • a generic acceleration sensor in which the spring stiffness can still be set externally after manufacture - during pre-measurement or final measurement - so that a single layout or design can be used for a wide range of stiffnesses.
  • the spring device can be unlocked or locked so that a desired effective spring constant can be set on a separation area, in particular by the action of a measuring current or an externally controllable magnetic field. Settings once made can only be changed by a new external setting procedure.
  • the object of the present invention is to provide a micromechanical component of the type mentioned at the outset which, without requiring any external influence, has simultaneously a high resolution in the lower measurement range and a large measurement range, that is to say that reaches up to large maximum accelerations.
  • the spring device is designed for intrinsically non-linear behavior in accordance with a progressive spring characteristic curve, in which greater acceleration is linked at least in some areas to greater stiffness (spring constant), so that the component contributes to this non-linear spring device greater acceleration has a lower sensitivity at least in some areas.
  • the non-linear component with its degressive sensor characteristic curve (corresponding to the progressive characteristic curve of its spring device) delivers a sensitivity which at least in some areas or even decreases continuously over the measuring range of the acceleration.
  • the function of two different g-range class sensors can thus be covered with sensitivity using a single nonlinear component.
  • the spring device is formed by two spiral spring elements which are arranged such that the mobility of the first spiral spring element with respect to the substrate is limited but not limited by an elastic spring stop, the spring stop itself being formed by the second spiral spring element. det.
  • the sensitivity of the component initially has a constant value corresponding to the spring constant of the first spiral spring element, while the sensitivity, once the spring stop is reached, is again constant due to the second spiral spring element being carried along by the first spiral spring element during the further deflection , but has a higher value corresponding to a higher spring constant.
  • a component can be realized whose sensor characteristic curve consists of a first linear partial area with a higher slope (sensitivity) and, "with
  • Knick is then composed of a second linear section with a lower slope (sensitivity).
  • the intrinsic nonlinearity can be implemented by the self-controlled additive interaction of two spring elements.
  • an (almost) continuously non-linear behavior can be realized in that the spring device is formed by an elongated spiral spring element arranged transversely to the direction of acceleration and tapering pyramidally from the first to the second end, the spring constant of which increases steadily with the bend, so that this intrinsic non-linearity causes an approximately logarithmic course of the component characteristic.
  • the spring element itself brings with it non-linear behavior due to the material used and the geometric design.
  • FIG. 1 shows a schematic diagram of the component characteristic curve with the dependence of the output signal on the acceleration for a component of the embodiment according to FIG. 2 and FIG. 3,
  • FIG. 2 and FIG. 3 show a partial top view of two different functional states of an acceleration sensor according to a first embodiment of the present invention
  • FIG 4 in the same view as Figures 2 and 3, an acceleration sensor according to a second embodiment of the invention.
  • FIG. 1 shows the non-linear course of the sensor characteristic curve 1 and 2, as can be achieved, for example, by the spiral spring elements according to FIG. 2 and FIG. 3.
  • a non-linear characteristic curve it is composed of a first constant subarea 1 with a higher gradient and a second subarea 2 with a likewise constant, but less steep course, discontinuous, with a "kink", so that the Sensor characteristic curve has a degressive course overall.
  • the relationship between the sensor characteristic curve 1 and 2 shown in FIG. 1 and the spring characteristic curve, not shown, is that, according to Hook's law, the linear restoring force of the spring device directly deflects is proportional_, so that the sensor output signal u measured in accordance with the deflection of the mass and shown in FIG. 1 depends on the reciprocal of the spring constant.
  • the greater slope of the characteristic curve 1 in the lower measuring range, ie with small acceleration values g corresponds to a high sensitivity of the micromechanical component and corresponds to a "soft" spring, ie a spring with low stiffness or spring constant.
  • the lower sensitivity of the acceleration sensor in the second partial area 2 which is constant over this partial area, corresponds to the sensor characteristic curve, ie with large acceleration values g, of a "hard” spring, ie a spring with greater stiffness or spring constant.
  • FIG. 2 shows that the spiral spring elements 3 and 4 according to the first embodiment of the invention each have an elongated shape and are anchored with their first ends to the component substrate 5.
  • the direction of the acting acceleration g (parallel to the surface of the substrate 5) is indicated by an arrow in FIGS. 2 and 3.
  • the spiral spring elements 3 and 4 are, parallel to each other, transverse (in particular perpendicular) to.
  • Direction of acceleration g is arranged, the second end 6 of the first spiral spring element 3 connected to the mass projecting beyond the second end 7 of the second spiral spring element 4, which can be connected indirectly to the mass (not shown) via the abutting first spiral spring element 3.
  • Figure 4 shows a second embodiment of the invention, o- after the spring device through an elongated, transverse to
  • Bending spring element 10 which is arranged in the direction of the acceleration g and is pyramidal from the first to the second end 9, in which, due to the shape, it is to be expected that its spring constant increases steadily with the bend, so that this intrinsic non-linearity has an approximately logarithmic course of the component characteristic curve causes.
  • the basic known process sequence of the technology of surface micromechanics for producing acceleration sensors is based on structuring, in particular, the seismic mass and the spring device typically in epitaxial polysilicon over a sacrificial layer made of oxide by etching.
  • the free, movable component components are then released by selective, isotropic etching of the sacrificial layer using a suitable method.
  • the spring devices for the component according to the invention can be easily produced in this existing frame.
  • the present invention has been described above on the basis of preferred exemplary embodiments, it is not restricted to these but can be modified in a variety of ways.
  • it can be used in an acceleration sensor in which, as described in the published patent application DE 199 59 707 A1, the flywheel can be elastically deflected from its rest position about an axis of rotation lying perpendicular to the substrate surface and at least one axis of rotation lying parallel to the substrate surface become.
  • an acceleration sensor in which two different masses can be deflected like a rocker perpendicular to the substrate surface, the suspension being provided by a torsion spring.

Abstract

The invention relates to a micromechanical component, especially an acceleration sensor, comprising a substrate, at least one seismic mass, whereby the first end of the spring device is connected to the substate and the second end is connected to the mass. The stiffness (spring constant) of the spring device is such that a movement of the mass relative to the substrate can occur as a result of an acceleration relative to the substrate, especially parallel to a surface of said substrate.

Description

Beschreibung description
Mikromechanisches BauelementMicromechanical component
Die Erfindung betrifft ein mikromechanisches Bauelement, insbesondere Beschleunigungssensor, mit einem Substrat, mindestens einer Federeinrichtung und mindestens einer seismischen Masse, wobei die Federeinrichtung mit einem ersten Ende mit dem Substrat und an einem zweiten Ende mit der Masse verbun- .. den ist, und wobei die Steifigkeit (Federkonstante) der Federeinrichtung so ausgelegt ist, dass durch eine Beschleunigung relativ zum Substrat, insbesondere parallel zu einer Oberfläche des Substrats, eine Bewegung der Masse relativ zum Substrat verursachbar ist.The invention relates to a micromechanical component, in particular an acceleration sensor, with a substrate, at least one spring device and at least one seismic mass, the spring device being connected to the substrate at a first end and to the mass at a second end . , and the stiffness (spring constant) of the spring device is designed such that an acceleration relative to the substrate, in particular parallel to a surface of the substrate, can cause movement of the mass relative to the substrate.
Ein derartiges mikromechanisches Bauelement ist bereits aus der DE 100 12 960 AI bekannt.Such a micromechanical component is already known from DE 100 12 960 AI.
Obwohl auf beliebige mikromechanische Bauelemente und Struk- turen, insbesondere Sensoren und Aktuatoren, anwendbar, werden die vorliegende Erfindung _sowie die ihr zugrunde liegende Problematik in Bezug auf einen in der Technologie der Silizi- u -Oberflächenmikromechanik (OMM) herstellbaren mikromechanischen Beschleunigungssensor erläutert.Although applicable to any micromechanical components and structures, in particular sensors and actuators, the present invention and the underlying problem are explained in relation to a micromechanical acceleration sensor that can be produced in the technology of silicon and surface micromechanics (OMM).
Beschleunigungssensoren, und insbesondere mikromechanische Beschleunigungssensoren in der Technologie der Oberflächenbzw. Volumenmi romechanik, gewinnen immer größere Marktsegmente im Kraftfahrzeugausstattungsbereich und ersetzen in zu- nehmendem Maße die bisher üblichen piezoelektrischen Be- schleunigungsSensoren.Acceleration sensors, and in particular micromechanical acceleration sensors in the technology of surfaces or Volume micro-mechanics are gaining ever larger market segments in the automotive equipment sector and are increasingly replacing the previously used piezoelectric acceleration sensors.
Die bekannten mikromechanisehen Beschleunigungssensoren funktionieren üblicherweise derart, dass die federnd gelagerte seismische Masseneinrichtung, welche durch eine externe Beschleunigung in mindestens eine Richtung auslenkbar ist , bei Auslenkung eine Kapazitätsänderung an einer damit verbundenen Differentialkondensatoreinrichtung bewirkt, die ein Maß für die Beschleunigung ist. Eine Differentialkondensatoreinrichtung mit einer zur Oberfläche des Substrats parallelen Kammstruktur aus bewegten und festen Elektroden ist in der ge- nannten Offenlegungsschrift beschrieben. Die Auslenkung kann auch anhand einer anderen geeigneten Messmethode nachgewiesen werden.The known micromechanical acceleration sensors usually function in such a way that the resiliently mounted seismic mass device, which can be deflected in at least one direction by an external acceleration, changes a capacitance at a deflection associated therewith Differential capacitor device causes, which is a measure of the acceleration. A differential capacitor device with a comb structure made of moving and fixed electrodes that is parallel to the surface of the substrate is described in the aforementioned publication. The deflection can also be verified using another suitable measurement method.
Die Empfindlichkeit solcher bekannter mikromechanischer Be- schleunigungssensoren für die Messgröße Beschleunigung kann gegenwärtig im Wesentlichen nur durch die Steifigkeit der Federlagerung der seismischen Masse eingestellt werden, also durch deren vorab zu wählende Federkonstante. Eine hohe Empfindlichkeit bedeutet dabei jedoch, dass die linearen Rück- stellkräfte der Federn klein sind, so dass das Bauelement aufgrund seiner entsprechend geringen Belastbarkeit nur als Nieder-g-Sensor einsetzbar ist. Für Beschleunigungssensoren, die in einem Bereich mit höherer maximaler Beschleunigung, beispielsweise 50 g (g = Erdbeschleunigung) oder 100 g einge- setzt werden sollen, ist deshalb die Federeinrichtung von vornherein mit einer höheren Steifigkeit . (Federkonstante) auszulegen.The sensitivity of such known micromechanical acceleration sensors for the measured variable acceleration can currently only be set essentially by the stiffness of the spring bearing of the seismic mass, that is to say by the spring constant to be selected beforehand. However, a high sensitivity means that the linear restoring forces of the springs are small, so that the component can only be used as a low-g sensor due to its correspondingly low load capacity. For acceleration sensors that are to be used in an area with higher maximum acceleration, for example 50 g (g = gravitational acceleration) or 100 g, the spring device is therefore from the outset with a higher rigidity. (Spring constant).
Aufgrund des linearen Zusammenhangs zwischen Beschleunigung und Auslenkung korrespondiert bei einer derartigen, "harten" Feder eine große Beschleunigung allerdings mit einer kleinen Auslenkung, demnach auch mit einer geringeren Empfindlichkeit des Beschleunigungssensors. Für die praktische Anwendung besteht der Wunsch nach Sensoren, die gleichzeitig eine hohe Auflösung im unteren Messbereich und einen großen, das heißt bis zu großen maximalen Beschleunigungen reichenden, Messbereich aufweisen; bisher muss sich der Anwender jedoch entweder für eine bestimmte Bereichs- bzw. Empfindlichkeits-Klasse entscheiden oder — als aufwendige Alternative — mehrere Sen- soren verschiedener Bereichsklassen gleichzeitig einsetzen. Die vorab zu wählenden g-Bereichsklassen bedingen auch den herstellungstechnischen Nachteil, dass für verschiedene g- Bereichsklassen jeweils verschiedene Layouts erforderlich sind. In der oben genannten Offenlegungsschrift wird deshalb ein gattungsgemäßer Beschleunigungssensor vorgeschlagen, bei dem die Federsteifigkeit auch nach Herstellung — beim Vormessen oder Endmessen — noch extern einstellbar ist, so dass ein einziges Layout bzw. Design für einen breiten Bereich von Steifigkeiten verwendbar ist. Zu diesem Zweck sind Teile der _. Federeinrichtung entarretierbar bzw. arretierbar ausgeführt, so dass eine gewünschte effektive Federkonstante insbesondere durch Wirkung eines Messstroms oder eines extern steuerbaren Magnetfeldes auf einen Trennbereich einstellbar ist. Einmal vorgenommene Einstellungen sind allenfalls durch eine erneute externe Einstellprozedur änderbar.Because of the linear relationship between acceleration and deflection, with such a "hard" spring, however, a large acceleration corresponds to a small deflection, and consequently also to a lower sensitivity of the acceleration sensor. For practical use, there is a desire for sensors which at the same time have a high resolution in the lower measuring range and a large measuring range, that is to say that reach up to large maximum accelerations; So far, however, the user has either had to choose a specific range or sensitivity class or - as a complex alternative - use several sensors from different range classes at the same time. The g-range classes to be selected in advance also have the manufacturing disadvantage that different layouts are required for different g-range classes. In the above-mentioned laid-open publication, therefore, a generic acceleration sensor is proposed, in which the spring stiffness can still be set externally after manufacture - during pre-measurement or final measurement - so that a single layout or design can be used for a wide range of stiffnesses. For this purpose, parts of the _. The spring device can be unlocked or locked so that a desired effective spring constant can be set on a separation area, in particular by the action of a measuring current or an externally controllable magnetic field. Settings once made can only be changed by a new external setting procedure.
Aufgabe der vorliegenden Erfindung ist es, ein mikromechanisches Bauelement der eingangs genannten Art anzugeben, das — ohne externe Beeinflussung zu erfordern — gleichzeitig eine hohe Auflösung im unteren Messbereich und einen großen, das heißt bis zu großen maximalen Beschleunigungen reichenden, Messbereich aufweist.The object of the present invention is to provide a micromechanical component of the type mentioned at the outset which, without requiring any external influence, has simultaneously a high resolution in the lower measurement range and a large measurement range, that is to say that reaches up to large maximum accelerations.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, dass die Federeinrichtung für ein intrinsisch nichtlineares Verhalten entsprechend einer progressiven Feder-Kennlinie ausgelegt ist, in der eine größere Beschleunigung mindestens bereichsweise mit einer größeren Steifigkeit (Federkonstante) verknüpft ist, so dass das Bauelement mit dieser nichtlinearen Federeinrichtung bei größerer Beschleunigung mindestens bereichsweise eine geringere Empfindlichkeit aufweist.This object is achieved according to the invention in that the spring device is designed for intrinsically non-linear behavior in accordance with a progressive spring characteristic curve, in which greater acceleration is linked at least in some areas to greater stiffness (spring constant), so that the component contributes to this non-linear spring device greater acceleration has a lower sensitivity at least in some areas.
Das nichtlineare Bauelement mit seiner degressiven Sensor- Kennlinie (entsprechend der progressiven Kennlinie seiner Fe- dereinrichtung) liefert eine über den Messbereich der Beschleunigung mindestens bereichsweise oder sogar stetig abfallende Empfindlichkeit. Abgesehen von der unterschiedlichen Empfindlichkeit kann erfindungsgemäß somit die Funktion von zwei verschiedenen g-Bereichsklassen-Sensoren mit einem einzigen nichtlinearen Bauelement abgedeckt werden.The non-linear component with its degressive sensor characteristic curve (corresponding to the progressive characteristic curve of its spring device) delivers a sensitivity which at least in some areas or even decreases continuously over the measuring range of the acceleration. Aside from the different According to the invention, the function of two different g-range class sensors can thus be covered with sensitivity using a single nonlinear component.
In den Unteransprüchen finden sich vorteilhafte Weiterbildungen und Verbesserungen des in Anspruch 1 angegebenen mikromechanischen Bauelementes.Advantageous developments and improvements of the micromechanical component specified in claim 1 are found in the subclaims.
Gemäß einer bevorzugten Weiterbildung ist die Federeinrich- tung durch zwei Biegefederelemente gebildet, die so angeordnet sind, dass die Beweglichkeit des ersten Biegefederelemen- tes gegenüber dem Substrat durch einen elastischen Federanschlag eingeschränkt aber nicht begrenzt ist, wobei der Federanschlag durch das zweite Biegefederelement selbst gebil- det ist. Bei zunehmender Beschleunigung weist die Empfindlichkeit des Bauelementes dadurch zunächst einen konstanten, der Federkonstante des ersten Biegefederelementes entsprechenden Wert auf, während die Empfindlichkeit ab Erreichen des Federanschlags — aufgrund der Mitnahme des zweiten Biege- federelementes durch das erste Biegefederelement bei der weiteren Auslenkung — einen wiederum konstanten, jedoch einer höheren Federkonstante entsprechenden höheren Wert aufweist. Auf diese einfache Weise lässt sich ein Bauelement realisieren, dessen Sensor-Kennlinie aus einem ersten linearen Teil- bereich mit höherer Steigung (Empfindlichkeit) und, "mitAccording to a preferred development, the spring device is formed by two spiral spring elements which are arranged such that the mobility of the first spiral spring element with respect to the substrate is limited but not limited by an elastic spring stop, the spring stop itself being formed by the second spiral spring element. det. As the acceleration increases, the sensitivity of the component initially has a constant value corresponding to the spring constant of the first spiral spring element, while the sensitivity, once the spring stop is reached, is again constant due to the second spiral spring element being carried along by the first spiral spring element during the further deflection , but has a higher value corresponding to a higher spring constant. In this simple manner, a component can be realized whose sensor characteristic curve consists of a first linear partial area with a higher slope (sensitivity) and, "with
Knick" daran anschließend, einem zweiten linearen Teilbereich mit niedrigerer Steigung (Empfindlichkeit) zusammengesetzt ist. Die intrinsische Nichtlinearität ist in diesem Fall also durch das selbstgesteuerte additive Zusammenwirken zweier Fe- derelemente implementierbar.Knick "is then composed of a second linear section with a lower slope (sensitivity). In this case, the intrinsic nonlinearity can be implemented by the self-controlled additive interaction of two spring elements.
Gemäß einer weiteren bevorzugten Weiterbildung lässt sich ein (nahezu) stetig nichtlineares Verhalten dadurch realisieren, dass die Federeinrichtung durch ein längliches, quer zur Richtung der Beschleunigung angeordnetes und vom ersten zum zweiten Ende pyramidal zulaufendes Biegefederelement gebildet ist, dessen Federkonstante mit der Biegung stetig zunimmt, so dass diese intrinsische Nichtlinearität einen annähernd logarithmischen Verlauf der Bauelement-Kennlinie bewirkt. Das Federelement bringt in diesem Fall nichtlineares Verhalten also aufgrund des verwendeten Materials und der geometrischen Gestaltung selbst schon mit sich.According to a further preferred development, an (almost) continuously non-linear behavior can be realized in that the spring device is formed by an elongated spiral spring element arranged transversely to the direction of acceleration and tapering pyramidally from the first to the second end, the spring constant of which increases steadily with the bend, so that this intrinsic non-linearity causes an approximately logarithmic course of the component characteristic. In this case, the spring element itself brings with it non-linear behavior due to the material used and the geometric design.
Ausführungsbeispiele der Erfindung sind in den Figuren der Zeichnung dargestellt und in der nachfolgenden Beschreibung näher erläutert. Es zeigtEmbodiments of the invention are shown in the figures of the drawing and explained in more detail in the following description. It shows
Figur 1 in einem schematischen Diagramm die Bauelement- Kennlinie mit der Abhängigkeit des Ausgangssignals von der Beschleunigung für ein Bauelement der Ausführungsform gemäß Figur 2 und Figur 3,1 shows a schematic diagram of the component characteristic curve with the dependence of the output signal on the acceleration for a component of the embodiment according to FIG. 2 and FIG. 3,
Figur 2 und Figur 3 eine partielle Aufsicht auf zwei verschiedene Funktionszustände eines Beschleunigungssensors gemäß einer ersten Ausführungsform der vorliegenden Erfindung,2 and FIG. 3 show a partial top view of two different functional states of an acceleration sensor according to a first embodiment of the present invention,
Figur 4, in gleicher Ansicht wie Figur 2 und 3, einen Beschleunigungssensor gemäß einer zweiten Ausführungsform der Erfindung.Figure 4, in the same view as Figures 2 and 3, an acceleration sensor according to a second embodiment of the invention.
Figur' 1 zeigt den nichtlinearen Verlauf der Sensor-Kennlinie 1 und 2, wie sie beispielsweise durch die Biegefederelemente gemäß Figur 2 und Figur 3 realisierbar ist. In diesem einfachen Fall einer nichtlinearen Kennlinie ist diese aus einem ersten konstanten Teilbereich 1 mit höherer Steigung und ei-- ne zweiten Teilbereich 2 mit einem ebenfalls konstanten, je- doch weniger steilen Verlauf unstetig, mit einem " Knick ", zusammengesetzt, so dass die Sensor-Kennlinie insgesamt einen degressiven Verlauf hat.FIG. 1 shows the non-linear course of the sensor characteristic curve 1 and 2, as can be achieved, for example, by the spiral spring elements according to FIG. 2 and FIG. 3. In this simple case of a non-linear characteristic curve, it is composed of a first constant subarea 1 with a higher gradient and a second subarea 2 with a likewise constant, but less steep course, discontinuous, with a "kink", so that the Sensor characteristic curve has a degressive course overall.
Der Zusammenhang der in Figur 1 dargestellten Sensor- Kennlinie 1 und 2 mit der nicht dargestellten Feder-Kennlinie besteht darin, dass gemäß dem Hookschen Gesetz die lineare Rückstellkraft der Federeinrichtung der Auslenkung direkt proportional_ ist, so dass das gemäß der Auslenkung der Masse gemessene, in Figur 1 dargestellte, Sensor-Ausgangssignal ü vom Kehrwert der Federkonstante abhängt. Die größere Steigung der Kennlinie 1 im unteren Messbereich, d. h. bei kleinen Be- schleunigungswerten g, entspricht demnach einer hohen Empfindlichkeit des mikromechanischen Bauelementes und korrespondiert mit einer "weichen" Feder, also einer Feder mit geringer Steifigkeit bzw. Federkonstante. Umgekehrt entspricht die geringere, aber über diesen Teilbereich wiederum konstan- te, Empfindlichkeit des Beschleunigungssensors im zweiten Teilbereich 2 der Sensor-Kennlinie, d. h. bei großen Beschleunigungswerten g, einer "harten" Feder, also einer Feder mit größerer Steifigkeit bzw. Federkonstante.The relationship between the sensor characteristic curve 1 and 2 shown in FIG. 1 and the spring characteristic curve, not shown, is that, according to Hook's law, the linear restoring force of the spring device directly deflects is proportional_, so that the sensor output signal u measured in accordance with the deflection of the mass and shown in FIG. 1 depends on the reciprocal of the spring constant. The greater slope of the characteristic curve 1 in the lower measuring range, ie with small acceleration values g, corresponds to a high sensitivity of the micromechanical component and corresponds to a "soft" spring, ie a spring with low stiffness or spring constant. Conversely, the lower sensitivity of the acceleration sensor in the second partial area 2, which is constant over this partial area, corresponds to the sensor characteristic curve, ie with large acceleration values g, of a "hard" spring, ie a spring with greater stiffness or spring constant.
Figur 2 zeigt, dass die Biegefederelemente 3 und 4 gemäß der ersten Ausführungsform der Erfindung jeweils eine längliche Form aufweisen und mit ihren ersten Enden jeweils am Bauelement-Substrat 5 verankert sind. Die Richtung der angreifenden Beschleunigung g (parallel zur Oberfläche des Substrats 5) ist in den Figuren 2 und 3 jeweils durch einen Pfeil angedeutet. Die Biegefederelemente 3 und 4 sind, parallel zueinan- _der, quer (insbesondere senkrecht) zur. Richtung der Beschleunigung g angeordnet, wobei das zweite, mit der Masse verbundene Ende 6 des ersten Biegefederelementes 3 das zweite, über das anschlagende erste Biegefederelement 3 mittelbar mit der (nicht dargestellten) Masse verbindbare, Ende 7 des zweiten Biegefederelementes 4 überragt.FIG. 2 shows that the spiral spring elements 3 and 4 according to the first embodiment of the invention each have an elongated shape and are anchored with their first ends to the component substrate 5. The direction of the acting acceleration g (parallel to the surface of the substrate 5) is indicated by an arrow in FIGS. 2 and 3. The spiral spring elements 3 and 4 are, parallel to each other, transverse (in particular perpendicular) to. Direction of acceleration g is arranged, the second end 6 of the first spiral spring element 3 connected to the mass projecting beyond the second end 7 of the second spiral spring element 4, which can be connected indirectly to the mass (not shown) via the abutting first spiral spring element 3.
Wenn, wie im Funktionszustand gemäß Figur 3 angedeutet, eine Beschleunigung der Masse eine Biegung des ersten Biegefederelementes 3 bis hin zum zweiten Biegefederelement 4 verursacht, so erfolgt ein Anschlag 8 der dem zweiten Biegefederelement 4 zugewandten Oberfläche des .ersten Biegefederelementes 3 am zweiten Ende 7 des zweiten Biegefederelementes 4. Bei weiterer Beschleunigung und Deformierung des ersten Biegefederelementes 3 nimmt dieses das zweite Biegefederelement 4 bei der weiteren Biegung -mit, wobei die zusätzliche Feder- konstante des zweiten Biegefederelementes 4 ins Spiel kommt. Insbesondere durch Wahl der Länge (und damit der Steifigkei- ten) der Biegefederelemente 3 und 4, der Länge des "Überstands" des ersten über das zweite Biegefederelement, sowie ihres Abstandes zueinander, lassen sich Wünsche hinsichtlich der Art des nichtlinearen Biegeverhaltens in einem relativ weiten Bereich realisieren.If, as indicated in the functional state according to FIG. 3, an acceleration of the mass causes the first spiral spring element 3 to bend up to the second spiral spring element 4, then the surface of the first spiral spring element 3 facing the second spiral spring element 4 stops at the second end 7 of the second spiral spring element 4 second spiral spring element 4. When the first spiral spring element 3 accelerates and deforms further, it takes the second spiral spring element 4 with it during the further bending, with the additional spring constant of the second spiral spring element 4 comes into play. In particular, by choosing the length (and thus the stiffness) of the spiral spring elements 3 and 4, the length of the "protrusion" of the first over the second spiral spring element, and their distance from one another, wishes regarding the type of non-linear bending behavior can be relatively broad Realize area.
Figur 4 zeigt eine zweite Ausführungsform der Erfindung, o- nach die Federeinrichtung durch ein längliches, quer zurFigure 4 shows a second embodiment of the invention, o- after the spring device through an elongated, transverse to
Richtung der Beschleunigung g angeordnetes und vom ersten zum zweiten Ende 9 pyramidal zulaufendes Biegefederelement 10 gebildet ist, bei dem aufgrund der Formgebung zu erwarten ist, dass dessen Federkonstante mit der Biegung stetig zunimmt, so dass diese intrinsische Nichtlinearität einen annähernd logarithmischen Verlauf der Bauelement-Kennlinie bewirkt.Bending spring element 10, which is arranged in the direction of the acceleration g and is pyramidal from the first to the second end 9, in which, due to the shape, it is to be expected that its spring constant increases steadily with the bend, so that this intrinsic non-linearity has an approximately logarithmic course of the component characteristic curve causes.
Die grundlegende bekannte Prozessseguenz der Technologie der Oberflächenmikromechanik um Beschleunigungssensoren herzu- stellen beruht darauf, insbesondere die seismische Masse und die Federeinrichtung typischerweise in Epitaxie-Polysilizium über einer Opferschicht aus Oxid durch Ätzen zu strukturieren. Durch selektives, isotropes Ätzen der Opferschicht mit einem geeigneten Verfahren werden anschließend die freien, beweglichen Bauelementkomponenten gelöst. Die Federeinrichtungen für das erfindungsgemäße Bauelement können ohne weiteres in diesem bestehenden Rahmen hergestellt werden.The basic known process sequence of the technology of surface micromechanics for producing acceleration sensors is based on structuring, in particular, the seismic mass and the spring device typically in epitaxial polysilicon over a sacrificial layer made of oxide by etching. The free, movable component components are then released by selective, isotropic etching of the sacrificial layer using a suitable method. The spring devices for the component according to the invention can be easily produced in this existing frame.
Obwohl die vorliegende Erfindung vorstehend anhand bevorzug- ter Ausführungsbeispiele beschrieben wurde, ist sie darauf nicht beschränkt, sondern auf vielfältige Weise modifizierbar. Beispielsweise kann sie bei einem Beschleunigungssensor, bei dem, wie in der Offenlegungsschrift DE 199 59 707 A 1 beschrieben, die Schwungmasse um eine senkrecht zur Substrato- berfläche liegende Drehachse und um mindestens eine parallel zur Substratoberfläche liegende Drehachse elastisch aus ihrer Ruhelage auslenkbar ist, eingesetzt werden. Ebenso ist ein Einsatz bei einem Beschleunigungssensor denkbar, bei dem zwei verschiedene Massen wippenartig senkrecht zur Substratoberfläche auslenkbar sind, wobei die Aufhängung durch eine Torsionsfeder gegeben ist. Although the present invention has been described above on the basis of preferred exemplary embodiments, it is not restricted to these but can be modified in a variety of ways. For example, it can be used in an acceleration sensor in which, as described in the published patent application DE 199 59 707 A1, the flywheel can be elastically deflected from its rest position about an axis of rotation lying perpendicular to the substrate surface and at least one axis of rotation lying parallel to the substrate surface become. Likewise is a Use with an acceleration sensor is conceivable, in which two different masses can be deflected like a rocker perpendicular to the substrate surface, the suspension being provided by a torsion spring.

Claims

Patentansprüche claims
1. Mikromechanisches Bauelement, insbesondere Beschleunigungssensor, mit einem Substrat (5), mindestens ' einer Feder- einrichtung (3, 4, 10) und mindestens einer seismischen Masse, wobei die Federeinrichtung (3, 4, 10) mit einem ersten Ende mit dem Substrat (5) und an einem zweiten Ende (6, 9) mit der Masse verbunden ist, und wobei die Steifigkeit (Federkonstante) der Federeinrichtung (3, 4, 10) so ausgelegt ist, dass durch eine Beschleunigung (g) relativ zum Substrat (5) , insbesondere parallel zu einer Oberfläche des Substrats (5), eine Bewegung der Masse relativ zum Substrat (5) verursachbar ist, dadurch geken zeich e , dass die Federeinrichtung (3, 4, 10) für ein intrinsisch nichtlineares Verhalten entsprechend einer progressiven Feder-Kennlinie ausgelegt ist, in der eine größere Beschleunigung (g) mindestens bereichsweise mit einer größeren Steifigkeit (Federkonstante) verknüpft ist, so dass das Bauelement mit dieser nichtlinearen Federein ichtung (3, 4, 10) bei größerer Beschleunigung (g) mindestens bereichsweise eine geringere Empfindlichkeit aufweist.1. A micromechanical component, in particular an acceleration sensor, with a substrate (5), at least one spring device (3, 4, 10) and at least one seismic mass, the spring device (3, 4, 10) having a first end with the Substrate (5) and at a second end (6, 9) is connected to the mass, and wherein the rigidity (spring constant) of the spring device (3, 4, 10) is designed such that an acceleration (g) relative to the substrate (5), in particular parallel to a surface of the substrate (5), a movement of the mass relative to the substrate (5) can be caused, characterized in that the spring device (3, 4, 10) for an intrinsically non-linear behavior according to a Progressive spring characteristic is designed in which a greater acceleration (g) is linked at least in some areas with a greater stiffness (spring constant), so that the component with this non-linear spring device (3, 4, 10) is greater Acceleration (g) has a lower sensitivity at least in some areas.
2. Mikromechanisches Bauelement nach Anspruch 1, dadurch gekennzeichnet,2. Micromechanical component according to claim 1, characterized in that
- dass die Federeinrichtung durch zwei Biegefederelemente (3, 4) gebildet ist; die so angeordnet sind, dass die Beweglichkeit .des ersten Biegefederelementes (3) gegenüber, dem Substrat (5) durch einen elastischen Federanschlag (8) eingeschränkt aber nicht begrenzt ist,- That the spring device is formed by two spiral spring elements (3, 4); which are arranged such that the mobility of the first spiral spring element (3) relative to the substrate (5) is limited but not limited by an elastic spring stop (8),
- wobei der Federanschlag (8) durch das zweite Biegefederelement (4) selbst gebildet ist,- wherein the spring stop (8) is formed by the second spiral spring element (4) itself,
- so dass bei zunehmender Beschleunigung (g) die Empfindlichkeit des Bauelementes zunächst einen konstanten, der Federkonstante des ersten Biegefederelementes (3) entsprechenden Wert aufweist, während die Empfindlichkeit ab Erreichen des Federanschlags (8) — aufgrund der Mitnahme des zweiten Biegefederelementes (4) durch das erste Biegefederelement (3) bei der weiteren Auslenkung — einen wiederum konstanten, jedoch einer höheren Federkonstante entsprechenden höheren Wert aufweist.- So that with increasing acceleration (g) the sensitivity of the component initially has a constant value corresponding to the spring constant of the first spiral spring element (3), while the sensitivity from reaching the spring stop (8) - due to the entrainment of the second spiral spring element (4) by the first spiral spring element (3) during the further deflection - again a constant, but corresponding to a higher spring constant, higher value.
3. Mikromechanisches Bauelement nach Anspruch 2, dadurch gekennzeichnet,3. Micromechanical component according to claim 2, characterized in that
- dass die Biegefederelemente (3, 4) jeweils eine längliche Form aufweisen, - dass die Biegefederelemente (3 , 4), parallel zueinander, quer zur Richtung der Beschleunigung (g) angeordnet sind, wobei das zweite, mit der Masse verbundene Ende (6) des ersten Biegefederelementes (3) das zweite, über das anschlagende erste Biegefederelement (3) mittelbar mit der Masse verbindbare, Ende (7) des zweiten Biegefederelementes (4) überragt,- that the spiral spring elements (3, 4) each have an elongated shape, - that the spiral spring elements (3, 4), parallel to one another, are arranged transversely to the direction of the acceleration (g), the second end (6 ) of the first spiral spring element (3) projects beyond the second end (7) of the second spiral spring element (4), which can be connected indirectly to the mass via the abutting first spiral spring element (3),
- und dass durch eine von der Beschleunigung (g) der Masse verursachten Biegung des ersten Biegefederelementes (3) bis hin zum zweiten Biegefederelement (4) ein Anschlag (8) der dem zweiten Biegefederelement (4) zugewandten 0- berflache des ersten Biegefederelementes (3) am zweiten Ende (7) des zweiten Biegefederelementes (4) bewirkt ist.- And that a stop (8) of the surface of the first spiral spring element (3) facing the second spiral spring element (4) is caused by a bending of the first spiral spring element (3) up to the second spiral spring element (4) caused by the acceleration (g) of the mass ) at the second end (7) of the second spiral spring element (4).
4. Mikromechanisches Bauelement nach Anspruch 1, dadurch gekennzeichnet, dass die Federeinrichtung durch ein längliches, quer zur Richtung der Beschleunigung (g) angeordnetes und vom ersten zum zweiten Ende (9) in der Dicke abnehmendes Biegefederelement (10) gebildet ist, dessen Federkon-, stante mit der Biegung zunimmt.4. Micromechanical component according to claim 1, characterized in that the spring device is formed by an elongated spiral spring element (10) arranged transversely to the direction of acceleration (g) and decreasing in thickness from the first to the second end (9), the spring cone of which , constantly increases with the bend.
5. Mikromechanisches Bauelement nach Anspruch 4, dadurch gekennzeichnet, dass die Dicke pyramidal abnimmt.5. Micromechanical component according to claim 4, characterized in that the thickness decreases pyramidal.
6. Mikromechanisches Bauelement nach Anspruch 5, dadurch gekennzeichnet, dass diese intrinsische Nichtlinearität einen annähernd logarithmischen Verlauf der Bauelement- Kennlinie (1, 2) bewirkt. 6. Micromechanical component according to claim 5, characterized in that this intrinsic non-linearity causes an approximately logarithmic course of the component characteristic curve (1, 2).
PCT/DE2003/000591 2002-08-02 2003-02-25 Micromechanical component WO2004019048A1 (en)

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DE50313240T DE50313240D1 (en) 2002-08-02 2003-02-25 MICROMECHANICAL CONSTRUCTION ELEMENT
EP03709653A EP1529217B1 (en) 2002-08-02 2003-02-25 Micromechanical component
JP2004529670A JP2005534939A (en) 2002-08-02 2003-02-25 Micromachining type component

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DE10235370A DE10235370A1 (en) 2002-08-02 2002-08-02 Micromechanical component especially an acceleration sensor for motor vehicles, has spring with non linear response for reduced sensitivity at high accelerations
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