WO2004010192A3 - Substrats a compatibilite optique - Google Patents

Substrats a compatibilite optique Download PDF

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Publication number
WO2004010192A3
WO2004010192A3 PCT/US2003/022687 US0322687W WO2004010192A3 WO 2004010192 A3 WO2004010192 A3 WO 2004010192A3 US 0322687 W US0322687 W US 0322687W WO 2004010192 A3 WO2004010192 A3 WO 2004010192A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical
circuits
optical waveguide
microelectronic
insulating layer
Prior art date
Application number
PCT/US2003/022687
Other languages
English (en)
Other versions
WO2004010192A2 (fr
Inventor
Lawrence C West
Dan Mayden
Samuel Broydo
Claes Bjorkman
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/280,505 external-priority patent/US7072534B2/en
Priority claimed from US10/280,492 external-priority patent/US7043106B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to AU2003273221A priority Critical patent/AU2003273221A1/en
Priority to EP03755727A priority patent/EP1776610A2/fr
Publication of WO2004010192A2 publication Critical patent/WO2004010192A2/fr
Publication of WO2004010192A3 publication Critical patent/WO2004010192A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention concerne un article fabriqué comprenant un substrat à compatibilité optique comprenant une première couche de semi-conducteur, une couche isolante sur la première couche de semi-conducteur et une seconde couche de semi-conducteur disposée au-dessus de la couche isolante, la seconde couche de semi-conducteur présente une surface supérieure et est divisée latéralement en deux régions comprenant une première région et une seconde région, la surface supérieure de la première région étant d'une qualité suffisante pour permettre la formation d'un circuit micro-électronique sur celle-ci, et dans la seconde région étant formé un circuit de distribution de signal optique, le circuit de distribution de signal optique étant composé d'éléments photoniques à semi-conducteur interconnectés et conçus pour fournir des signaux au circuit micro-électronique à fabriquer dans la première région de la seconde couche de semi-conducteur.
PCT/US2003/022687 2002-07-22 2003-07-21 Substrats a compatibilite optique WO2004010192A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003273221A AU2003273221A1 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits
EP03755727A EP1776610A2 (fr) 2002-07-22 2003-07-21 Substrats optiquement préparés avec guide d`onde optique et circuits microélectroniques

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US39755202P 2002-07-22 2002-07-22
US60/397,552 2002-07-22
US10/280,505 US7072534B2 (en) 2002-07-22 2002-10-25 Optical ready substrates
US10/280,505 2002-10-25
US10/280,492 2002-10-25
US10/280,492 US7043106B2 (en) 2002-07-22 2002-10-25 Optical ready wafers

Publications (2)

Publication Number Publication Date
WO2004010192A2 WO2004010192A2 (fr) 2004-01-29
WO2004010192A3 true WO2004010192A3 (fr) 2004-04-22

Family

ID=30773468

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/022687 WO2004010192A2 (fr) 2002-07-22 2003-07-21 Substrats a compatibilite optique

Country Status (3)

Country Link
EP (1) EP1776610A2 (fr)
AU (1) AU2003273221A1 (fr)
WO (1) WO2004010192A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016446A1 (en) * 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
FR2867898B1 (fr) * 2004-03-17 2006-09-15 Commissariat Energie Atomique Fabrication d'une couche d'interconnection optique sur un circuit electronique
JP2006053473A (ja) * 2004-08-16 2006-02-23 Sony Corp 光導波モジュール及びその実装構造
US20070104441A1 (en) * 2005-11-08 2007-05-10 Massachusetts Institute Of Technology Laterally-integrated waveguide photodetector apparatus and related coupling methods
US7574090B2 (en) * 2006-05-12 2009-08-11 Toshiba America Electronic Components, Inc. Semiconductor device using buried oxide layer as optical wave guides
WO2010038871A1 (fr) 2008-10-03 2010-04-08 ソニー株式会社 Dispositif à semi-conducteur
EP3141941B1 (fr) 2015-09-10 2019-11-27 ams AG Dispositif semi-conducteur avec une fonctionnalité photonique et électronique et procédé de fabrication d'un dispositif semi-conducteur

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0661561A2 (fr) * 1993-12-27 1995-07-05 Hitachi, Ltd. Guide d'onde optique intégré
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020066899A1 (en) * 2000-08-04 2002-06-06 Fitzergald Eugene A. Silicon wafer with embedded optoelectronic material for monolithic OEIC

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0661561A2 (fr) * 1993-12-27 1995-07-05 Hitachi, Ltd. Guide d'onde optique intégré
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
IRACE A ET AL: "FAST SILICON-ON-SILICON OPTOELECTRONIC ROUTER BASED ON A BMFET DEVICE", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 6, no. 1, January 2000 (2000-01-01), pages 14 - 18, XP000908296, ISSN: 1077-260X *
JALALI B ET AL: "ADVANCES IN SILICON-ON-INSULATOR OPTOELECTRONICS", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 4, no. 6, November 1998 (1998-11-01), pages 938 - 947, XP000801341, ISSN: 1077-260X *
SCHAUB J D ET AL: "HIGH-SPEED MONOLITHIC SILICON PHOTORECEIVERS ON HIGH RESISTIVITY AND SOI SUBSTRATES", JOURNAL OF LIGHTWAVE TECHNOLOGY, IEEE. NEW YORK, US, vol. 19, no. 2, February 2001 (2001-02-01), pages 272 - 278, XP000989395, ISSN: 0733-8724 *
See also references of EP1776610A2 *

Also Published As

Publication number Publication date
AU2003273221A1 (en) 2004-02-09
AU2003273221A8 (en) 2004-02-09
WO2004010192A2 (fr) 2004-01-29
EP1776610A2 (fr) 2007-04-25

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