AU2003273221A8 - Optical-ready substrates with optical waveguide circuits and microelectronic circuits - Google Patents

Optical-ready substrates with optical waveguide circuits and microelectronic circuits

Info

Publication number
AU2003273221A8
AU2003273221A8 AU2003273221A AU2003273221A AU2003273221A8 AU 2003273221 A8 AU2003273221 A8 AU 2003273221A8 AU 2003273221 A AU2003273221 A AU 2003273221A AU 2003273221 A AU2003273221 A AU 2003273221A AU 2003273221 A8 AU2003273221 A8 AU 2003273221A8
Authority
AU
Australia
Prior art keywords
circuits
optical
microelectronic
optical waveguide
ready substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003273221A
Other versions
AU2003273221A1 (en
Inventor
Dan Mayden
Claes Bjorkman
Samuel Broydo
Lawrence C West
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/280,492 external-priority patent/US7043106B2/en
Priority claimed from US10/280,505 external-priority patent/US7072534B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2003273221A1 publication Critical patent/AU2003273221A1/en
Publication of AU2003273221A8 publication Critical patent/AU2003273221A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
AU2003273221A 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits Abandoned AU2003273221A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US39755202P 2002-07-22 2002-07-22
US60/397,552 2002-07-22
US10/280,492 US7043106B2 (en) 2002-07-22 2002-10-25 Optical ready wafers
US10/280,505 2002-10-25
US10/280,492 2002-10-25
US10/280,505 US7072534B2 (en) 2002-07-22 2002-10-25 Optical ready substrates
PCT/US2003/022687 WO2004010192A2 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits

Publications (2)

Publication Number Publication Date
AU2003273221A1 AU2003273221A1 (en) 2004-02-09
AU2003273221A8 true AU2003273221A8 (en) 2004-02-09

Family

ID=30773468

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003273221A Abandoned AU2003273221A1 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits

Country Status (3)

Country Link
EP (1) EP1776610A2 (en)
AU (1) AU2003273221A1 (en)
WO (1) WO2004010192A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016446A1 (en) * 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
FR2867898B1 (en) 2004-03-17 2006-09-15 Commissariat Energie Atomique FABRICATION OF AN OPTICAL INTERCONNECTION LAYER ON AN ELECTRONIC CIRCUIT
JP2006053473A (en) * 2004-08-16 2006-02-23 Sony Corp Optical waveguide module and mounting structure thereof
US20070104441A1 (en) * 2005-11-08 2007-05-10 Massachusetts Institute Of Technology Laterally-integrated waveguide photodetector apparatus and related coupling methods
US7574090B2 (en) * 2006-05-12 2009-08-11 Toshiba America Electronic Components, Inc. Semiconductor device using buried oxide layer as optical wave guides
JPWO2010038871A1 (en) 2008-10-03 2012-03-01 ソニー株式会社 Semiconductor device
EP3141941B1 (en) * 2015-09-10 2019-11-27 ams AG Semiconductor device with photonic and electronic functionality and method for manufacturing a semiconductor device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3345143B2 (en) * 1993-12-27 2002-11-18 株式会社日立製作所 Manufacturing method of optical waveguide
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same
WO2002013342A2 (en) * 2000-08-04 2002-02-14 Amberwave Systems Corporation Silicon wafer with embedded optoelectronic material for monolithic oeic

Also Published As

Publication number Publication date
AU2003273221A1 (en) 2004-02-09
WO2004010192A2 (en) 2004-01-29
WO2004010192A3 (en) 2004-04-22
EP1776610A2 (en) 2007-04-25

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase