WO2003101888A3 - Fluorochemical treatment for silicon articles - Google Patents

Fluorochemical treatment for silicon articles Download PDF

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Publication number
WO2003101888A3
WO2003101888A3 PCT/US2003/009894 US0309894W WO03101888A3 WO 2003101888 A3 WO2003101888 A3 WO 2003101888A3 US 0309894 W US0309894 W US 0309894W WO 03101888 A3 WO03101888 A3 WO 03101888A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluorochemical treatment
silicon articles
equal
silicon
integer greater
Prior art date
Application number
PCT/US2003/009894
Other languages
French (fr)
Other versions
WO2003101888A2 (en
Inventor
Timothy D Dunbar
Lawrence A Zazzera
Mark J Pellerite
Larry D Boardman
George G I Moore
Miguel A Guerra
Cheryl L S Elsbernd
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to CA002487715A priority Critical patent/CA2487715A1/en
Priority to AU2003226168A priority patent/AU2003226168A1/en
Priority to JP2004509589A priority patent/JP2005528234A/en
Priority to EP03756154A priority patent/EP1513763A2/en
Publication of WO2003101888A2 publication Critical patent/WO2003101888A2/en
Publication of WO2003101888A3 publication Critical patent/WO2003101888A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Micromachines (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

Silicon substrates having Si-H bonds are chemically modified using a fluorinated olefin having the formula wherein m is an integer greater than or equal to 1; n is an integer greater than or equal to 0; Z is a divalent linking group; and Rf is a highly fluorinated organic group.
PCT/US2003/009894 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles WO2003101888A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA002487715A CA2487715A1 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles
AU2003226168A AU2003226168A1 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles
JP2004509589A JP2005528234A (en) 2002-05-31 2003-04-01 Fluorochemical treatment of silicon articles
EP03756154A EP1513763A2 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/160,738 US6841079B2 (en) 2002-05-31 2002-05-31 Fluorochemical treatment for silicon articles
US10/160,738 2002-05-31

Publications (2)

Publication Number Publication Date
WO2003101888A2 WO2003101888A2 (en) 2003-12-11
WO2003101888A3 true WO2003101888A3 (en) 2004-09-10

Family

ID=29709726

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/009894 WO2003101888A2 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles

Country Status (7)

Country Link
US (1) US6841079B2 (en)
EP (1) EP1513763A2 (en)
JP (1) JP2005528234A (en)
CN (1) CN1314693C (en)
AU (1) AU2003226168A1 (en)
CA (1) CA2487715A1 (en)
WO (1) WO2003101888A2 (en)

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AU2005220150A1 (en) * 2004-02-13 2005-09-15 The University Of North Carolina At Chapel Hill Functional materials and novel methods for the fabrication of microfluidic devices
US20050249956A1 (en) * 2004-05-07 2005-11-10 Naiyong Jing Stain repellent optical hard coating
US7101618B2 (en) 2004-05-07 2006-09-05 3M Innovative Properties Company Article comprising fluorochemical surface layer
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US7288619B2 (en) * 2004-05-07 2007-10-30 3M Innovative Properties Company Fluorinated polyether polyamine and method of making the same
US7173778B2 (en) * 2004-05-07 2007-02-06 3M Innovative Properties Company Stain repellent optical hard coating
US7342080B2 (en) * 2004-05-07 2008-03-11 3M Innovative Properties Company Polymerizable compositions, methods of making the same, and composite articles therefrom
US20050272599A1 (en) * 2004-06-04 2005-12-08 Kenneth Kramer Mold release layer
US7682771B2 (en) * 2004-12-29 2010-03-23 3M Innovative Properties Company Compositions containing photosensitive fluorochemical and uses thereof
US7471439B2 (en) * 2005-11-23 2008-12-30 Miradia, Inc. Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
US7580174B2 (en) 2005-11-23 2009-08-25 Miradia, Inc. Anti-stiction gas-phase lubricant for micromechanical systems
US7463404B2 (en) * 2005-11-23 2008-12-09 Miradia, Inc. Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7723812B2 (en) 2005-11-23 2010-05-25 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7616370B2 (en) * 2005-11-23 2009-11-10 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7618682B2 (en) * 2006-09-25 2009-11-17 Hewlett-Packard Development Company, L.P. Method for providing an anti-stiction coating on a metal surface
US8096665B2 (en) * 2006-10-11 2012-01-17 Miradia, Inc. Spatially offset multi-imager-panel architecture for projecting an image
EP2356082B1 (en) * 2008-10-17 2021-03-17 Surfix BV Photochemical modification of solid materials
US20130216820A1 (en) 2010-11-10 2013-08-22 3M Innovative Properties Company Hydrophobic fluorinated coatings
SG194779A1 (en) 2011-05-04 2013-12-30 Univ Cornell Multiblock copolymer films, methods of making same, and uses thereof
CA2882622C (en) 2012-08-21 2021-11-09 Kratos LLC Group iva functionalized particles and methods of use thereof
US9290380B2 (en) 2012-12-18 2016-03-22 Freescale Semiconductor, Inc. Reducing MEMS stiction by deposition of nanoclusters
FR3000069B1 (en) * 2012-12-21 2015-02-06 Bluestar Silicones France METHOD FOR HYDROSILYLATION OF A SILOXANE PHOTOCATALYSIS BY A POLYOXOMETALLATE COMPOUND
JP6547629B2 (en) * 2013-12-13 2019-07-24 Ａｇｃ株式会社 Method for producing silicon compound
JP2017513787A (en) * 2014-02-21 2017-06-01 クラトス・エル・エル・シー Preparation of nanosilicon materials for the structure of functionalized Group IVA particles
KR101719340B1 (en) 2016-01-27 2017-03-23 제이에스아이실리콘주식회사 A Silicone Coupling Agent having Hydrophilic and Hydrophobic Groups for Invisible Fingerprint Coating and a Method for Producing the Same
KR102308085B1 (en) 2016-04-28 2021-10-06 테라포어 테크놀로지스, 인코포레이티드 Charged Isoporous Materials for Electrostatic Separation
BR112019000112A2 (en) 2016-07-05 2019-04-09 Kratos LLC passivated pre-lithiated micron and submicron group particles and methods for their preparation
US11401411B2 (en) 2016-11-17 2022-08-02 Terapore Technologies, Inc. Isoporous self-assembled block copolymer films containing high molecular weight hydrophilic additives and methods of making the same
WO2018156731A1 (en) 2017-02-22 2018-08-30 Dorin Rachel M Ligand bound mbp membranes, uses and method of manufacturing
US11637280B2 (en) 2017-03-31 2023-04-25 Kratos LLC Precharged negative electrode material for secondary battery
CA3062637A1 (en) * 2017-05-12 2018-11-15 Terapore Technologies, Inc. Chemically resistant fluorinated multiblock polymer structures, methods of manufacturing and use
SG11202002333SA (en) 2017-09-19 2020-04-29 Terapore Tech Inc Chemically resistant isoporous crosslinked block copolymer structure
SG11202008678TA (en) 2018-03-12 2020-10-29 Terapore Tech Inc Isoporous mesoporous asymmetric block copolymer materials with macrovoids and method of making the same
US10626013B2 (en) * 2018-04-04 2020-04-21 Canon Kabushiki Kaisha Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
KR20180099609A (en) 2018-08-29 2018-09-05 제이에스아이실리콘주식회사 Bis(silylalkane) Type Silicone Coupling Agents Substituted with Fluoroalkyl Group or Perfluoroalkyl ether Group and a Method for Preparing the Same
CN111074349A (en) * 2019-07-12 2020-04-28 杭州师范大学 Method for preparing super-hydrophobic porous silicon by modifying photocatalytic fluorine-containing monomer

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Also Published As

Publication number Publication date
US20030226818A1 (en) 2003-12-11
JP2005528234A (en) 2005-09-22
CA2487715A1 (en) 2003-12-11
AU2003226168A1 (en) 2003-12-19
WO2003101888A2 (en) 2003-12-11
CN1668528A (en) 2005-09-14
US6841079B2 (en) 2005-01-11
CN1314693C (en) 2007-05-09
EP1513763A2 (en) 2005-03-16

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