WO2003068668A3 - Mikromechanisches bauelement und verfahren zu dessen herstellung - Google Patents
Mikromechanisches bauelement und verfahren zu dessen herstellung Download PDFInfo
- Publication number
- WO2003068668A3 WO2003068668A3 PCT/EP2003/001309 EP0301309W WO03068668A3 WO 2003068668 A3 WO2003068668 A3 WO 2003068668A3 EP 0301309 W EP0301309 W EP 0301309W WO 03068668 A3 WO03068668 A3 WO 03068668A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- component
- micromechnical
- producing
- same
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50312662T DE50312662D1 (de) | 2002-02-11 | 2003-02-10 | Mikromechanisches bauelement und verfahren zu dessen herstellung |
EP03739464A EP1474355B1 (de) | 2002-02-11 | 2003-02-10 | Mikromechanisches bauelement und verfahren zu dessen herstellung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2002105585 DE10205585A1 (de) | 2002-02-11 | 2002-02-11 | Mikromechanisches Bauelement und Verfahren zu dessen Herstellung |
DE10205585.8 | 2002-02-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003068668A2 WO2003068668A2 (de) | 2003-08-21 |
WO2003068668A3 true WO2003068668A3 (de) | 2004-04-22 |
Family
ID=27634870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/001309 WO2003068668A2 (de) | 2002-02-11 | 2003-02-10 | Mikromechanisches bauelement und verfahren zu dessen herstellung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1474355B1 (de) |
DE (2) | DE10205585A1 (de) |
WO (1) | WO2003068668A2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0605576D0 (en) * | 2006-03-20 | 2006-04-26 | Oligon Ltd | MEMS device |
DE102006012856B4 (de) * | 2006-03-21 | 2016-11-24 | Robert Bosch Gmbh | Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen und Verfahren zum Empfang und/oder zur Erzeugung von akustischen Signalen |
EP2207190B9 (de) * | 2009-01-08 | 2014-09-24 | Epcos AG | Gefederte Vorrichtung |
GB2551854B (en) * | 2016-07-28 | 2019-03-27 | Cirrus Logic Int Semiconductor Ltd | MEMS device and process |
DE102017103620B4 (de) | 2017-02-22 | 2022-01-05 | Infineon Technologies Ag | Halbleitervorrichtung, Mikrofon und Verfahren zum Bilden einer Halbleitervorrichtung |
US11490186B2 (en) | 2020-08-31 | 2022-11-01 | Invensense, Inc. | Edge patterns of microelectromechanical systems (MEMS) microphone backplate holes |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4607383A (en) * | 1983-08-18 | 1986-08-19 | Gentex Corporation | Throat microphone |
US5452268A (en) * | 1994-08-12 | 1995-09-19 | The Charles Stark Draper Laboratory, Inc. | Acoustic transducer with improved low frequency response |
US5870482A (en) * | 1997-02-25 | 1999-02-09 | Knowles Electronics, Inc. | Miniature silicon condenser microphone |
US6140689A (en) * | 1996-11-22 | 2000-10-31 | Siemens Aktiengesellschaft | Micromechanical sensor |
US6168906B1 (en) * | 1998-05-26 | 2001-01-02 | The Charles Stark Draper Laboratory, Inc. | Micromachined membrane with locally compliant and stiff regions and method of making same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4032559C2 (de) * | 1990-10-13 | 2000-11-23 | Bosch Gmbh Robert | Drehratensensor und Verfahren zur Herstellung |
EP1105344B1 (de) * | 1998-08-11 | 2012-04-25 | Infineon Technologies AG | Mikromechanischer sensor und verfahren zu seiner herstellung |
WO2000070630A2 (en) * | 1999-05-19 | 2000-11-23 | California Institute Of Technology | High performance mems thin-film teflon® electret microphone |
-
2002
- 2002-02-11 DE DE2002105585 patent/DE10205585A1/de not_active Ceased
-
2003
- 2003-02-10 WO PCT/EP2003/001309 patent/WO2003068668A2/de not_active Application Discontinuation
- 2003-02-10 DE DE50312662T patent/DE50312662D1/de not_active Expired - Lifetime
- 2003-02-10 EP EP03739464A patent/EP1474355B1/de not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4607383A (en) * | 1983-08-18 | 1986-08-19 | Gentex Corporation | Throat microphone |
US5452268A (en) * | 1994-08-12 | 1995-09-19 | The Charles Stark Draper Laboratory, Inc. | Acoustic transducer with improved low frequency response |
US6140689A (en) * | 1996-11-22 | 2000-10-31 | Siemens Aktiengesellschaft | Micromechanical sensor |
US5870482A (en) * | 1997-02-25 | 1999-02-09 | Knowles Electronics, Inc. | Miniature silicon condenser microphone |
US6168906B1 (en) * | 1998-05-26 | 2001-01-02 | The Charles Stark Draper Laboratory, Inc. | Micromachined membrane with locally compliant and stiff regions and method of making same |
Also Published As
Publication number | Publication date |
---|---|
DE10205585A1 (de) | 2003-08-28 |
EP1474355B1 (de) | 2010-04-28 |
WO2003068668A2 (de) | 2003-08-21 |
EP1474355A2 (de) | 2004-11-10 |
DE50312662D1 (de) | 2010-06-10 |
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