WO2003061107A3 - Dielectric actuator including conductive gap - Google Patents

Dielectric actuator including conductive gap Download PDF

Info

Publication number
WO2003061107A3
WO2003061107A3 PCT/US2003/000896 US0300896W WO03061107A3 WO 2003061107 A3 WO2003061107 A3 WO 2003061107A3 US 0300896 W US0300896 W US 0300896W WO 03061107 A3 WO03061107 A3 WO 03061107A3
Authority
WO
WIPO (PCT)
Prior art keywords
actuator including
including conductive
conductive gap
dielectric actuator
space
Prior art date
Application number
PCT/US2003/000896
Other languages
French (fr)
Other versions
WO2003061107A2 (en
Inventor
Matthew R Wilson
Original Assignee
Npoint Inc
Matthew R Wilson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Npoint Inc, Matthew R Wilson filed Critical Npoint Inc
Priority to AU2003217198A priority Critical patent/AU2003217198A1/en
Publication of WO2003061107A2 publication Critical patent/WO2003061107A2/en
Publication of WO2003061107A3 publication Critical patent/WO2003061107A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/004Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0094Switches making use of nanoelectromechanical systems [NEMS]

Abstract

Disclosed is a capacitor-type actuator including two conductive plates (10, 10’) defining a space between them where one conductive plate (10’) is moveable and the other is not. A dielectric (12) is disposed in the space between the conductive plates (10, 10’) and adhered to the moveable plate (10’). An electrically conducting material (17), preferably a solid, is adhered to the non-moveable conductive plate (10) in the space between the two plates.
PCT/US2003/000896 2002-01-11 2003-01-10 Dielectric actuator including conductive gap WO2003061107A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003217198A AU2003217198A1 (en) 2002-01-11 2003-01-10 Dielectric actuator including conductive gap

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US34820102P 2002-01-11 2002-01-11
US60/348,201 2002-01-11

Publications (2)

Publication Number Publication Date
WO2003061107A2 WO2003061107A2 (en) 2003-07-24
WO2003061107A3 true WO2003061107A3 (en) 2003-12-18

Family

ID=23367015

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/000896 WO2003061107A2 (en) 2002-01-11 2003-01-10 Dielectric actuator including conductive gap

Country Status (2)

Country Link
AU (1) AU2003217198A1 (en)
WO (1) WO2003061107A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4146813B2 (en) * 2004-03-25 2008-09-10 ファナック株式会社 Electrostatic motor
DE102005034323B4 (en) * 2005-07-22 2011-07-21 Deutsches Zentrum für Luft- und Raumfahrt e.V., 51147 Actuator with nanotubes
FR2930370B1 (en) * 2008-04-18 2011-08-26 Thales Sa MICROSYSTEM COMPONENTS COMPRISING A MEMBRANE COMPRISING NANOTUBES.
DE102010030034B4 (en) 2010-06-14 2016-02-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Actuator with nanotubes
US10310481B2 (en) 2015-10-07 2019-06-04 International Business Machines Corporation Dynamic position control for electronic components

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340777A (en) * 1989-07-07 1991-02-21 Fujitsu Ltd Liquid electrode type electrostatic motor
US5552654A (en) * 1993-10-21 1996-09-03 Mitsubishi Chemical Corporation Electrostatic actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340777A (en) * 1989-07-07 1991-02-21 Fujitsu Ltd Liquid electrode type electrostatic motor
US5552654A (en) * 1993-10-21 1996-09-03 Mitsubishi Chemical Corporation Electrostatic actuator

Also Published As

Publication number Publication date
AU2003217198A8 (en) 2003-07-30
WO2003061107A2 (en) 2003-07-24
AU2003217198A1 (en) 2003-07-30

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