WO2003056605A3 - Gekühlte hochdruckgasentladungslampe - Google Patents

Gekühlte hochdruckgasentladungslampe Download PDF

Info

Publication number
WO2003056605A3
WO2003056605A3 PCT/IB2002/005507 IB0205507W WO03056605A3 WO 2003056605 A3 WO2003056605 A3 WO 2003056605A3 IB 0205507 W IB0205507 W IB 0205507W WO 03056605 A3 WO03056605 A3 WO 03056605A3
Authority
WO
WIPO (PCT)
Prior art keywords
high intensity
bulb
discharge lamp
gas discharge
cooled high
Prior art date
Application number
PCT/IB2002/005507
Other languages
English (en)
French (fr)
Other versions
WO2003056605A2 (de
Inventor
Holger Moench
Jan A J Stoffels
Original Assignee
Philips Intellectual Property
Koninkl Philips Electronics Nv
Holger Moench
Jan A J Stoffels
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Intellectual Property, Koninkl Philips Electronics Nv, Holger Moench, Jan A J Stoffels filed Critical Philips Intellectual Property
Priority to AU2002353363A priority Critical patent/AU2002353363A1/en
Priority to EP02788385A priority patent/EP1464072A2/de
Priority to US10/500,491 priority patent/US20080218078A1/en
Priority to JP2003557027A priority patent/JP2005513751A/ja
Publication of WO2003056605A2 publication Critical patent/WO2003056605A2/de
Publication of WO2003056605A3 publication Critical patent/WO2003056605A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

Die Erfindung betrifft eine gekühlte Hochdruckgasentladungslampe, zumindest umfassend einen gekühlten Lampenkolben (43), der einen mit einem Gas gefüllten Entladungsraum (431) hermetisch verschließt, wobei zum Zeitpunkt der Gasentladung zumindest im Entladungsraum (431) eine inhomogene Temperaturverteilung besteht, und eine Kühleinrichtung (7) mit einem Kühlmittel, die einen gerichteten Kühlmittelstrom (9) erzeugt, wobei ein flüssiges Kühlmittel auf den Lampenkolben (43) einwirkt, die Lampe mit einer erhöhten Leistung betreibbar und der Kühlmittelstrom (9) derart beschaffen ist, dass bei der erhöhten Leistungsaufnahme der Lampe eine Entglasung des Lampenkolbens (43) und eine Kondensation des Gases im wesentlichen verhindert wird.
PCT/IB2002/005507 2002-01-02 2002-12-18 Gekühlte hochdruckgasentladungslampe WO2003056605A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2002353363A AU2002353363A1 (en) 2002-01-02 2002-12-18 Cooled high intensity gas discharge lamp
EP02788385A EP1464072A2 (de) 2002-01-02 2002-12-18 Gekühlte hochdruckgasentladungslampe
US10/500,491 US20080218078A1 (en) 2002-01-02 2002-12-18 Cooled High-Pressure Gas-Discharge Lamp
JP2003557027A JP2005513751A (ja) 2002-01-02 2002-12-18 冷却式高圧ガス放電ランプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10200026A DE10200026A1 (de) 2002-01-02 2002-01-02 Gekühlte Hochdruckgasentladungslampe
DE10200026.3 2002-01-02

Publications (2)

Publication Number Publication Date
WO2003056605A2 WO2003056605A2 (de) 2003-07-10
WO2003056605A3 true WO2003056605A3 (de) 2004-06-03

Family

ID=7711442

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2002/005507 WO2003056605A2 (de) 2002-01-02 2002-12-18 Gekühlte hochdruckgasentladungslampe

Country Status (7)

Country Link
US (1) US20080218078A1 (de)
EP (1) EP1464072A2 (de)
JP (1) JP2005513751A (de)
CN (1) CN100401458C (de)
AU (1) AU2002353363A1 (de)
DE (1) DE10200026A1 (de)
WO (1) WO2003056605A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1836883B1 (de) * 2005-01-03 2011-03-02 Philips Intellectual Property & Standards GmbH Verfahren und betriebssteuerung für den betrieb einer quecksilberdampfentladungslampe in einem bildwiedergabesystem
WO2008092503A1 (de) * 2007-01-31 2008-08-07 Osram Gesellschaft mit beschränkter Haftung Reflektorlampe
JP2016111268A (ja) * 2014-12-09 2016-06-20 キヤノン株式会社 冷却装置、照明光学系、露光装置、並びに物品の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09147805A (ja) * 1995-11-21 1997-06-06 Ushio Inc 棒状ランプの冷却方法および光照射器
EP0825808A2 (de) * 1996-08-22 1998-02-25 Matsushita Electric Industrial Co., Ltd. Gerät und Verfahren zum Betreiben einer Entladungslampe
EP0897190A2 (de) * 1997-08-11 1999-02-17 Osram Sylvania Inc. Elektrodenlose Projektionslampe hoher Lichtstärke

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2822489A (en) * 1953-09-15 1958-02-04 Gen Electric Temperature responsive arrangement
US4482842A (en) * 1980-10-01 1984-11-13 Hitachi, Ltd. Curved tube type ultra high pressure mercury arc discharge lamp device
JPS61142662A (ja) * 1985-12-12 1986-06-30 Matsushita Electric Works Ltd 高圧放電灯
US4785216A (en) * 1987-05-04 1988-11-15 Ilc Technology, Inc. High powered water cooled xenon short arc lamp
US4994705A (en) * 1989-03-27 1991-02-19 Hughes Aircraft Company Water-cooled, low pressure gas discharge lamp
JPH05151940A (ja) * 1991-11-28 1993-06-18 Iwasaki Electric Co Ltd 低圧水銀蒸気放電灯
JPH05283051A (ja) * 1992-04-01 1993-10-29 Iwasaki Electric Co Ltd メタルハライドランプ装置
JPH0652836A (ja) * 1992-07-27 1994-02-25 Matsushita Electric Ind Co Ltd メタルハライドランプ装置
JPH1055782A (ja) * 1996-08-09 1998-02-24 Ushio Inc 光照射装置
JP4089072B2 (ja) * 1998-10-23 2008-05-21 三菱電機株式会社 永久磁石埋込み形モータ
DE10061248B4 (de) 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
US6664554B2 (en) 2001-01-03 2003-12-16 Euv Llc Self-cleaning optic for extreme ultraviolet lithography

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09147805A (ja) * 1995-11-21 1997-06-06 Ushio Inc 棒状ランプの冷却方法および光照射器
EP0825808A2 (de) * 1996-08-22 1998-02-25 Matsushita Electric Industrial Co., Ltd. Gerät und Verfahren zum Betreiben einer Entladungslampe
EP0897190A2 (de) * 1997-08-11 1999-02-17 Osram Sylvania Inc. Elektrodenlose Projektionslampe hoher Lichtstärke

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 10 31 October 1997 (1997-10-31) *

Also Published As

Publication number Publication date
JP2005513751A (ja) 2005-05-12
US20080218078A1 (en) 2008-09-11
EP1464072A2 (de) 2004-10-06
WO2003056605A2 (de) 2003-07-10
CN1613136A (zh) 2005-05-04
AU2002353363A1 (en) 2003-07-15
CN100401458C (zh) 2008-07-09
AU2002353363A8 (en) 2003-07-15
DE10200026A1 (de) 2003-07-17

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