WO2003054975A3 - Baking oven for photovoltaic devices - Google Patents

Baking oven for photovoltaic devices Download PDF

Info

Publication number
WO2003054975A3
WO2003054975A3 PCT/EP2002/013372 EP0213372W WO03054975A3 WO 2003054975 A3 WO2003054975 A3 WO 2003054975A3 EP 0213372 W EP0213372 W EP 0213372W WO 03054975 A3 WO03054975 A3 WO 03054975A3
Authority
WO
WIPO (PCT)
Prior art keywords
baking oven
photovoltaic devices
semiconductor material
oven
entrainment
Prior art date
Application number
PCT/EP2002/013372
Other languages
French (fr)
Other versions
WO2003054975A2 (en
Inventor
Mariano Zarcone
Amerigo Romagnoli
Original Assignee
Eurosolare Spa
Mariano Zarcone
Amerigo Romagnoli
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eurosolare Spa, Mariano Zarcone, Amerigo Romagnoli filed Critical Eurosolare Spa
Priority to EP02791725A priority Critical patent/EP1454367A2/en
Priority to JP2003555596A priority patent/JP4511186B2/en
Priority to AU2002358050A priority patent/AU2002358050B2/en
Publication of WO2003054975A2 publication Critical patent/WO2003054975A2/en
Publication of WO2003054975A3 publication Critical patent/WO2003054975A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tunnel Furnaces (AREA)
  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
  • Electric Stoves And Ranges (AREA)

Abstract

A baking oven is described, for photovoltaic devices starting from semiconductor material characterized in that the entrainment of the semiconductor material inside the oven is effected by means of a series of rolls made of a ceramic material, which rotate on their own axis.
PCT/EP2002/013372 2001-12-13 2002-11-27 Baking oven for photovoltaic devices WO2003054975A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP02791725A EP1454367A2 (en) 2001-12-13 2002-11-27 Baking oven for photovoltaic devices
JP2003555596A JP4511186B2 (en) 2001-12-13 2002-11-27 Photovoltaic baking oven
AU2002358050A AU2002358050B2 (en) 2001-12-13 2002-11-27 Baking oven for photovoltaic devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI20012628 ITMI20012628A1 (en) 2001-12-13 2001-12-13 BAKING OVEN FOR PHOTOVOLTAIC DEVICES
ITMI01A002628 2001-12-13

Publications (2)

Publication Number Publication Date
WO2003054975A2 WO2003054975A2 (en) 2003-07-03
WO2003054975A3 true WO2003054975A3 (en) 2004-01-08

Family

ID=11448688

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/013372 WO2003054975A2 (en) 2001-12-13 2002-11-27 Baking oven for photovoltaic devices

Country Status (6)

Country Link
EP (1) EP1454367A2 (en)
JP (1) JP4511186B2 (en)
CN (1) CN100356589C (en)
AU (1) AU2002358050B2 (en)
IT (1) ITMI20012628A1 (en)
WO (1) WO2003054975A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008061537A1 (en) * 2008-12-03 2010-06-10 Aci-Ecotec Gmbh & Co. Kg Curing device for photovoltaic thin-film solar cells
DE102009019127A1 (en) * 2009-04-29 2011-05-05 Eisenmann Anlagenbau Gmbh & Co. Kg Furnace for producing thin-film photovoltaic cells
DE102010016512A1 (en) 2010-04-19 2011-10-20 Roth & Rau Ag Flow-through system e.g. diffusion furnace, for heat treatment of glass panes in glass industry, has planar glass substrates comprising transport layers arranged one above other in process chamber, where substrates are processed by chamber
DE102010016509A1 (en) 2010-04-19 2011-10-20 Roth & Rau Ag Flowthrough system for processing substrate in atmosphere, has gas inlets and gas outlets arranged on line parallel to rollers, where one of gas outlets is fixed on channels at transport direction while other gas outlet is placed on chamber
DE202010013032U1 (en) * 2010-12-01 2011-02-17 Roth & Rau Ag transport roller
DE202011110836U1 (en) 2011-02-21 2016-09-02 Ctf Solar Gmbh Device for coating substrates
US8795785B2 (en) 2011-04-07 2014-08-05 Dynamic Micro System Methods and apparatuses for roll-on coating
US8739728B2 (en) 2011-04-07 2014-06-03 Dynamic Micro Systems, Semiconductor Equipment Gmbh Methods and apparatuses for roll-on coating
US8720370B2 (en) 2011-04-07 2014-05-13 Dynamic Micro System Semiconductor Equipment GmbH Methods and apparatuses for roll-on coating
CN102393139A (en) * 2011-11-16 2012-03-28 杨桂玲 Roller way type solar battery silicon wafer sintering furnace

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2788957A (en) * 1953-03-30 1957-04-16 Drever Co Refractory roller furnace conveyor system
US3867748A (en) * 1974-03-07 1975-02-25 Libbey Owens Ford Co Supporting and driving frangible rollers
US4343395A (en) * 1977-11-10 1982-08-10 Holcroft & Co. Roller hearth furnace
US4932864A (en) * 1988-06-08 1990-06-12 Chugai Ro Co., Ltd. Roller hearth type heat treating furnace
US5044920A (en) * 1988-08-04 1991-09-03 Gerlach Juergen Heat treatment apparatus for continuously advanced material
US5266027A (en) * 1992-08-12 1993-11-30 Ngk Insulators, Ltd. Roller-hearth continuous furnace
EP0908928A2 (en) * 1997-10-09 1999-04-14 Matsushita Electric Industrial Co., Ltd. Baking furnace and control method therefor
EP1010960A1 (en) * 1998-12-17 2000-06-21 O.T.B. Engineering B.V. Furnace for heating articles

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332295U (en) * 1986-08-12 1988-03-02
JP2961295B2 (en) * 1994-12-20 1999-10-12 光洋リンドバーグ株式会社 Roller hearth furnace
CN1107618C (en) * 1999-09-03 2003-05-07 北新建材(集团)有限公司 Automatic plate packing line

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2788957A (en) * 1953-03-30 1957-04-16 Drever Co Refractory roller furnace conveyor system
US3867748A (en) * 1974-03-07 1975-02-25 Libbey Owens Ford Co Supporting and driving frangible rollers
US4343395A (en) * 1977-11-10 1982-08-10 Holcroft & Co. Roller hearth furnace
US4932864A (en) * 1988-06-08 1990-06-12 Chugai Ro Co., Ltd. Roller hearth type heat treating furnace
US5044920A (en) * 1988-08-04 1991-09-03 Gerlach Juergen Heat treatment apparatus for continuously advanced material
US5266027A (en) * 1992-08-12 1993-11-30 Ngk Insulators, Ltd. Roller-hearth continuous furnace
EP0908928A2 (en) * 1997-10-09 1999-04-14 Matsushita Electric Industrial Co., Ltd. Baking furnace and control method therefor
EP1010960A1 (en) * 1998-12-17 2000-06-21 O.T.B. Engineering B.V. Furnace for heating articles

Also Published As

Publication number Publication date
AU2002358050B2 (en) 2007-10-11
AU2002358050A1 (en) 2003-07-09
WO2003054975A2 (en) 2003-07-03
JP2005513406A (en) 2005-05-12
CN100356589C (en) 2007-12-19
CN1602554A (en) 2005-03-30
ITMI20012628A1 (en) 2003-06-13
JP4511186B2 (en) 2010-07-28
EP1454367A2 (en) 2004-09-08

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