WO2003041845A1 - Decomposing agent and method of decomposition treatment for sulfur fluorides - Google Patents

Decomposing agent and method of decomposition treatment for sulfur fluorides Download PDF

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Publication number
WO2003041845A1
WO2003041845A1 PCT/JP2002/011782 JP0211782W WO03041845A1 WO 2003041845 A1 WO2003041845 A1 WO 2003041845A1 JP 0211782 W JP0211782 W JP 0211782W WO 03041845 A1 WO03041845 A1 WO 03041845A1
Authority
WO
WIPO (PCT)
Prior art keywords
decomposing agent
sulfur
decomposing
agent
compound
Prior art date
Application number
PCT/JP2002/011782
Other languages
French (fr)
Japanese (ja)
Inventor
Kenji Otsuka
Youji Nawa
Tomohisa Ikeda
Koshi Ochi
Original Assignee
Japan Pionics Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Co., Ltd. filed Critical Japan Pionics Co., Ltd.
Publication of WO2003041845A1 publication Critical patent/WO2003041845A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/10—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of rare earths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8603—Removing sulfur compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

A decomposing agent comprising an aluminum compound and a lanthanoid compound, and optionally an alkaline earth compound as effective components; and a method for decomposing sulfur fluorides which comprises contacting a gas containing a sulfur fluoride with the decomposing agent while heating, or comprises contacting the gas with a decomposing agent comprising an aluminum compound as an effective component, followed by contacting an agent comprising a lanthanoide oxide and an alkaline earth metal oxide as effective components. The method allows the decomposition of sulfur fluorides, such as SF6, contained in an exhaust gas discharged from a semiconductor manufacturing process or the like, in a short time at a relatively low temperature of 1000 °C or lower with a decomposition percentage of 99.9 % or more, without deactivation of the decomposing agent and without discharging a corrosive gas such as a sulfur oxide, hydrogen fluoride, or the like.
PCT/JP2002/011782 2001-11-13 2002-11-12 Decomposing agent and method of decomposition treatment for sulfur fluorides WO2003041845A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-347244 2001-11-13
JP2001347244A JP4112845B2 (en) 2001-11-13 2001-11-13 Sulfur fluoride decomposition treatment agent and decomposition treatment method

Publications (1)

Publication Number Publication Date
WO2003041845A1 true WO2003041845A1 (en) 2003-05-22

Family

ID=19160277

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/011782 WO2003041845A1 (en) 2001-11-13 2002-11-12 Decomposing agent and method of decomposition treatment for sulfur fluorides

Country Status (3)

Country Link
JP (1) JP4112845B2 (en)
TW (1) TWI226261B (en)
WO (1) WO2003041845A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4887327B2 (en) * 2008-05-07 2012-02-29 日本パイオニクス株式会社 Fluorine compound decomposition treatment system
JPWO2010101073A1 (en) * 2009-03-04 2012-09-10 昭和電工株式会社 Reaction apparatus and reaction method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0895801A2 (en) * 1997-08-07 1999-02-10 Showa Denko Kabushiki Kaisha Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor
US6162957A (en) * 1997-03-24 2000-12-19 Showa Denko K.K. Catalytic decomposition of perfluoro-compound
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
JP2001162139A (en) * 1999-12-06 2001-06-19 Yusaku Takita Method for catalytic decomposition of global warming gas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6162957A (en) * 1997-03-24 2000-12-19 Showa Denko K.K. Catalytic decomposition of perfluoro-compound
EP0895801A2 (en) * 1997-08-07 1999-02-10 Showa Denko Kabushiki Kaisha Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
JP2001162139A (en) * 1999-12-06 2001-06-19 Yusaku Takita Method for catalytic decomposition of global warming gas

Also Published As

Publication number Publication date
JP2003144843A (en) 2003-05-20
JP4112845B2 (en) 2008-07-02
TWI226261B (en) 2005-01-11

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