WO2003037565A3 - Polishing pads and manufacturing methods - Google Patents
Polishing pads and manufacturing methods Download PDFInfo
- Publication number
- WO2003037565A3 WO2003037565A3 PCT/US2002/034618 US0234618W WO03037565A3 WO 2003037565 A3 WO2003037565 A3 WO 2003037565A3 US 0234618 W US0234618 W US 0234618W WO 03037565 A3 WO03037565 A3 WO 03037565A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- properties
- pads
- manufacturing methods
- area
- polishing pads
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002350031A AU2002350031A1 (en) | 2001-10-29 | 2002-10-29 | Polishing pads and manufacturing methods |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US34096201P | 2001-10-29 | 2001-10-29 | |
US60/340,962 | 2001-10-29 | ||
US10/020,081 | 2001-12-11 | ||
US10/020,081 US20030083003A1 (en) | 2001-10-29 | 2001-12-11 | Polishing pads and manufacturing methods |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003037565A2 WO2003037565A2 (en) | 2003-05-08 |
WO2003037565A3 true WO2003037565A3 (en) | 2003-10-23 |
Family
ID=26692984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/034618 WO2003037565A2 (en) | 2001-10-29 | 2002-10-29 | Polishing pads and manufacturing methods |
Country Status (3)
Country | Link |
---|---|
US (1) | US20030083003A1 (en) |
AU (1) | AU2002350031A1 (en) |
WO (1) | WO2003037565A2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7704125B2 (en) | 2003-03-24 | 2010-04-27 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
WO2004087375A1 (en) | 2003-03-25 | 2004-10-14 | Neopad Technologies Corporation | Chip customized polish pads for chemical mechanical planarization (cmp) |
US8864859B2 (en) | 2003-03-25 | 2014-10-21 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
US9278424B2 (en) | 2003-03-25 | 2016-03-08 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
US7086932B2 (en) * | 2004-05-11 | 2006-08-08 | Freudenberg Nonwovens | Polishing pad |
TWI385050B (en) * | 2005-02-18 | 2013-02-11 | Nexplanar Corp | Customized polishing pads for cmp and methods of fabrication and use thereof |
US20070049169A1 (en) * | 2005-08-02 | 2007-03-01 | Vaidya Neha P | Nonwoven polishing pads for chemical mechanical polishing |
US7458885B1 (en) * | 2007-08-15 | 2008-12-02 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad and methods of making and using same |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4728552A (en) * | 1984-07-06 | 1988-03-01 | Rodel, Inc. | Substrate containing fibers of predetermined orientation and process of making the same |
US4927432A (en) * | 1986-03-25 | 1990-05-22 | Rodel, Inc. | Pad material for grinding, lapping and polishing |
FR2673574A1 (en) * | 1991-03-06 | 1992-09-11 | Delamare Pierre | Method of manufacturing polishing discs and discs obtained thereby |
US5868605A (en) * | 1995-06-02 | 1999-02-09 | Speedfam Corporation | In-situ polishing pad flatness control |
US6106754A (en) * | 1994-11-23 | 2000-08-22 | Rodel Holdings, Inc. | Method of making polishing pads |
US20010000772A1 (en) * | 1999-02-04 | 2001-05-03 | Kramer Stephen J. | Method and apparatus for uniformly planarizing a microelectronic substrate |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4046729A (en) * | 1975-06-02 | 1977-09-06 | Ppg Industries, Inc. | Water-reduced urethane coating compositions |
US4171391A (en) * | 1978-09-07 | 1979-10-16 | Wilmington Chemical Corporation | Method of preparing composite sheet material |
US4376148A (en) * | 1980-09-18 | 1983-03-08 | Norwood Industries, Inc. | Impregnated non-woven sheet material with ionically solubilized resin |
US4342805A (en) * | 1980-09-18 | 1982-08-03 | Norwood Industries, Inc. | Simulated leather sheet material |
US4511605A (en) * | 1980-09-18 | 1985-04-16 | Norwood Industries, Inc. | Process for producing polishing pads comprising a fully impregnated non-woven batt |
US4496624A (en) * | 1982-07-14 | 1985-01-29 | Norwood Industries, Inc. | Fibrous web impregnated with coagulated polyurethane and polyolefin admixture |
JPS62140769A (en) * | 1985-12-16 | 1987-06-24 | Toyo Cloth Kk | Manufacture of abrasive cloth |
US4841680A (en) * | 1987-08-25 | 1989-06-27 | Rodel, Inc. | Inverted cell pad material for grinding, lapping, shaping and polishing |
US5533923A (en) * | 1995-04-10 | 1996-07-09 | Applied Materials, Inc. | Chemical-mechanical polishing pad providing polishing unformity |
US6287185B1 (en) * | 1997-04-04 | 2001-09-11 | Rodel Holdings Inc. | Polishing pads and methods relating thereto |
US6126532A (en) * | 1997-04-18 | 2000-10-03 | Cabot Corporation | Polishing pads for a semiconductor substrate |
JPH11216663A (en) * | 1998-02-03 | 1999-08-10 | Sony Corp | Grinding pad, grinding apparatus and grinding method |
US6117000A (en) * | 1998-07-10 | 2000-09-12 | Cabot Corporation | Polishing pad for a semiconductor substrate |
US6095902A (en) * | 1998-09-23 | 2000-08-01 | Rodel Holdings, Inc. | Polyether-polyester polyurethane polishing pads and related methods |
-
2001
- 2001-12-11 US US10/020,081 patent/US20030083003A1/en not_active Abandoned
-
2002
- 2002-10-29 WO PCT/US2002/034618 patent/WO2003037565A2/en not_active Application Discontinuation
- 2002-10-29 AU AU2002350031A patent/AU2002350031A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4728552A (en) * | 1984-07-06 | 1988-03-01 | Rodel, Inc. | Substrate containing fibers of predetermined orientation and process of making the same |
US4927432A (en) * | 1986-03-25 | 1990-05-22 | Rodel, Inc. | Pad material for grinding, lapping and polishing |
FR2673574A1 (en) * | 1991-03-06 | 1992-09-11 | Delamare Pierre | Method of manufacturing polishing discs and discs obtained thereby |
US6106754A (en) * | 1994-11-23 | 2000-08-22 | Rodel Holdings, Inc. | Method of making polishing pads |
US5868605A (en) * | 1995-06-02 | 1999-02-09 | Speedfam Corporation | In-situ polishing pad flatness control |
US20010000772A1 (en) * | 1999-02-04 | 2001-05-03 | Kramer Stephen J. | Method and apparatus for uniformly planarizing a microelectronic substrate |
Also Published As
Publication number | Publication date |
---|---|
US20030083003A1 (en) | 2003-05-01 |
WO2003037565A2 (en) | 2003-05-08 |
AU2002350031A1 (en) | 2003-05-12 |
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