WO2003036672A3 - A multi-layer 3d device and method of manufacturing - Google Patents

A multi-layer 3d device and method of manufacturing Download PDF

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Publication number
WO2003036672A3
WO2003036672A3 PCT/IL2002/000842 IL0200842W WO03036672A3 WO 2003036672 A3 WO2003036672 A3 WO 2003036672A3 IL 0200842 W IL0200842 W IL 0200842W WO 03036672 A3 WO03036672 A3 WO 03036672A3
Authority
WO
WIPO (PCT)
Prior art keywords
layers
elements
optical
sidewalls
positioning
Prior art date
Application number
PCT/IL2002/000842
Other languages
French (fr)
Other versions
WO2003036672A2 (en
Inventor
Igal Chertkow
Moshe Medina
Slava Krylov
David Kin
Original Assignee
Memlink Ltd
Igal Chertkow
Moshe Medina
Slava Krylov
David Kin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Igal Chertkow, Moshe Medina, Slava Krylov, David Kin filed Critical Memlink Ltd
Priority to AU2002351157A priority Critical patent/AU2002351157A1/en
Publication of WO2003036672A2 publication Critical patent/WO2003036672A2/en
Publication of WO2003036672A3 publication Critical patent/WO2003036672A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation

Abstract

An apparatus suitable for three-dimensional micro-electromechanical system (MEMS) apparatus wherein features of the 3D structure contribute to functionality, and a method for assembly thereof is disclosed. The apparatus includes one or more sidewalls supporting a plurality of stacked, parallel layers in precisely fixed relative positions. Both sidewalls (110F) and layers (200a, 200e), which may be made from any of a variety of materials, may support active and inactive electronic, optical, and micro-electromechanical elements. The invention may be applied to optical switching and provides accurate alignment of optical elements through relatively precise design and manufacturing of components of the apparatus rather than by accurate positioning of individual elements. Precisely manufactured positioning elements are provided on the sidewalls (110F) for positioning layers, which are fixed thereto. The apparatus is also suitable for containing fluids between layers(200a, 200e) that may be required for their optical properties.
PCT/IL2002/000842 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing WO2003036672A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002351157A AU2002351157A1 (en) 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33044001P 2001-10-22 2001-10-22
US60/330,440 2001-10-22

Publications (2)

Publication Number Publication Date
WO2003036672A2 WO2003036672A2 (en) 2003-05-01
WO2003036672A3 true WO2003036672A3 (en) 2004-03-18

Family

ID=23289791

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2002/000842 WO2003036672A2 (en) 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing

Country Status (2)

Country Link
AU (1) AU2002351157A1 (en)
WO (1) WO2003036672A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG139568A1 (en) 2006-07-13 2008-02-29 Avago Technologies General Ip Remote control receiver device and ambient light photosensor device incoporated into a single composite assembly
SG139569A1 (en) 2006-07-13 2008-02-29 Avago Technologies General Ip A composite assembly that incorporate multiple devices that use different wavelengths of light and method for making same
US10815121B2 (en) 2016-07-12 2020-10-27 Hewlett-Packard Development Company, L.P. Composite wafers
US10290574B2 (en) 2017-01-18 2019-05-14 Globalfoundries Inc. Embedded metal-insulator-metal (MIM) decoupling capacitor in monolitic three-dimensional (3D) integrated circuit (IC) structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6059001A (en) * 1994-04-15 2000-05-09 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for manufacturing microtubes with axially variable geometries
US6499006B1 (en) * 1999-07-14 2002-12-24 Wireless Valley Communications, Inc. System for the three-dimensional display of wireless communication system performance
US6535663B1 (en) * 1999-07-20 2003-03-18 Memlink Ltd. Microelectromechanical device with moving element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6059001A (en) * 1994-04-15 2000-05-09 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for manufacturing microtubes with axially variable geometries
US6499006B1 (en) * 1999-07-14 2002-12-24 Wireless Valley Communications, Inc. System for the three-dimensional display of wireless communication system performance
US6535663B1 (en) * 1999-07-20 2003-03-18 Memlink Ltd. Microelectromechanical device with moving element

Also Published As

Publication number Publication date
WO2003036672A2 (en) 2003-05-01
AU2002351157A1 (en) 2003-05-06

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