AU2002351157A1 - A multi-layer 3d device and method of manufacturing - Google Patents

A multi-layer 3d device and method of manufacturing

Info

Publication number
AU2002351157A1
AU2002351157A1 AU2002351157A AU2002351157A AU2002351157A1 AU 2002351157 A1 AU2002351157 A1 AU 2002351157A1 AU 2002351157 A AU2002351157 A AU 2002351157A AU 2002351157 A AU2002351157 A AU 2002351157A AU 2002351157 A1 AU2002351157 A1 AU 2002351157A1
Authority
AU
Australia
Prior art keywords
manufacturing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002351157A
Inventor
Igal Chertkow
David Kin
Slava Krylov
Moshe Medina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memlink Ltd
Original Assignee
Memlink Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd filed Critical Memlink Ltd
Publication of AU2002351157A1 publication Critical patent/AU2002351157A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2002351157A 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing Abandoned AU2002351157A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33044001P 2001-10-22 2001-10-22
US60/330,440 2001-10-22
PCT/IL2002/000842 WO2003036672A2 (en) 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing

Publications (1)

Publication Number Publication Date
AU2002351157A1 true AU2002351157A1 (en) 2003-05-06

Family

ID=23289791

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002351157A Abandoned AU2002351157A1 (en) 2001-10-22 2002-10-22 A multi-layer 3d device and method of manufacturing

Country Status (2)

Country Link
AU (1) AU2002351157A1 (en)
WO (1) WO2003036672A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG139569A1 (en) 2006-07-13 2008-02-29 Avago Technologies General Ip A composite assembly that incorporate multiple devices that use different wavelengths of light and method for making same
SG139568A1 (en) 2006-07-13 2008-02-29 Avago Technologies General Ip Remote control receiver device and ambient light photosensor device incoporated into a single composite assembly
US10815121B2 (en) 2016-07-12 2020-10-27 Hewlett-Packard Development Company, L.P. Composite wafers
US10290574B2 (en) 2017-01-18 2019-05-14 Globalfoundries Inc. Embedded metal-insulator-metal (MIM) decoupling capacitor in monolitic three-dimensional (3D) integrated circuit (IC) structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6059001A (en) * 1994-04-15 2000-05-09 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for manufacturing microtubes with axially variable geometries
US6499006B1 (en) * 1999-07-14 2002-12-24 Wireless Valley Communications, Inc. System for the three-dimensional display of wireless communication system performance
US6535663B1 (en) * 1999-07-20 2003-03-18 Memlink Ltd. Microelectromechanical device with moving element

Also Published As

Publication number Publication date
WO2003036672A2 (en) 2003-05-01
WO2003036672A3 (en) 2004-03-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase