WO2003034477A1

WO2003034477A1 - Method and apparatus for chemical vapor ddeposition capable of preventing contamination and enhancing film growth rate

Info

Publication number: WO2003034477A1
Application number: PCT/KR2002/001845
Authority: WO
Inventors: Chul Soo Byun
Original assignee: Chul Soo Byun
Priority date: 2001-10-18
Filing date: 2002-10-04
Publication date: 2003-04-24
Also published as: EP1454346B1; JP4387190B2; US20030077388A1; US7156921B2; CN1572016A; US20070065599A1; JP2005506448A; US7485339B2; CN100342496C; EP1454346A4; EP1454346A1

Abstract

Disclosed relates to a method for CVD comprises steps of injecting a purge gas, which doesn't either dissolve or generate byproducts by itself, into a reaction chamber where substrates are located; and supplying a source material of vapor phase participating directly in forming a film on the substrates to an inside of the reaction chamber, thus forming a protective curtain in the inside of the reaction chamber by a mutual diffusion-suppressing action between the purge gas and source material. Besides, the invention provides an apparatus for CVD including a susceptor located in a reaction chamber producing a vacuum, on which substrates are placed and a film deposition process is made, the apparatus comprising: a reactive gas confining means, established over the susceptor, having at least a source material supply port through which a source material is supplied and a plurality of openings perforated on a surface thereof; a purge gas supply port through which a purge gas is fed into an outside of the reactive gas confining means; and an exhaust port for discharging exhaust gasses generated in the reaction chamber.

Description

METHOD AND APPARATUS FOR CHEMICAL VAPOR DEPOSITION CAPABLE OF PREVENTING CONTAMINATION AND ENHANCING FILM GRWOTH RATE

Technical Field

The present invention relates in general to a method and apparatus for

chemical vapor deposition (CVD), and more particularly to a method and apparatus

for CVD that prevents contamination and enhancing film growth rate by directing a

reactive gas for forming a film to the midst of a reaction chamber, and concentrating

the reactive gas diffused over a susceptor in the chamber to prevent the reactive gas

from being touching components of the reaction chamber.

Background Art

Chemical vapor deposition (CVD) is a thin film deposition process for forming

solid material over the surface of a substrate using a reactant (usually in the form of

gas, i.e., a reactive gas). As depicted in Fig. 1 , a conventional apparatus for CVD

comprises in general a reaction chamber 3 producing a vacuum, an inlet 7 for

supplying the reactive gas to the chamber 3, a heating means for chemically reacting

the reactive gas supplied, outlets 6 for discharging exhaust gas, and a susceptor 5,

located in the midst of the chamber 3, on which a substrate is placed and the

deposition occurs. When a given composition of vapor phase, including a main

source material that participates directly in forming films and an auxiliary source material for carrying, vaporizing or diluting the main source material, is injected into

the vacuum chamber 3, the composition is diffused instantly in all directions, such

that the density of the reactive gas may have finite value at all over the inside of the

reaction chamber. Especially, a portion of the composition in the vicinity of the

susceptor is excited by hot temperature of the susceptor to form films on the

substrate.

The conventional CVD apparatus is mainly used for making thin films less

than 3μm in thickness due to a low growth rate. To form a thick film more than 3μm in

thickness, it is necessary to increase the density of the reactive gas in the chamber

considerably. However, the reactive gas injected into the chamber 3 generates

undesired films or powders on the reaction chamber components such as walls,

reactive gas distributing showerheads, substrate heating devices, inspection

windows, etc. Moreover, the undesired films and/or powders formed on the reaction

chamber components are broken to be small particles by repeated thermal

expansion/contraction and/or lattice parameter mismatch between the reaction

chamber components, thus contaminating the thin films while manufacturing. Here, if

the number of the contaminant particles in the chamber 3 is increased, the reliability

of the manufacturing process is deteriorated seriously. For example, in case of

making very large scale integration (VLSI), the contaminant particles result in serious

pattern inferiority such as circuit short.

Meanwhile, to enhance film growth rates in the conventional CVD system, it is necessary to increase the density of the reactive gas in the vicinity of the susceptor

by adding the reactive gas to all space of the chamber 3 in practice, which requires

the amount of the reactive gas excessively, thus deteriorating the economic

efficiency.

To prevent contamination and undesired deposits in the reaction chamber 3, it

may be considered to regulate the chamber temperature appropriately. However, the

range of the temperature regulatable is very narrow, and furthermore, if the reactive

gas is composed of several source materials, the range of temperature to regulate

doesn't exist actually. Consequently, it is impossible to prevent generation of

contaminant particles by regulating the reaction chamber temperature.

Besides, in the conventional CVD system, the temperature difference

between the inner wall of the chamber 3 and the susceptor 5 causes a natural

convection, which makes it difficult to maintain the diffusion of the reactive gas

uniformly onto the substrates, thus deteriorating the reliability of the films formed.

Moreover, the natural convection makes the contaminant particles generated

continue to re-circulate in the chamber, which aggravates the problem of the

contamination.

Accordingly, to manufacture a thick film more than 3μm in thickness or VLSI

circuits rapidly and economically, it is required to provide an improved method and

apparatus for CVD that can prevent contamination, even when highly concentrated

reactive gas is injected into the reaction chamber, and increase the density of the reactive gas in the vicinity of the susceptor in the reaction chamber considerably

without raising the amount of the reactive gas supplied.

Following two conventional methods relate to the methods for increasing the

density of the reactive gas in the vicinity of the susceptor in the chamber 3, and

preventing generation of contaminant particles, respectively, which are considered

as prior arts of the present invention.

First, as depicted in Fig. 2, U.S. Patent No. 5,851 ,589 describes a CVD

apparatus including a first gas, containing a reactive gas, fed in parallel to the

surface of the substrate 5 through a pipe 2, and a second gas, containing a purge

gas (non-reactive-gas), blown perpendicularly towards the surface of the substrate 5

through a injecting plate 1 to stabilize and make laminar flowing state of the first gas.

Next, referring to Fig. 3, U.S. Patent No. 6,301 ,434 discloses a dual gas manifold

providing purge gas through a top showerhead 6 to prevent deposits on the window

8 and providing reactive gas through a lower showerhead 7 to deposit films on the

substrate 5. The prior arts described above positively employed the control of purge

gas to relax the conventional contamination problem. However, it seems that

relaxation of the contamination is done only at the limited portion of the whole

reaction chamber in both prior arts cited.

In Fig. 2, there exists an unavoidable re-circulation zone near the leading

edge of the substrate, and it is difficult to suppress the diffusion of the reactive gas to

the chamber wall, which deteriorates the effectiveness of the reference system. Moreover, the external control of purge gas flow rate may need much trial to make

the reactive gas flow stabilized, since the laminar flow zone of the reactive gas is

very narrow while the purge gas suppresses the narrow zone overall perpendicularly,

thereby involving the latent instability of the flow. In Fig. 3, although the purge gas

control system may be effective in preventing deposits on the window of the lamp

system, it is not sure whether the reference apparatus could prevent particles being

formed on the surface of the reaction chamber components such as chamber walls,

especially around the areas far away from the purge gas showerhead. This problem

would become serious when long process time and/or high growth rate is required.

Accordingly, the present invention is invented to provide a method and apparatus for chemical vapor deposition, which eliminates the drawbacks of the above-mentioned prior art. That is, the method and apparatus for CVD can form efficiently thick films more than 3μm in thickness of high quality with excellent reproducibility, uniformity, controllability, and high growth rate using a protective curtain formed by a mutual diffusion-suppressing action between the purge gas and reactive gas.

Disclosure of Invention

Accordingly, it is an object of the present invention to provide a method for

CVD comprising steps of injecting a purge gas, which doesn't either dissolve or

generate byproducts by itself, into a reaction chamber where substrates are placed

introducing the purge gas into the inside of the reactive gas confining means having plural openings; and supplying a source material of vapor phase participating directly

in forming a film on the substrates to an inside of the reaction chamber, thus forming

a protective curtain in the inside of the reaction chamber by a mutual diffusion-

suppressing action between the purge gas and source material. According to the

method for CVD of the invention described above, it is possible to increase the

density of source material substantially only in the vicinity of the substrates and

enhance film growth rate remarkably.

It is a further object of the present invention to provide a method for CVD

comprising steps of: establishing a reactive gas confining means, having a plurality

of openings, in a reaction chamber; injecting a purge gas, which doesn't either

dissolve or generate byproducts by itself, into an outside of the reactive gas

confining means; and supplying a source material of vapor phase participating

directly in forming a film to an inside of the reactive gas confining means, thus

dividing an inside of the reaction chamber into a first region where a density of the

source material is high and a second region where the density of the source material

is extremely low.

Another object of the present invention is to provide the method for CVD

described above, wherein the reactive gas confining means has a plurality of

openings through which the purge is introduced to the inside of the reactive gas

confining means, thus preventing the source material from diffusing to the outside of

the reactive gas confining means, and forming a protective curtain that prevents the source material from touching the reactive gas confining means.

An additional object of the present invention is to provide the method for CVD

described above, wherein an amount of the purge gas injected to the outside of the

reactive gas confining means is set much larger than that of the source material

supplied to the inside of the reactive gas confining means to direct the protective

curtain of purge gas from the outside to the inside of the reactive gas confining

means, thus preventing the source material from touching the reactive gas confining

means.

Yet another object of the present invention is to provide an apparatus for CVD,

including a susceptor located in a reaction chamber producing a vacuum, on which

substrates are placed and a film deposition process is made, the apparatus

comprising: a reactive gas confining means, established over the susceptor, having

at least a source material supply port through which a source material is supplied

and a plurality of openings perforated on a surface thereof; a purge gas supply port

through which a purge gas is fed into an outside of the reactive gas confining means;

and an exhaust port for discharging exhaust gasses generated in the reaction

chamber.

Still another object of the present invention is to provide an apparatus for CVD

including a boat, established in a reaction chamber in a horizontal direction, on which

a plurality of wafers are placed, the apparatus comprising: a reactive gas confining

means, provided in a horizontal direction to envelop the boat, having a plurality of openings perforated on a surface thereof, a source material supply means on one

end thereof and an exhaust port for discharging byproducts on the other end thereof,

thus forming a protective curtain in an inside of the reaction chamber by a mutual

diffusion-suppressing action between a purge gas injected to an outside of the

reactive gas confining means and a source material supplied to an inside of the

reactive gas confining means.

Brief Description of Drawings

The accompanying drawings, which are included to provide a further

understanding of the invention and are incorporated in and constitute a part of this

specification, illustrate embodiments of the invention and together with the

description serve to explain the principles of the invention:

In the drawings:

Figs. 1 , 2 and 3 are schematic views showing various types of conventional

CVD apparatus;

Fig. 4 is a conceptional view showing a reaction chamber where a reactive

gas for depositing films is filled up;

Fig. 5 is a conceptional view showing a reaction chamber where a purge gas

is filled up;

Fig. 6 is a conceptional view depicting the status that the reactive gas is

confined in the midst of the chamber where a purge gas is filled up; Fig. 7 is a partially cut perspective view illustrating a basic concept of a

reaction chamber of a CVD apparatus in accordance with a preferred embodiment of

the present invention;

Fig. 8 is a perspective view showing an example of a reactive gas confining

means in accordance with the invention;

Figs. 9A, 9B and 9C shows various types of reactive gas supply port formed

on the top of the reactive gas confining means in accordance with the invention;

Fig. 10 shows a swirl phenomenon of the reactive gas injected through the

inclined reactive gas supply ports depicted in Fig. 8C in accordance with another

embodiment of the invention;

Figs. 11 and 12 depict another examples of the reactive gas confining means

in accordance with the invention;

Figs. 13, 14, 15 and 16 are schematic sectional views showing various types

of the reaction chamber where the reactive gas confining means is provided in

accordance with the present invention;

Fig. 17 is a graph showing variations of Tio₂ growth rate based on the heights

of the susceptor in the reaction chamber in accordance with the invention;

Fig. 18 shows a drift velocity vector of a mixed gas composed of the reactive

gas and the purge gas in the CVD apparatus in accordance with the invention;

Fig. 19 shows how the density of the reactive gas is distributed in the CVD

apparatus in accordance with the invention; Fig. 20 is a graph illustrating variations of TiO₂ growth rate based on the purge

gas flow rates in accordance with the invention;

Fig. 21 is a graph depicting variations of TiO₂ growth rate obtained by using a

conventional showerhead type CVD apparatus and the CVD apparatus of the

present invention;

Figs. 22 and 23 show variations of TiO₂ growth rate based on the vacuum

pressures in the reaction chamber in accordance with the invention

Fig. 24 illustrates variations of TiO₂ growth rate based on the TIP flow rates in

accordance with the invention;

Fig. 25 is a cross-sectional electron microscope view of a TiO₂ film formed on

a bare silicon wafer in accordance with the invention;

Fig. 26 is a cross-sectional electron microscope view of a PZT/Ni/ TiO₂+ZrO₂

film on a Si₃N₄ layer in accordance with the invention;

Fig. 27 is a cross-sectional electron microscope view of a PZT film grown on a

bare silicon wafer in accordance with the invention; and

Fig. 28 is a graph showing variations of TiO₂ growth rate based on the heights

of the susceptor in the reaction chamber according to another embodiment of the

reactive gas confining means depicted in Fig. 7 of the present invention.

Best Mode For Carrying Out The Invention

Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

Referring to Figs. 4 to 6, there are provided a purge gas supply port 27

through which a purge gas is fed into a reaction chamber 3, a reactive gas supply

port 7 through which a reactive gas is supplied into the chamber 3, a susceptor 5 for

supporting and heating the substrate and an exhaust port 28 for discharging

byproducts in the chamber 3. When a predetermined reactive gas is injected into the

chamber 3 of low pressure, the reactive gas is diffused instantly in all directions;

likewise, the purge gas fed into the chamber 3 is diffused instantly in all direction.

However, as depicted in Fig. 6, when the reactive gas is supplied into the midst of

the chamber 3 where the purge gas is filled up, there is formed a protective curtain B

between the reactive gas and purge gas filled up due to a mutual diffusion-

suppressing action, thus dividing the interior space of the chamber 3 into two

portions A and C.

The purge gas doesn't either dissolve or generate byproducts by itself in the

chamber 3. For example, the purge gas includes Ar, He, H₂, N₂ etc. as a carrier gas,

Ar, N₂ as a dilution gas, and O₂ which doesn't generate byproducts by itself. The

purge gas of small molecular weight, which diffuses instantly, is relatively little

influenced by the act of vacuum pumping.

Meanwhile, the reactive gas is a source material of vapor phase that

participates directly in forming the film; a mixture of vapor phase containing a main

source material and an auxiliary source material for carrying, vaporizing or diluting the main source material; or a pure main source material of vapor phase without

carrier gas for carrying the main source material. In this regard, the Korean Patent

No. 225592 teaches a method for vaporizing and delivering such reactive gas

without the aid of carrier gas in a metal-organic chemical vapor deposition process

(MOCVD).

According to the present invention, when the purge gas and the reactive gas

are supplied separately into the reaction chamber 3, the reactive gas is highly

concentrated at a region proximate to the susceptor 5 located in the midst of the

chamber 3 (portion_A), whereas the purge gas gathers in the vicinity of the inner wall

of the chamber 3 (portion C). That is, when the reactive gas is fed into the midst of

the chamber 3 where the purge gas is filled up in advance, there is formed a

protective curtain B, which divides the interior space of the chamber 3 into two

portions A and C, having different density distributions with each other. Accordingly, it

is possible to increase the film growth rate with the increase of the reactive gas

density, and to prevent generation of contaminant particles on the inner wall of the

chamber 3, since the reactive gas doesn't exist over the inner wall of the chamber 3.

However, a minute temperature difference between the inner wall of the chamber 3

and the susceptor 5 may cause a natural convection, which makes it very difficult to

maintain the protective curtain B stably. That is, the protective curtain B is ready to

get broken by the natural convection or variations of the amount of the two gasses

supplied. Consequently, it is hard to adopt the method using the unstable protective curtain B to the chemical vapor deposition that needs precision, uniformity and high

growth rate.

To overcome the problem described above, the present invention provides a

reactive gas confining means 1 as an auxiliary means for keeping the protective

curtain B stably. As depicted in Fig. 7, the reactive gas confining means 1 is

established in the midst of the chamber 3. The means 1 has a proper volume and

type capable of surrounding the protective curtain B therein. Reactive gas supply

ports 7 are provided on the top of the means 1 , a showerhead 9 through which the

purge gas passes into the chamber 3 is established over the means 1 , and a

susceptor 5 on which substrates are placed is provided within the means 1. Besides,

an exhaust port 18 for discharging byproducts is located between the susceptor 5

and the means 1.

The reactive gas confining means 1 , established a little bit outside based on

the protective curtain to be formed desirably between the purge gas and the reactive

gas, prevents the protective curtain from being broken by complementing the mutual

diffusion-suppressing action between the two gasses, thus protecting and keeping

the protective curtain stably. That is, when the purge gas is fed into the chamber 3

through a purge gas supply port, not depicted, the purge gas is readily diffused to

the inside of the means 1 through a plurality of openings 13 perforated on the

surface of the means 1. Next, when the reactive gas is supplied to the inside of the

means 1 through the reactive supply ports 7, the reactive gas concentrated within the means 1 presses the purge gas outwardly, thus forming a predetermined

protective curtain. Contrarily, a portion of the purge gas is forced to diffuse to the

inside of the means 1 through the openings 13, thus strengthening the protective

curtain to be kept stably, regardless of the natural convection or variations of the

purge gas flow.

Hereinafter, various embodiments of the reactive gas confining means 1 in

accordance with the invention will be described in detail. The means 1 , depicted in

Fig. 8, is designed most similar to the shape of the protective curtain formed

between the purge gas and the reactive gas, and to envelop the susceptor 5

thoroughly. That is, the means 1 comprising a mixing part 21 , a diffusion part 23 and

a deposition part 25 in a body flattens the density contour of the reactive gas in

parallel to the upper side of the substrates, thus depositing films uniformly in

thickness. The means 1 is made of heat and corrosion resistant materials such as

stainless steel, ceramic, quartz, or reinforced glass by various methods such as

spinning, casting, or molding based on the materials used. The openings 13 are

made appropriately by drilling, casting or molding based on the materials used. The

size and interval of the openings 13 are designed properly to make a protective

curtain, a unique effect of the reactive gas confining means 1. Here, the protective

curtain forces the reactive gas fed to the inside of the means 1 not to diffuse

outwardly. The size and interval of the openings 13 are suitably regulated to 3mm in

diameter and at intervals of 20mm, for example, however, not limited since they can be varied according to various factors such as flow rates of the two gasses, density

of the reactive gas and overall size of the apparatus used.

Meanwhile, returning to Fig. 7, the showerhead 9 has a plurality of

perforations 19 for supporting the protective curtain, of which the intervals can be

varied also. For example, the intervals of the perforations 19 in the midst of the

showerhead 9 are set wide, whereas, those around the edge of the showerhead 9

are narrow, thus creating a difference in density of the reactive gas within the

reaction chamber 3. As a result, the purge gas flow is directed toward the inside of

the reactive gas confining means 1. Actually, however, in case that the means 1 is

installed in the chamber 3, the same effect can be obtained also by the mere work of

the purge gas supply port 27, depicted in Fig. 6, instead of the showerhead 9.

Repeatedly, referring to Fig. 8, the mixing part 21 having a relatively small

diameter mixes the main source material and the auxiliary source material rapidly in

the narrow space thereof. Besides, the purge gas diffused through the openings 13

formed around the surface of the mixing part 21 helps the source materials to be

mixed in the midst of the mixing part 21 , while preventing generation of contaminant

particles on the inner wall of the mixing part 21.

The reactive gas supply ports 7 established on the top of the mixing part 21

can be configured to have various types. For example, a single perpendicular

conduit as a reactive gas supply port 7, shown in Fig. 9A, can be adopted when the

main and auxiliary source materials mixed in advance or a pure main source material of vapor phase without carrier gas is injected. Besides, as shown in Figs. 9B

and 9C, a plurality of perpendicular or inclined conduits, as another types of the

reactive gas supply port 7, can be used when various kinds of the source material,

mixed or unmixed, are injected directly. Here, the source material injected through

the inclined ports 7 of Fig. 9C induces a swirl phenomenon (an effect of cyclone),

which lengthens traveling path of the source materials supplied, thus mixing the

source materials satisfactorily. Accordingly, when it is required to establish a long

path through which the source materials travel, or when the axial length of the

reaction chamber 3 is short, it is desired to feed the reactive gas into the chamber 3

in the inclined direction, as shown in Fig. 9C. The reactive gas supply port 7 having

an internal diameter less than 10mm is formed with a tubular tube made of stainless

steel, ceramic, Teflon, etc. The reactive gas supply port 7 is connected to bubbler,

vaporizer, etc., not depicted, to supply the reactive gas to the inside of the means 1.

The diffusion part 23, of which diameter becomes wider downward, diffuses

high concentrated reactive gas mixed in the mixing part 21 in an inclined direction,

thus flattening the density contour. Afterwards, the high density of the reactive gas

gets decreased while it is diffused in the inclined direction through the diffusion part

23 that grows voluminous downward. Here, the diverging angle and the height of the

diffusion part 23 are closely related with the flow rate of the reactive gas. For

example, if the diffusion process occurs rapidly, the diverging angle of the diffusion

part 23 may get increased and the height be lowered. The longitudinal deposition part 25 is a region where the flattened density

contour of the reactive gas meets parallel to an upper side 15 of the susceptor 5.

The upper side 15 of the susceptor 5, on which film is formed substantially, should

be located to a region where the density of the reactive gas is set adequate and the

density contour is sufficiently flattened. Accordingly, the longitudinal deposition part

25 is designed to have an ample height enough to surround the upper side 15 of the

susceptor 5. Besides, to discharge exhaust gas smoothly, it is also desired to

increase the height of the deposition part 25 as much as possible. The plural

openings 13 perforated on the surface of the means 1 are configured to induce a

portion of the purge gas distributed to the outside of the reactive gas confining

means 1 to diffuse in a normal direction to the surface of the means 1. As a result,

the reactive gas is impeded to escape outside from the means 1 by means of the

protective curtain of purge gas. Besides, the highly concentrated reactive gas apt to

diffuse outward also prevents the purge gas from permeating to the inside of the

means 1 over a predetermined depth. Accordingly, there is formed a protective

curtain in the inside of the reaction chamber 3 due to the mutual diffusion-

suppressing action between the two gasses. As a result, it is possible to confine the

reactive gas to the inside of the means 1 , without touching the inner wall of the

means 1 , by regulating the amounts and flow rates of the two gasses properly.

Consequently, in the CVD apparatus in accordance with the present invention, there

are not generated contaminant particles on the inner wall of the chamber 3 and the inner and outer walls of the means 1 as well.

Meanwhile, the reactive gas confining means 1 according to the invention is

not limited to the form depicted in Figs. 7 and 8, but can be designed to various

forms based on the characteristics of the reactive gas and the conditions of the

chamber 3. For example, the means 1 shown in Fig. 11 has no mixing part 21 , and

the diverging angle of the diffusion part 23 thereof is increased sharply. This type of

the means 1 can be adopted when the diffusion rate of the reactive gas is very high,

and advantageously employed when using a large size substrate. The other

components of the means 1 of Fig. 11 have the same functions with that of Fig. 8.

The means 1 depicted in Fig. 12 includes no diffusion part 23 as well as the mixing

part 21 , but only the deposition part 25 having a predetermined height. In this case,

the protective curtain can be formed through the openings 13 in the same manner

described above, however, the reactive gas fed to the inside of the means 1 doesn't

diffuse readily, thus deteriorating the horizontal uniformity of the reactive gas density.

Accordingly, it is desired to establish the reactive gas supply port(s) 7 as

shown in Figs. 13 and 14. The reactive gas supply ports 7 in Fig. 13 penetrate the

means 1 through a plurality of reactive gas supply paths 37 provided on the top of

the means 1 at regular intervals to supply the reactive gas to the inside of the means

1 uniformly. Meanwhile, the reactive gas supply port 7 in Fig. 14 is connected with a

showerhead 29 in the means 1 to spread the reactive gas wide and uniformly.

With reference to Fig. 15, there is shown another type of the reactive gas confining means 1 in accordance with the present invention having a dome-like

shape of low height, which excludes the mixing part, diffusion part and deposition

part. That is, when the reactive gas and purge gas are fed separately into the midst

of the reaction chamber 3 where the purge gas is filled up, there is formed a

protective curtain over the susceptor 5. Here, the dome-like reactive gas confining

means 1 prevents the protective curtain from being broken. Besides, if the

showerhead 9 is further provided over the means 1 , it is much helpful to create a

more stable protective curtain.

Next, referring to Fig. 16, the reactive gas confining means 1 in accordance

with the present invention is applied to a low-pressure chemical vapor deposition

(LPCVD), where a plurality of wafers 47 stands erect on a boat 45 established in a

horizontal direction. Here, the cylindrical means 1 provided in the same direction with

the boat 45 has a plurality of openings 13 perforated on the surface thereof, a

reaction gas supply port on one end thereof and an exhaust port 48 for discharging

byproducts on the other end thereof. When the purge gas is fed into the outside of

the means 1 and the reactive gas is supplied to the inside of the means 1 , the purge

gas is introduced to the inside of the means 1 through the openings, thus creating

the protective curtain between the purge gas and reactive gas in the means 1.

Accordingly, the density of the reactive gas concentrated around the boat 45 on

which the plural wafers 47 are placed is increased. However, there exists no reactive

gas on the inner wall the reaction chamber 3, and the inner and outer surfaces of the means 1 as well, thus preventing generation of contaminant particles.

That is, according to the CVD apparatus using the reactive gas confining

means 1 and the protective curtain of purge gas of the present invention, the density

of the reactive gas concentrated in the midst of the reaction chamber 3 is increased

more than several or several tens of times compared with that in the other region by

supplying the purge gas into the outside of the means 1 while feeding the reactive

gas to the inside of the means 1 , separately.

In addition to this, neither the local re-circulation caused by the inconsistency

of chamber geometry nor the natural convection caused by temperature difference

between the relatively cold wall of the chamber 3 and the hot susceptor 5 seems to

occur easily inside the means 1 , since the purge gas flow has a direction normal to

the surface of the means 1 and exerts a stabilizing effect as followings. The purge

gas which was directed from the outside to the inside of the means 1 confines the

reactive gas into the means 1 and makes laminar flowing state of the reactive gas in

the vicinity of the substrate. This effect can be regulated by the purge gas flow rate

that would be, for example, several times as large as the reactive gas flow rate.

Consequently, the present invention is disclosed to increase the film growth

rate and the uniformity of the film thickness remarkably, and minimize the generation

of the contaminant particles by designing the geometry of the reaction chamber 3

optimally including the type of reactive gas confining means 1 , the location of

susceptor, etc., and by controlling the amount of purge gas flow, and the mixing, diffusion and exhaust of source materials properly.

Hereinafter, various embodiments of the method and apparatus for CVD

capable of preventing contamination and enhancing film growth rate according to the

present invention will be described in following examples.

Example 1 (Configuration of CVD apparatus)

In a preferred embodiment in accordance with the present invention, as

shown in Fig. 7, the reactive gas confining means 1 having a diameter of 300mm

and a height of 445mm was provided to surround the susceptor 5, having a diameter

of 240mm and a height of 80mm, positioned in the midst of the reaction chamber 3.

The means 1 employed has a funnel-like shape through which the purge gas is

diffused to the inside of the means 1. The reactive gas supply ports 7 were equipped

on the top of the means 1 and the purge gas supply port 9 provided over the means

^*\ ,

Example 2 (TiO₂ film deposition)

TiO₂ film deposition was made using the CVD apparatus described in

Example 1. Following equation denotes TiO₂ film deposition by TIP pyrolysis.

Ti(OC₃H₇)₄→ TiO₂(s)+ 4C₃H₆ + 2H₂0

Titanium iso-propoxide (TIP, Ti(OC₃H )₄) was employed as a precursor for

TiO₂ film deposition. The vapor pressure of TIP was 2Torr at 70 °C . The heating temperature of TIP was 85 ^°C, and the reaction chamber pressure was 133Pa. Pure

TIP gas was supplied to the inside of the means 1 at a flow rate of 1x10^"6kg/sec without the aid of carrier gas, whereas Argon as purge gas was injected into the outside of the means 1 at a flow rate of 10x10^"6kg/sec. At appropriately low heating

temperatures, i.e., at the range from 70^°C to 100 "C , TIP can be easily vaporized but

hardly decomposed in the TIP container. Pure vapor of TIP can be delivered without the aid of carrier gas into the chamber 3 where the chamber pressure is much lower than the TIP vapor pressure. Here, there is an advantage that facilitates quantitative analysis of the metal organic compounds used in the MOCVD process. To simulate the deposition behavior, a computational fluid dynamics program, Fluent, was utilized. Herein, Lennard Jones parameter was introduced for convenience since the kinetic theory can easily calculate the theoretical physical properties of TIP such as

diffusion coefficient, thermal conductivity, specific heat etc. L-J characteristic length

(Angstrom) and energy parameter (K), which are the values of Lennard Jones parameters of TIP and other gases, can be referenced elsewhere.

Example 3

As shown in Fig. 17, Ti0₂ film deposition was made at various heights of the susceptor from the bottom of the means 1 with the CVD apparatus and conditions described in Examples l and 2, respectively, while keeping the uniformity of the

deposition within +5% in the range less than 100mm in radial position. It was

understood that the reason why the film growth rate beyond the radial position 100mm, i.e., the edge portion of the upper surface of the susceptor, is increased steeply is because the velocity vector is abruptly changed in this vicinity.

Example 4 Fig. 18 depicts the drift velocity vector of the mixed gas composed of the

reactive gas and purge gas. The maximum velocity was about 1.5m/sec. It can be

seen that there was formed the protective curtain that confines the highly

concentrated reactive gas in the midst of the reaction chamber 3 from the outside to

inside of the means 1. Besides, Fig. 19 illustrates how the density (mass fraction) of

the TIP is distributed in the CVD apparatus in accordance with the invention. The

maximum and minimum concentrations are 100% and 0%, respectively, and the

contour is drawn at the interval of 1%. It can be noted that the purge gas fed to the

inside of the means 1 doesn't so much decrease the density of the TIP injected from

the reactive gas supply ports 7 at the mixing part 21. Moreover, due to the effect of

the protective curtain having a normal direction from the outside to the inside of the

means 1 , the density of the TIP adjacent to the inner wall of the chamber 3 is

detected extremely low, such that there were not generated unwanted contaminant

particles on the inner wall of the chamber 3. In addition to this, the net velocity of the

TIP, i.e., the vector sum of the drift velocity of the mixed gas and the TIP diffusion

velocity, can be selected to have a normal direction from the outside to the inside of

the means 1. That is, since the range of the purge gas flow rate to be selected is very wide, for example, several to several tens times as large as the TIP flow rate,

while keeping the uniformity of the TiO₂ growth within ±5% in practice, there is no

possibility that the net velocity of the TIP exists eventually in the direction from the

inside to the outside of the means 1.

Example 5

Fig. 20 shows variations of Tio₂ growth rate based on the purge gas flow rates,

obtained when supplying the pure TIP vapor not diluted to the inside of the means 1

of the CVD apparatus described in Example 1. It was noted that the protective

curtain, which confines the TIP flow within the means 1 , becomes thicker accordingly

as the purge gas flow is increased. That is, at the purge gas flow rate of 20x10^"

⁶kg/sec, the TiO₂ growth rate was the highest and relatively uniform in the radial

direction of the susceptor. However, if the purge gas flow rate is more than 300x10^"

⁶kg/sec, the TIP vapor may be over-concentrated in the midst of the chamber 3. As a

result, the TiO₂ growth rate in the midst of the 200mm Si wafer on the substrate, for

example, was much higher than that in the edge portion of the wafer.

Example 6

Next, Fig. 21 depicts variations of TiO₂ growth rate obtained by using a

conventional showerhead type CVD apparatus and the CVD apparatus described in

Example 1. Here, input mass fraction of TIP is defined as the ratio of TIP input mass flow rate to total input mass flow rate. It was found that at all input mass fractions of

TIP, the present invention (■ •♦) provides much higher TiO₂ growth rate than that

of conventional method (DOO). For example, if the input mass fraction of TIP is

10%, the TiO₂ growth rate of the present invention (•) is more than 30% higher than

that of the conventional method (O). If the input mass fraction of TIP is 1 %, the TiO₂

growth rate of the present invention (♦) is more than 300% higher than that of the

conventional method (O).

Example 7

As depicted in Figs. 22 and 23, showing variations of TiO₂ growth rate based

on vacuum pressures in the chamber 3, it was found that the TiO₂ growth rate

gradually increases accordingly as the chamber pressure rises, and reaches a

maximum value at a pressure of 133Pa, then slowly decreases at pressures more

than 133Pa. Besides, it was noted that the TiO₂ film growth rate is not sensitively

influenced by the chamber pressure within a wide range around 133Pa, which allows

plenty of scope for the change of vacuum pressure in mass production.

Example 8

As shown in Fig. 24, illustrating variations of TiO₂ growth rate based on the

TIP flow rates, it was noted that the growth rate of TiO₂ film increases remarkably according as the flow rate of TIP rises when using the means 1 of the invention.

Especially, when delivering the pure TIP vapor without carrier gas to the inside of the

means 1 , TiO₂ film growth rate increased in proportion as the input flow rate of TIP

rose. That is, since it is very easy to increase the input flow rate of TIP when

supplying the pure TIP vapor without carrier gas, it is desired to employ the pure TIP

vapor without carrier gas when it is necessary to ensure high growth rates.

Example 9

a bare silicon wafer using the CVD apparatus accordance with the invention. The

TiO₂ film was formed 8μm in thickness at a growth rate of 20μm/h in the chamber 3

at a pressure of 133Pa. It can be understood that the growth rate obtained in this

example is remarkably high, which shows a superiority of the present invention for

depositing thick films.

Meanwhile, Fig. 26 is a cross-sectional electron microscope view of a PZT/Ni/

TiO₂+ZrO₂ film on a Si₃N layer using the CVD apparatus in accordance with the

invention. At first, TiO₂+ZrO₂ layer was deposited on a nitride silicon wafer, where

TIP and Zirconium tert-butoxide were precursors for TiO₂ and ZrO₂ components,

respectively. Then, Ni electrode was formed on the TiO₂+ZrO₂ layer by RF sputtering.

Finally PZT layer was deposited using the present invention. Here, tetraethyl-lead

(Pb(C₂H₅) ) was adopted as a precursor for a lead component together with TIP and Zirconium tert-butoxide described above, and oxygen was used to make lead oxide

compounds which also constitute PZT. As shown in Fig. 26, the film thickness of

TiO₂+ZrO₂ grown on the Si₃N layer is about 5μm and the film thickness of PZT film

formed on a Ni electrode is about 3μm.

Example 10

Next, Fig. 27 is a cross-sectional electron microscope view of a PZT film

grown on a bare silicon wafer using the CVD apparatus in accordance with the

invention. The PZT film was formed 6μm in thickness at a growth rate of 6μm/h in

the chamber 3 at a pressure of 200Pa. It can be recognized that the morphology of

the deposited PZT film is not so planar, but the thickness of the PZT film obtained

according to the present invention is much enhanced compared with the

conventional methods described earlier, and may belong to the thickest one among

the PZT films prepared by the metal-organic chemical vapor deposition (MOCVD).

Example 11

Finally, Fig. 28 is a graph showing variations of TiO₂ growth rate based on the

heights of the susceptor in the chamber 3 according to another embodiment of the

means 1 having no mixing part depicted in Fig. 11. In this embodiment, the full height

of the means is 300mm and the other conditions are the same with that of Example

1. As shown in Fig. 28, it was noted that the film growth rates increases outstandingly, whereas, the uniformity of the film growth deteriorates more or less. That is, it

teaches that, for securing the uniformity of the film growth, it is necessary to flatten

the density contour of the source materials by increasing the length of the means 1

sufficiently. Accordingly, the axial length of the means 1 should be determined

circumspectly in terms of both the structural efficiency and the uniformity of the film

growth.

Industrial Applicability

According to the present invention described above, it is possible to increase

the density of the reactive gas using the effect of protective curtain caused by

introducing the purge gas to the inside of the means 1 for confining the reactive gas

in the midst of the reaction chamber 3 where the film growth is made, thus

enhancing the film growth rate remarkably.

Besides, according to the effect of protective curtain of the invention, it is

possible to prevent generation of contaminant particles on the inner wall of the

reaction chamber 3.

Furthermore, according to another embodiment of the invention, there is

provided a reactive gas confining means 1 , of an appropriate size and shape that

can surround the susceptor 5 in the reaction chamber 3, having the plural openings

13, perforated on the surface thereof, through which the purge gas is introduced.

With the means 1 , it is possible to prevent generation of contaminant particles on the surface of the means 1 using the effect of the protective curtain caused by the

mutual diffusion-suppressing action between the reactive gas and purge gas by

regulating the purge gas flow and the diffusion rate so as to introduce the purge gas,

fed to the outside of the means 1 , to the inside of the means 1.

Moreover, according to the reactive gas confining means 1 of the invention, it is possible to mix and diffuse the reactive gas rapidly and smoothly, and to prevent the natural convection caused by a temperature difference between the components in the reaction chamber thus enhancing the reproducibility, uniformity, controllability, and growth rate remarkably. In addition, according to the invention, it is possible to increase noticeably the concentration of the reactive gas in the midst of the reaction chamber 3 where the film growth is made, without any losses of the reactive gas, compared with the conventional CVD apparatus, and to prevent generation of contaminant particles, which may be caused by the highly concentrated reactive gas, thus efficiently forming thick films more than 3μm in thickness applied to the micro-electro mechanical system (MEMS), etc.

It will be apparent to those skilled in the art that various modifications and

variations can be made in the method and apparatus for CVD capable of preventing

contamination and enhancing film growth rate of the present invention without

departing from the spirit or scope of the invention. Thus, it is intended that the

present invention cover the modifications and variations of this invention provided

they come within the scope of the appended claims and their equivalents.

Claims

1. A method for chemical vapor deposition (CVD) comprising steps

of:

injecting a purge gas, hard to dissolve or generate byproducts by itself, into a

reaction chamber where substrates are placed; and

supplying a source material of vapor phase participating directly in forming a

film on the substrates to an inside of the reaction chamber, thus forming a protective

curtain in the inside of the reaction chamber by a mutual diffusion-suppressing action

between the purge gas and source material.

2. The method for CVD as recited in claim 1 ,

wherein the source material is a composition mixed with a main source

material that participates directly in forming the film and an auxiliary source material

for carrying, vaporizing or diluting the main source material.

3. The method for CVD as recited in claim 1 ,

wherein the source material is composed of only the main source material of

pure vapor without a carrier gas.

4. The method for CVD as recited in claim 1 ,

wherein the purge gas is composed of one of Ar, N₂, He, H₂, and O₂ gas, or a composition mixed with the gasses.

5. A method for CVD comprising steps of:

establishing a reactive gas confining means, having a plurality of openings, in

a reaction chamber;

injecting a purge gas, which doesn't either dissolve or generate byproducts by

itself, into an outside of the reactive gas confining means; and

supplying a source material of vapor phase participating directly in forming a

film to an inside of the reactive gas confining means, thus dividing an inside of the

reaction chamber into a first region where a density of the source material is high

and a second region where the density of the source material is extremely low.

6. The method for CVD as recited in claim 5,

wherein the reactive gas confining means has a plurality of openings through

which the purge gas is introduced to the inside of the reactive gas confining means,

thus preventing the source material from diffusing to the outside of the reactive gas

confining means, and forming a protective curtain that prevents the source material

from touching the reactive gas confining means.

7. The method for CVD as recited in claims 5 and 6,

wherein an amount of the purge gas injected to the outside of the reactive gas confining means is set much larger than that of the source material supplied to the

inside of the reactive gas confining means to direct the protective curtain of purge

gas from the outside to the inside of the reactive gas confining means, thus

preventing the source material from touching the reactive gas confining means.

8. An apparatus for CVD including a susceptor located in a reaction

chamber producing a vacuum, on which substrates are placed and a film deposition

process is made, the apparatus comprising:

a reactive gas confining means, established over the susceptor, having at

least a source material supply port through which a source material is supplied and a

plurality of openings perforated on a surface thereof;

a purge gas supply port through which a purge gas is fed into an outside of

the reactive gas confining means; and

an exhaust port for discharging exhaust gasses generated in the reaction

chamber.

9. The apparatus for CVD as recited in claim 8,

wherein the reactive gas confining means comprises a mixing part where the

source material supplied through the source material supply port is mixed, a

diverging diffusion part where the mixed source material diffuses in an inclined

direction and a vertical deposition part having a good length to flatten a density contour of the source material diffused through the diffusion part.

10. The apparatus for CVD as recited in claim 8,

wherein the source material supply port is a tubular conduit through which a

main source material and an auxiliary source material, mixed in advance or

separated each other, are delivered in a vertical direction to the inside of the reactive

gas confining means.

11. The apparatus for CVD as recited in claim 8,

wherein the source material supply port is a tubular conduit through which a

main source material and an auxiliary source material, mixed in advance or

separated each other, are delivered in an inclined direction to the inside of the

reactive gas confining means.

12. The apparatus for CVD as recited in claim 8,

wherein the susceptor is positioned in a midst of the reactive gas confining

means by keeping a top surface of the susceptor apart from a bottom of the reactive

gas confining means at a predetermined distance.

13. The apparatus for CVD as recited in claim 8,

wherein the exhaust port is provided between the reactive gas confining means and the susceptor.

14. The apparatus for CVD as recited in claim 8,

wherein the reactive gas confining means comprises a diverging diffusion part

through which the mixed source material diffuses in an inclined direction and a

vertical deposition part having a good length to flatten a density contour of the

source material diffused through the diffusion part.

15. The apparatus for CVD as recited in claim 8,

wherein the reactive gas confining means comprises a vertical deposition part

having a good length to flatten a density contour of the source material diffused

through the diffusion part.

16. The apparatus for CVD as recited in claim 8,

wherein the reactive gas confining means comprises a dome-like deposition

part of low height.

17. The apparatus for CVD as recited in claim 15,

wherein a showerhead or a plurality of source material supply paths is formed

at an upper portion inside the reactive gas confining means, through which the

source material is supplied to a wide range uniformly and diffused rapidly.

18. An apparatus for CVD including a boat, established in a reaction

chamber in a horizontal direction, on which a plurality of wafers are placed, the

apparatus comprising:

a reactive gas confining means, provided in a horizontal direction to envelop

the boat, having a plurality of openings perforated on a surface thereof, a source

material supply means on one end thereof and an exhaust port for discharging

byproducts on the other end thereof, thus forming a protective curtain in an inside of

the reaction chamber by a mutual diffusion-suppressing action between a purge gas

injected to an outside of the reactive gas confining means and a source material

supplied to an inside of the reactive gas confining means.