WO2003012323A1 - Gate valve with delayed retraction of counter plate - Google Patents
Gate valve with delayed retraction of counter plate Download PDFInfo
- Publication number
- WO2003012323A1 WO2003012323A1 PCT/US2002/023012 US0223012W WO03012323A1 WO 2003012323 A1 WO2003012323 A1 WO 2003012323A1 US 0223012 W US0223012 W US 0223012W WO 03012323 A1 WO03012323 A1 WO 03012323A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- seal plate
- plate
- valve
- counter plate
- grooves
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Definitions
- This invention relates to valve structures and, more particularly, to gate valve structures wherein retraction of a counter plate is delayed relative to retraction of a seal plate to permit pressure equalization and to reduce wear on seal surfaces.
- Conventional gate valve structures include a valve housing having a fluid conduit and a valve seat, a seal plate that is movable between an open position and a closed position in the fluid conduit, and an actuator mechanism for moving the seal plate between the open and closed positions.
- the seal plate engages the valve seat and seals the fluid conduit in the closed position.
- the seal plate may be moved from the closed position to a retracted position and then moved linearly to the open position.
- Gate valves are used in a wide variety of applications. Different applications may involve liquids, gases, and vacuum. Many applications require a long operating life, with frequent cycling between the open and closed positions, and low particulate generation.
- An example of such an application is in equipment for processing of semiconductor wafers. As semiconductor device geometries decrease in size and circuit densities increase, semiconductor wafers are increasingly sensitive to particulate contamination. Components within the vacuum envelope of the processing chamber, such as gate valves, are potential sources of particulate contamination.
- the failure of a gate valve may require all or part of a semiconductor fabrication line to shut down, thereby adversely affecting throughput. Accordingly, long operating life and low particulate generation are important gate valve characteristics.
- Another potential problem with gate valves relates to the shock and vibration that may occur when the valve is opened or closed.
- the shock and vibration may damage or disrupt the operation of sensitive equipment in proximity to the gate valve. It has been observed that the shock produced by the operation of prior art gate valves may jar loose the charcoal from the inside of cryogenic vacuum pumps. Accordingly, it is desirable to limit shock and vibration produced by gate valves.
- a gate valve having an linearly movable seal plate is disclosed in U.S. Patent No. 4,052,036 issued October 4, 1977 to Schertler.
- the seal plate and a counter plate are biased toward each other by leaf springs.
- the actuator carries a series of rollers which engage recesses in the seal plate and the counter plate. When the seal plate and the counter plate reach a stop position, the actuator continues to move, forcing the rollers out of the recesses and moving the seal plate and the counter plate toward the closed position.
- the seal plate engages a valve seat, and the counter plate engages a support surface.
- the counter plate provides support for the seal plate in the closed position and prevents the seal plate from being forced away from the valve seat by a pressure differential across the valve.
- the seal plate and the counter plate are retracted simultaneously. This leaves the seal plate unsupported when the seal between the seal plate and the valve seat is broken. In the presence of a pressure differential across the valve, the unsupported seal plate is forced into the rollers and the counter plate. This causes a shock which may damage sensitive components and which may loosen particles in the system.
- the elastomer ring on the seal plate may be subjected to scuffing or rubbing as the seal plate is retracted from the valve seat. Such scuffing or rubbing may produce in wear of the elastomer ring and reduce the operating life of the gate valve.
- a valve comprising a valve housing having a fluid conduit and defining a valve seat and a support surface, a seal plate, a counter plate, an actuator for moving the seal plate and the counter plate between an open position and a closed position, and a coupling mechanism operatively coupled between the seal plate, the counter plate, and the actuator.
- the seal plate is in sealed engagement with the valve seat, and the counter plate is in engagement with the support surface in the closed position.
- the coupling mechanism retracts the counter plate from the support surface subsequent to retraction of the seal plate from the valve seat as the valve is opened.
- the coupling mechanism comprises one or more seal plate grooves in the seal plate, one or more counter plate grooves in the counter plate, roller elements movably mounted in the actuator, and one or more springs for biasing the seal plate and the counter plate toward retracted positions.
- the roller elements move along the seal plate grooves and the counter plate grooves as the actuator moves toward or away from the closed position.
- the seal plate grooves and the counter plate grooves each have a shallow portion and a deep portion. Transitions between shallow portions and deep portions in the seal plate grooves are offset in a direction of actuator movement relative to transitions between shallow portions and deep portions in the counter plate grooves.
- the seal plate grooves and the counter plate grooves each have a relatively abrupt transition between the shallow portion and the deep portion.
- the seal plate grooves each have a relatively gradual transition between the shallow portion and the deep portion
- the counter plate grooves each have a relatively abrupt transition between the shallow portion and the deep portion.
- a method for operating a gate valve wherein a seal plate engages a valve seat and a counter plate engages a support surface in a closed position.
- the method comprises the steps of retracting the seal plate from the valve seat and retracting the counter plate from the support surface subsequent to retraction of the seal plate from the valve seat.
- Fig. 1 is a partial, cross-sectional side view of a first embodiment of a gate valve in accordance with the invention, shown in a closed position;
- Fig. 2 is a partial, cross-sectional side view of the valve of Fig. 1, shown in a first retracted position;
- Fig. 3 is a partial, cross-sectional side view of the valve of Fig. 1, shown in a second retracted position;
- Fig. 4 is a front view of the valve of Fig. 1;
- Fig. 5 is a front view, partly in cross section, of the seal plate and actuator of the valve of Fig. 1;
- Fig. 6 is a partial, cross-sectional side view of a second embodiment of a gate valve in accordance with the invention, shown in a closed position;
- Fig. 7 is a partial, cross-sectional side view of the valve of Fig. 6, shown in a first retracted position;
- Fig. 8 is a partial, cross-sectional side view of the valve of Fig. 6, shown in a second retracted position.
- a gate valve 10 includes a valve housing 12 having a fluid conduit 14 for passage of a gas or a liquid and a flange 15 for attachment of the valve to other system components.
- the gas pressure may be low in the case of vacuum applications of the gate valve.
- Valve housing 12 defines a valve seat 16 for engagement with a seal plate, as described below.
- Valve housing 12 also defines a support surface 18 for engagement with a counter plate, as further described below.
- Fluid conduit 14 may be generally cylindrical, square, rectangular or any other suitable shape.
- Valve seat 16 and support surface 18 may each have the form of a surface that surrounds fluid conduit 14.
- Gate valve 10 further includes a seal plate 20, a counter plate 22 and an actuator assembly 32, and may include a valve actuator 34, such as an air cylinder. In an alternate configuration, actuator 34 is replaced with a handle or other suitable device for manual operation of the gate valve.
- Actuator assembly 32 includes a shaft 40 connected at one end to valve actuator 34. The opposite end of shaft 40 is connected to an actuator element 44.
- Seal plate 20 and counter plate 22 are positioned on opposite sides of actuator element 44.
- An elastomer ring 64 is mounted in a groove in seal plate 20 for producing a vacuum-tight seal between valve seat 16 and seal plate 20 when the valve is closed.
- Counter plate 22 is in contact with support surface 18 in the closed position, as shown in Fig. 1.
- Counter plate 22 may include a vent hole 66 for rapid pressure equalization.
- a coupling mechanism 50 is disposed between actuator element 44, seal plate 20 and counter plate 22. Coupling mechanism 50 controls movement of seal plate 20 and counter plate 22 between closed and retracted positions, as described below. As described below, coupling mechanism 50 includes rollers 52, grooves in seal plate 20 and counter plate 22, and one or more springs connected between seal plate 20 and counter plate 22. Rollers 52, which may be balls, are movably mounted in openings 46 and 48 in actuator element 44.
- Coupling mechanism 50 includes at least one spring 70, which is attached at one end to seal plate 20 and is attached at the other end to counter plate 22.
- Spring 70 biases seal plate 20 and counter plate 22 toward each other. When the valve is closed, spring 70 is deformed, as shown in Fig. 1, thereby producing a restoring force that tends to pull seal plate 20 and counter plate 22 toward each other.
- leaf springs, Belleville springs, coil springs or any other suitable springs may be utilized within the scope of the present invention.
- Seal plate 20 is provided with a groove 80 and a groove 82.
- Counter plate 22 is provided with a groove 84 and a groove 86. Grooves 80, 82, 84 and 86 are positioned and shaped to engage the respective rollers 52.
- Each of the grooves has a deep portion that defines a retracted position of the respective plate, a shallow portion that defines the closed position of the respective plate and a transition between the deep portion and the shallow portion.
- groove 80 includes a deep portion 80a, a shallow portion 80b and a transition 80c between deep portion 80a and shallow portion 80b.
- seal plate 20 and counter plate 22 are movable between a closed position shown in Fig. 1, retracted positions shown in Figs. 2 and 3 and an open position (not shown).
- seal plate 20 and counter plate 22 are moved away from fluid conduit 14 into an upper portion 12a (Fig. 4) of valve housing 12 to permit passage of a liquid or a gas.
- seal plate 20 is in sealed engagement with valve seat 16, thereby blocking passage of a liquid or a gas through fluid conduit 14.
- shaft 40 moves seal plate 20, counter plate 22 and actuator element 44 from the closed position shown in Fig. 1 to the first retracted position shown in Fig.
- rollers 52 engage the shallow portions of grooves 80, 82, 84 and 86. This causes seal plate 20 to be in sealed engagement with valve seat 16 and causes counter plate 22 to be in engagement with support surface 18. Counter plate 22 provides support for seal plate 20 in the closed position and prevents a pressure differential across the valve 10 from forcing seal plate 20 away from engagement with valve seat 16.
- Coupling mechanism 50 is configured to provide advantageous movement of seal plate 20 and counter plate 22 as the valve is opened.
- the valve is opened by energizing actuator 34 and moving shaft 40 and actuator element 44 to the left in Figs. 1-3.
- Fig. 2 illustrates movement to a first retracted position wherein seal plate 20 is retracted from valve seat 16 and counter plate 22 remains in engagement with support surface 18. In the first retracted position, the valve seal is broken, and any pressure differential across the valve is allowed to equalize. Because counter plate 22 remains in engagement with support surface 18, the retraction of seal plate 20 from valve seat 16 is substantially perpendicular to valve seat 16, and rubbing and wear of elastomer ring 64 are limited.
- coupling mechanism 50 is configured such that counter plate 22 is retracted from support surface 18 subsequent to retraction of seal plate 20 from valve seat 16.
- the delay between the retraction of seal plate 20 from valve seat 16 and the retraction of counter plate 22 from support surface 18 depends on the speed of actuator 34 and on the design of coupling mechanism 50.
- the delay is preferably selected to be sufficient to allow any pressure differential across the valve to equalize.
- grooves 80 and 82 in seal plate 20 have deep portions that are elongated in the direction of actuator travel and have transitions 80c and 82c, respectively, between deep portions and shallow portions that are offset in the direction of actuator travel relative to transitions 84c and 86c in grooves 84 and 86, respectively.
- rollers 52 move along the shallow portions of the respective grooves 80, 82, 84 and 86, with seal plate 20 and counter plate 22 initially remaining fixed in their closed positions.
- Transitions 80c and 82c are offset relative to transitions 84c and 86c such that rollers 52 first engage the deep portions of grooves 80 and 82 in seal plate 20, as shown in Fig. 2.
- Spring 70 causes seal plate 20 to be retracted from valve seat 16. In the first retracted position of Fig. 2, rollers 52 remain in the shallow portions of grooves 84 and 84 in counter plate 22, and counter plate 22 remains in engagement with support surface 18.
- rollers 52 move into the deep portions of grooves 84 and 86, and counter plate 22 is retracted from support surface 18.
- rollers 52 move along the elongated deep portions of grooves 80 and 82 in seal plate 20, and seal plate 20 remains in the retracted position.
- Spring 70 holds seal plate 20 in the deep portions of grooves 80 and 82 and holds counter plate 22 in the deep portions of grooves 84 and 86 as seal plate 20 and counter plate 22 are moved toward the open position.
- the arrangement of rollers 52 and grooves 80 and 82 which have transitions offset from the transitions in grooves 84 and 86, provide the desired movement shown in Figs. 1-3.
- the rollers which engage the grooves in seal plate 20 may be offset from the rollers which engage the grooves in counter plate 22.
- different groove shapes and roller types may be utilized within the scope of the invention.
- the coupling mechanism in general, causes the counter plate to be retracted from the support surface subsequent to retraction of the seal plate from the valve seat.
- FIG. 6-8 A second embodiment of a gate valve in accordance with the invention is shown in Figs. 6-8. Like elements in Figs. 1-8 have the same reference numerals.
- the embodiment of Figs. 6-8 differs from the embodiment of Figs. 1-3 primarily with respect to the shape of the grooves in seal plate 20.
- grooves 80 and 82 in seal plate 20 and grooves 84 and 86 in counter plate 22 have relatively abrupt transitions 80c, 82c, 84c and 86c between the shallow portions and the deep portions.
- seal plate 20 is provided with grooves 180 and 182 having ramps, or gradual transitions, between shallow portions and deep portions.
- seal plate 20 to be retracted from valve seat 16 with a smooth, non-abrupt movement.
- seal plate 20 is first retracted from valve seat 16, as shown in Fig. 5, and, subsequently, counter plate 22 is retracted from support surface 18, as shown in Fig. 6.
- the grooves in seal plate 20 and counter plate 22 can have a variety of configurations within the scope of the invention. It should be understood that various changes and modifications of the embodiments shown in the drawings described in the specification may be made within the spirit and scope of the present invention. Accordingly, it is intended that all matter contained in the above description and shown in the accompanying drawings be interpreted in an illustrative and not in a limiting sense. The invention is limited only as defined in the following claims and the equivalents thereto.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020047001370A KR100906572B1 (en) | 2001-08-01 | 2002-07-19 | Gate valve with delayed retraction of counter plate |
DE60201409T DE60201409T2 (en) | 2001-08-01 | 2002-07-19 | DISPENSING VALVE WITH DELAYED REMOVAL OF THE COUNTERPLATE |
JP2003517477A JP4053980B2 (en) | 2001-08-01 | 2002-07-19 | Valve and operating method thereof |
EP02748211A EP1327090B1 (en) | 2001-08-01 | 2002-07-19 | Gate valve with delayed retraction of counter plate |
NZ524800A NZ524800A (en) | 2001-08-01 | 2002-07-19 | Gate valve with delayed retraction of counter plate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/920,160 | 2001-08-01 | ||
US09/920,160 US6612546B2 (en) | 2001-08-01 | 2001-08-01 | Gate valve with delayed retraction of counter plate |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003012323A1 true WO2003012323A1 (en) | 2003-02-13 |
Family
ID=25443274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/023012 WO2003012323A1 (en) | 2001-08-01 | 2002-07-19 | Gate valve with delayed retraction of counter plate |
Country Status (9)
Country | Link |
---|---|
US (1) | US6612546B2 (en) |
EP (1) | EP1327090B1 (en) |
JP (1) | JP4053980B2 (en) |
KR (1) | KR100906572B1 (en) |
CN (1) | CN100353100C (en) |
DE (1) | DE60201409T2 (en) |
NZ (1) | NZ524800A (en) |
TW (1) | TW520429B (en) |
WO (1) | WO2003012323A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004099656A1 (en) * | 2003-05-02 | 2004-11-18 | Varian, Inc. | Gate valve |
US9638335B2 (en) | 2015-01-08 | 2017-05-02 | King Lai Hygienic Materials Co., Ltd. | Double sealing valve |
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JP4849751B2 (en) * | 2001-09-06 | 2012-01-11 | パナソニック株式会社 | Component mounting apparatus and component mounting method |
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DE102005043595A1 (en) * | 2005-09-12 | 2007-04-19 | Bösch, Hubert | Valve mechanism for a vacuum valve |
KR100779241B1 (en) * | 2006-11-02 | 2007-11-23 | 주식회사 비츠로테크 | Double sided vacuum gate valve |
US7871061B1 (en) | 2007-04-05 | 2011-01-18 | Mandeville Jr Matthew Kevin | Dual spreading link for gate valves |
DE102008047355B4 (en) * | 2008-09-15 | 2014-08-21 | Weco Armaturen Gmbh | slider unit |
US7931251B2 (en) * | 2009-07-08 | 2011-04-26 | Perdix Engineering Llc | Expanding gate valve |
JP2011054928A (en) * | 2009-08-04 | 2011-03-17 | Tokyo Electron Ltd | Gate valve, and substrate processing system using the same |
US9271338B2 (en) | 2012-03-14 | 2016-02-23 | Microwave Materials Technologies, Inc. | Pressurized heating system with enhanced pressure locks |
CN104455506B (en) * | 2013-11-26 | 2017-03-22 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
CN103644315B (en) * | 2013-12-04 | 2016-02-17 | 淮北新祥液压机电成套设备制造有限公司 | A kind of long-life knife gate valve |
TWI656293B (en) * | 2014-04-25 | 2019-04-11 | 瑞士商Vat控股股份有限公司 | Valve |
KR101647579B1 (en) * | 2015-01-26 | 2016-08-10 | 킹 라이 하이제닉 머티리얼즈 캄파니 리미티드 | Double sealing valve |
US9470319B2 (en) * | 2015-01-26 | 2016-10-18 | King Lai Hygienic Materials Co., Ltd. | Gate valve with linkage structure |
KR101698925B1 (en) * | 2015-02-26 | 2017-01-24 | 주식회사 비츠로머티리얼 | low noise vacuum gate valve |
CN106286874A (en) * | 2015-05-25 | 2017-01-04 | 北京实力源科技开发有限责任公司 | A kind of push-pull valve |
KR101784839B1 (en) * | 2015-09-25 | 2017-11-06 | 프리시스 주식회사 | Two-way gate valve |
CN106763841A (en) * | 2017-03-02 | 2017-05-31 | 北京创世威纳科技有限公司 | A kind of vacuum lock |
KR102559694B1 (en) | 2017-03-15 | 2023-07-25 | 915 랩스, 엘엘씨 | Energy control element for improved microwave heating of packaged goods |
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KR102145830B1 (en) * | 2017-10-13 | 2020-08-19 | 주식회사 라온티엠디 | A valve complex |
EP3492790A1 (en) * | 2017-12-04 | 2019-06-05 | King Lai Hygienic Materials Co., Ltd. | Spring free gate valve |
CN107883005B (en) * | 2017-12-11 | 2024-01-19 | 成都中科唯实仪器有限责任公司 | Valve core structure for gate valve and working principle thereof |
DE102019123563A1 (en) * | 2019-09-03 | 2021-03-04 | Vat Holding Ag | Vacuum valve for loading and / or unloading a vacuum chamber |
US11421508B2 (en) | 2020-04-24 | 2022-08-23 | Cameron International Corporation | Fracturing valve systems and methods |
CN112222773B (en) * | 2020-09-25 | 2022-01-04 | 浙江联大阀门有限公司 | Preparation process of wear-resistant sliding plate gate valve |
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DE420047C (en) * | 1925-10-14 | Edmund Augustin | Slide valve | |
US4052036A (en) | 1974-07-15 | 1977-10-04 | Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik | Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit |
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DE10025615A1 (en) * | 1999-06-29 | 2001-01-18 | Varian Inc | Valve has positioning drive arrangement with drive element and rolling element moving along ramp when drive element moves relative to sealing plate. |
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-
2001
- 2001-08-01 US US09/920,160 patent/US6612546B2/en not_active Expired - Fee Related
-
2002
- 2002-07-19 NZ NZ524800A patent/NZ524800A/en not_active IP Right Cessation
- 2002-07-19 EP EP02748211A patent/EP1327090B1/en not_active Expired - Lifetime
- 2002-07-19 KR KR1020047001370A patent/KR100906572B1/en not_active IP Right Cessation
- 2002-07-19 DE DE60201409T patent/DE60201409T2/en not_active Expired - Lifetime
- 2002-07-19 CN CNB028026128A patent/CN100353100C/en not_active Expired - Fee Related
- 2002-07-19 JP JP2003517477A patent/JP4053980B2/en not_active Expired - Fee Related
- 2002-07-19 WO PCT/US2002/023012 patent/WO2003012323A1/en active IP Right Grant
- 2002-07-23 TW TW091116315A patent/TW520429B/en not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE420047C (en) * | 1925-10-14 | Edmund Augustin | Slide valve | |
US4052036A (en) | 1974-07-15 | 1977-10-04 | Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik | Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit |
US4314579A (en) * | 1980-03-18 | 1982-02-09 | Charles Wheatley | Gate valve |
US4487393A (en) * | 1982-06-10 | 1984-12-11 | Barton Valve Company, Inc. | Gate valve having a pressure-secured seat |
US4817915A (en) * | 1986-12-18 | 1989-04-04 | Cetec Ag | Slide valve |
US5379983A (en) * | 1993-12-21 | 1995-01-10 | Vat Holding Ag | Shut-off valves for pipelines |
DE10025615A1 (en) * | 1999-06-29 | 2001-01-18 | Varian Inc | Valve has positioning drive arrangement with drive element and rolling element moving along ramp when drive element moves relative to sealing plate. |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004099656A1 (en) * | 2003-05-02 | 2004-11-18 | Varian, Inc. | Gate valve |
US9638335B2 (en) | 2015-01-08 | 2017-05-02 | King Lai Hygienic Materials Co., Ltd. | Double sealing valve |
Also Published As
Publication number | Publication date |
---|---|
CN100353100C (en) | 2007-12-05 |
US20030025098A1 (en) | 2003-02-06 |
KR100906572B1 (en) | 2009-07-10 |
US6612546B2 (en) | 2003-09-02 |
NZ524800A (en) | 2005-05-27 |
KR20040024595A (en) | 2004-03-20 |
JP4053980B2 (en) | 2008-02-27 |
EP1327090A1 (en) | 2003-07-16 |
DE60201409D1 (en) | 2004-11-04 |
TW520429B (en) | 2003-02-11 |
DE60201409T2 (en) | 2005-10-13 |
EP1327090B1 (en) | 2004-09-29 |
CN1464949A (en) | 2003-12-31 |
JP2004537694A (en) | 2004-12-16 |
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