WO2003010489A3 - Method and apparatus for surface roughness measurement - Google Patents

Method and apparatus for surface roughness measurement Download PDF

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Publication number
WO2003010489A3
WO2003010489A3 PCT/IB2002/004174 IB0204174W WO03010489A3 WO 2003010489 A3 WO2003010489 A3 WO 2003010489A3 IB 0204174 W IB0204174 W IB 0204174W WO 03010489 A3 WO03010489 A3 WO 03010489A3
Authority
WO
WIPO (PCT)
Prior art keywords
incidence
surface roughness
light beam
angles
incidence angle
Prior art date
Application number
PCT/IB2002/004174
Other languages
French (fr)
Other versions
WO2003010489A2 (en
Inventor
Vladimir Ya Mendeleev
Ko Sergei N Skovorod
Andrei Kourilovitch
Original Assignee
Hohner Corp
Vladimir Ya Mendeleev
Ko Sergei N Skovorod
Andrei Kourilovitch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hohner Corp, Vladimir Ya Mendeleev, Ko Sergei N Skovorod, Andrei Kourilovitch filed Critical Hohner Corp
Publication of WO2003010489A2 publication Critical patent/WO2003010489A2/en
Publication of WO2003010489A3 publication Critical patent/WO2003010489A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Abstract

A method and apparatus for surface roughness measurement are provided, wherein the method and apparatus utilize a light source directing a light beam at an incidence angle θ onto a surface to be measured; a light detector measuring the intensity I(θ) of at least a portion of said light beam reflected from said surface; said light beam movable such that said incidence angle θ is variable over a sequence of angles (θi ...θn) between grazing and normal incidence to said surface, where i is the index counter of the incidence angle in the sequence from O to n, and n is the number of incidence angles; and a processing unit for recording and converting values of said incidence angles and values of intensity signals from said light detector into a surface roughness value for said surface.
PCT/IB2002/004174 2001-07-25 2002-07-25 Method and apparatus for surface roughness measurement WO2003010489A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30781901P 2001-07-25 2001-07-25
US60/307,819 2001-07-25

Publications (2)

Publication Number Publication Date
WO2003010489A2 WO2003010489A2 (en) 2003-02-06
WO2003010489A3 true WO2003010489A3 (en) 2003-11-20

Family

ID=23191291

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2002/004174 WO2003010489A2 (en) 2001-07-25 2002-07-25 Method and apparatus for surface roughness measurement

Country Status (1)

Country Link
WO (1) WO2003010489A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840048A (en) * 2016-12-17 2017-06-13 江汉大学 Roughness measuring device and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6595951B2 (en) * 2016-05-19 2019-10-23 株式会社神戸製鋼所 Method and apparatus for estimating roughness of metal plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218144A (en) * 1977-09-09 1980-08-19 The Rank Organisation Limited Measuring instruments
WO2000058713A2 (en) * 1999-03-31 2000-10-05 Semiconductor 300 Gmbh & Co. Kg Device for rapidly measuring angle-dependent diffraction effects on finely structured surfaces

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218144A (en) * 1977-09-09 1980-08-19 The Rank Organisation Limited Measuring instruments
WO2000058713A2 (en) * 1999-03-31 2000-10-05 Semiconductor 300 Gmbh & Co. Kg Device for rapidly measuring angle-dependent diffraction effects on finely structured surfaces

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
J.C. LE BOSSE ET AL.: "Characterisation of surface roughness by laser light scattering:specularly scattered intensity measuremnt", WEAR, vol. 209, no. 1-2, August 1997 (1997-08-01), switzerland, pages 328 - 337, XP001165782 *
V. YA. MENDELEEV: "Study of the possibility to measure the root-mean-square roughness of a shaded rough surface", OPTICS AND SPECTROSCOPY (TRANSLATED FROM OPTIKA I SPEKTROSKOPIYA,VOL. 89,NO. 3,SEPTEMBER 2000,PP 433-437, vol. 89, no. 3, September 2000 (2000-09-01), Russia, pages 397 - 401, XP001160823 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840048A (en) * 2016-12-17 2017-06-13 江汉大学 Roughness measuring device and method

Also Published As

Publication number Publication date
WO2003010489A2 (en) 2003-02-06

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