WO2002099494A1 - Dispositif pour support de miroir pouvant etre incline a l'aide de moyens d'entrainement - Google Patents

Dispositif pour support de miroir pouvant etre incline a l'aide de moyens d'entrainement Download PDF

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Publication number
WO2002099494A1
WO2002099494A1 PCT/NL2002/000372 NL0200372W WO02099494A1 WO 2002099494 A1 WO2002099494 A1 WO 2002099494A1 NL 0200372 W NL0200372 W NL 0200372W WO 02099494 A1 WO02099494 A1 WO 02099494A1
Authority
WO
WIPO (PCT)
Prior art keywords
point
support
connection
engagement
tilting body
Prior art date
Application number
PCT/NL2002/000372
Other languages
English (en)
Inventor
Leonardus Georgius Arkesteijn
Original Assignee
Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno filed Critical Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
Publication of WO2002099494A1 publication Critical patent/WO2002099494A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G02B7/1828—Motorised alignment using magnetic means

Definitions

  • the present invention relates to a device for tilting a mirror support with the aid of driving means, which mirror support is intended for directing a laser beam with the aid of a mirror, the device being provided with a first and a second tilting body, the first tilting body being provided at a first point of connection with a first connection with a first point of engagement of the mirror support, the second tilting body being provided at a second point of connection with a second connection with a second point of engagement of the mirror support, the first and the second point of engagement being located at a distance from each other, the device also being provided with driving means, which, in use, drive the first tilting body at a first driving point and drive the second tilting body at a second driving point, the first tilting body being connected with the fixed environment from a first point of support engagement, and the second tilting body being connected with the fixed environment from a second point of support engagement.
  • the driving means in the known device comprise one or more actuators of magnetostrictive material.
  • the material expands.
  • This expansion of this material drives, in use, the tilting bodies, thus converting the linear drive into a tilting of the mirror support.
  • a drawback of magnetostrictive material is that the expansion is only a few tenths of percent.
  • the connection transmitting the motion requires a relatively large transmission arm. This implies that the connection does not satisfy high stiffness requirements.
  • Devices of the known type are used in laser scan systems. These are found e.g. in hand scanners for reading bar codes and scanners in copiers. In this field of application, low-power lasers are used. This means that the beam diameter of the laser can be relatively small. As a result thereof, the mirror can also be relatively small.
  • the laser beam directed well with the aid of the mirror is finally focused with the aid of a lens, so that the high-power laser beam has a small diameter where material has to be laser milled.
  • This can secure a high accuracy during laser milling.
  • the tilting of the mirror must be controllable accurately and rapidly. Since at the present time the high-power lasers have a very high pulse frequency, a high laser milling speed can be realized if the mirror too can be brought into a required tilted position rapidly enough. This also imposes high requirements on the accuracy of the tilted position of the mirror. It will also clear that at these high-frequency tiltings the mirror must not tend to resonate.
  • Resonance effects of the device contribute to the fact that the high-frequency laser beam will not laser mill regularly. This detracts from the accuracy and the surface smoothness of the pattern to be laser milled. In order to prevent resonance, therefore, a relatively stiff connection between the driving means and the mirror is required. A sufficiently large and sufficiently accurate stroke, however, requires a relatively large arm for converting the relatively small linear motion of the actuator into the tilting of the mirror. Since the known device does not satisfy relatively high stiffness requirements, it will resonate during tiltings within a wide frequency range. This adversely affects the accuracy during laser milling. The known device for tilting a mirror is therefore very unsuitable for the field of application in which high-power lasers are to be directed accurately and rapidly.
  • the object of the invention is to remove the drawbacks of the known device while retaining the advantages of the known device.
  • the object of the invention is to enable rapid realization of a wide, accurately determined, tilting of the mirror.
  • the intended object is achieved with the device according to the invention, which is characterized in that the first driving point is located between the first point of connection and the first point of support engagement and the second point of support engagement is located between the second point of connection and the second driving point.
  • a special embodiment of a device according to the invention is characterized in that the driving means are arranged to drive the first and the second driving point in a similar manner.
  • This has the advantage that the device can be provided with a single linear actuator driving both tilting bodies in a similar manner. This also increases the compactness and stiffness of the device and hence widens the operating frequency range in which a resonance will practically not occur.
  • a further elaborated embodiment of a device according to the invention is characterized in that the device is also provided with a support communicating with the fixed environment, on which the mirror support is supported.
  • This has the advantage that during tilting at least a part of the mirror support remains in a practically similar horizontal plane. In use, this contributes to the accuracy during e.g. laser milling. Moreover, this gives an even stiffer device, which further increases the operating frequency range within which the device can be used without resonating disturbingly.
  • the driving means comprise an electromagnetic actuator. This has the advantage that the linear driving motion generated by the driving means can be relatively large. This implies that the other parts of the device, such as e.g.
  • the tilting bodies can be relatively small, without necessarily reducing the angle through which the mirror support can be tilted. This has favorable effects on the highest possible desired stiffness of the device and finally results in a very wide operating frequency range within which the device will not resonate disturbingly. This also has advantages with respect to the accuracy with which the mirror support can be tilted.
  • the linear motion of an electromagnetic actuator is controllable very well in very small steps, the tilting thus also being controllable very well in very small steps.
  • Fig. 1 diagrammatically shows a section of a first embodiment of a device according to the invention
  • Fig. 2 diagrammatically shows a section of a second embodiment of a device according to the invention
  • FIG. 3 diagrammatically shows a section of a first electromagnetic actuator according to the invention
  • Fig. 4 diagrammatically shows a section of a second electromagnetic actuator according to the invention
  • Fig. 5 perspectively shows a third embodiment of a device according to the invention.
  • a first section of a first embodiment of a device 1 according to the invention is diagrammatically shown.
  • the device is provided with a first tilting body 10 and a second tilting body 16.
  • the first tilting body 10 is provided at a first point of connection 11 with a first connection 12.1 with a first point of engagement 31.1 of the mirror support 2.
  • the second tilting body 16 is provided at a second point of connection 17 with a second connection 12.2 with a second point of engagement 31.2 of the mirror support 2.
  • the first point of engagement 31.1 and the second point of engagement 31.2 are located at a distance from each other.
  • the device 1 is also provided with driving means 3, which, in use, drive the first tilting body 10 at a first driving point 15 and drive the second tilting body 16 at a second driving point 18.
  • the first tilting body 10 is also connected with the fixed environment 14 from a first point of support engagement 13.
  • the second tilting body 16 is connected with the fixed environment 14 from a second point of support engagement 32.
  • the positions of the first driving point 15 and the first point of support engagement 13 on the first tilting body 10, located with respect to the first point of connection 11, differ from the positions of the second driving point 18 and the second point of support engagement 32, located with respect to the second point of connection 17.
  • the first driving point 15 is located between first point of connection 11 and the first point of support engagement 13.
  • the second point of support engagement 32 is located between the second point of connection 17 and the second driving point 18.
  • the asymmetric arrangement of the first tilting body 10 and the second tilting body 16 with respect to the driving means 3 and the fixed environment 14 has the advantage that the device can be designed with one actuator.
  • the linear motion of the actuator can be converted into a tilting motion of the mirror support 2.
  • the device 1 is therefore very compact and stiff, which has the advantage that resonance frequencies will only occur at very high operating frequencies.
  • the device 1 for the tiltable mirror support 2 thus also satisfies very high speed and accuracy requirements.
  • the first tilting body 10 will convert the linear motion of the driving means 3 into a tilting motion of the mirror support 2 in a direction A indicated by arrow 21.
  • the second tilting body 16 will cause the mirror support 2 to tilt in the direction A indicated by arrow 20.
  • the driving means 3 move down in the direction B indicated by arrow 19
  • the mirror support 2 will tilt in the directions B indicated by arrows 20 and 21.
  • the stiffness of the embodiment of the invention shown in Fig. 1 is considerable in the driving direction indicated by arrow 19, which has the advantage that the device will practically not resonate within a wide frequency range.
  • a two-dimensional leaf spring 22 as flexible connection 12.1 between the mirror support 2 and the first tilting body 10 and as flexible connection 12.2 between the mirror support 2 and the second tilting body 16 has the result that undesirable resonance frequencies of the device will even be higher, which increases the operating frequency spectrum.
  • the driving means 3 are also connected with the aid of a flexible connection 30, 31 with the first driving point 15 and/or the second driving point 18.
  • the first point of support engagement 13 and/or the second point of support engagement 32 can also each be connected with the fixed environment 14 with a flexible connection 38, 33.
  • the flexible connections 30, 31, 38, 33 are preferably also designed as leaf springs. In use, such leaf springs are preferably subjected to a practically pure-flexible bending load.
  • FIG. 2 A second embodiment of a device according to the invention is shown in Fig. 2.
  • a device is balanced such that during the transmission of the motion each leaf spring 22, in use, is subjected to a practically pure-flexible bending load.
  • the inertia of the first tilting body 10 and the inertia of the second tilting body 16 must practically correspond with each other.
  • the first tilting body 10, the second tilting body 16, the mirror support 2, and the flexible connections 30, 31, 38, 33, 22 are preferably made as a whole from one block of material with the aid of wire sparking. This also has the advantage that this part of the device can be very stiff, and that, in use, practically no kinetic energy is lost in this part of the device 1.
  • Such a part of the device 1, to be made as one whole, is also called the transmission device.
  • An additional advantage of making the transmission device as one whole from a block is that the transmission device is easy to make in series production.
  • a rough surface can be formed.
  • tensile stresses can be undesirably produced in the material.
  • the transmission device can be grit blasted, which comprises blasting with small round glass beads. The compression of the surface resulting therefrom causes a compression stress in the material. The maximally occurring tensile stress is thus reduced. This has a positive effect on the notch effect of the material.
  • a material from which the transmission device is made substantially comprises titanium or an alloy thereof.
  • the second embodiment of a device according to the invention diagrammatically shown in Fig. 2, is provided with a support 23 connected with the fixed environment 14, on which the mirror support 2 is supported.
  • the mirror support 2 is bearing-mounted with respect to at least a part of the support 23.
  • the support 23 has the advantage that, in use, during the tilting, at least a part of the mirror support 2 located near a point of rotation of the mirror support 2 remains in practically one horizontal plane. In use, this makes it easier to direct a laser beam incident on a mirror. Moreover, the support 23 contributes to an increased stiffness of the device.
  • the support comprises a rollable metal pin 24. This has the advantage that no large counteracting moment is generated during the tilting of the mirror support 2.
  • the device is preferably kinematically balanced. This has the result that the displacement of the points of engagements on the mirror support 2 is practically in accordance with a rolling motion of the metal pin 24.
  • the rollable metal pin 24 is held between the mirror support 2 and the fixed environment 14 by means of magnetic prestress. This has the advantage that when the mirror support 2, in use, is accelerated during tilting, resistance is offered to the forces coming into being because the center of gravity of the mirror support 2 is not equal to the point of rotation. Because of this resistance the metal pin does not tend to slip. Moreover, an upward movement of the mirror support is opposed by the magnetic prestress.
  • the driving means comprise a single actuator (not shown), which is in contact with actuator driving points 34, which e.g. is driven electromagnetically.
  • the electromagnetic actuator may comprise both a so-called coil actuator and a so-called magnet actuator.
  • the electromagnetic actuator comprises a magnet actuator 39, such as e.g. shown in Fig. 3. This has the advantage that the actuator will be stiffer. In fact, a solid magnet 42 is stiffer than a coil 40.1, 41.1. In a magnet actuator, the magnet 42 is the moving component part. This additionally has the advantage over a coil actuator (not shown) that no moving wires are contained in the actuator. Besides, relatively few eddy currents dissipating power occur in the magnet actuator 39.
  • the magnet actuator 39 shown in Fig. 3 comprises a first inner coil 40.1 and an outer coil 41.1 concentrically arranged around the first inner coil 40.1.
  • An annular magnet 42 closed in itself is also concentrically arranged between the inner and the outer coil 40, 41.
  • the magnet 42 will be movable through a radially directed magnetic field of magnet 42 in axial direction under the influence of a magnetic field generated by the concentric coils 40.1, 41.1, through which an electric current passes.
  • the magnet actuator 43 shown in Fig. 4 the magnet 42 is axially magnetized.
  • the magnet actuator 43 is provided with a second inner coil 40.2 and a second outer coil 41.2 concentrically arranged around the second inner coil 40.2 such that, in use, the magnet of the magnet actuator 43 can also be moved axially.
  • Permanently axially magnetizing the magnet 42 is simpler and therefore less expensive than radially magnetizing.
  • an embodiment with an axially magnetized magnet is less troubled by self- induction.
  • a fourth embodiment of a device according to the invention is shown.
  • the electromagnetic actuator 4 is cylindrical and is provided with a ceramic housing 25.
  • the magnet actuator comprises an inner coil 9A in the form of a cylinder jacket, a magnet 7 in the form of a cylinder jacket, which magnet is arranged around the inner coil 9A, and a cylindrical outer coil 9B arranged around the magnet 7.
  • the embodiment shown in Fig. 5 may be provided with both an axially magnetized magnet and a radially magnetized magnet. Through this housing 25 it is practically impossible that great adhesive powers come into being between magnetic material and other metallic material. Moreover, eddy currents will practically be absent.
  • the ceramic housing 25 also provides the heat removal.
  • the device 5 is also provided with a sensor 26 arranged to observe the tilting of the mirror support 2.
  • the device 1 will be provided with a control device (not shown), with which the driving means 3, in this case actuator 4, are controlled.
  • the sensor 26 is arranged to send, on the basis of the observation, a signal to the control device, which control device, in use, controls the driving means 3 at least partly on the basis of the signal of the sensor 26.
  • the invention is not at all limited to the embodiments shown.
  • the dimensions of the device 1 can be easily determined by those skilled in the art by observing criteria that will enhance the effect of the measures of the invention.
  • minimally attainable spark machining thicknesses, a desirable tilting angle, and the admissible stresses as well as the required actuator force and the kinematic balancing are regarded inter alia as criteria to be taken into consideration.
  • the design of the device will also be directed to obtaining a widest possible operating frequency range within which no resonance frequencies of the device occur.
  • the device may simply be designed and dimensioned further to make it suitable for mass production as well.
  • the mirror will usually be arranged on the mirror support 2 such that the force necessary for tilting the mirror acts on approximately a quarter of the length from an edge of the mirror. At this point, the least deformation of the mirror is expected. Through a difference in coefficient of expansion of the mirror support 2 and the mirror, the mirror can deform during use because of generated heat.
  • the mirror will preferably be arranged on the mirror support 2 with the aid of leaf springs.
  • the mirror support may also be of such design that it comprises the mirroring element.
  • a use will possibly be found in the laser milling of different materials, but also in the texturing of materials, which requires a much smaller penetration depth of the laser beam. In this connection, the marking of plastics may also be considered.
  • This application also requires a very rapid and accurate tilting device, which, in accordance with the device 1 according to the invention, must be very stiff, so that undesirable resonance frequencies of the device 1 do not fall within the operating frequency range of the device 1.
  • a first device according to the invention can be placed in series with a second device according to the invention, the mirror support of the second device having another tilting direction than the mirror support of the first device.
  • the laser beam can be directed to a position in an x-y plane.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif pour incliner un support de miroir à l'aide de moyens d'entraînements. Ce dispositif possède un premier et un second corps inclinables, le premier corps inclinable possédant en un premier point de raccord un premier raccord avec un premier point de mise en prise du support de miroir, le second corps inclinable possédant en un second point de raccord un second raccord avec un second point de mise en prise du support de miroir. Ce dispositif possède également des moyens d'entraînement qui entraînent le premier corps inclinable en un premier point d'entraînement et le second corps inclinable en un second point, le premier corps inclinable étant relié à l'installation fixe à partir d'un premier point de mise en prise du support, et le second corps inclinable étant relié à l'installation fixe à partir d'un second point de mise en prise du support. Le premier point d'entraînement est situé entre le premier point de raccord et le premier point de mise en prise du support, et le second point d'entraînement est situé entre le second point de raccord et le second point d'entraînement.
PCT/NL2002/000372 2001-06-07 2002-06-07 Dispositif pour support de miroir pouvant etre incline a l'aide de moyens d'entrainement WO2002099494A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1018236 2001-06-07
NL1018236A NL1018236C2 (nl) 2001-06-07 2001-06-07 Inrichting voor een spiegelhouder die met behulp van aandrijfmiddelen kan worden gekanteld.

Publications (1)

Publication Number Publication Date
WO2002099494A1 true WO2002099494A1 (fr) 2002-12-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2002/000372 WO2002099494A1 (fr) 2001-06-07 2002-06-07 Dispositif pour support de miroir pouvant etre incline a l'aide de moyens d'entrainement

Country Status (2)

Country Link
NL (1) NL1018236C2 (fr)
WO (1) WO2002099494A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1750153A1 (fr) * 2005-08-02 2007-02-07 TRUMPF Maschinen Grüsch AG Appareil pour régler l'inclinaison d'un miroir d'une machine de travail au laser

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166504A (en) * 1990-09-13 1992-11-24 Messerschmitt-Bolkow-Blohm Gmbh Apparatus for controlling high-power laser beams with flexible member and mirror
NL1001752C2 (nl) * 1995-11-27 1997-05-30 Tno Deflector.
WO1998047035A1 (fr) * 1997-04-11 1998-10-22 Bootsman Holding B.V. Systeme de deplacement d'un faisceau laser, par exemple systeme de marquage au laser

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166504A (en) * 1990-09-13 1992-11-24 Messerschmitt-Bolkow-Blohm Gmbh Apparatus for controlling high-power laser beams with flexible member and mirror
NL1001752C2 (nl) * 1995-11-27 1997-05-30 Tno Deflector.
WO1998047035A1 (fr) * 1997-04-11 1998-10-22 Bootsman Holding B.V. Systeme de deplacement d'un faisceau laser, par exemple systeme de marquage au laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1750153A1 (fr) * 2005-08-02 2007-02-07 TRUMPF Maschinen Grüsch AG Appareil pour régler l'inclinaison d'un miroir d'une machine de travail au laser
WO2007014767A1 (fr) * 2005-08-02 2007-02-08 TRUMPF Maschinen Grüsch AG Dispositif de reglage d'inclinaison d'une machine d'usinage au laser

Also Published As

Publication number Publication date
NL1018236C2 (nl) 2002-12-10

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