WO2002098583B1 - Method for plasma deposition of polymer coatings - Google Patents

Method for plasma deposition of polymer coatings

Info

Publication number
WO2002098583B1
WO2002098583B1 PCT/RU2002/000238 RU0200238W WO02098583B1 WO 2002098583 B1 WO2002098583 B1 WO 2002098583B1 RU 0200238 W RU0200238 W RU 0200238W WO 02098583 B1 WO02098583 B1 WO 02098583B1
Authority
WO
WIPO (PCT)
Prior art keywords
discharge
plasma
gas
pulses
treated
Prior art date
Application number
PCT/RU2002/000238
Other languages
French (fr)
Other versions
WO2002098583A3 (en
WO2002098583A2 (en
Inventor
Gleb E Bugrov
Konstantin V Vavilin
Sergei G Kondranin
Elena A Kralkina
Vladimir B Pavlov
Original Assignee
Plasma Tech Co Ltd
Gleb E Bugrov
Konstantin V Vavilin
Sergei G Kondranin
Elena A Kralkina
Vladimir B Pavlov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Tech Co Ltd, Gleb E Bugrov, Konstantin V Vavilin, Sergei G Kondranin, Elena A Kralkina, Vladimir B Pavlov filed Critical Plasma Tech Co Ltd
Priority to AU2002309363A priority Critical patent/AU2002309363A1/en
Publication of WO2002098583A2 publication Critical patent/WO2002098583A2/en
Publication of WO2002098583A3 publication Critical patent/WO2002098583A3/en
Publication of WO2002098583B1 publication Critical patent/WO2002098583B1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The method of plasma deposition of polymer coatings involves locating a sample to be treated in a discharge volume, filling a discharge chamber (1) by means of a working gas supply system (2) with a reactive gas containing at least one plasma polymerizable gas-monomer, and plasma generation in the discharge volume through the ignition and maintaining of a pulsed-periodic gas discharge with a periodically repeated sequence of pulses. During plasma polymerization of the gas-monomer, a polymer coating is deposited onto the surface of the sample. To do that, a pulsed-periodic discharge is used with the total current variation time of a separate pulse within the range of from 10-7 s to 10-1 s. The time interval between separate pulses in each sequence of pulses is selected within the range of from 10-5 s to 10-2 s. The invention allows the efficiency of plasma polymerization process to be increased and continuous processing to be enabled.

Claims

AMENDED CLAIMS[received by the International Bureau on 15 January 2004 (15.01.04); original claims 1-22 replaced by amended claims 1-20 (2 pages)]What we claim is:
1. Method for plasma deposition of polymer coatings including placing a sample to be treated into a discharge volume, filling a discharge chamber (1) with a reactive gas containing at least one plasma polymerizable gas-monomer, plasma generation in the discharge volume through the ignition and maintaining of gas discharge between discharge electrodes (4) and deposition of polymer coating onto the surface of the sample in the process of plasma polymerization of said gas-monomer, is characterized in that plasma generation is effectuated by igniting and maintaining a pulsed-periodic discharge with periodically repeated sequence of pulses, with total time of current variation for a separate discharge pulse being selected within the range of from 10" s to 10" s, and time interval between separate pulses in each sequence of pulses being within the range of from 10" s to 10" s, furthermore the time of each sequence of discharge pulses and time interval between each of the pulse sequences following one another is selected to be within the range of from 10"4 s to 10 s.
2. Method as claimed in claim 1, wherein a reactive gas contains an inert gas.
3. Method as claimed in claim 1, wherein the surface of a sample to be treated is preliminarily cleaned and /or modified prior to deposition a polymer coating thereon.
4. Method as claimed in claim 3, wherein the processes of preliminary cleaning and modifying the surface to be treated are carried out in a gas discharge plasma in an inert gas and/or reactive gas medium.
5. Method as claimed in claim 3, wherein a DC discharge, pulsed discharge, high-frequency discharge, or superhigh-frequency discharge is used for preliminary cleaning and modifying the surface to be treated.
6. Method as claimed in claim 3, wherein ion beams of inert and/or reactive gases are used for preliminary cleaning and modifying the surface to be treated.
7. Method as claimed in claim 3, wherein radicals generated in reactive gas plasma are used for preliminary cleaning and modifying the surface to be treated.
8. Method as claimed in claim 1, wherein a protective and/or intermediate adhesive layer is deposited by plasma deposition method onto the surface of a sample to be treated prior to deposition of polymer coating thereon.
9. Method as claimed in claim 1, wherein the surface of a coating deposited onto the surface of a sample is subjected to modification. 18
10. Method as claimed in claim 9, wherein the coating surface modification process is effectuated in a gas discharge plasma in said reactive gas-monomer medium.
11. Method as claimed in claim 9, wherein DC discharge, pulsed discharge, high- frequency discharge or superhigh frequency discharge is used for modifying the coating surface.
12. Method as claimed in claim 9, wherein ion beams of inert and/or reactive gases are used for modifying the coating surface.
13. Method as claimed in claim 9, wherein radicals generated in a reactive gas plasma are used for modifying the coating surface.
14. Method as claimed in claim 1, wherein at least one of electrodes (4) is subjected to cleaning by heating it to coating decomposition temperature during the plasma polymerization process.
15. Method as claimed in claim 1, wherein at least one of electrodes (4) is subjected to cleaning by means of an accelerated ion beam during the plasma polymerization process.
16. Method as claimed in claim 1, wherein a hollow cathode serves as one of discharge electrodes (4).
17. Method as claimed in claim 1, wherein said plasma polymerization process is accompanied with plasma parameters control effectuated by means of an optical plasma radiation detecting system.
18. Plasma generation method including filling a discharge chamber (1) with a reactive gas containing at least one plasma polymerizable gas-monomer, with the following igniting and maintaining of a gas discharge between discharge electrodes (4), is characterized in that a pulsed discharge with periodically repeated pulse sequence is ignited and maintained, with total time of current variation for a separate discharge pulse being selected in the range of from 10"7 s to 10"1 s and time interval between separate pulses in each sequence of pulses being selected in the range of from 10" s to 10" s, furthermore the time of each sequence of pulses and the time interval between each of the pulse sequences following one another are selected in the range of from 10"4 s to 10 s.
19. Method as claimed in claim 18, wherein a reactive gas contains an inert gas.
20. Method as claimed in claim 18, wherein a hollow cathode is used as one of the discharge electrodes (4).
PCT/RU2002/000238 2001-06-04 2002-05-17 Method for plasma deposition of polymer coatings WO2002098583A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002309363A AU2002309363A1 (en) 2001-06-04 2002-05-17 Method for plasma deposition of polymer coatings

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2001114812 2001-06-04
RU2001114812A RU2190484C1 (en) 2001-06-04 2001-06-04 Method for plasma deposition of polymeric coatings and method for plasma generation

Publications (3)

Publication Number Publication Date
WO2002098583A2 WO2002098583A2 (en) 2002-12-12
WO2002098583A3 WO2002098583A3 (en) 2004-02-19
WO2002098583B1 true WO2002098583B1 (en) 2004-05-13

Family

ID=20250228

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU2002/000238 WO2002098583A2 (en) 2001-06-04 2002-05-17 Method for plasma deposition of polymer coatings

Country Status (3)

Country Link
AU (1) AU2002309363A1 (en)
RU (1) RU2190484C1 (en)
WO (1) WO2002098583A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006053366A1 (en) 2006-11-10 2008-05-15 Schott Ag Method and apparatus for plasma enhanced chemical vapor deposition
WO2011090397A1 (en) 2010-01-20 2011-07-28 Inano Limited Method for plasma deposition of polymer coatings and apparatus
RU2751348C2 (en) * 2019-12-19 2021-07-13 Федеральное государственное бюджетное образовательное учреждение высшего образования "Восточно-Сибирский государственный университет технологий и управления" Installation for polymer surface modification in low-temperature smoldering discharge plasma

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3471316A (en) * 1965-06-14 1969-10-07 Continental Can Co Method of forming a flexible organic layer on metal by a pulsed electrical abnormal glow discharge
JPS61213221A (en) * 1985-03-19 1986-09-22 Japan Synthetic Rubber Co Ltd Production of plasma-polymerized film
DE4239234A1 (en) * 1992-11-21 1994-06-09 Krupp Widia Gmbh Tool and method for coating a tool body
US5876753A (en) * 1996-04-16 1999-03-02 Board Of Regents, The University Of Texas System Molecular tailoring of surfaces
DE19618926A1 (en) * 1996-05-10 1997-11-13 Boehringer Mannheim Gmbh Surface coated with amino groups
EP0985741A1 (en) * 1998-09-07 2000-03-15 The Procter & Gamble Company Modulated plasma glow discharge treatments for making super hydrophobic substrates

Also Published As

Publication number Publication date
AU2002309363A1 (en) 2002-12-16
WO2002098583A3 (en) 2004-02-19
RU2190484C1 (en) 2002-10-10
WO2002098583A2 (en) 2002-12-12

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