WO2002087732A3 - Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft - Google Patents

Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft Download PDF

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Publication number
WO2002087732A3
WO2002087732A3 PCT/DE2002/001513 DE0201513W WO02087732A3 WO 2002087732 A3 WO2002087732 A3 WO 2002087732A3 DE 0201513 W DE0201513 W DE 0201513W WO 02087732 A3 WO02087732 A3 WO 02087732A3
Authority
WO
WIPO (PCT)
Prior art keywords
exhaust air
central
treatment
air containing
containing pfc
Prior art date
Application number
PCT/DE2002/001513
Other languages
English (en)
French (fr)
Other versions
WO2002087732A2 (de
Inventor
Hans-Peter Bipp
Ewald Hagenhoff
Paul Kaller
Original Assignee
Infineon Technologies Ag
Messer Griesheim Gmbh
Hans-Peter Bipp
Ewald Hagenhoff
Paul Kaller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Messer Griesheim Gmbh, Hans-Peter Bipp, Ewald Hagenhoff, Paul Kaller filed Critical Infineon Technologies Ag
Priority to DE10291795T priority Critical patent/DE10291795D2/de
Publication of WO2002087732A2 publication Critical patent/WO2002087732A2/de
Publication of WO2002087732A3 publication Critical patent/WO2002087732A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Chimneys And Flues (AREA)

Abstract

ZusammenfassungDie Anlage zur Reinigung von Abluftströmen aus Abluftquellen mittels thermischer Verbrennung enthält eine zentrale Brennereinheit 1, der mindestens ein Teil der Abluftströme zugeführt wird, und in der Regel eine zentrale Wäschereinheit 2. Die Abluftteilströme werden auf einer A-B-C-Analyse basierend gesteuert.
PCT/DE2002/001513 2001-04-27 2002-04-25 Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft WO2002087732A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10291795T DE10291795D2 (de) 2001-04-27 2002-04-25 Zentrale Verbrennungsanlage zur Behandlung PFC-haltiger Abluft

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10120820 2001-04-27
DE10120820.0 2001-04-27

Publications (2)

Publication Number Publication Date
WO2002087732A2 WO2002087732A2 (de) 2002-11-07
WO2002087732A3 true WO2002087732A3 (de) 2003-01-09

Family

ID=7683031

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/001513 WO2002087732A2 (de) 2001-04-27 2002-04-25 Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft

Country Status (2)

Country Link
DE (1) DE10291795D2 (de)
WO (1) WO2002087732A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006052586B4 (de) * 2006-11-08 2008-07-03 Schott Solar Gmbh Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3517138A1 (de) * 1985-05-11 1986-11-20 Wilfred Antony GmbH, 7146 Tamm Verfahren und vorrichtung zur entfernung von halogenkohlenwasserstoffen aus luft
EP0768109A2 (de) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Vorrichtung und Verfahren zur Abgasreinigung
EP0885648A1 (de) * 1997-06-20 1998-12-23 Hitachi, Ltd. Verfahren, Katalysator und Vorrichtung zur Zersetzung Fluorierter Verbindung
EP0933120A1 (de) * 1998-02-03 1999-08-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abgasbehandlungsanlage
EP1103297A1 (de) * 1999-11-26 2001-05-30 Hitachi, Ltd. Verfahren und Vorrichtung zur Behandlung von Perfluoroverbindungen enthaltenden Gasen

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3517138A1 (de) * 1985-05-11 1986-11-20 Wilfred Antony GmbH, 7146 Tamm Verfahren und vorrichtung zur entfernung von halogenkohlenwasserstoffen aus luft
EP0768109A2 (de) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Vorrichtung und Verfahren zur Abgasreinigung
EP0885648A1 (de) * 1997-06-20 1998-12-23 Hitachi, Ltd. Verfahren, Katalysator und Vorrichtung zur Zersetzung Fluorierter Verbindung
EP0933120A1 (de) * 1998-02-03 1999-08-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abgasbehandlungsanlage
EP1103297A1 (de) * 1999-11-26 2001-05-30 Hitachi, Ltd. Verfahren und Vorrichtung zur Behandlung von Perfluoroverbindungen enthaltenden Gasen

Also Published As

Publication number Publication date
WO2002087732A2 (de) 2002-11-07
DE10291795D2 (de) 2004-08-05

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