WO2002085522A1 - Dispositif microfluidique comprenant un element partiellement retenu - Google Patents

Dispositif microfluidique comprenant un element partiellement retenu Download PDF

Info

Publication number
WO2002085522A1
WO2002085522A1 PCT/US2002/015034 US0215034W WO02085522A1 WO 2002085522 A1 WO2002085522 A1 WO 2002085522A1 US 0215034 W US0215034 W US 0215034W WO 02085522 A1 WO02085522 A1 WO 02085522A1
Authority
WO
WIPO (PCT)
Prior art keywords
flap
layer
channel
microfluidic
fluid
Prior art date
Application number
PCT/US2002/015034
Other languages
English (en)
Inventor
Christoph D. Karp
Marci Pezzuto
Laird Maresch
Stephen D. O'connor
Original Assignee
Nanostream, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanostream, Inc. filed Critical Nanostream, Inc.
Publication of WO2002085522A1 publication Critical patent/WO2002085522A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/003—Valves for single use only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0681—Filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0622—Valves, specific forms thereof distribution valves, valves having multiple inlets and/or outlets, e.g. metering valves, multi-way valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/08—Regulating or influencing the flow resistance
    • B01L2400/084—Passive control of flow resistance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Definitions

  • the present invention relates to flow control in microfluidic devices.
  • Microfluidic devices are becoming more important in a variety of fields, from biochemical analysis to medical diagnostics and to fields as diverse as environmental monitoring to chemical synthesis.
  • microfluidic systems allow complicated biochemical reactions to be carried out using very small volumes of liquid. These miniaturized systems increase the response time of the reactions, minimize sample volume, and lower reagent cost.
  • microfluidic systems have been constructed in a planar fashion using silicon fabrication techniques. Representative systems are described, for example, in some early work by Manz et al. (Trends in Anal. Chem. (1990) 10(5): 144-149; Advances in Chromatography (1993) 33: 1-66). These publications describe microfluidic devices constructed using photolithography to define channels on silicon or glass substrates and etching techniques to remove material from the substrate to form the channels. A cover plate is bonded to the top of this device to provide closure. [0004] More recently, a number of methods have been developed that allow microfluidic devices to be constructed from plastic, siiicone or other polymeric materials.
  • a negative mold is first constructed, and plastic or siiicone is then poured into or over the mold.
  • the mold can be constructed using a silicon wafer (see, e.g., Duffy et al., Analytical Chemistry (1998) 70: 4974-4984; McCormick et al., Analytical Chemistry (1997) 69: 2626 -2630), or by building a traditional injection molding cavity for plastic devices.
  • Some molding facilities have developed techniques to construct extremely small molds. Components constructed using a LIGA technique have been developed (see, e.g., Schomburg et al., Journal of Micromechanical Microengineering (1994) 4: 186-191). Other approaches combine LIGA and a hot-embossing technique.
  • microfluidic flow control devices In light of these limitations, there exists a need for improved microfluidic flow control devices. It would be further desirable if microfluidic devices having integrated flow control elements could be fabricated quickly and inexpensively. It would be further desirable if such device could be fabricated from a variety of different materials.
  • a microfluidic device in a first separate aspect of the invention, includes a first microfluidic channel defined through a first stencil layer, a second microfluidic channel defined through a second stencil layer, a flap layer positioned between the stencil layers and having a moveable flap, and a sealing surface positioned adjacent to the flap layer.
  • the first flap is capable of intermittently engaging the sealing surface to affect fluid communication between the first microfluidic channel and the second microfluidic channel.
  • multiple flaps may be provided in a single microfluidic device. Fluid displacement means in fluid communication with a first flap and a second flap may be provided.
  • a filter material may be disposed between the first microfluidic channel and the second microfluidic channel.
  • one or more layers of the device or surfaces thereof may be formed with self-adhesive tapes or coated with adhesives.
  • any of the foregoing aspects may be combined for additional advantage.
  • FIG. 1A is an exploded perspective view of a microfluidic device having a microfluidic valve disposed therein.
  • FIG. 1B is a top assembled view of the device of FIG. 1A.
  • FIG. 1C is a side cross-sectional view of a portion of the device of FIGS. 1A-1B in a first operating state, with a large internal arrow showing the direction of fluid flow.
  • FIG. 1D is a side cross-sectional view of a portion of the same device in a second operating state, with large arrows showing the direction of fluid flow reversed within the device.
  • FIG. 2A is an exploded perspective view of a microfluidic device capable of being used to provide fluid pumping utility.
  • FIG. 2B is a top view of the assembled device of FIG. 2A.
  • FIGS. 2C and 2D are cross-sectional views of a portion of the same device along section lines "A"-"A" in FIG. 2B in two different operating states.
  • FIG. 2C shows the device with negative pressure applied to an actuation channel 111
  • FIG. 2D shows the device with a positive pressure applied to the actuation channel 111.
  • FIGS. 3A and 3B are cross-sectional views of a portion of a microfluidic device having a microfluidic diversion valve therein where the flap portion is usually in the down position.
  • the device is show in operation with fluid flowing according to the single arrows through channels 189 and 192.
  • fluid is flowing in the reverse direction through channels 191 and 189 as indicated by the single arrows. In both cases, fluid flows through filter region 190.
  • FIGS. 3C and 3D show cross-sectional views of a microfluidic device having a microfluidic diversion valve therein where the microflap portion is usually in the up position. In FIG.
  • FIG. 4A is a top view of a microfluidic device having a flap valve contained therein.
  • FIGS. 4B-4C are a side cross-sectional views of a portion of the device of FIG. 4A in two different operating states. In FIG.4B, the flap is deformed toward and into channel 220, while in FIG. 4C the flap is closed against a sealing surface of layer 224.
  • FIGS. 5A-5C are a side cross-sectional views of a portion of a microfluidic device having a flap valve therein in three different operating states.
  • the flap is not subject to any external forces.
  • the flap is subject to an external force that deforms the flap valve upward into channel 87.
  • the flap is subject to an external force that deforms the flap valve downward into channel 86.
  • channel as used herein is to be interpreted in a broad sense. Thus, the term “channel” is not intended to be restricted to elongated configurations where the transverse or longitudinal dimension greatly exceeds the diameter or cross-sectional dimension. Rather, the term is meant to include a conduit of any desired shape or configuration through which liquids may be directed. A channel may be filled with one or more materials, or may contain a moveable element or structures.
  • microfluidic as used herein refers to structures or devices through which one or more fluids are capable of being passed or directed and having at least one dimension less than about 500 microns.
  • microfluidic flap as used herein is to be understood to refer to a portion of a layer or sheet bounding a microfluidic channel wherein the portion is not connected at all points to other portions of the structure forming the channel. A microfluidic flap is thus only partially restrained from movement, and may move within said channel when certain physical characteristics of the channel change, such as pressure, temperature, flow rate of fluid, type of fluid, etc.
  • stencil refers to a material layer or sheet that is preferably substantially planar through which one or more variously shaped and oriented portions have been cut or otherwise removed through the entire thickness of the layer, and that permits substantial fluid movement within the layer (e.g., in the form of channels or chambers, as opposed to simple through-holes for transmitting fluid through one layer to another layer).
  • the outlines of the cut or otherwise removed portions form the lateral boundaries of microstructures that are formed when a stencil is sandwiched between other layers such as substrates or other stencils.
  • Microfluidic flow control devices of various designs according to the present invention may be built with different fabrication techniques.
  • microfluidic devices are constructed using stencil layers or sheets to define channels and/or other microstructures.
  • a computer-controlled plotter modified to accept a cutting blade may be used to cut various patterns through a material layer. Such a blade may be used either to cut sections to be detached and removed from the stencil layer or to fashion slits that separate certain regions of a layer without removing any material.
  • a computer-controlled laser cutter may be used to cut portions through a material layer. While laser cutting may be used to yield precisely- dimensioned microstructures, the use of a laser to cut a stencil layer inherently involves the removal of some material.
  • stencil layers include conventional stamping or die-cutting technologies.
  • the above-mentioned methods for cutting through a stencil layer or sheet permits robust devices to be fabricated quickly and inexpensively compared to conventional surface micromachining or material deposition techniques that are conventionally employed to produce microfluidic devices.
  • the outlines of the cut or otherwise removed portions form the lateral boundaries of microstructures that are completed upon sandwiching a stencil between substrates and/or other stencils.
  • the thickness or height of the microstructures such as channels or chambers can be varied by altering the thickness of the stencil layer, or by using multiple substantially identical stencil layers stacked on top of one another.
  • top and bottom surfaces of stencil layers are intended to mate with one or more adjacent layers (such as stencil layers or substrate layers) to form a substantially enclosed device, typically having at least one fluidic inlet port and often having at least one fluidic outlet port.
  • Various means may be used to seal or bond layers of a device together.
  • adhesives may be used.
  • one or more layers of a device may be fabricated from single- or double-sided adhesive tape, although other methods of adhering stencil layers may be used.
  • a portion of the tape (of the desired shape and dimensions) can be cut and removed to form channels, chambers, and/or apertures.
  • a tape stencil can then be placed on a supporting substrate with an appropriate cover layer, between layers of tape, or between layers of other materials.
  • stencil layers can be stacked on each other.
  • the thickness or height of the channels within a particular stencil layer can be varied by varying the thickness of the stencil layer (e.g., the tape carrier and the adhesive material thereon) or by using multiple substantially identical stencil layers stacked on top of one another.
  • Suitable tape carrier materials include but are not limited to polyesters, polycarbonates, polytetrafluoroethlyenes, polypropylenes, and polyimides. Such tapes may have various methods of curing, including curing by pressure, temperature, or chemical or optical interaction. The thickness of these carrier materials and adhesives may be varied.
  • stencil-based fabrication methods enable very rapid fabrication of devices, both for prototyping and for high-volume production.
  • Rapid prototyping is invaluable for trying and optimizing new device designs, since designs may be quickly implemented, tested, and (if necessary) modified and further tested to achieve a desired result.
  • the ability to prototype devices quickly with stencil fabrication methods also permits many different variants of a particular design to be tested and evaluated concurrently.
  • Still further embodiments may be fabricated from various materials using well-known techniques such as embossing, stamping, molding, and soft lithography.
  • other techniques may be used to attach one or more of the various layers of microfluidic devices, as would be recognized by one of ordinary skill in attaching materials.
  • attachment techniques including thermal, chemical, or light-activated bonding steps; mechanical attachment (such as using clamps or screws to apply pressure to the layers); and/or other equivalent coupling methods may be used.
  • microfluidic devices contain valves for controlling fluid flow.
  • certain sections of microfluidic channels are flaps that are partially restrained, that is, not connected at all points. These flaps can be used to control the flow of fluid.
  • a flap has at least one dimension, typically width, that is smaller than that of the channel into which it is deflected.
  • a flap typically may have a closed position sealed against a sealing surface formed by the second layer and can open into the first microfluidic channel.
  • Microfluidic devices constructed according to one or more of the methods described above may be provided with one or more fluid control valve regions disposed therein.
  • such a valve is a one-way valve or a check valve.
  • a microfluidic valve may include a first channel formed within a first layer of a microfluidic device and a second channel formed within a second layer of the microfluidic device substantially coplanar with the first channel. The first channel is preferably smaller than the second channel in at least one dimension within the plane of the channels such that a seating surface is formed.
  • a third layer disposed between the first and second layers has a flap that is movable within the device but remains attached to the third layer. In a preferred embodiment, the flap and the third layer are formed from the same material, with material removed from the third layer to form the flap.
  • the flap is movable, such that in a closed position it seals with the seating surface.
  • the term "seals" refers to contact of a flap against a seating surface. Sealing of a flap includes both the formation of a fluid- tight junction and junction that allow restricted fluid flow through the device. Mobility of the flap can be achieved by any suitable modification of the flap material or dimensions, including, for example, altering the material of the flap, the dimensions of the flap (e.g., thickness), the degree of connection of the flap to the third layer and combinations thereof.
  • a flap can be formed from a substantially rigid material, with a hinge region to allow movement. A hinge region can be formed in a rigid material by reducing its thickness at the desired hinge region.
  • the flap also can be formed from a pliable material.
  • a material is suitably pliable if, at the desired operating pressures of the device, the material will bend or deform. The degree of pliability will depend on the nature of the material used and on the thickness of the material used.
  • a flap can have any shape such that the flap can deform within the device towards the second channel. In certain embodiments, the flap will seal against the first channel within normal operating pressures of the device. In other embodiments, the flap will seal against the second channel within normal operating pressure of the device.
  • a flap has one side separated from the membrane from which it is formed. In another embodiment, the flap is formed by cutting three sides of a rectangle into the membrane material to form a flap with a substantially rectangular shape.
  • the flap layer or membrane in which the flap resides can be made of any suitable material.
  • a suitable material can be chosen by one of skill in the art, depending on the type of construction used to make the microfluidic device.
  • flaps Either flexible or substantially rigid materials may be used to form flaps.
  • the flap can have a hinge region.
  • a hinge region can be a portion of the material that has a reduced thickness relative to the movable portion of the flap.
  • the hinge region is constructed from a different material from the movable portion of the flap.
  • the material chosen has a degree of elasticity allowing it to rebound into the seated position.
  • the material can be a metal foil, paper or polymer or combinations or laminates thereof.
  • the flap and flap layer are preferably fabricated from a polymeric material. Suitable polymeric materials include, for example, polytetrafluorethylenes, polystyrenes, polypropylene, polyethylene, polyimides, polyacrylates, rubbers and silicones.
  • one or both sides of the flap region may be covered or coated with a material to enhance adhesion to the upper or lower channel surface.
  • microfluidic devices may be fabricated with substrates and stencil layers that define channels therein. Such devices can be constructed from discrete layers of material or can be fabricated as an integral unit. When a coupling device is constructed as an integral unit, layers refer only to positions within a device rather than to individual components. When the device is to be constructed by assembling stencil layers with adhesive separating the layers or using self-adhesive tape materials, the material forming the sealing surface and the side of the flap region interacting with the sealing surface are both preferably non-adhesive.
  • the area of the flap interacting with the sealing surface and/or the seating surface can be adhesively coated, and the adhesive strength can be chosen to prevent permanently closing the valve.
  • Any suitable adhesive can be used to assemble a device from stencil layers.
  • the material chosen for use as a valve is preferably substantially impermeable to the fluid to be used in the device.
  • a device can, however, use a material that is permeable to a fluid.
  • the flap layer is formed from a material that is impermeable to the fluid for which the device is designed, but may be permeable to a gaseous fluid, such as air.
  • a flap-containing device can be constructed such that the movable flap can contact one or more surfaces of the first channel, and restrict fluid flow therein.
  • a microfluidic device also can have a sealing layer adjacent to the flap layer with holes or apertures disposed therein to allow fluid communication through the flap region.
  • a sealing layer can be formed with substantially rigid material.
  • the sealing layer may also contain an aperture disposed adjacent to the movable flap.
  • the flap region may be used to seal a hole or via that connects one level of the device to another level.
  • the flap portion may be more effective at blocking fluid flow if it covers a hole or via rather than a channel portion.
  • the height of the outlet channel also can be varied to change the operation of the flap.
  • a large flap relative to the height of the outlet channel will allow the flap to seal against a (e.g., the upper or lower) surface of the channel into which the flap is deflected.
  • a flap 30 defined in a central membrane layer 22 is capable of opening into a channel 26 defined in an adjacent layer 23.
  • the thickness of the layer 23 (the height of channel 26) and the length of the flap 30 can be varied such that the deflected flap may or may not come in contact with the lower surface of an upper layer 24 that bounds the channel 26 from above.
  • microfluidic devices having flaps can be used as one-way or check valves.
  • a microfluidic device 32 is constructed from five layers 20-24 (including two stencil layers 21 , 23) that define channels 25, 26, vias 27, and inlet/outlet ports 28, 29. Additionally, one portion or flap 30 in layer 22 is cut so that the flap 30 is still attached to the intermediate layer 22 but is only partially restrained from moving.
  • the assembled device 32, including flap valve region 31 is shown in FIG. 1B.
  • FIGS. 1C and 1D provide cross-sectional views of a portion of the device 32, focusing on the flap valve region 31 and illustrating two different operating states. In one state shown in FIG.
  • fluid is injected into the device 32 through port 29.
  • the fluid passes through channel 26 until it reaches the flap valve region 31.
  • the flap 30 is shown contacting against a sealing surface 21 A of stencil layer 21.
  • Fluid pressure within channel 26 helps force the flap 30 closed against the surface 21A.
  • the flap 30 prevents fluid from flowing from channel 26 into channel 25. If the fluid injected into port 29 is a liquid, then in actuality this liquid may never contact the closed flap 30 as shown in the first operating state, since this liquid will compress any air present within the channel 26, thus building a high- pressure region that will prevent further liquid flow.
  • FIG. 1D shows operation of the device 32 with fluid flow in the reverse direction.
  • fluid When fluid is injected into the device through port 28, it passes through the vias 27 into channel 25.
  • the flap 30 When the fluid encounters the flap 30 from below, the flap 30 is capable of being displaced upward since it is only restrained along one end, and the distal end is bounded above by an open channel 26.
  • the advancing fluid displaces the flap 30 upward and passes from the lower channel 25 into the upper channel 26, from which it is free to exit the device 32 through port 29.
  • the device 32 thus serves as a passive one-way valve or check valve, since it permits fluid flow in one direction but disallows fluid flow in the reverse direction.
  • a microfluidic device multiple one-way flap valve regions may be arranged in fluid communication with a fluid displacement means to provide pumping utility.
  • a basic configuration of such a device includes a first inlet channel, a first microfluidic one-way valve having a first flap opening into a chamber in fluid communication with the first inlet channel, and an outlet channel in fluid communication with the chamber through the second microfluidic one-way valve.
  • the second one-way valve has a second flap opening into the second channel.
  • a pumping chamber includes a cylinder and piston assembly.
  • a pumping chamber includes a deformable membrane forming one side of the chamber.
  • the deformable membrane may be deformed or otherwise moved to alter the pressure within the chamber, thus inducing fluid movement.
  • the deformable membrane can be moved by various means, including mechanical force.
  • the membrane can be deformed using a mechanical actuator.
  • the mechanical actuator includes a piston.
  • the mechanical actuator includes an electromechanical material, such as, for example, a piezoelectric device or a Ti-Ni device.
  • the membrane can include a magnetic material, and a magnetic field can be fluctuated to force the membrane up and down.
  • the material can be driven up and down using an asymmetrical cam.
  • force to deform the membrane is supplied by having an additional chamber opposite the pumping chamber, the pressure of which can be varied, for example, by an external pressure pump or vacuum pump.
  • the temperature of the chamber 1 1 can be cycled up and down to induce movement of the membrane.
  • the second through sixth layers 107-103 define vias 113A, 114A, with a further via 114A defined in the seventh layer 102.
  • the second layer 107 defines an actuation channel 111.
  • the fourth layer 105 defines a channel 112.
  • the fifth layer 104 defines a small aperture 118 and a large aperture 119.
  • the sixth layer 103 defines two flaps 116, 117. Preferably, these flaps are only partially restrained, such that they can be deflected upward or downward, as permitted by the surrounding structures.
  • the seventh layer 102 defines a channel 110 and a small aperture 121.
  • the eighth layer 101 defines a channel 109.
  • the ninth layer 100 serves as a cover layer to define the lower boundary of the channel 109 defined in the eighth layer 101.
  • the assembled device 120 is shown in FIG. 2B. [0043] A side cross-sectional view of a portion of the pumping device 120
  • FIGS. 2C and 2D (along section lines "A"-" A” in FIG. 2B) is shown in FIGS. 2C and 2D.
  • the device 120 worked as follows. Fluid was injected into the device 120 through an inlet port 114 and vias 114A, through channel 109 and into the aperture 121 to stop against the first flap 117.
  • An external pressure/vacuum source (not shown) was connected to the actuation port 115. When the external source applied a slight vacuum to the actuation channel 111 , a central portion of layer 106 flexed up towards the actuation channel 111. This upward deformation of the layer 106 created a slight negative pressure in a displacement channel 112 disposed immediately below the deformable portion of the membrane 106.
  • the flap 117 In response to the reduced pressure in channel 112, the flap 117 was lifted up into the channel 112, thus permitting fluid to flows into the channel 112. Notably, the second flap 116 did not open since its upward travel was blocked by the sealing surface 104A of layer 104.
  • the pressure on the external source at actuation port 115 was reversed to supply positive pressure to the actuation channel 111. Referring to FIG. 3D, the positive pressure within channel 111 caused the deformable portion of layer 106 to push down into the channel 112, thus increasing the pressure.
  • the second flap 116 opens downward towards an outlet channel 110 to admit fluid into the outlet channel 110.
  • This pumping mechanism can be used to push fluid throughout additional channels within a microfluidic structure, or to push fluid off-board.
  • the pumping speed and amount can be altered in a number of ways.
  • the size of the pressure change at the actuation port 115 as well as the period of the oscillation can have an effect.
  • the geometry and size of the channels themselves can also alter the pumping parameters. For example, the size of the flaps will determine the amount of fluid transferred per stroke.
  • the size of the actuation channel 111 just below the deformable portion of layer 106 can also be altered to change the parameters.
  • Fluid control valves according to the present invention also can be used to direct fluid flow among layers of a microfluidic device. These valves can be incorporated into a system in such as way that a particular microfluidic device can perform a variety of functions depending on how the chip is used. Additionally, channels within a particular device can be used more than once for different functions when using these valves.
  • Microfluidic devices of the invention also can have filter materials embedded within the channels.
  • a filter is any material that partially blocks or selectively alters fluid flow within a channel.
  • a filter is typically a porous material. The material also can have surface chemical properties that alter its interaction with various fluids to be used in the device.
  • FIGS. 3A-3D Further embodiments in two similar configurations that perform in two distinct manners are shown in FIGS. 3A-3D. These figures are cross- sectional views of a portion of a microfluidic device having flap regions to provide flow control utility.
  • a microfluidic device contain filter material for performing ultra-filtration of biological or chemical molecules.
  • a device 179 is shown with an input channel 189 for loading a biological sample. Fluid injected into channel 189 from the left will encounter filter material 187. When fluid is injected, it enters the filter material 187 below from region 190 and flows upward through the filter 187.
  • the filter 187 is chosen so that biological targets within the sample of choice will become stuck at the lower surface of the filter 187 adjacent to region 190.
  • the filter 187 can be chosen so that large nucleic acid targets will be blocked at the entrance of the filter and other non-specific biomass can pass through.
  • the flap layer 182 in this device is composed of a flexible material so that a flap 188 rests against the upper surface of a lower layer 184 in an unactuated position. Additionally, semi-permanent adhesive material may be used on the lower surface of the flap portion 193 and/or the upper surface of the lower layer 184. In the normal, unactuated position, channel 191 within layer 183 is blocked and the fluid flowing through the filter 187 from below is diverted into the upper channel 192.
  • an extraction fluid is injected into channel 191.
  • the pressure from the extraction fluid being injected at 191 pushes the moveable flap 188 up into a closed position against stencil layer 181.
  • the extraction fluid passes down through the filter 187 and carries the nucleic acid off the filter and into the solution.
  • the extraction fluid then proceeds down channel 189 to another portion of the device or off-board for further analysis.
  • FIG. 3C A similar configuration of the device 179 is shown in FIG. 3C.
  • the flap layer 182 is composed of a material such that flap region 188 is normally in the closed position as shown in FIG. 3D.
  • a pressurized sample containing wash buffer is loaded through channel 192, thus deforming the flap downward (as shown in FIG. 3C) to permit the sample to pass through the filter region 187.
  • a nucleic acid material in this example is stuck on the top surface of the filter area 190.
  • elution buffer can be added in the reverse direction (see FIG. 3D) and be directed to the exit channel 191.
  • Other configurations are possible, as are other types of sample materials and filters.
  • microfluidic devices containing one or more internal flaps can be used to direct or divert fluid among different levels of a three- dimensional device.
  • FIGS. 4A-4C One such embodiment of the present invention is shown in FIGS. 4A-4C.
  • a separate control channel is used to alter the fluid being pumped.
  • FIG. 4A a top view of a microfluidic device 219 having a flow channel 221 and control channel 220 is provided.
  • the flow channel 221 is defined in a first layer 229
  • the control channel 220 is defined in a second layer 228.
  • a via (or aperture) 227 formed in a spacing layer 224 and a flap region 226 that operates as a valve.
  • Cross-sectional views of the valve region are shown in FIGS. 4B and 4C.
  • a portion of the fluid then passes into the upper channel 220 as well as the flow channel 221.
  • pressure is applied to the control channel 220 during use. If the pressure in control channel 220 is higher than the pressure in flow channel 221 , then the flap 226 completely covers the via 227 and all of the fluid flowing in channel 221 continues to flow in channel 221.
  • the pressure in channel 220 can be adjusted as desired to serve as a pseudo flow regulator for channel 221. If the flap 226 is partially open, then only a smaller portion of fluid will flow up into channel 220.
  • channel 220 could be used as the flow channel and channel 221 as the control channel. In this embodiment, all of the fluid would remain in channel 220 and the movement of the flap region 226 would act as a flow constrictor.
  • FIGS. 5A-5C A further embodiment depicting an externally controllable flap is shown in FIGS. 5A-5C.
  • a flap 88 is composed in whole or in part of a magnetic or magnetizable material, such as a ferromagnetic, paramagnetic, or diamagnetic material.
  • the device has an associated magnetic actuator (not shown), preferably external to the device, for deforming and therefore controlling the position of the flap 88.
  • a portion of a microfluidic device 90 is shown in side sectional view with no magnetic field is applied to the device. Both a flap 88 and a first channel 85 are defined in a central layer 82.
  • An upper channel 87 is defined in layer 83, and a lower channel 86 is defined in layer 81.
  • Outer layers 80, 84 further define the boundaries of the upper and lower channel 87, 86, including inner surfaces 84A and 80A.
  • Inner layers 81 , 83 assist with directing the flow when the flap 88 is deflected from a substantially linear position aligned with central layer 82, such as shown in FIG. 5B.
  • an external magnetic force is applied to the flap 88 in the direction of the dark arrow (upward) using a magnetic actuator (not shown). This upward force causes the flap 88 to deflect, either just a small amount or sufficiently to contact the lower surface 84A of the outer layer 84.
  • FIG. 5C is substantially the same as FIG. 5B, but the direction of the magnetic force, represented by the dark arrow, is reversed (downward). In this manner, a microfluidic device responsive to the application of magnetic force may be constructed to control the flow of liquid.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un dispositif (32) de régulation d'écoulement microfluidique comprenant un volet (30) mobile qui peut venir s'appliquer de manière intermittente contre une surface (21A) d'étanchéité. Ce dispositif peut en outre comprendre un système de soupape ou de clapet anti-retour. Plusieurs soupapes peuvent être connectées avec plusieurs moyens de déplacement de fluide de manière à former un système de pompage. Ces dispositifs peuvent être construits à partir de couches découpées au pochoir, formées dans divers matériaux, notamment des matériaux polymères, des rubans adhésifs et/ou des matériaux filtrants. Ces dispositifs de régulation d'écoulement peuvent être activés de manière passive par le fluide qu'ils contiennent ou par des moyens d'activation externes.
PCT/US2002/015034 2001-04-24 2002-04-18 Dispositif microfluidique comprenant un element partiellement retenu WO2002085522A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/841,145 2001-04-24
US09/841,145 US20020155010A1 (en) 2001-04-24 2001-04-24 Microfluidic valve with partially restrained element

Publications (1)

Publication Number Publication Date
WO2002085522A1 true WO2002085522A1 (fr) 2002-10-31

Family

ID=25284140

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/015034 WO2002085522A1 (fr) 2001-04-24 2002-04-18 Dispositif microfluidique comprenant un element partiellement retenu

Country Status (2)

Country Link
US (1) US20020155010A1 (fr)
WO (1) WO2002085522A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023596A1 (fr) * 2008-08-25 2010-03-04 Koninklijke Philips Electronics N.V. Filtre microfluidique reconfigurable

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7829025B2 (en) 2001-03-28 2010-11-09 Venture Lending & Leasing Iv, Inc. Systems and methods for thermal actuation of microfluidic devices
US8895311B1 (en) 2001-03-28 2014-11-25 Handylab, Inc. Methods and systems for control of general purpose microfluidic devices
US7094345B2 (en) * 2002-09-09 2006-08-22 Cytonome, Inc. Implementation of microfluidic components, including molecular fractionation devices, in a microfluidic system
JP3725109B2 (ja) * 2002-09-19 2005-12-07 財団法人生産技術研究奨励会 マイクロ流体デバイス
US7419638B2 (en) * 2003-01-14 2008-09-02 Micronics, Inc. Microfluidic devices for fluid manipulation and analysis
CA2513424A1 (fr) * 2003-01-14 2004-08-05 Micronics Inc. Dispositifs microfluidiques pour la manipulation et l'analyse de fluides
WO2004087281A2 (fr) * 2003-03-31 2004-10-14 Cytonome, Inc. Mise en place de composants microfluidiques, y compris de dispositifs de fractionnement moleculaire, dans un systeme microfluidique
EP1654066B1 (fr) 2003-07-31 2014-11-12 Handylab, Inc. Traitement d'echantillons contenant des particules
JP4377639B2 (ja) * 2003-09-18 2009-12-02 株式会社日立ハイテクノロジーズ ポンプおよびクロマトグラフ用液体ポンプ
DE10360709A1 (de) * 2003-12-19 2005-10-06 Bartels Mikrotechnik Gmbh Mikropumpe und klebstoffreies Verfahren zur Verbindung zweier Substrate
US8852862B2 (en) 2004-05-03 2014-10-07 Handylab, Inc. Method for processing polynucleotide-containing samples
JP3952036B2 (ja) * 2004-05-13 2007-08-01 コニカミノルタセンシング株式会社 マイクロ流体デバイス並びに試液の試験方法および試験システム
US7832429B2 (en) * 2004-10-13 2010-11-16 Rheonix, Inc. Microfluidic pump and valve structures and fabrication methods
JP4887652B2 (ja) * 2005-04-21 2012-02-29 ソニー株式会社 噴流発生装置及び電子機器
CN101213392B (zh) * 2005-06-30 2012-06-27 皇家飞利浦电子股份有限公司 阀装置
EP1938425A4 (fr) * 2005-08-23 2010-09-15 Univ Virginia Composants passifs pour profilage d'un debit microfluide, et procede associe
JP2009509134A (ja) * 2005-09-20 2009-03-05 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 微小流体調節装置
US20080257071A1 (en) * 2005-11-25 2008-10-23 Koninklijke Philips Electronics, N.V. Microfluidic Device with Porous Membrane and an Unbranched Channel
US20070178529A1 (en) * 2006-01-13 2007-08-02 Micronics, Inc. Electromagnetically actuated valves for use in microfluidic structures
US7976795B2 (en) * 2006-01-19 2011-07-12 Rheonix, Inc. Microfluidic systems
US10900066B2 (en) 2006-03-24 2021-01-26 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
DK3088083T3 (en) 2006-03-24 2018-11-26 Handylab Inc Method of carrying out PCR down a multi-track cartridge
US11806718B2 (en) 2006-03-24 2023-11-07 Handylab, Inc. Fluorescence detector for microfluidic diagnostic system
US7998708B2 (en) 2006-03-24 2011-08-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US7959876B2 (en) * 2006-07-17 2011-06-14 Industrial Technology Research Institute Fluidic device
US20080021364A1 (en) * 2006-07-17 2008-01-24 Industrial Technology Research Institute Fluidic device
US7794665B2 (en) * 2006-07-17 2010-09-14 Industrial Technology Research Institute Fluidic device
US8709787B2 (en) 2006-11-14 2014-04-29 Handylab, Inc. Microfluidic cartridge and method of using same
WO2008060604A2 (fr) 2006-11-14 2008-05-22 Handylab, Inc. Système microfluidique utilisé pour amplifier et détecter des polynucléotides en parallèle
ES2877602T3 (es) 2007-07-13 2021-11-17 Handylab Inc Materiales de captura de polinucleótidos y procedimientos de uso de los mismos
US9186677B2 (en) 2007-07-13 2015-11-17 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US8182763B2 (en) 2007-07-13 2012-05-22 Handylab, Inc. Rack for sample tubes and reagent holders
US8287820B2 (en) 2007-07-13 2012-10-16 Handylab, Inc. Automated pipetting apparatus having a combined liquid pump and pipette head system
US9618139B2 (en) 2007-07-13 2017-04-11 Handylab, Inc. Integrated heater and magnetic separator
US8105783B2 (en) 2007-07-13 2012-01-31 Handylab, Inc. Microfluidic cartridge
US8016260B2 (en) 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
DE102007035721B4 (de) * 2007-07-30 2019-02-07 Robert Bosch Gmbh Mikroventil, Verfahren zum Herstellen eines Mikroventils sowie Mikropumpe
WO2009049268A1 (fr) 2007-10-12 2009-04-16 Rheonix, Inc. Dispositif microfluidique intégré et procédés
WO2009066897A2 (fr) * 2007-11-22 2009-05-28 Jae Chern Yoo Dispositif de soupape à film mince et son appareil de commande
NZ591128A (en) * 2008-08-14 2013-10-25 Univ Monash Switches for microfluidic systems
EP2349566B1 (fr) 2008-10-03 2016-01-06 Micronics, Inc. Appareil microfluidique et procédés d'exécution de détermination de groupe sanguin et épreuve de compatibilité croisée
US8100293B2 (en) 2009-01-23 2012-01-24 Formulatrix, Inc. Microfluidic dispensing assembly
NZ597699A (en) * 2009-07-20 2014-04-30 Univ Monash Three-dimensional microfluidic systems
US9618129B2 (en) * 2010-10-07 2017-04-11 Vanderbilt University Normally closed microvalve and applications of the same
CA2829331C (fr) 2011-02-15 2019-01-22 Daniel Brassard Dispositifs microfluidiques 3d a base de membranes elastomeres thermoplastiques a ouverture traversante
DE112011106142B3 (de) * 2011-02-15 2020-12-17 National Research Council Of Canada Durchbrochene thermoplastische Elastomer-Membran, ihre Verwendung und Verfahren zu ihrer Herstellung
WO2012142516A1 (fr) 2011-04-15 2012-10-18 Becton, Dickinson And Company Thermocycleur microfluidique en temps réel à balayage et procédés synchronisés de thermocyclage et de détection optique à balayage
CN103906923A (zh) * 2011-09-27 2014-07-02 株式会社菊池制作所 微型隔膜泵
USD692162S1 (en) 2011-09-30 2013-10-22 Becton, Dickinson And Company Single piece reagent holder
ES2825905T3 (es) 2011-09-30 2021-05-17 Becton Dickinson Co Tira reactiva unificada
EP2773892B1 (fr) 2011-11-04 2020-10-07 Handylab, Inc. Dispositif de préparation d'échantillons de polynucléotides
BR112014018995B1 (pt) 2012-02-03 2021-01-19 Becton, Dickson And Company sistemas para executar ensaio automatizado
CN102671728A (zh) * 2012-05-07 2012-09-19 博奥生物有限公司 一种微流控气动阀芯片
BE1021436B1 (fr) * 2012-10-26 2015-11-20 Francis Henry De Frahan Dispositif mecanique qui regle le flux de fluides.
AU2012393585B2 (en) * 2012-10-29 2016-05-05 Halliburton Energy Services, Inc. Subterranean well tools with directionally controlling flow layer
WO2014093360A1 (fr) 2012-12-10 2014-06-19 Landers James P Filtrage à base de fréquence d'un actionnement mécanique utilisant un dispositif fluidique
US10386377B2 (en) 2013-05-07 2019-08-20 Micronics, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
JP6662776B2 (ja) * 2013-08-12 2020-03-11 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． バルブを用いたマイクロ流体デバイス
DE102014117976B4 (de) * 2014-12-05 2018-10-11 Biflow Systems Gmbh Fluidikvorrichtung und Verfahren zum Betreiben derselben
WO2016098722A1 (fr) * 2014-12-15 2016-06-23 日本電気株式会社 Micropuce, procédé de transfert de liquide, et unité de commande de micropuce
JP5866470B1 (ja) * 2015-05-01 2016-02-17 株式会社朝日Ｆｒ研究所 チェックバルブ及びこれを用いたマイクロ化学チップ
US9995116B2 (en) * 2015-12-11 2018-06-12 Baker Hughes, A Ge Company, Llc Directional screen, system and method
AU2017202369C1 (en) 2016-04-11 2022-09-29 National Research Council Of Canada Patterned Film for Forming Fluid-Filled Blister, Microfluidic Blister, and Kit and Method of Forming
DE102016115016A1 (de) 2016-08-12 2018-02-15 Plan Optik Ag Mikropumpe und Verfahren zur Herstellung einer Mikropumpe
CN116115845A (zh) * 2017-06-24 2023-05-16 纳科斯达格医药股份有限公司 流体管理和测量系统、装置和方法
CN116888364A (zh) * 2021-01-27 2023-10-13 Q T 福禄有限公司 流体泵送装置
EP4209273A1 (fr) * 2022-01-10 2023-07-12 Direct Analysis Puce pour la lyse de micro-organismes, broyeur et son utilisation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US6033191A (en) * 1997-05-16 2000-03-07 Institut Fur Mikrotechnik Mainz Gmbh Micromembrane pump
WO2001089695A2 (fr) * 2000-05-24 2001-11-29 Micronics, Inc. Soupape utilisable dans des structures microfluidiques

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US6033191A (en) * 1997-05-16 2000-03-07 Institut Fur Mikrotechnik Mainz Gmbh Micromembrane pump
WO2001089695A2 (fr) * 2000-05-24 2001-11-29 Micronics, Inc. Soupape utilisable dans des structures microfluidiques

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
GRAVESEN P ET AL: "MICROFLUIDICS - A REVIEW", JOURNAL OF MICROMECHANICS & MICROENGINEERING, NEW YORK, NY, US, vol. 3, 1993, pages 168 - 182, XP000601274, ISSN: 0960-1317 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023596A1 (fr) * 2008-08-25 2010-03-04 Koninklijke Philips Electronics N.V. Filtre microfluidique reconfigurable

Also Published As

Publication number Publication date
US20020155010A1 (en) 2002-10-24

Similar Documents

Publication Publication Date Title
WO2002085522A1 (fr) Dispositif microfluidique comprenant un element partiellement retenu
US6644944B2 (en) Uni-directional flow microfluidic components
US10119619B2 (en) Microfluidic pump and valve structures and fabrication methods
US8512502B2 (en) Microfluidic pump and valve structures and fabrication methods
US6951632B2 (en) Microfluidic devices for introducing and dispensing fluids from microfluidic systems
US6619311B2 (en) Microfluidic regulating device
US20060245933A1 (en) Valve and pump for microfluidic systems and methods for fabrication
CA2408353A1 (fr) Soupape utilisable dans des structures microfluidiques
US10888861B2 (en) Microfluidic flow control and device
WO2002001081A2 (fr) Valve pour structures microfluidiques
US6811695B2 (en) Microfluidic filter

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG US UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP