WO2002067032A3 - Optical alignment system - Google Patents

Optical alignment system Download PDF

Info

Publication number
WO2002067032A3
WO2002067032A3 PCT/US2002/005268 US0205268W WO02067032A3 WO 2002067032 A3 WO2002067032 A3 WO 2002067032A3 US 0205268 W US0205268 W US 0205268W WO 02067032 A3 WO02067032 A3 WO 02067032A3
Authority
WO
WIPO (PCT)
Prior art keywords
alignment system
optical alignment
optical
registration feature
optical module
Prior art date
Application number
PCT/US2002/005268
Other languages
French (fr)
Other versions
WO2002067032A2 (en
Inventor
Steven K Case
Gregory S Mowry
Timothy A Skunes
Patrick J Garfield
John T Mcelreath
Craig D Knighton
Gary A Lenz
Mark L Wilson
Original Assignee
Cyberoptics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/789,124 external-priority patent/US6546172B2/en
Priority claimed from US09/789,185 external-priority patent/US6443631B1/en
Priority claimed from US09/789,125 external-priority patent/US6546173B2/en
Priority claimed from US09/789,317 external-priority patent/US6590658B2/en
Priority claimed from US09/920,366 external-priority patent/US6956999B2/en
Application filed by Cyberoptics Corp filed Critical Cyberoptics Corp
Priority to AU2002252056A priority Critical patent/AU2002252056A1/en
Priority to US10/099,907 priority patent/US20020154870A1/en
Priority to US10/098,743 priority patent/US20020168147A1/en
Publication of WO2002067032A2 publication Critical patent/WO2002067032A2/en
Publication of WO2002067032A3 publication Critical patent/WO2002067032A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2553—Splicing machines, e.g. optical fibre fusion splicer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2555—Alignment or adjustment devices for aligning prior to splicing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3873—Connectors using guide surfaces for aligning ferrule ends, e.g. tubes, sleeves, V-grooves, rods, pins, balls
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4227—Active alignment methods, e.g. procedures and algorithms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G02B6/4231—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment with intermediate elements, e.g. rods and balls, between the elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G02B6/362—Vacuum holders for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3834—Means for centering or aligning the light guide within the ferrule
    • G02B6/3838—Means for centering or aligning the light guide within the ferrule using grooves for light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4238—Soldering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4239—Adhesive bonding; Encapsulation with polymer material

Abstract

An optical alignment system (122) is provided for aligning an optical module (12) of the type which is suitable for use in an optical device. The system (122) includes a reference base (142) having a registration feature aligns with a registration feature of the optical module (12).
PCT/US2002/005268 2001-02-20 2002-02-20 Optical alignment system WO2002067032A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2002252056A AU2002252056A1 (en) 2001-02-20 2002-02-20 Optical alignment system
US10/099,907 US20020154870A1 (en) 2001-02-20 2002-03-15 Optical module with heat dissipation
US10/098,743 US20020168147A1 (en) 2001-02-20 2002-03-15 Optical circuit pick and place machine

Applications Claiming Priority (22)

Application Number Priority Date Filing Date Title
US09/789,124 US6546172B2 (en) 2001-02-20 2001-02-20 Optical device
US09/789,185 US6443631B1 (en) 2001-02-20 2001-02-20 Optical module with solder bond
US09/789,125 US6546173B2 (en) 2001-02-20 2001-02-20 Optical module
US09/789,317 2001-02-20
US09/789,185 2001-02-20
US09/789,124 2001-02-20
US09/789,125 2001-02-20
US09/789,317 US6590658B2 (en) 2001-02-20 2001-02-20 Optical alignment system
US27633601P 2001-03-16 2001-03-16
US27632301P 2001-03-16 2001-03-16
US27633501P 2001-03-16 2001-03-16
US60/276,335 2001-03-16
US60/276,323 2001-03-16
US60/276,336 2001-03-16
US28816901P 2001-05-02 2001-05-02
US60/288,169 2001-05-02
US09/920,366 US6956999B2 (en) 2001-02-20 2001-08-01 Optical device
US09/920,366 2001-08-01
US31839901P 2001-09-10 2001-09-10
US60/318,399 2001-09-10
US34011401P 2001-12-14 2001-12-14
US60/340,114 2001-12-14

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10/098,743 Continuation-In-Part US20020168147A1 (en) 2001-02-20 2002-03-15 Optical circuit pick and place machine
US10/099,907 Continuation-In-Part US20020154870A1 (en) 2001-02-20 2002-03-15 Optical module with heat dissipation

Publications (2)

Publication Number Publication Date
WO2002067032A2 WO2002067032A2 (en) 2002-08-29
WO2002067032A3 true WO2002067032A3 (en) 2003-08-21

Family

ID=27582758

Family Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2002/005268 WO2002067032A2 (en) 2001-02-20 2002-02-20 Optical alignment system
PCT/US2002/005497 WO2002067033A2 (en) 2001-02-20 2002-02-20 Optical module
PCT/US2002/005412 WO2002075415A2 (en) 2001-02-20 2002-02-20 Optical device
PCT/US2002/005498 WO2002067034A2 (en) 2001-02-20 2002-02-20 Optical circuit pick and place machine

Family Applications After (3)

Application Number Title Priority Date Filing Date
PCT/US2002/005497 WO2002067033A2 (en) 2001-02-20 2002-02-20 Optical module
PCT/US2002/005412 WO2002075415A2 (en) 2001-02-20 2002-02-20 Optical device
PCT/US2002/005498 WO2002067034A2 (en) 2001-02-20 2002-02-20 Optical circuit pick and place machine

Country Status (4)

Country Link
CN (2) CN1259585C (en)
AU (2) AU2002306579A1 (en)
GB (2) GB2390174B (en)
WO (4) WO2002067032A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007076888A1 (en) * 2005-12-30 2007-07-12 Fci Optical coupling device
CN102969644A (en) * 2011-08-29 2013-03-13 华新丽华股份有限公司 Alignment structure, laser light source module and optical alignment method
US9983371B2 (en) * 2016-03-08 2018-05-29 Mellanox Technologies, Ltd. Optoelectronic transducer with integrally mounted thermoelectric cooler
CN114929441A (en) * 2019-11-12 2022-08-19 光明机器公司 Module insertion system for robotic assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0600645A1 (en) * 1992-11-30 1994-06-08 AT&T Corp. Single in-line optical package
EP0903600A1 (en) * 1997-09-19 1999-03-24 Nec Corporation Optical device mounting board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0600645A1 (en) * 1992-11-30 1994-06-08 AT&T Corp. Single in-line optical package
EP0903600A1 (en) * 1997-09-19 1999-03-24 Nec Corporation Optical device mounting board

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KOSHOUBU N ET AL: "ADVANCED FLIP CHIP BONDING TECHNIQUES USING TRANSFERRED MICROSOLDERBUMPS", 1999 PROCEEDINGS 49TH. ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE. ECTC 1999. SAN DIEGO, CA, JUNE 1 - 4, 1999, PROCEEDINGS OF THE ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, NEW YORK, NY: IEEE, US, 1 June 1999 (1999-06-01), pages 272 - 277, XP000903804, ISBN: 0-7803-5232-7 *
SASAKI J ET AL: "HYBRID INTEGRATED 4*4 OPTICAL MATRIX SWITCH USING SELF-ALIGNED SEMICONDUCTOR OPTICAL AMPLIFIER GATE ARRAYS AND SILICA PLANAR LIGHTWAVE CIRCUIT", ELECTRONICS LETTERS, IEE STEVENAGE, GB, vol. 34, no. 10, 14 May 1998 (1998-05-14), pages 986 - 987, XP000846136, ISSN: 0013-5194 *

Also Published As

Publication number Publication date
WO2002067032A2 (en) 2002-08-29
GB2387923A (en) 2003-10-29
CN1502054A (en) 2004-06-02
GB2390174A (en) 2003-12-31
AU2002306580A1 (en) 2002-09-04
CN1493013A (en) 2004-04-28
WO2002067033A3 (en) 2003-10-30
GB2387923B (en) 2004-06-02
AU2002306579A1 (en) 2002-09-04
GB2390174B (en) 2004-06-09
CN1259585C (en) 2006-06-14
CN1220086C (en) 2005-09-21
GB0319381D0 (en) 2003-09-17
WO2002067034A2 (en) 2002-08-29
WO2002067033A2 (en) 2002-08-29
WO2002067034A3 (en) 2003-10-30
WO2002075415A2 (en) 2002-09-26
WO2002075415A3 (en) 2003-08-07
GB0319380D0 (en) 2003-09-17

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