WO2002060607A1

WO2002060607A1 - Bearing device for use in purified atmospheres

Info

Publication number: WO2002060607A1
Application number: PCT/EP2002/001062
Authority: WO
Inventors: Peter Lichtinger
Original assignee: Krauss-Maffei Kunststofftechnik Gmbh
Priority date: 2001-02-01
Filing date: 2002-02-01
Publication date: 2002-08-08
Also published as: DE10104555A1; DE10104555B4

Abstract

The invention relates to a bearing device (39,40), which is particularly suitable for use in purified atmospheres such as clean rooms or purified air regions in factories. In order to prevent the rub-off from the bearing device (39, 40) from entering the purified atmosphere, the bearing device (39, 40) is provided with a gas outlet (44,52) which is joined to a vacuum line (42). Gas is thus extracted from the purified element which suctions rub-off which might occur to an external area.

Description

Applicant: Krauss-Maffei Kunststofftechni GmbH

Title: Storage device for use in clean environments

The invention relates to a storage device according to the preamble of claim 1, which is particularly suitable for use in environments with a cleaned atmosphere.

In many production plants, for example in the semiconductor industry or also in the plastics processing industry for the production of plastic parts with high-quality surfaces, it is necessary to work in a cleaned atmosphere in order to prevent particles from adhering to the product to be manufactured. For this purpose, cleaned air is supplied to a room or an area of a production plant at a slightly higher pressure than atmospheric pressure. Although this can prevent dust particles from entering the area from outside, there is still the problem that contamination particles can also be emitted within the area.

A possible source of contaminant particles is eliminated according to the invention in that storage devices are formed within the area with a cleaned atmosphere in accordance with the features of patent claim 1; the dependent claims relate to advantageous embodiments of the invention. The invention is based on the finding that bearing devices in which two elements are in frictional contact with one another produce, due to the friction, abrasion which can contaminate the cleaned atmosphere. According to the invention it is therefore proposed to provide gas extraction means at least in the contact area of the touching elements, so that abrasion particles are drawn off directly from the contact area together with the gas.

This is preferably done through openings in the bearing element or in the element to be stored, which are connected to a vacuum line.

According to the invention, the entire storage device can be provided with gas extraction means, the system being operated in such a way that gas is drawn off only in the area in which the bearing elements are currently in contact with one another. Alternatively, a suction device assigned to the current contact area can be provided, which is moved along with the movable element.

In a structurally simple variant, the bearing element is designed as a U-profile rail, at least one wall of the profile being provided with openings to which a vacuum line extending parallel to the profile rail is connected. The legs of the U-profile preferably bear bridges facing each other so that an undercut groove is formed which encapsulates the inside of the bearing device from the surrounding cleaned atmosphere.

An embodiment of the invention will be explained with reference to the accompanying drawings.

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or the individual segments are connected to different vacuum lines, which are operated depending on the position of the frame.

In an alternative embodiment (not shown), a suction device on the bearing block 39 or on the leg, i.e. be provided in the contact area between the profile rail and the element to be stored, which moves with the frame 30.

The exemplary embodiments in which the openings are operated or move with the frame depending on the movement of the frame have the advantage that less clean air is drawn from the clean area during operation.

Claims

claims

1. Bearing device for storing a movable component (30) with at least one bearing element (40) and at least one bearing element (39) which are movable relative to one another and are in contact with one another, characterized in that at least in the contact area between the bearing element ( 40) and the mounted element (39) gas extraction means (44, 52) are provided.

2. Storage device according to claim 1, characterized in that the gas extraction means openings (44) in the bearing element (40) or the mounted element (39), which are connected to a vacuum line (42).

3. Storage device according to claim 1, characterized in that the gas extraction means are formed by a suction device which is assigned to the contact area and is moved with the mounted element (50).

4. Bearing device according to one of the preceding claims, characterized in that the contact area between the bearing element and the mounted element is shielded from the outside.

5. Bearing device according to claim 2, characterized in that the bearing element is a U-profile rail (40), that the openings (44) are formed in a wall of the profile, and that this perforated wall simultaneously forms part of the wall of the vacuum line (42 ) forms.

6. Storage device according to claim 5, characterized in that a hollow profile (46) extends parallel to the perforated wall.

7. Storage device according to claim 5 or 6, characterized in that the legs of the U-profile rail bear webs, so that an undercut groove is formed.