WO2002046974A1

WO2002046974A1 - Design supporting system and design supporting method

Info

Publication number: WO2002046974A1
Application number: PCT/JP2001/010636
Authority: WO
Inventors: Hirofumi Kitayama; Kazuto Hara; Yasuhiko Amano
Original assignee: Tokyo Electron Limited; Sipec Corporation
Priority date: 2000-12-05
Filing date: 2001-12-05
Publication date: 2002-06-13
Also published as: JPWO2002046974A1; AU2002222582A1

Abstract

A user terminal (21) and a design supporting site (11) are connected through a network (IN). In accordance with an instruction from the user terminal (21), the design supporting site (11) supports the work to design a gas supply unit device which is constructed by combining blocked fluid control units. The design supporting site (11) relates information on each fluid control unit to its symbol mark and stores them, and reads and connects the symbol marks in response to an instruction from the user terminal (21) through the network (IN) thereby to create a flow chart showing the relations among the units visually. On the basis of this flow chart, the design drawings, the parts list and the estimate sheets are created.

Description

Design support system and design support method

The present invention provides a design support system and a design support system capable of supporting the design of a fluid control device (including, for example, a vacuum exhaust line, etc., in addition to the device main body) used in a semiconductor manufacturing device or the like via a network. About the method. '' Background technology

A vertical heat treatment apparatus is known as an apparatus for performing heat treatment such as formation of an oxide film, diffusion of a dopant, annealing or CVD on a semiconductor wafer. This device is composed of a device body A and a utility box B as shown in FIG. The apparatus main body A includes a loading / unloading stage 211 for the wafer cassette C, a transport system for the cassette C wafer, and a vertical heat treatment furnace 212. The utility box B is provided with an input / output unit, for example, a control unit including a controller for a horse moving part, an exhaust unit 22 1 for evacuating the heat treatment furnace, and a processing gas to the heat treatment furnace 2 12 內. And a gas supply unit 222 provided with a gas supply device for supply. A gas supply pipe 223 and an exhaust pipe 224 are provided between the main unit A and the utility box B, and cables (not shown) are provided.

The gas supply unit 222 must be located near the heat treatment furnace 212. The reasons are as follows: 1) If the gas supply unit 2 2 2 is installed far away, it takes a long time to replace the gas in the piping when switching the gas, and 2) the gas flow rate and pressure This is because the response is poor when adjusting. For this reason, it is desirable to install the utility box B on the same floor as the main unit A and in the vicinity. Vertical heat treatment equipment is larger than before due to large diameter wafers and other reasons. The space occupied by one unit is wide. On the other hand, a clean room in which a vertical heat treatment apparatus is installed has a high construction cost and a high running cost. Considering these costs, there is a problem that the cost for operating one heat treatment apparatus increases.

As one of the methods to solve such problems, there is a method of unitizing (blocking) the gas supply equipment that constitutes the gas supply unit. For example, a method of uniting gas supply equipment, such as a pressure reducing valve, an on-off valve, a flow meter (mass flow controller), a check valve, a pressure gauge, etc., into an assembly unit 205 as shown in FIGS. 23 and 24 It is.

As shown in Fig. 23, each unit 205 has a rectangular gas flow path element 25 4 and a mass flow meter or on-off valve device body 25 mounted on the gas flow path element 25 4. Consists of five. As shown in FIG. 23, the gas flow path element 25 4 has a gas flow path 25 1 formed therein, and is provided with coupling portions 25 2, 25 3, for example, a square type made of stainless steel. Device. The connecting portions 25 2 and 25 3 are for connecting the gas flow path elements 25 4 to each other, and are configured as, for example, a convex portion (25 2) and a concave portion (25 3) that are closely connected to each other. You. This assembling unit 205 is composed of a plurality of gas flow path elements 254 combined to form a predetermined flow path network, and can reduce the size of the gas supply unit compared to a configuration using piping. .

Documents disclosing such a technology include Japanese Patent Application Laid-Open No. H11-250150, Japanese Patent Application Laid-Open No. H10-2181385, and Japanese Patent Application Laid-Open No. H10-99632. JP-A-10-169589, JP-A-10-169881, JP-2000-351488 and the like.

When designing such a gas supply unit, the designer (or sales representative) must provide a flow diagram or diagram as shown in Fig. 25 based on the request (required specifications) of the customer (the destination of the equipment). 26 Draw a plan view as shown in 6 and perform design (selection, combination, and arrangement of units) based on the plan. For this reason, requests from customers (required specifications) are brought back and designed using our own CAD system and proposed to customers. However, a gas supply unit designed based on the customer's requirements does not always fit in the installation space required by the customer. Also, the manufacturing cost of an actually designed gas supply unit may exceed the customer's allowance. Conversely, due to the successful miniaturization of the unit, customers have expressed a desire to carry more types and numbers of gas than before, and the maximum efficiency of the space that the gas supply unit can occupy in the semiconductor manufacturing equipment has been reduced. In some cases, customers make design changes that cause

In such a case, it is necessary to conduct a meeting with the customer again and change the specifications. For this reason, it takes a considerable amount of time from the receipt of the customer's required specifications to the completion of the design. In particular, if the customer is far away, a considerable burden will be incurred in meeting with the customer.

With the recent development of computer technology, sales representatives or designers bring portable design equipment, make specifications while discussing specifications with customers, and if they do not meet customer specifications, A method of designing is also conceivable. However, in this method, management of each terminal is complicated. For example, when unit parts are revised or abolished, prices are changed, or related laws and regulations are changed, it is necessary to respond individually to each design device, and updates are likely to be omitted.

Similar problems are not limited to gas supply unit designs, but occur in various situations where designs are based on customer requirements.

Also, in the conventional flow diagram, the fluid passage is clear, but the size of each device and the interval between adjacent devices are not considered at all. On the other hand, in the conventional plan view, the size of each device and the spacing between adjacent devices are clear, but it is difficult to grasp the fluid passage in each device.

As described above, the flow diagram and the plan view complement each other's drawbacks.However, create these flow diagrams and plan views to determine the connection members, and create a parts list and quote. Doing so increases the time and effort involved in the work, and also increases the risk of human error in the work.

The present invention has been made in view of the above situation, and has as its object to facilitate design work.

Another object of the present invention is to reduce the time and money required for designing.

Another object of the present invention is to facilitate design work and to enable a system to be designed interactively with a customer.

It is also an object of the present invention to be able to create a flow chart that clarifies not only the fluid passage but also the size of each device.

Further, another object of the present invention is to improve the efficiency in operations such as the design of a fluid control device and the like.

Disclosure of the invention

A design support system according to a first aspect of the present invention includes a storage unit that stores information of a symbol mark that displays a function, a flow path, and an outer shape of a device, and an input from a user terminal via a network. And a flow diagram creation unit that creates a flow diagram of the flow control device configured to receive and combine the devices by reading and combining the symbol marks stored in the storage unit.

The flow diagram creation unit, for example, displays a flow diagram creation screen on a display device of the user terminal, and creates a flow diagram by combining the symbol on the flow diagram creation screen in accordance with an instruction from the user terminal. The flow diagram creator creates, for example, a flow diagram using the symbol marks according to the drawing data read by the image reading device of the user terminal. The design support system accumulates information on connection members for connecting devices. A connection member information storage unit, and a connection member selection unit that selects a connection member from the connection member information storage unit according to a combination of the symbol marks may be further provided. The design support system may include a piping assembly drawing creating unit that creates a piping assembly drawing from the flow chart created by the flow diagram creating unit.

The design support system may include an order receiving unit that receives an order from the user terminal for the fluid control device related to the flow chart created by the flow chart creating unit.

The design support system may include an ordering unit that, when receiving an order from the user terminal, places an order with respect to the ordered fluid control device to the orderer terminal on the network. The design support system may include a bidding unit that, when receiving an order from the user terminal, receives a bid via the network for the fluid control device for which the order has been received.

The design support system may include a conversion unit for mutually converting the symbol mark and another mark. A design support system according to a second aspect of the present invention includes: a storage unit that stores information relating to a device and its symbol mark in association with each other; and stores the storage in response to an instruction supplied from a user terminal via a network. A schematic diagram that reads symbol marks from the unit and creates a schematic diagram that visually represents the relationship between devices by linking the symbol marks.

The storage unit stores, for example, design drawing data of each device. In this case, the design support system includes a design drawing creating unit that reads out graphic data from the storage unit based on the schematic drawing created by the schematic drawing creating unit and creates a design drawing of the designed system. You may. The design support system may include a list generation unit that generates a list of devices that make up the designed system.

The storage unit may store the cost of each device. In this case, the design support system includes a unit that calculates the cost of the designed system based on the schematic diagram created by the schematic diagram creating unit and the cost stored in the storage unit.

The storage unit may include a unit that stores a schematic diagram of a device designed in advance. In this case, the creating unit may include a unit that reads a schematic diagram stored in the storage unit and edits the schematic diagram to generate a new schematic diagram. The design support system may include a list display unit that displays a list for comparing the contents of the plurality of designed systems.

The design support system may include an ordering unit for ordering parts constituting the designed system.

The device is composed of, for example, a block device for forming a gas unit, and the drawing is a front view showing the arrangement of the devices and the gas flow path. A fluid control device design device according to a third aspect of the present invention includes a storage unit that stores information of a symbol mark that displays a function, a flow path, and an outer shape of a device, and a response unit that responds to an external input. And a flow diagram creation unit that creates a flow diagram of the fluid control device configured by combining the devices by reading and combining the symbol marks stored in the storage unit. A fluid control device design method according to a fourth aspect of the present invention is a fluid control device design method for creating a flow diagram of a fluid control device configured by combining devices, and the method includes the steps of: Symbol marks that indicate the function, flow path, and outline of the device And a procedure for creating a flow diagram using A design method according to a fifth aspect of the present invention stores information relating to a device and a symbol mark thereof in association with each other, and in response to an instruction, designs an apparatus configured by combining the stored devices. An instruction is supplied to the server via a network, and the stored symbol marks are read and linked to create a drawing that visually represents the relationship between the devices. A computer program for causing a computer to function as the above-described system or apparatus, or for executing the procedure of the above-described method may be stored in a storage medium and distributed, or transmitted and received via a network. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram illustrating an overall configuration of a network system according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating an example of a hardware configuration of the server computer illustrated in FIG.

FIG. 3 is a diagram illustrating an example of a hardware configuration of the user terminal illustrated in FIG. FIG. 4 is a diagram showing a functional configuration of the server computer 102 shown in FIG. FIG. 5 is a diagram showing an example of a flowchart.

FIG. 6 is a flowchart showing the flow diagram creation processing.

FIG. 7 is a three-dimensional view of the fluid control device obtained based on the flow chart.

FIG. 8 is a diagram showing a configuration of a design support system according to the second embodiment of the present invention.

FIG. 9 is a diagram showing the configuration of the design site 11 shown in FIG.

FIG. 10 is a diagram showing a configuration example of a user information database (DB). FIG. 11 is a diagram illustrating a configuration example of a component information database.

FIG. 12 is a diagram illustrating a configuration example of the job information DB.

FIG. 13 is a diagram showing an example of the login screen.

FIG. 14 is a diagram showing an example of the work selection menu.

FIG. 15 shows an example of the process selection menu.

FIG. 16A and FIG. 16B are diagrams illustrating an example of a flow diagram creation process.

FIG. 17 is a diagram illustrating a configuration example of a gas supply unit.

FIG. 18 is a diagram showing an example of a flowchart corresponding to the configuration example of FIG.

FIG. 19 is a diagram illustrating an example of a configuration diagram of the gas unit corresponding to FIGS. 17 and 18.

FIG. 20 is a diagram showing an example of a perspective view of the gas unit shown in FIG.

FIG. 21 is a diagram showing an example of the comparison table.

FIG. 22 is a diagram showing a configuration example of a conventional vertical semiconductor manufacturing apparatus.

FIG. 23 is a diagram illustrating an example of the assembly unit.

FIG. 24 is a diagram illustrating an example of the assembly unit.

FIG. 25 is a diagram showing an example of a flowchart of the fluid control device.

FIG. 26 is a diagram illustrating an example of a plan view of the fluid control device. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the network system of the present invention will be described.

As a method for creating a flow diagram of the fluid control device, there is a method proposed in Japanese Patent Application Publication No. 2000-35997 as a reference example. In this embodiment, based on the flow diagram creation method, the network is used to standardize and share the system, to design the fluid control device, and to improve the efficiency of a series of tasks involved in the design. Is to be improved.

(First Embodiment) FIG. 1 is a diagram illustrating an overall configuration of a network system according to the present embodiment. In the figure, reference numeral 100 denotes a network such as the Internet / Intranet. Reference numeral 101 denotes a user terminal, which is used to create a flow diagram of the fluid control device by using a server computer 102 described later, and to place an order for the fluid control device. Although only one user terminal 101 is shown in FIG. 1, a plurality of user terminals exist on the network 100.

Reference numeral 102 denotes a server computer equipped with a database, which creates a flow diagram of a fluid control device using a symbol mark as shown in FIG. 5 according to an input from a user terminal 101. In addition, it creates parts lists and quotations, and receives orders and orders for fluid control equipment. In the present embodiment, the functions of the data processing device and the fluid control device design device of the present invention are realized by the server computer 102.

Reference numeral 103 denotes an order receiving terminal, and the server computer 102 places an order with respect to the fluid control device to the order receiving terminal 103. The contents of the order include subcontracting of the assembly of the fluid control equipment and delivery of the equipment and connecting members. Note that FIG. 1 shows only one order-receiving terminal 103, but a plurality of terminals exist on the network 100.

FIG. 2 shows an example of a hardware configuration of the server computer 102. Reference numeral 201 denotes a CPU which controls various components via a path 206 for transmitting and receiving data, coupling, and the like. Through this path 206, address signals, control signals, various data, and the like are transferred between the components.

Reference numeral 202 denotes a ROM, which stores a control procedure (computer program) of the CPU 201. When the CPU 201 executes this control procedure, it becomes possible to execute processing such as data transmission / reception and coupling. Reference numeral 203 denotes a RAM, which is used as a work memory for transmitting and receiving data, coupling, and the like, and as a temporary storage means for controlling various components. Reference numeral 204 denotes a storage device such as a hard disk storage device, and a database 204a for storing symbol marks, device data, and connection member data is constructed. Reference numeral 205 denotes a network interface for connecting to a network 100 such as the Internet.

In general, a fluid control device is configured by connecting a plurality of devices via a plurality of connection members. The equipment includes two single-function members, such as a master flow controller, an on-off valve, a check valve, a pressure regulator, a filter, a mass flow meter, and a pressure sensor, as well as two single-function members. Some of them (for example, a combination of an on-off valve, a filter, and a pressure sensor), and some have a single-function member (for example, a mass flow controller) with integrated connection members on both sides. In addition, as the connection member, there is a block joint having a rectangular parallelepiped block provided with a communication fluid passage, a tube-type pipe, and the like.

As a symbol mark stored in the database 204a, one that indicates the function, flow path, and outer shape of the device is defined as one symbol mark. For example, if there is a JIS symbol such as a valve, the sum of the JISS symbol and the fluid passage and outer shape is used as one symbol. In the case of a mass flow controller that does not have a JIS symbol such as a mass flow controller, a symbol in which the fluid passage and the outer shape are combined with an abbreviation such as MFCi is used as one symbol mark. The external shape shall represent the dimensions on the plan view. And, even when only the fluid passage or only the dimension such as the length is changed, it is treated as another device, that is, a symbol mark. An appropriate item number is assigned to each device, and the item number and the symbol mark are paired, and a large number of pairs are stored in the database 204a.

In addition, the data of the equipment and the data of the connection members are the three-dimensional external dimensions (the maximum value of the vertical, horizontal, and height and other necessary values) and the plane dimensions of the fluid passage (the length of the fluid passage and the distance from the reference position, respectively). Position of the opening). In addition to these, weight, pressure loss, flow rate, etc. are used as reference values as appropriate. FIG. 3 shows an example of a hardware configuration of the user terminal 101. Reference numeral 301 denotes a CPU, which controls various components via a path 308 in order to transmit, receive, and combine data. Through this path 308, mutual transfer of address signals, control signals, various data, etc. between various components is performed.

Reference numeral 302 denotes a ROM, which stores a control procedure (computer program) of the CPU 310. When the CPU 310 executes this control procedure, it becomes possible to execute processes such as data transfer and coupling. Reference numeral 303 denotes a RAM, which is used as a work memory for data transmission / reception, coupling, and the like, and as a temporary storage unit for controlling various components.

Reference numeral 304 denotes a storage device for storage. Reference numeral 3005 denotes a network interface for connecting to a network 100 such as the Internet. Reference numeral 303 denotes an input device such as a keyboard and a mouse, and is used to input an electronic document or the like. Reference numeral 307 denotes a display device such as a display, which is used to display various screens.

Note that the hardware configuration of the order-receiving terminal 103 is almost the same as the configuration of the user terminal 101.

Next, a functional configuration of the server computer 102 will be described with reference to FIG. As shown in the figure, the server computer 102 has a JOB management function 401, a flow diagram creation function 402, a pipe assembly drawing creation function 400, a piping production drawing creation function 400, and parts ( Parts) List creation function 405, Estimate creation function 406, Ordering function 407, Order function 408, Symbol mark conversion function 409, Master management function 410, Operation management function 4 It has 1 etc.

The job management function 401 performs job status management and purge management. The status management manages the progress (status) of each job (JOB) using the customer item number, arrangement source, process name, flow number, and serial number as JOB identification keys. The three types are "consideration", "provisional" and "confirmed". As a kind, only a JOB worker can correct it by hand. As a result, the revision status of each work is managed, and consistency of work confirmation is checked. Purge-on management manages the progress status (purge-on) of each operation in JOB units, and enables purge-on confirmation, new registration, copy registration, and deletion in JOB units.

The interface diagram creation function 402 displays the flow diagram creation screen on the display device 307 of the user terminal 101 via the network 100, and responds to the instruction from the user terminal 100. The flow chart is created by sequentially pasting the symbol marks of each device registered in advance in the database 204a at predetermined positions on the screen. FIG. 5 shows an example of a flow chart created by the flow chart creation function 402. In the figure, reference numerals 51, 52, 54, 55 denote on-off valves, reference numeral 53 denotes a mass flow controller (MFC), reference numeral 56 denotes a check valve, and reference numeral 57 denotes a mass flow meter (MF M). , 58 is a pressure sensor (PT), 59 is a pre-regulator (RO), 60 is a finoletor, 61 is a manual valve (HV), and 62 is between adjacent lines. Indicates connection piping. Each symbol indicates the name or function of the device.

Further, in the flow chart shown in FIG. 5, the frame indicated by the broken line represents the size of the actual device as viewed from the plane, and the spacing between the devices is also drawn to correspond to the actual size. The bold line indicates the fluid passage, and the white circle at the end indicates the fluid passage opening (port).

For example, in the flow chart shown in Fig. 5, the on-off valves 51, 52 installed on the inlet side of the mass flow controller 53, and the on-off valves 54, 55 installed on the outlet side are one each. It can be read that it is treated as one part attached to the blocks 63, 64.

A fluid passage leading to the on-off valves 52, 55 branches off from a fluid passage leading to the mass flow controller 53, in which the on-off valves 51, 54 are connected to the mass flow controller 53. It can be read that the fluid control device is closed in the width direction without intervention. It can also be seen that the size of the block joints 65, 65 provided on the inlet side and the outlet side of the mass flow controller 53 is included in the mass flow controller 53.

In such a flow diagram, the device is represented by a symbol mark that displays not only its function but also its fluid passage and outer shape, so that all of the functions, fluid passages, and sizes are clear at a glance. Both of the flowcharts and plan views described in (1) above have the disadvantages removed.

FIG. 6 shows a flowchart of the flow diagram creation process. When the flow diagram creation function 402 is selected in a state where the user terminal 101 accesses the server computer 102, the display device of the user terminal 101, not specifically shown, is selected. Displays the flow diagram creation screen and the device menu (step S1). The user sequentially selects devices such as a mass flow controller from the symbol mark file of the database 204a by clicking the device menu using the input state 310 of the user terminal 101. (Step S 2). The selected device is arranged at an appropriate position based on a reference point in the arbitrary point power device on the flow diagram creation screen by, for example, moving a mouse (step S3).

In other words, the user can either configure the two on-off valves with two materials, or configure the two on-off valves with one integrated member, or use a mosquito joint that connects adjacent devices by welding pipes. Select a device that has the corresponding function while considering various design factors such as connection. When a device is selected, the symbol marks for that device are displayed on both sides. These symbol marks are then pasted at desired positions on the flow diagram creation screen sequentially to create a flow diagram.

Next, the plane dimensions of the equipment and the equipment adjacent to it are extracted from the equipment data file in the database 204a, and the appropriate connection members for connecting these equipment are automatically extracted from the connection member data file in the database 204a. Is selected (step S 4). In this way, the devices and the connecting members are automatically arranged according to their plane dimensions, and the flow diagram of the fluid control device is automatically created (step S5). Each processing from step S2 to step S5 is repeated until a selection end instruction (step S6) is issued, and when the selection end instruction (step S6) is issued, a series of flow diagram creation processing is performed. finish. -Here, in the step S4 for selecting a connection member, when the next device is arranged next to the already-arranged device, the process of identifying the block shapes of both devices and selecting the corresponding connection member is performed. Done. The connection member is represented by, for example, an item stamper including a number, and the number substantially corresponds to the opening-to-row distance. There are usually multiple types of connection members that can connect both devices, and the user selects from these, taking into account other conditions, and can configure a fluid control device that meets the required performance. . When a connecting member is selected, the selected connecting member is automatically drawn on the arranged device side, and the next device is automatically drawn on the other arrangement point of the connecting member. For example, when using a block joint having a V-shaped passage, the minimum distance between the openings of the two devices connected by the block joint is determined from the device data, and the block joint that can be used for this connection is a connecting member. If the distance is larger than the minimum distance from the data, multiple types can be found under the condition that it is possible. These multiple types of block joints are displayed on the screen. The user can select an appropriate block coupling in view of other specifications of the fluid control device, such as reducing the overall length or performing alignment with adjacent fluid controllers.

When creating a flow diagram, the item number of the symbol mark is managed as a serial name in the flow diagram, and the selection of each symbol mark of the mass flow controller, pressure regulator, and filter is performed using the previously created “gas name”. Available only from the "one flow" relation matrix.

Returning to Fig. 4, the pipe assembly drawing creation function 4003 uses the MDT function in the above flow chart and replaces each symbol mark and each connection member with a pre-registered 3D drawing In this way, a pipe assembly drawing of the actual dimensions is automatically created. Creation of piping assembly drawings is only possible when the flow diagram creation work status is "provisional" and "confirmed". The piping production drawing creation function 404 takes in the above piping and erect drawing and automatically creates a bird's-eye view, bottom part layout drawing, prefabricated piping drawing, tap piping drawing, and the like. The bird's-eye view shows the piping assembly drawing with hidden line processing. An example is shown in Fig. 7. In the figure, the reference numerals correspond to those shown in FIG. When creating a bird's-eye view with hidden line processing, the existence itself is not deleted even if part or all of the parts are deleted by the concealment process, and the symbol mark items added in the flow diagram Display the pick-up required.

The bottom part layout diagram includes a gasket, a port, a pipe, and a welded joint in addition to the connecting members, and shows these in a plan view. The prefabricated piping diagram is to draw a part where the range of the bottom part layout drawing is input as a three-dimensional diagram. When drawing, the start position on the screen can be indicated. In the tapping drawing, only the tap position for fixing the connection member is drawn as a two-dimensional diagram, and the tap position information is edited for board (sheet metal) design.

The parts (parts) list creation function 405 automatically creates each parts list from the above flow chart and piping assembly drawing. Parts list creation based on the flow diagram can be processed only when the work status of the flow diagram is "provisional" and "fixed". Also, the header information of the parts list can be manually input, and the automatically created part cannot be modified.

The quotation creation function 406 automatically creates each quotation from the above flow chart and piping assembly drawing. Create an integrated quote. Creation of a rough preliminary quote based on a flow diagram can be processed only when the work status of the flow diagram is "provisional" and "finalized". Insufficient information in the estimate is sent to the Fluid Control System Design Equipment 102 side.

Input is possible, and automatically created parts cannot be modified. The order receiving function .407 accepts an order from the user terminal 101 for the fluid control device according to the above flow chart. For example, when the flow diagram is completed, an order button or the like is displayed on the display device 307 of the user terminal 101. When the user wants to order the fluid control device for which the flowchart has been created, the user may operate the order button or the like. This order can be processed only when the work status of the flow diagram is "Fixed".

When the order function 408 accepts an order from the user terminal 101 in the order receiving function 407, the order function 408 sends the order to the order terminal 103 on the network 100 based on the parts list and the quote. An order is placed. For example, if the server computer 102 is operated by a fluid control equipment maker, the subcontractor orders an assembling of the fluid control equipment to the ordering terminal 103 of the subcontractor, or an order for various kinds of functions. It is possible to order delivery of equipment and connection members to the terminal 103. By providing an automatic ordering function in this way, significant efficiency can be achieved, and lead time, inventory, and personnel can be significantly reduced.

A bidding function may be provided instead of or in addition to the order function 408 described above. That is, when an order is received from the user terminal 101, the specifications and the like of the fluid control device are made public on the network 100, and the network is connected with respect to the assembly of the fluid control device and the delivery of the devices and machine parts. Make each company bid through 0.

The symbol mark change function 409, for example, receives information on the function, flow path, and outer shape of the device from the outside, converts the information into a symbol mark, and stores it in the database 204a. In the present embodiment, JIS symbols and abbreviations are used for the symbol marks as described above. However, depending on the device maker or the like, some devices having the same function are represented by other symbols. In addition, there are standards for each country, and the symbols for devices having the same function are different. The symbol mark conversion function 409 converts information represented by various symbols into symbol marks (abbreviations such as JIS symbols and ": MFC") defined by this system and stores them in the database 204a. I do. This makes it possible to unify the symbol marks on the system, thereby improving convenience. Conversely, at the stage of performing the ordering or the like, the symbol on the system can be converted into a symbol or the like used by another person, and the ordering or the like can be performed.

The data stored in the database 204a may be registered not only by the operator of the server computer 102 (such as a fluid control device maker) but also through the network 100. . For example, a device maker or the like can provide information on functions, flow paths, and external shapes of a new product or the like to the server computer 102 via the network 100 via its own terminal. If this is done, the amount of data stored in the database 204a will increase, and the user will have a wider range of choices for creating a flow diagram, and the device manufacturer will encourage the use of their own products. It becomes possible.

The master management function 410 manages the entire maintenance, and the operation management function 410 manages backup, restoration, troubleshooting, security, and production migration plan.

As described above, according to the present embodiment, a flow diagram of the fluid control device can be created using the server computer 102 on the network 100, and It is also possible to perform a series of tasks such as ordering and ordering for the fluid control device according to the figure, and it is possible to improve the efficiency of each process of designing and ordering the fluid control device. .

Furthermore, by providing the above infrastructure, it becomes possible for this system to have a remote maintenance function for the flow control device. In other words, various data on the runaway control device delivered to the user was originally exchanged on the network 100, and the various data were transferred to the server computer 1002 and each order-receiving terminal 100. 3 and can be used as data for remote maintenance. In this embodiment, a flow diagram creation screen is displayed on the display device 307 of the user terminal 101, and the symbol of each device of the database 204a is displayed in accordance with an instruction from the user terminal 100. Although the flow diagram was created by pasting it sequentially to a predetermined position on the screen, other methods may be used.

For example, an image reading device such as a scanner is installed on the user terminal 101 side, and a flow diagram such as handwriting is read. If the server computer 102 receives the drawing data of the flow diagram such as the handwriting via the network 100, the server computer 102 automatically uses the symbol mark of each device in the database 204a according to the drawing data. Create a flow diagram. In this case, if the symbol mark function described above is provided, the handwritten person can create a handwritten flow diagram using his / her most easily usable standard symbols, etc. In the server computer 102, the flow chart can be created by converting into the above-mentioned symbol mark.

In addition to the conversion between symbol marks and other symbols, a conversion function that automatically converts the language (for example, Japanese and English), the unit (for example, Meitonore and inch), etc., may be provided. .

In the first embodiment, only one server computer 102 is shown in FIG. 1, but various processes may be distributed by a plurality of server computers. (Second embodiment)

Next, a second embodiment of the present invention will be described. The second embodiment corresponds to a modification of the first embodiment, and basically inherits the description of the first embodiment.

FIG. 8 is a diagram showing a configuration of a design support system according to the second embodiment of the present invention. As shown in the figure, this system is connected to a design support site 11 located on the Internet IN and the Internet LAN directly or in-house. It comprises a user terminal (design terminal) 21 connected via an internet gateway, an access point, etc., and an order receiving server 31.

The design support site 11 is a device that performs design work, and as shown in FIG. 9, a design server 111, a user information DB (database) 112, a parts information DB 113, and job information. It has a DB 114 and a management terminal 115.

The design server 111 does not need to be physically composed of one computer device, but may be composed of a plurality of computers. In addition to the computer being installed in a semiconductor manufacturing equipment manufacturer's factory, the computer may be partially installed at a service station near a customer to perform distributed processing. The design server 111 executes a design program and performs a design process using information stored in the databases 112 to 114 in response to an instruction from the user terminal 21.

As shown in Fig. 10, the user information DB 112 shows the ID, password, name of the person in charge, the name of the person in charge, the e-mail address, and other information for each user who is allowed to access this site 11 The information of the destination (phone number, facsimile number, etc.) is stored.

Here, “ID” is an identifier assigned to a person who is permitted to access the design site 11. “Password” is authentication information required when accessing the design site 11. The design site 11 identifies the accessor by the ID, and authenticates the accessor by the pair of the ID and the password. “Company” is the name of the entity to which the user belongs, for example, company name, research institute name, university name, and the like. The “person in charge” and “department name” are the name and department of the person in charge of accessing the design site 11 in each business entity. “Contact” is the contact information of the person in charge, and includes information such as address, telephone number, facsimile number, and e-mail address. As a result, only those who are authorized by the semiconductor manufacturing equipment manufacturer can obtain confidentiality access to computers.

Part information DB 113 constitutes a block-type gas unit (fluid control device). This is a DB for storing information on parts, such as part names, part numbers (models), symbol images, 3D modeling data, and unit prices, as shown in Fig. 11. These data will be the basic data for ordering parts when the design is completed. "

Generally, a block type gas unit is configured by connecting a plurality of devices via a plurality of connecting members. The equipment includes single-function members such as mass flow controllers, on-off valves, check valves, pressure regulators, finolators, mass flow meters, and pressure sensors. For example, there are a combination of an on-off valve, a filter, and a pressure sensor), and a single-function member (for example, a mass flow controller) integrally provided with connecting members on both sides. The connection member includes a block joint having a rectangular parallelepiped block provided with a communication fluid passage, a tube-type pipe, and the like. Even if only the fluid path or only the dimensions such as the length are different, they are treated as separate devices.

Here, the name is the name of the device. The model is a part number unique to the device. The symbol image is an image representing the device. As a symbol image, one that displays the function of the device, the flow path, and the outer shape is used as one symbol mark. For example, in the case of a valve with a JIS symbol such as a valve, the combination of the JIS symbol with the fluid passage and outer shape is defined as one symbol mark. In the case of a mass flow controller without a JIS symbol such as a mass flow controller, for example, an abbreviation such as “MFC” with its fluid passage and outer shape combined is used as one symbol mark. The outer shape shall represent the dimensions on the plan view. Each symbol image has a reference point at the end of the gas flow path, and the symbol is used so that the reference points of adjacent symbol images are connected so that the gas flow path does not shift or be separated. Images are automatically placed.

The three-dimensional modeling data is data that defines the shape of each device, and it is possible to generate a hexagonal view, a cross-sectional view, and a perspective view of each device using this data.

Job information DB 114 stores design information created in the past by site 11 I do. As shown in Fig. 12, this design information includes status information, flow diagram data, 3D modeling data, parts list, estimate data, etc. for each job. The status information indicates whether the job has the determined content. The flow diagram is a diagram for facilitating human understanding by associating the flow of gas with the arrangement of components. The three-dimensional modeling data is the three-dimensional design data of the system composed of the modeling data of each part.

The management terminal 115 performs management processing such as updating the contents of the databases 112 to 114.

On the other hand, the user terminal 21 shown in FIG. 8 is configured by a personal computer, a workstation, and the like in which a dedicated browser is installed, and includes a communication unit, a display unit, an input unit, a control unit, and the like. These are carried, for example, by the gas supply unit designer or sales representative, and are used to design the gas supply unit while meeting with the person in charge of the semiconductor manufacturer ordering the gas supply unit.

On the other hand, the order receiving server 31 shown in Fig. 8 is installed at the manufacturer of parts (procs) that make up the gas supply unit, accepts orders for parts (units) from the design terminal 21, and Notify the department in charge of.

Next, the operation of the system having the above configuration will be described.

In order to perform design using the design support site 11, the user must be registered in advance and registered to the user DB 111.

When designing a gas supply unit using the design support site 11 while discussing with a customer, the designer or salesperson can use his / her own user terminal 21 to send the information via an ISP (Internet service provider) or the like. And access the design support site.

The design support site 11 responds to the access and provides the top screen (mouth GUI screen) shown in Fig. 13. The designer inputs the ID and password on this top screen and clicks the “Login” button. The design server 111 determines whether the pair of the ID and the password is registered in the table shown in FIG. 10 on the user information DB 112 or not, and if not registered, an error to that effect is made. Bounce the message.

On the other hand, if the pair of the ID and the password is registered in the user information DB 112, the design server 111 transmits the work selection menu shown in FIG. 14 to the user terminal 21.

The user terminal 21 receives the work selection menu and displays it on the browser. Here, when designing a completely new gas supply unit, select (for example, click) “Job registration” to register a job. Also, when reusing existing data, for example, when using data in the process of designing as it is, or when diverting data designed in the past and partially modifying it, Select “Job Restore”.

To search for a job created in the past, select “Job Search”. The browser notifies the design server 111 of the selected work.

In response to the selection of “Job registration”, the design server 111 assigns a new job number, registers the job in the job information DB 114, and selects a process for the job. The process selection screen shown in FIG. 15 is transmitted to the user terminal 21.

On the other hand, the design server 111 notifies the user terminal 21 of a screen for specifying a job in response to the selection of “job restore”. The designer specifies a job (job number) on this screen and sends it to the design server 111. In response to this notification, the design server 111 notifies the user terminal of a process selection screen shown in FIG.

In addition, the design server 111 notifies the user terminal 21 of a screen for searching for a job in response to the selection of “search”. The designer specifies search conditions (keywords, etc.) on this screen and sends them to the design server 111. In response to this notification, the design server 111 searches the job information DB 114, reads a job that matches the search condition from the job information DB 114, and selects a process for the job. Fig. 15 Is transmitted to the user terminal 21.

When creating a flow diagram, the designer selects “Create Flow Diagram” on the process selection screen shown in Figure 15. The user terminal 21 notifies the design server 111 of the job information and the selected process ′.

5 In response to this notification, the design server 111 determines, for the specified job, whether or not the flow diagram already exists in the job information DB114. If there is, the flow diagram is read out and sent to the user terminal 21 together with a dialog box for component selection and a menu for process selection. The user terminal 21 displays the provided information on the screen as shown in FIG. 16A, for example. Note that the specified job

If there is no flow diagram in the job information D B 114 for Job No. 10, a dialog box for component selection and a menu for processing selection are transmitted to the user terminal 21. The user terminal 21 displays the provided information as shown in FIG. 16B.

The designer inputs part information (information for identifying the part) into a text box displayed on the screen of the user terminal 21 of the user, and the user terminal 21 transmits the information to the design server 1.

Send to 15 1 1 The design server 111 reads the symbol image of the notified component from the component information DB 113 and provides it to the user terminal 21.

The user terminal 21 displays the supplied symbol image, and the designer moves the symbol image to an arbitrary position by a click-and-drop operation and connects the symbol image to the designed flow diagram. For example, a designer may replace two on-off valves with two

20) or a single member (block) that integrates two on-off valves, a force that connects adjacent equipment by welding pipes, a connection using block joints, etc. Select a device that has the corresponding function while considering the design elements.

Specifically, for example, when designing a code 5 1 to 6 1 i shown in FIG. 1 7, a gas supply Yunitto with 5 1 _2-6 1 ₂ gas channel 2 based gun is composed of, 1 Shown in 6B

25 Suyo, at the design stage, for example, would be placed by connecting a mass flow controller (MSF) 5 3 ₂ the valve 6 3 _2. Designer, the text box for the component information input to input information identifying the matching massflow controller 5 3 ₂ to the flow rate and pressure which are required by design. In response to this information, the design server 111 reads out the symbol image of the designated mass flow controller from the component information DB 113 and transmits it to the user terminal 21. The user terminal 21 receives and displays the symbol image. Designers, by click-and-drop operation with this symbol shape, moved, arranged in a position connected to the valve 6 3 ₂ of the flow diagram of already designed.

This information is sent to the user terminal 21 so that the reference point of the mass flow controller 53 ₂ (the end point of the gas flow path) is connected to the reference point of the valve 63 ₂ just as the position of the symbol image of the mass flow controller 53 ₂ Fine-tune.

By repeating such operations and linking the symbol figures indicating the members, the flow chart as shown in Fig. 18 (corresponding to Fig. 17) is completed.

When a part is selected on the user terminal 21, the design server 111 adds the selected part to the parts list stored in association with the job.

When the design is completed, the designer notifies the design server 111 of the completion of the design from the user terminal 21. The design server 111 sends the designed flow diagram together with the job information to the design server. Stored in DB114.

When the design of the flow diagram is completed, the designer can perform any process, such as “Create assembly part”, “Create piping diagram”, “Create spool diagram”, etc. on the process selection menu in FIG. specify. In response to the selection of these processes, the design server 111 uses the modeling data of each part specified by the flow diagram specified by the job number to assemble the designed gas supply unit and piping diagram. A spool diagram is created as shown in FIGS. 19 and 20, and is supplied to the user terminal 21. The user terminal 21 receives and displays the drawing. At this time, the external dimensions of the entire system are also displayed in (vertical: horizontal: high) or (x, y, z) format.

In addition, the designer selects “Parts list creation J or When "Part Number List" is selected, the design server 1 1 1 1 selects "Parts List" or "Part Number List" from the list of parts created in the flow diagram creation stage for the specified job. Is generated and transmitted to the user terminal 12. The user terminal 21 receives and displays the parts list.

When the designer selects "Create quote" on the process selection menu in Fig. 15, the design server 111 connects the unit price of each part and each part to the adjacent parts for the job. It calculates the processing costs, etc. necessary to carry out the calculations, sums them up to create an estimate and a statement, and sends them to the user terminal 12. The user terminal 21 receives and displays the “quotation”.

The designer performs the above-described processing while meeting with the customer, for example. Here, as a result of completing the design, the completed system may not fit within the specified size, or the estimated cost may not meet the needs of the customer.

In such a case, the designer, for example, designs on the spot based on an alternative. At this time, the flow diagram may be completed by using the flow diagram created in the above process and modifying a part of the flow diagram. In this case, for example, while displaying an existing flow diagram, an arbitrary symbol image is selected and moved or deleted, and further, an arbitrary symbol image is called and connected to a created portion.

When the design of multiple proposals is completed, the designer specifies those jobs and specifies the list display. Then, the user terminal 21 displays a list of information such as the drawing, cost estimate, number of parts, and size of the designated job as illustrated in FIG. The design staff and the customer staff compare the size of the occupied space, the gas flow rate, and the number of types of flowing gas among the designed gas supply units in each item, and determine the optimal The selection is repeatedly executed by accessing the computer program via the Internet in an interactive manner until reaching the optimal model. Through this series of processing, the design can be completed without having to send data to the semiconductor manufacturing equipment maker factory. Finally, when the optimal design is determined, the user terminal 21 sends the parts list of the job to the order server 31 of the parts company as order information. The order receiving server 31 notifies the department in charge of the received parts list. The department in charge starts creating parts (units) based on the notified parts list. Accordingly, the period from design to ordering of parts can be shortened, and the delivery time of parts can be shortened.

With such a configuration, it is possible to perform a design that best meets the customer's needs in front of the customer, and to prevent a situation in which the customer goes back and forth between his or her own factory (design department). . Furthermore, using this design support tool, the system can be operated as a system for ordering parts required for the manufacture of the equipment from a part manufacturer based on the parts list required for the determined design.

In the above-described configuration, for example, when the specification and unit price of a part are changed, the contents of the parts information DB 113 of the design server 111 are updated by the management terminal 115. However, this can be reflected in the processing at all user terminals 21.

In the above embodiment, the case where the present invention is applied to the design of a gas supply unit of a vertical furnace as a semiconductor manufacturing apparatus has been described. However, other apparatuses, for example, an etching apparatus, a single-wafer type film forming apparatus, and a coating apparatus It can also be applied to devices such as a developing device and a washing device. In addition, the present invention is not limited to the gas supply unit, but can be applied to a design system such as an evacuation pump system, a process chamber, and a high-frequency power supply unit.

In the above embodiment, the design server 111 and the user terminal 21 are described to perform the design process jointly, but the design method itself is arbitrary. For example, the above-described design program is installed on the user terminal 21 and, at the start of the design, the user accesses the design server 111 to download the information necessary for the design and downloads the information. Alternatively, a method may be employed in which all the design processing is performed on the server 1 and finally the processing result is stored in the job information DB 114 via the design server 111. Conversely, all the design operations may be performed by the design server 111, and the user terminal 21 may function as a mere remote input device and display device of the design server 111.

It should be noted that the system of the present invention can be realized by using a normal computer system without using a dedicated system. For example, by installing the program from a medium (floppy disk, CD-ROM, etc.) storing a program for executing the above-described operation in a computer, a design server 111 that executes the above-described processing is installed. Etc. can be configured. Note that when the above-described functions are shared by the OS or the OS and the application are implemented jointly, only a part other than the OS may be stored in the medium.

It is also possible to superimpose a program on a carrier wave and distribute it via a communication network. For example, the program may be posted on a bulletin board (BBS) of a communication network, and distributed via the network. Then, by starting this program and executing it in the same manner as other application programs under the control of OS, the above-described processing can be executed.

Claims

The scope of the claims

1. A storage unit (204a) that stores the information of the symbol mark that displays the function, flow path, and outline of the device.

A flow in which an input from the user terminal (101) is received via a network, and a flow diagram of a fluid control device configured by combining the devices is created by reading out the symbol marks stored in the storage unit and combining them. Figure creator (201, 202)

A design support system comprising:

2. The flow diagram creation unit (201, 202) displays a flow diagram creation screen on the display device of the user terminal, and combines the symbol marks on the flow diagram creation screen in accordance with an instruction from the user terminal. The design support system according to claim 1, wherein a diagram is created.

3. The flow diagram creation section (201, 202, 111) creates a flow diagram using the symbol mark according to the drawing data read by the image reading device of the user terminal. The design support system according to claim 1.

4. A connection member information storage unit (204a) for storing information on connection members for connecting devices,

The design support system according to claim 1, further comprising: a connection member selection unit (201, 202) for selecting a connection member from the connection member information storage unit according to the combination of the symbol marks. .

5. The design support system according to claim 1, further comprising a piping assembly drawing creation unit (201, 202) for creating a piping assembly drawing from the flow diagram created by the flow diagram creation unit.

6. An order receiving unit (40) for receiving an order from the user terminal for the fluid control device according to the flow diagram created by the flow diagram creating unit (201, 202).

8. The design support system according to claim 1, comprising:

7. When an order is received from the user terminal, an ordering unit that places an order with the orderer terminal (103) on the network with respect to the flow control device having the order.

7. The design support system according to claim 6, comprising: (408).

8. The design according to claim 7, further comprising: a bidding unit that receives a bid via the network for the fluid control device 5 for which an order has been received from the user terminal. Support system.

9. The design support system according to claim 1, further comprising a conversion unit (409) for converting between the symbol mark and another mark.

10. a storage unit 10 (113) for storing information about the device and its symbol mark in association with each other;

In response to an instruction supplied from a user terminal via a network, a symbol map is read from the storage unit and linked to create a schematic diagram that visually represents the relationship between devices, and a schematic diagram creating unit (111) ) When,

Design support system with

15 11. The storage unit (113) stores the design drawing data of each device.

A design drawing creation unit (11 1) for reading graphic data from the storage unit based on the schematic drawing created by the schematic drawing creation unit and creating a design drawing of the designed system; The design support system according to claim 10, wherein

20. The design support system according to claim 10, further comprising a list generation unit (111) for generating a list of devices constituting the system.

13. The storage unit (113) stores the cost of each device, and a system designed based on the schematic diagram created by the schematic diagram creation unit and the cost stored in the storage unit. 11. The design support system according to claim 10, further comprising a cost acquisition unit (111) for calculating the cost of the design.

14. The storage unit includes a unit that stores a schematic diagram of a device designed in advance, The generation unit (111) that reads out the schematic diagram stored in the storage unit and edits the schematic diagram, thereby generating a new schematic diagram. The design support system according to 10.

15. The design support system according to claim 10, further comprising a list display unit (111) for displaying a list for comparing the contents of the plurality of designed systems.

16. The design support system according to claim 11, further comprising: an ordering section (11 1) for ordering parts constituting the designed system.

17. The device according to claim 11, wherein the device is configured from a block device for forming a gas unit, and wherein the drawing is a flow chart showing an arrangement of the device and a gas flow path. Design support system.

18. A storage unit (204a, 113) that stores the information of the symbol mark that displays the function, flow path, and outline of the device.

A flow diagram creation unit (201, 202) that creates a flow diagram of a fluid control device configured by combining devices in response to an external input, by reading and combining the symbol marks stored in the storage unit. , 111)

A fluid control device designing device, comprising:

19. A fluid control device design method for creating a flow diagram of a fluid control device configured by combining devices,

A method for designing a fluid control device, comprising: a procedure for creating a flow diagram using a symbol mark for displaying a function, a flow path, and an outer shape of a device according to an external input. 20. Information about the device and its symbol mark are stored in association with each other, and in response to the command, the command is supplied via a network to a server that designs a device configured by combining the stored devices, Reading the stored symbol marks and linking them to create a drawing that visually represents the relationship between the devices;

A method for designing a fluid control device, comprising:

21. To cause a computer to function as the design support system or the design support device according to any one of claims 1 to 17, or to cause a computer to execute the design method according to claim 19 or 20. Program.