WO2002041006A3 - Silicon capacitive accelerometer - Google Patents

Silicon capacitive accelerometer Download PDF

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Publication number
WO2002041006A3
WO2002041006A3 PCT/IL2001/001046 IL0101046W WO0241006A3 WO 2002041006 A3 WO2002041006 A3 WO 2002041006A3 IL 0101046 W IL0101046 W IL 0101046W WO 0241006 A3 WO0241006 A3 WO 0241006A3
Authority
WO
WIPO (PCT)
Prior art keywords
metal
silicon
capacitive accelerometer
silicon capacitive
proofmass
Prior art date
Application number
PCT/IL2001/001046
Other languages
French (fr)
Other versions
WO2002041006A2 (en
Inventor
Michael Reznik
Original Assignee
Micma Engineering Ltd
Michael Reznik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micma Engineering Ltd, Michael Reznik filed Critical Micma Engineering Ltd
Priority to AU2002223991A priority Critical patent/AU2002223991A1/en
Publication of WO2002041006A2 publication Critical patent/WO2002041006A2/en
Publication of WO2002041006A3 publication Critical patent/WO2002041006A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

Microaccelerometer which comprises a movable silicon proofmass, constututed by two silicon masses and supported by metal beam means, which is constituted by two metal beams. The two metal beams are defined in a metal plate. The proofmass may be part of an intermediate component, which comprises the metal beam means and the two silicon masses. The Microaccelerometer may also comprising two exterior insulating glass plates, carrying stationary electrodes.
PCT/IL2001/001046 2000-11-16 2001-11-12 Silicon capacitive accelerometer WO2002041006A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002223991A AU2002223991A1 (en) 2000-11-16 2001-11-12 Silicon capacitive accelerometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL139730 2000-11-16
IL13973000A IL139730A0 (en) 2000-11-16 2000-11-16 Silicon capacitive accelerometer

Publications (2)

Publication Number Publication Date
WO2002041006A2 WO2002041006A2 (en) 2002-05-23
WO2002041006A3 true WO2002041006A3 (en) 2002-08-01

Family

ID=11074827

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2001/001046 WO2002041006A2 (en) 2000-11-16 2001-11-12 Silicon capacitive accelerometer

Country Status (3)

Country Link
AU (1) AU2002223991A1 (en)
IL (1) IL139730A0 (en)
WO (1) WO2002041006A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7397097B2 (en) 2003-11-25 2008-07-08 Stmicroelectronics, Inc. Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
US7353706B2 (en) 2004-12-28 2008-04-08 Stmicroelectronics, Inc. Weighted released-beam sensor
US7179674B2 (en) 2004-12-28 2007-02-20 Stmicroelectronics, Inc. Bi-directional released-beam sensor
CN100401071C (en) * 2006-08-03 2008-07-09 上海交通大学 Flexible vertical column seesaw type double-layer structural micro-accelerometer
CN103910323B (en) * 2013-01-09 2017-04-12 先技股份有限公司 Micro-electromechanical device
JP5330620B1 (en) * 2013-04-17 2013-10-30 リオン株式会社 Servo type acceleration sensor
CN106841683B (en) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 Quartz pendulum accelerometer and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0306178A2 (en) * 1987-08-18 1989-03-08 Fujitsu Limited Acceleration sensor
JPH04121630A (en) * 1990-09-13 1992-04-22 Nissan Motor Co Ltd Dynamics quantity detection device
EP0937985A1 (en) * 1997-09-10 1999-08-25 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method of producing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0306178A2 (en) * 1987-08-18 1989-03-08 Fujitsu Limited Acceleration sensor
JPH04121630A (en) * 1990-09-13 1992-04-22 Nissan Motor Co Ltd Dynamics quantity detection device
EP0937985A1 (en) * 1997-09-10 1999-08-25 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method of producing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 016, no. 378 (P - 1402) 13 August 1992 (1992-08-13) *

Also Published As

Publication number Publication date
AU2002223991A1 (en) 2002-05-27
WO2002041006A2 (en) 2002-05-23
IL139730A0 (en) 2002-02-10

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