WO2002040973A3 - Verfahren und vorrichtung zur messung von eigenschaften einer probe - Google Patents

Verfahren und vorrichtung zur messung von eigenschaften einer probe Download PDF

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Publication number
WO2002040973A3
WO2002040973A3 PCT/EP2001/013129 EP0113129W WO0240973A3 WO 2002040973 A3 WO2002040973 A3 WO 2002040973A3 EP 0113129 W EP0113129 W EP 0113129W WO 0240973 A3 WO0240973 A3 WO 0240973A3
Authority
WO
WIPO (PCT)
Prior art keywords
signals
measuring
sample
determined
modulation
Prior art date
Application number
PCT/EP2001/013129
Other languages
English (en)
French (fr)
Other versions
WO2002040973A2 (de
Inventor
Barre Stephan Ia
Patrik Varadinek
Benno Orschel
Jorge Lacayo-Pineda
Original Assignee
Barre Stephan Ia
Patrik Varadinek
Benno Orschel
Jorge Lacayo-Pineda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2000156770 external-priority patent/DE10056770A1/de
Priority claimed from DE2000156768 external-priority patent/DE10056768B4/de
Application filed by Barre Stephan Ia, Patrik Varadinek, Benno Orschel, Jorge Lacayo-Pineda filed Critical Barre Stephan Ia
Priority to AU2002220701A priority Critical patent/AU2002220701A1/en
Publication of WO2002040973A2 publication Critical patent/WO2002040973A2/de
Publication of WO2002040973A3 publication Critical patent/WO2002040973A3/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Die Erfindung betrifft Verfahren und Vorrichtungen zur Messung von einer oder mehreren Eigenschaften einer Probe (10). Eine Aufgabe der Erfindung besteht darin, die Messzeit bei solchen Verfahren zu reduzieren Dabei werden einzelnen Parameter der Probe (10) gezielt verändert und ein oder mehrere modulierbare Messsignale (20, 20A, 20B) erzeugt, welche jeweils eine von einem oder mehreren Parametern der Probe (10) abhängige, zu ermittelnde Messgrösse enthalten. Die Messsignale (20, 20A, 20B) werden zur Erzeugung von Detektorsignalen (30) detektiert und die Messgrössen werden aus den so erzeugten Detektorsignalen (30) ermittelt. Die Messsignale (20, 20A, 20B) werden vor dem Detektieren einer Modulation mit bestimmten Modulationsparameter unterworfen. Die modulierten Messsignale (20, 20A, 20B) werden dann zeitlich integriert und Aussagen über die Messgrössen werden anhand der Detektorsignale (30) und der Modulationsparameter der Modulation der modulierten Messsignale (20, 20A, 20B) ermittelt.
PCT/EP2001/013129 2000-11-14 2001-11-13 Verfahren und vorrichtung zur messung von eigenschaften einer probe WO2002040973A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002220701A AU2002220701A1 (en) 2000-11-14 2001-11-13 Method and device for measuring properties of a sample

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE2000156770 DE10056770A1 (de) 2000-11-14 2000-11-14 Verfahren und Vorrichtung zur Messung von Eigenschaften einer Probe in mehreren Punkten der Probe
DE10056770.3 2000-11-14
DE10056768.1 2000-11-14
DE2000156768 DE10056768B4 (de) 2000-11-14 2000-11-14 Verfahren und Vorrichtung zur Messung von Eigenschaften einer Probe mit Meßsignal-Modulation

Publications (2)

Publication Number Publication Date
WO2002040973A2 WO2002040973A2 (de) 2002-05-23
WO2002040973A3 true WO2002040973A3 (de) 2002-10-03

Family

ID=26007676

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/013129 WO2002040973A2 (de) 2000-11-14 2001-11-13 Verfahren und vorrichtung zur messung von eigenschaften einer probe

Country Status (2)

Country Link
AU (1) AU2002220701A1 (de)
WO (1) WO2002040973A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101365336B1 (ko) 2005-10-11 2014-02-19 비티 이미징 피티와이 리미티드 간접 밴드갭 반도체 구조 검사 방법 및 시스템
DE102013209104A1 (de) 2013-05-16 2014-11-20 Carl Zeiss Microscopy Gmbh Vorrichtung und Verfahren zur spektroskopischen Analyse

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652757A (en) * 1985-08-02 1987-03-24 At&T Technologies, Inc. Method and apparatus for optically determining defects in a semiconductor material
WO1992013265A1 (en) * 1991-01-24 1992-08-06 The University Of Maryland Method and apparatus for multi-dimensional phase fluorescence lifetime imaging
WO2001022048A2 (de) * 1999-09-21 2001-03-29 Barre Stephan Verfahren und vorrichtung zur messung von eigenschaften einer probe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652757A (en) * 1985-08-02 1987-03-24 At&T Technologies, Inc. Method and apparatus for optically determining defects in a semiconductor material
WO1992013265A1 (en) * 1991-01-24 1992-08-06 The University Of Maryland Method and apparatus for multi-dimensional phase fluorescence lifetime imaging
WO2001022048A2 (de) * 1999-09-21 2001-03-29 Barre Stephan Verfahren und vorrichtung zur messung von eigenschaften einer probe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SCHOENECKER A ET AL: "SENSITIVITY ANALYSIS FOR THE DETERMINATION OF RECOMBINATION PARAMETERS IN SI WAFERS USING HARMONIC CARRIER GENERATION", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 79, no. 3, 1 February 1996 (1996-02-01), pages 1497 - 1504, XP001059451, ISSN: 0021-8979 *

Also Published As

Publication number Publication date
AU2002220701A1 (en) 2002-05-27
WO2002040973A2 (de) 2002-05-23

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