WO2002037161A3 - Mems-based wavelength equalizer - Google Patents

Mems-based wavelength equalizer Download PDF

Info

Publication number
WO2002037161A3
WO2002037161A3 PCT/US2001/042504 US0142504W WO0237161A3 WO 2002037161 A3 WO2002037161 A3 WO 2002037161A3 US 0142504 W US0142504 W US 0142504W WO 0237161 A3 WO0237161 A3 WO 0237161A3
Authority
WO
WIPO (PCT)
Prior art keywords
wavelength
micro
optical paths
signals
discrete wavelength
Prior art date
Application number
PCT/US2001/042504
Other languages
French (fr)
Other versions
WO2002037161A2 (en
Inventor
Billy L Weaver
Michael E Hamerly
Robert G Smith
Kathy L Hagen
Douglas P Goetz
Silva K Theiss
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to AU2001296985A priority Critical patent/AU2001296985A1/en
Priority to JP2002539862A priority patent/JP2004524549A/en
Priority to EP01977902A priority patent/EP1332399A2/en
Priority to IL15567501A priority patent/IL155675A0/en
Priority to CA002427234A priority patent/CA2427234A1/en
Publication of WO2002037161A2 publication Critical patent/WO2002037161A2/en
Publication of WO2002037161A3 publication Critical patent/WO2002037161A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
    • G02B6/2931—Diffractive element operating in reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
    • G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Abstract

A wavelength specific optical equalizer for selectively attenuating discrete wavelength signals contained within a wavelength division multiplexed signal without affecting the adjacent signals. The wavelength equalizer includes a demultiplexer adapted to separate a wavelength division multiplexed signal into a plurality of discrete wavelength signals and to direct each of the discrete wavelength signals along a plurality of first optical paths. A micro-mechanical device comprising at least one micro-mirror is optically coupled with each of the first optical paths. A plurality of second optical paths is positioned to receive the discrete wavelength signals reflected from the respective micro-mirrors. At least one actuator is mechanically coupled with each of the micro-mirrors. The actuators are adapted to selectively displace one or more to divert at least a portion of the discrete wavelength away from the corresponding second optical paths. The orientation of the micro-mirror determines a signal strength of the discrete wavelength signal reflected to the corresponding second optical path. A multiplexer is provided to combine the discrete wavelength signals in the plurality of second optical paths into a reconstituted wavelength division multiplexed signal.
PCT/US2001/042504 2000-10-31 2001-10-05 Mems-based wavelength equalizer WO2002037161A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU2001296985A AU2001296985A1 (en) 2000-10-31 2001-10-05 Mems-based wavelength equalizer
JP2002539862A JP2004524549A (en) 2000-10-31 2001-10-05 MEMS type wavelength equalizer
EP01977902A EP1332399A2 (en) 2000-10-31 2001-10-05 Mems-based wavelength equalizer
IL15567501A IL155675A0 (en) 2000-10-31 2001-10-05 Mems-based wavelength equalizer
CA002427234A CA2427234A1 (en) 2000-10-31 2001-10-05 Mems-based wavelength equalizer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70259100A 2000-10-31 2000-10-31
US09/702,591 2000-10-31

Publications (2)

Publication Number Publication Date
WO2002037161A2 WO2002037161A2 (en) 2002-05-10
WO2002037161A3 true WO2002037161A3 (en) 2003-02-27

Family

ID=24821849

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/042504 WO2002037161A2 (en) 2000-10-31 2001-10-05 Mems-based wavelength equalizer

Country Status (7)

Country Link
EP (1) EP1332399A2 (en)
JP (1) JP2004524549A (en)
AU (1) AU2001296985A1 (en)
CA (1) CA2427234A1 (en)
IL (1) IL155675A0 (en)
TW (1) TW548232B (en)
WO (1) WO2002037161A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6721475B1 (en) 2000-12-22 2004-04-13 Cheetah Omni, Llc Apparatus and method for providing gain equalization
US6834154B2 (en) 2001-07-24 2004-12-21 3M Innovative Properties Co. Tooling fixture for packaged optical micro-mechanical devices
US6798954B2 (en) 2001-07-24 2004-09-28 3M Innovative Properties Company Packaged optical micro-mechanical device
US6771859B2 (en) 2001-07-24 2004-08-03 3M Innovative Properties Company Self-aligning optical micro-mechanical device package
FR2849919B1 (en) * 2003-01-15 2006-02-17 Jobin Yvon Sas DEVICE FOR INJECTING SUBTRACTION OF SPECTRAL COMPONENTS FOR OPTICAL FIBERS.
FR2858405B1 (en) * 2003-07-30 2006-05-26 Get Enst Bretagne INTERFEROMETRIC SYSTEM FOR SELECTING OPTICAL BEAM SPECTRAL COMPONENTS
US7262918B1 (en) * 2006-09-06 2007-08-28 Wafermasters Incorporated Light beam conditioner
EP2423720B1 (en) * 2010-08-25 2013-07-10 Sercalo Microtechnology Ltd. Wavelength-tuneable optical filter and reflective element
TWI648561B (en) 2012-07-16 2019-01-21 美商唯亞威方案公司 Optical filter and sensor system
WO2023046420A1 (en) * 2021-09-22 2023-03-30 Asml Netherlands B.V. Source selection module and associated metrology and lithographic apparatuses

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5933270A (en) * 1996-12-06 1999-08-03 Nec Corporation Optical equalizer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5933270A (en) * 1996-12-06 1999-08-03 Nec Corporation Optical equalizer

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BRIGHT V M ET AL: "SURFACE MICROMACHINED MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS", IEICE TRANSACTIONS ON ELECTRONICS, INSTITUTE OF ELECTRONICS INFORMATION AND COMM. ENG. TOKYO, JP, vol. E80-C, no. 2, 1 February 1997 (1997-02-01), pages 206 - 213, XP000773349, ISSN: 0916-8524 *
FORD J E ET AL: "DYNAMIC SPECTRAL POWER EQUALIZATION USING MICRO-OPTO-MECHANICS", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 10, no. 10, 1 October 1998 (1998-10-01), pages 1440 - 1442, XP000786675, ISSN: 1041-1135 *
GILES C R ET AL: "A SILICON MEMS OPTICAL SWITCH ATTENUATOR AND ITS USE IN LIGHTWAVE SUBSYSTEMS", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 5, no. 1, January 1999 (1999-01-01), pages 18 - 25, XP000823383, ISSN: 1077-260X *
LAST M ET AL: "2-DOF actuated micromirror designed for large DC deflection", 3RD INTERNATIONAL CONFERENCE ON MICRO OPTO ELECTRO MECHANICAL SYSTEMS (OPTICAL MEMS). MOEMS 99. PROCEEDINGS, PROCEEDINGS OF MOEMS 99, MAINZ, GERMANY, 30 AUG.-1 SEPT. 1999, 1999, Mainz, Germany, Inst. Mikrotechnik, Germany, pages 239 - 243, XP002223104 *

Also Published As

Publication number Publication date
IL155675A0 (en) 2003-11-23
AU2001296985A1 (en) 2002-05-15
CA2427234A1 (en) 2002-05-10
WO2002037161A2 (en) 2002-05-10
JP2004524549A (en) 2004-08-12
TW548232B (en) 2003-08-21
EP1332399A2 (en) 2003-08-06

Similar Documents

Publication Publication Date Title
WO2001042844A3 (en) Wavelength selective cross-connect switch using a mems shutter array
KR100993500B1 (en) Modular all-optical cross-connect
JP3662754B2 (en) Wavelength selective add-drop device
CA2198836A1 (en) Optical Wavelength Multiplexer/Demultiplexer
WO2000034972A3 (en) Reconfigurable multiwavelength network elements
EP1091614A3 (en) Switch for optical signals
WO2003098856A3 (en) Reconfigurable optical add-drop module, system and method
CA2285128A1 (en) Switch for optical signals
WO2001027666A3 (en) Optical multiplexer/demultiplexer using resonant grating filters
US8363991B2 (en) Bidirectional wavelength cross connect architectures using wavelength routing elements
WO2002037161A3 (en) Mems-based wavelength equalizer
CA2411012A1 (en) Monolithic reconfigurable optical multiplexer systems and methods
US7231147B1 (en) System and method of wavelength add/drop multiplexing having client configurability
EP1148358A3 (en) An arrayed waveguide grating type optical multiplexer/demultiplexer
Pu et al. Client-configurable eight-channel optical add/drop multiplexer using micromachining technology
CA2372344A1 (en) Planar lightwave wavelength blocker
JP2002323683A5 (en)
US20030133655A1 (en) Multi-output arrayed waveguide grating demultiplexer
EP1445976A3 (en) Wavelength path monitoring/correcting apparatus in transparent optical cross-connect and method thereof
JP2001156716A5 (en)
AU4900701A (en) Reconfigurable add/drop multiplexer for fiber optic networks
JPH0933750A (en) Wavelength-multiplex multiplexing and demultiplexing circuit
JP4168778B2 (en) Optical function device
EP1041762A3 (en) Communication system
JP4366955B2 (en) Optical functional device and optical functional module

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2427234

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 155675

Country of ref document: IL

Ref document number: 2002539862

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 2001977902

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2001977902

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWW Wipo information: withdrawn in national office

Ref document number: 2001977902

Country of ref document: EP