WO2002033348A1 - Mesure optique d'un objet a l'aide d'un appareil de mesure de coordonnees, de cameras et de sources d'eclairage - Google Patents

Mesure optique d'un objet a l'aide d'un appareil de mesure de coordonnees, de cameras et de sources d'eclairage Download PDF

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Publication number
WO2002033348A1
WO2002033348A1 PCT/DE2001/003897 DE0103897W WO0233348A1 WO 2002033348 A1 WO2002033348 A1 WO 2002033348A1 DE 0103897 W DE0103897 W DE 0103897W WO 0233348 A1 WO0233348 A1 WO 0233348A1
Authority
WO
WIPO (PCT)
Prior art keywords
camera
illumination source
light
incident light
transmitted light
Prior art date
Application number
PCT/DE2001/003897
Other languages
German (de)
English (en)
Inventor
Frank Brosette
Mario Schroeder
Original Assignee
Mycrona Gesellschaft für innovative Messtechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mycrona Gesellschaft für innovative Messtechnik mbH filed Critical Mycrona Gesellschaft für innovative Messtechnik mbH
Priority to AU2002220497A priority Critical patent/AU2002220497A1/en
Priority to DE10194460T priority patent/DE10194460D2/de
Publication of WO2002033348A1 publication Critical patent/WO2002033348A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Definitions

  • the invention relates to devices and a method for the optical measurement of an object, with coordinate measuring machine, camera, in particular video camera, and illumination source for illuminating an object arranged in the beam path of the illumination source and in the field of view of the camera in incident light or transmitted light, according to the preambles of claims 1 and 11 and 12 respectively.
  • Devices with optical coordinate measuring devices and multi-sensor coordinate measuring devices with movable measuring tables are known, the coordinate measuring devices being equipped with a video sensor in which incident light or transmitted light is used to illuminate the field of view of the video sensor.
  • the incident light can be a two-dimensional incident light or a ring light or the incident light can be reflected in a lens of the video sensor.
  • such devices usually have three-dimensional data processing software.
  • a measuring device for measuring structures on a transparent substrate has become known from DE 198 19 492 A1, an incident-light illuminating device which illuminates from above and having an imaging device above a movable measuring table, consisting of a quartz glass mask, being used.
  • a transmitted-light illuminating device is provided below the measuring table, the optical axis of which is aligned with that of the incident-light illuminating device, the measuring table being designed as an open frame.
  • a measuring table for optical coordinate measuring machines with a height measuring device arranged above the measuring table for the Z-axis and a lighting source arranged below the table has become known; an object is irradiated with transmitted light.
  • a coordinate table has become known for coordinate measuring machines, above which there is a lens and a camera (CCD matrix).
  • a light source and lighting optics for the transmitted light irradiation of a test object from below To the side of the measuring table there is another, fixed evaluation unit, such as a measuring camera, of a flat incident light measuring system.
  • Devices of this type generally have the disadvantage that when an object is viewed or measured on both sides, the object must be turned over and relaunched, so that of course considerably more time and work must be spent than only one side of the object. Furthermore, a reference must be created for the most precise measurements.
  • the invention is therefore based on the object of further improving a device of the type mentioned in such a way that an object no longer needs to be turned during the inspection from opposite sides, the inspections can be carried out more quickly and also no additional reference is required.
  • the object is achieved according to the invention by a device for optical measurement of an object, with coordinate measuring machine, camera, in particular video camera, and illumination source for illuminating an object arranged in the beam path of the illumination source and in the field of view of the camera in incident light or transmitted light, characterized in that the device comprises a first camera with a first illumination source and a second camera with a second illumination source, which are arranged opposite one another with the object between them, the illumination sources being able to illuminate the object simultaneously or successively from opposite sides and the first camera to illuminate the object in the Reflected light from the first and transmitted light from the second illumination source and the second camera is able to detect the object in reflected light from the second and transmitted light from the first illumination source.
  • the optical axes of the two cameras essentially coincide and are essentially anti-parallel.
  • the first or second illumination source when the object is detected by the first or second camera, the first or second illumination source is used to illuminate the object in incident light, and at the same time the second or first illumination source is used to illuminate the object in transmitted light.
  • this comprises a measuring table movable in the horizontal XY plane with a glass plate for supporting the object on the glass plate, the first camera with the first lighting source above the measuring table and the second camera with the second lighting source below the Measuring table is arranged.
  • the invention has the advantage that it allows an object to be viewed both from above and from below, and additionally at the same time, so that the object no longer has to be turned over when inspecting from opposite sides.
  • An object can thus be measured and inspected simultaneously from above and from below, the incident light from one illumination source or camera serving as transmitted light for the other camera and vice versa, which makes such a device more versatile.
  • the inspection can also be carried out more quickly because the two sides of the object can be measured simultaneously. Furthermore, the measurements are more accurate because no additional reference is required.
  • Lenses can be connected upstream of the cameras in their field of vision.
  • the incident light generated by the first or second illumination source can be, for example, a planar incident light or a ring light or a multi-segment ring light.
  • a beam splitter in particular a partially transparent mirror, which serves to reflect the incident light and / or the transmitted light into the first or second lens.
  • the two cameras can be moved together or individually parallel and / or vertically to the measuring table.
  • the lighting sources can be cold light sources or laser light sources or LEDs.
  • the first or second cameras can also have a focusing device.
  • the stated object is also achieved by a device for the optical measurement of an object, with coordinate measuring machine, camera, in particular video camera, and illumination source for illuminating an object arranged in the beam path of the illumination source and in the field of view of the camera in incident light or in transmitted light, characterized in that the Device comprises a first and a second camera, which are arranged opposite one another with the object between them, the first camera being able to detect the object in reflected light and at the same time the second camera being able to detect the object in transmitted light from the illumination source, or vice versa.
  • the object is further achieved by a method for the optical measurement of an object, with coordinate measuring machine, camera, in particular video camera, and illumination source for illuminating an object arranged in the beam path of the illumination source and in the field of view of the camera in incident light or transmitted light, characterized in that a first and a second camera capture the object, which are opposed to each other the object are arranged between them, the first camera capturing the object in reflected light and at the same time the second camera capturing the object in transmitted light from the illumination source, or vice versa.
  • the drawing shows a device comprising a coordinate measuring machine with a camera for the optical measurement of an object.
  • the device for the optical measurement of an object 12, shown schematically in the drawing, comprises a coordinate measuring machine 3 which is suitably held in a known manner and which has a camera 5, which is in particular a video camera 5.
  • the coordinate measuring machine 3 can be moved in a suitable manner in the z direction or in height.
  • An illumination source 6 generates a beam 17 for illuminating the object 12 from above in incident light or also in transmitted light.
  • the beam 17 of the illumination source 6 is reflected into the field of view of the camera 5 by means of a partially transparent mirror 7.
  • the object to be measured 12 which is located in the beam path of the beam 17 of the illumination source 6 and in the field of view of the camera 5, is placed on a measuring table 1 which can be moved in the xy plane or in the plane, the contact surface of the measuring table 1 for the Object 12 is a glass plate 13 that is transparent to the beam 17.
  • the measuring table 1 is supported on the floor in a known and suitable manner (not shown in the drawing) and can likewise carry the coordinate measuring machine 3 and the optical equipment, such as camera 5, mirror 7 and lighting source 6, for example by means of a portal support.
  • the coordinate measuring machine 3 can have, at its lower end facing the measuring table 1, an objective 11 arranged in the beam path 17 or in the direction of the camera-object axis, into which the incident light from the illumination source 6 is then reflected.
  • the first camera 5 is preferably oriented such that it coincides the axis of the first camera object with the optical axis 15 of the first camera 5.
  • the illumination source 10 thus illuminates the object 12 equally from below, in transmitted light or in incident light.
  • the cameras 5, 8 of the device are followed by lenses 11, 14 in their field of view, which is shown in the drawing. Then the incident light from the lower illumination source 10 can likewise be reflected into the objective 14 by means of the partially transparent mirror 9.
  • the second camera 8 is preferably aligned in such a way that it coincides with the axis second camera object and the optical axis 16 of the second camera 8.
  • the two cameras 5, 8 are thus directed facing each other, so that the beam 17 of the incident light from the first illumination source 6 is directed from above onto the object 12 equally as transmitted light through the object 12 into the second camera 8, preferably the optical ones Axes 15, 16 of the two cameras 5, 8 coincide.
  • the beam of reflected light from the lower illumination source 10 from below onto the object 12 simultaneously serves as transmitted light through the object 12, which is captured by the upper camera 5 in its field of vision.
  • the two cameras 5, 8 can be moved together or individually parallel and / or vertically to the measuring table 1.
  • the invention is particularly suitable for devices for optically measuring an object because it allows an object to be viewed both from above and from below, and additionally at the same time, so that the object is not inspected from opposite sides needs to be turned more. An object can thus be measured and inspected simultaneously from above and from below, the incident light from one illumination source or camera serving as transmitted light for the other camera and vice versa, which makes such a device more versatile.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure optique d'un objet, avec un appareil de mesure de coordonnées (3), une caméra (5, 8), notamment une caméra vidéo (5, 8) et une source d'éclairage (6, 10) pour éclairer en lumière réfléchie ou en lumière transmise, un objet (12) placé dans la trajectoire du faisceau de la source d'éclairage (6, 10) et dans le champ de vision de la caméra (5, 8). Une seconde caméra (8) comportant une seconde source d'éclairage (10) se trouve dans le sens de l'axe optique (15, 16) « caméra-objet », face à la première caméra (5) après l'objet (12). Les deux caméras (6, 8) sont orientées en opposition mutuelle et la seconde source d'éclairage (10) peut éclairer l'objet (12) de manière similaire en lumière réfléchie. Ladite lumière réfléchie de la première source d'éclairage (6, 10) peut également être guidée sous forme de lumière transmise à travers l'objet (12) dans le champ de vision de la seconde caméra (8).
PCT/DE2001/003897 2000-10-16 2001-10-16 Mesure optique d'un objet a l'aide d'un appareil de mesure de coordonnees, de cameras et de sources d'eclairage WO2002033348A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002220497A AU2002220497A1 (en) 2000-10-16 2001-10-16 Optically measuring an object using a coordinate measuring device, cameras and lighting sources
DE10194460T DE10194460D2 (de) 2000-10-16 2001-10-16 Optische Vermessung eines Objektes mit Koordinatenmessgerät, Kamera und Beleuchtungsquellen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20017739.7 2000-10-16
DE20017739U DE20017739U1 (de) 2000-10-16 2000-10-16 Vorrichtungen zur optischen Vermessung eines Objektes, mit einem Koordinatenmeßgerät mit Kamera

Publications (1)

Publication Number Publication Date
WO2002033348A1 true WO2002033348A1 (fr) 2002-04-25

Family

ID=7947710

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/003897 WO2002033348A1 (fr) 2000-10-16 2001-10-16 Mesure optique d'un objet a l'aide d'un appareil de mesure de coordonnees, de cameras et de sources d'eclairage

Country Status (3)

Country Link
AU (1) AU2002220497A1 (fr)
DE (2) DE20017739U1 (fr)
WO (1) WO2002033348A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100410623C (zh) * 2006-09-30 2008-08-13 赵政康 移动龙门式光学坐标测量仪
DE102012100987B3 (de) * 2012-02-07 2013-07-11 Miho Holding-Gmbh Inspektionsvorrichtung und Inspektionsverfahren
US20210197233A1 (en) * 2017-10-27 2021-07-01 Robert Bosch Gmbh Acquisition device and method for acquiring sets of multiple object data of at least one object

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10211760A1 (de) * 2002-03-14 2003-10-02 Werth Messtechnik Gmbh Anordnung und Verfahren zum Messen von Geometrien bzw. Strukturen von im Wesentlichen zweidimensionalen Objekten mittels Bildverarbeitungssenorik
DE102012105923B4 (de) * 2012-07-03 2014-02-27 Sd Mechatronik Gmbh Vorrichtung und Verfahren zur Abrasionsmessung
DE102014205705B4 (de) 2014-03-27 2020-11-05 Carl Zeiss Industrielle Messtechnik Gmbh Leuchttisch geeignet für Anwendungen in der Metrologie sowie Koordinatenmessgerät mit einem solchen Leuchttisch
DE102015114575B4 (de) * 2015-09-01 2017-05-24 Stephan Krebs Vorrichtung zur Druckbildkontrolle
DE102016102360B4 (de) * 2016-02-11 2018-06-07 Kohnle GmbH Messanordnung und Verfahren zum optischen Vermessen von Zerspanungswerken
DE102016004713A1 (de) * 2016-04-19 2017-10-19 ISW GmbH Vorrichtung und Verfahren zur optischen Vermessung eines Objekts
DE102020118319B4 (de) * 2020-07-10 2021-09-16 Heilig & Schwab GmbH & Co. KG Verfahren und Vorrichtung zur Vermessung eines Messobjekts

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3712958C1 (en) * 1987-04-16 1988-10-06 Rollei Fototechnic Gmbh Method and device for photographically measuring a three-dimensional object
US4947474A (en) * 1988-10-24 1990-08-07 Mathias Zirm Mechanism of observation and recording operation on an object
DE4442787C1 (de) * 1994-12-01 1996-06-13 Zeiss Carl Jena Gmbh Koordinatentisch für Koordinatenmeßgeräte
JPH10221041A (ja) * 1997-02-10 1998-08-21 Toppan Printing Co Ltd 欠陥検査方法
DE19805040A1 (de) * 1998-02-09 1999-08-12 Wegu Messtechnik Durchlichtbeleuchtung für Koordinatenmeßmaschinen
DE19819492A1 (de) * 1998-04-30 1999-11-11 Leica Microsystems Meßgerät zur Vermessung von Strukturen auf einem transparenten Substrat

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3712958C1 (en) * 1987-04-16 1988-10-06 Rollei Fototechnic Gmbh Method and device for photographically measuring a three-dimensional object
US4947474A (en) * 1988-10-24 1990-08-07 Mathias Zirm Mechanism of observation and recording operation on an object
DE4442787C1 (de) * 1994-12-01 1996-06-13 Zeiss Carl Jena Gmbh Koordinatentisch für Koordinatenmeßgeräte
JPH10221041A (ja) * 1997-02-10 1998-08-21 Toppan Printing Co Ltd 欠陥検査方法
DE19805040A1 (de) * 1998-02-09 1999-08-12 Wegu Messtechnik Durchlichtbeleuchtung für Koordinatenmeßmaschinen
DE19819492A1 (de) * 1998-04-30 1999-11-11 Leica Microsystems Meßgerät zur Vermessung von Strukturen auf einem transparenten Substrat

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100410623C (zh) * 2006-09-30 2008-08-13 赵政康 移动龙门式光学坐标测量仪
DE102012100987B3 (de) * 2012-02-07 2013-07-11 Miho Holding-Gmbh Inspektionsvorrichtung und Inspektionsverfahren
US20210197233A1 (en) * 2017-10-27 2021-07-01 Robert Bosch Gmbh Acquisition device and method for acquiring sets of multiple object data of at least one object

Also Published As

Publication number Publication date
DE20017739U1 (de) 2001-01-11
AU2002220497A1 (en) 2002-04-29
DE10194460D2 (de) 2003-10-02

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