WO2002012766A1 - Valve device and pipeline system - Google Patents

Valve device and pipeline system Download PDF

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Publication number
WO2002012766A1
WO2002012766A1 PCT/JP2001/006828 JP0106828W WO0212766A1 WO 2002012766 A1 WO2002012766 A1 WO 2002012766A1 JP 0106828 W JP0106828 W JP 0106828W WO 0212766 A1 WO0212766 A1 WO 0212766A1
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WO
WIPO (PCT)
Prior art keywords
valve
valve device
closing
valve seat
present
Prior art date
Application number
PCT/JP2001/006828
Other languages
French (fr)
Japanese (ja)
Inventor
Hiroshi Yokota
Shingo Yokota
Original Assignee
Kabushiki Kaisha Yokota Seisakusho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yokota Seisakusho filed Critical Kabushiki Kaisha Yokota Seisakusho
Priority to AU2001278702A priority Critical patent/AU2001278702A1/en
Publication of WO2002012766A1 publication Critical patent/WO2002012766A1/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00Means in valves for absorbing fluid energy
    • F16K47/02Means in valves for absorbing fluid energy for preventing water-hammer or noise
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/36Valve members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/42Valve seats

Definitions

  • the present invention relates to a valve device that controls opening and closing of a flow path, and a pipe system using the valve device.
  • valve devices are widely used in addition to the typical on-off valve as shown in Fig. 12 to open and close the valve port by connecting and disconnecting the valve element to the valve seat in a pipeline.
  • the shape of the valve body 3 is needle-shaped, shell-shaped, V-port-shaped, etc. Is to reduce the amount smoothly.
  • this has some effect, it is not an essential solution.
  • the reason is that if the flow rate is reduced while keeping the smooth flow path shape, the flow velocity tends to increase rather than reducing the impact at the moment of closing the valve to block the flow.
  • the prolonged time to valve closure due to the valve body shape with a large closing stroke was the only cause, and the shock was only moderated. It is self-evident that prolonging the time to valve closure, i.e. closing the valve slowly, alleviates the impact, and that if it is under acceptable use conditions, the valve should be closed slowly.
  • the second conventional method is a method in which the valve element is operated in two steps, consisting of a main valve element and a small-diameter auxiliary valve element, and is operated in sequence. There is the same problem as in the first method, because it is to be reduced.
  • the third conventional method is to accept the shock that occurs when the valve is closed, and then attach a separate shock absorber to the pipeline to mitigate the shock.Although this also has some effect, symptomatic treatment is also available. This is not an essential solution.
  • a bypass method has been proposed especially in the semiconductor manufacturing field and the like. That is, as shown in FIG. 14, fluid is supplied to the supply source 3 1—line 3 2—line 3 3—supply source 31 in a loop circulating state, and branch piping is performed from the loop. After taking out the fluid for use point 34, use valve V1 to open or close, or, as illustrated in FIG. 15, install bypass discharge valve V2 in parallel with valve V1. This is a method of opening and closing the valve V1 while partially leaking the fluid in the pipeline from the no-pass discharge valve V2. In the semiconductor manufacturing field and the like, the valve VI may be opened and closed in a short time in order to accurately switch and supply various kinds of chemicals and gases while preventing liquid dripping and mutual mixing.
  • the present invention provides a valve device in which a valve element is separated from and opened to a valve seat to open and close a flow path, wherein the valve element and the valve seat correspond to each other at a closed surface portion at the end of a valve closing stroke. Irregularities are provided that fit into each other with a predetermined gap, and a flow path in the gaps of the fitted concaves and convexes is formed in a dog that bends the traveling direction of the flowing fluid to increase resistance loss. It features that.
  • the front-M3 projection may also serve as a seal when the valve is closed.
  • valve seat is formed so as to be able to advance and retreat with respect to a valve box accommodating the valve seat, and at the end of the valve closing stroke, the valve seat receives the valve body while retreating along the traveling direction of the flowing fluid. It may be configured in a structure.
  • the pipe system may be provided with any one of the valve devices.
  • the control of the opening and closing of the pipeline is performed reliably, and the operation is stable, and even if the valve is rapidly opened and closed, the time immediately before the valve closes and the time when the valve starts to open is controlled.
  • a valve device and a pipeline system that hardly cause impacts such as water hammer, chattering, and hunting were obtained.
  • FIG. 1 is a longitudinal sectional view (partial front view) of a first embodiment of the valve device of the present invention.
  • FIG. 2 is a longitudinal sectional view of a main part of the first embodiment of the valve device of the present invention, showing a fully opened state of the valve.
  • FIG. 3 is a longitudinal sectional view of a main part of the first embodiment of the valve device of the present invention, showing a valve closed state.
  • FIG. 4 is a longitudinal sectional view (partially front view) of a main part of a second embodiment of the valve device of the present invention. is there.
  • FIG. 5 is a longitudinal sectional view (partially front view) of a main part of a third embodiment of the valve device of the present invention.
  • FIG. 6 is a longitudinal sectional view (partially front view) of a main part of a fourth embodiment of the valve device of the present invention.
  • FIG. 7 is a vertical sectional view (partially front view) of a main part of a fifth embodiment of the valve device of the present invention.
  • FIG. 8 is a longitudinal sectional view (partial front view) of a sixth embodiment of the valve device of the present invention.
  • FIG. 9 is a longitudinal sectional view (partial front view) of a seventh embodiment of the valve device of the present invention.
  • FIG. 10 is a longitudinal sectional view (partial front view) of an eighth embodiment of the valve device of the present invention.
  • FIG. 11 is an explanatory diagram of an embodiment of the pipeline system of the present invention.
  • FIG. 12 is a longitudinal sectional view (partially front view) showing an example of a valve device of the prior art.
  • FIG. 13 is a longitudinal sectional view (partial front view) showing an example of a valve device of the prior art.
  • FIG. 4 is an explanatory diagram showing an example of a pipeline system of a conventional technique.
  • FIG. 15 is an explanatory diagram showing an example of a conventional pipeline system. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is an overall view of a first embodiment of a valve device of the present invention
  • FIGS. 2 and 3 are main views of the valve device.
  • FIG. 2 is a fully opened state of the valve
  • FIG. 3 is a closed state of the valve. It is shown.
  • the inside of the valve box 1 of the valve device V which is interposed in a pipe (not shown), has an outlet flow from the inlet flow path a through the valve port b and the flow path c.
  • the fluid may flow in the direction of d ⁇ c ⁇ b ⁇ a, but there is no problem in operation. The description will be made assuming that it is flowing.
  • a valve body 3 is disposed facing a valve seat 4 forming a valve port b, and the valve body 3 is mounted on a valve shaft 2 which hermetically penetrates the valve box 1 through a seal portion 8, and When the valve shaft 2 is driven by an appropriate driving device 11, the valve body 3 is configured to be separated from and connected to the valve seat 4 to open and close the valve port b.
  • the valve body 3 provided with the seal portion 7 is shown, but it may be provided on the valve seat 4 side, and the seal portion may be provided. May be selected as appropriate.
  • Corresponding closing surfaces of the valve body 3 and the valve seat 4 are provided with concave and convex portions 5 and 6 which are fitted with a predetermined gap at the end of the valve closing process! It is open.
  • the concave and convex portions 5 and 6 have a shape in which the flow path c in the gap between the two when they are fitted into each other repeatedly bends the traveling direction of the flowing fluid in a zigzag shape, thereby increasing the resistance loss. It is formed.
  • a shape in which the traveling direction of the flowing fluid is bent a plurality of times in a right angle direction is illustrated, but the angle of each bend may be an angle other than a right angle.
  • the number of turns may be other than the number shown.
  • the location of the uneven portions 5 and 6 is not particularly limited as long as it is on the corresponding closing surfaces of the valve body 3 and the valve seat 4. From the standpoint of ease of manufacture, it is best to form an annular groove on the closed surface and combine it as shown in Figs. Alternatively, a corresponding depression may be formed on the other side.
  • the concavo-convex portions 5 and 6 may be formed on the inside or on both sides.
  • the energy is attenuated by the labyrinth effect just before the valve is closed.
  • the labyrinth effect is a phenomenon in which a fluid flowing through a bent gap generates energy loss (resistance loss) due to viscous friction resistance, bending resistance, speed change, and the like.
  • a multi-stage labyrinth is formed in the axial direction for the purpose of the shaft seal in many cases, and in the labyrinth for the shaft seal, irregularities are formed in order to avoid the difficulty of assembling in the axial direction.
  • the labyrinth that is, the concave and convex portions 5; 6) is arranged on an opposed flat surface, and the concave and convex portions 5; 6 are sufficiently separated from each other as the valve body 3 approaches the valve seat 4. Because they can be fitted, an ideal "staggered" labyrinth is formed, and thus can exhibit a significant labyrinth effect.
  • the present invention not only can the opening and closing control of the pipeline be performed reliably, The operation is stable, and even if the valve opens and closes rapidly, impacts such as water hammer, chattering, and hunting are unlikely to occur immediately before the valve closes or when it opens. In addition, since it is compact and has a small number of parts, it can be easily standardized and manufactured at low cost, and maintenance is easy.
  • FIGS. 4 to 7 illustrate these.
  • FIG. 4 shows a second embodiment of the present invention, in which the concave and convex portions 5 and 6 are formed as grooves with an oblique slope, and the concave and convex portions are also formed inside the seal portion 7.
  • FIG. 5 shows a third embodiment of the present invention, in which concave and convex portions 5 and 6 are formed in a step-like shape.
  • FIG. 6 shows a fourth embodiment of the present invention, in which the concave and convex portions 5 and 6 themselves (the concave and convex portion 6 in the figure) also have the function of the seal portion when the valve is closed.
  • FIG. 5 shows a third embodiment of the present invention, in which concave and convex portions 5 and 6 are formed in a step-like shape.
  • FIG. 6 shows a fourth embodiment of the present invention, in which the concave and convex portions 5 and 6 themselves (the concave and convex portion 6 in the figure) also have the function of the seal portion when the valve is closed.
  • FIG. 7 shows a fifth embodiment of the present invention, in which the height of the convex portions 5; 6 is changed so that the degree of insertion of the concave portions 5; 6 'is changed even when the valve closing speed is constant.
  • the height of the projections of the projections and depressions 6 is changed stepwise. All other configurations and operation modes are the same as those of the first embodiment, and thus detailed description is omitted.
  • FIG. 8 shows a sixth embodiment of the present invention, in which the principle of the present invention is applied to a diaphragm valve device often used in the field of semiconductor manufacturing and the like, and an uneven portion 56 is formed. is there.
  • the uneven portion 5 may be formed integrally with the diaphragm 21 or may be separately mounted.
  • FIG. 9 shows a seventh embodiment of the present invention.
  • the pressure of the fluid is received in the direction opposite to the pressure acting direction of the fluid on the valve body 3.
  • a balance means for adding at least a part of the working pressure of the fluid related to the valve body 3 is added. That is, the valve shaft 2 is further provided with a pressure receiving plate 22.
  • the pressure receiving plate 22 is attached to the valve box 1 so as to be able to move forward and backward through the seal portion 23.
  • a bag chamber e hermetically sealed between the box 1 and the box 1 is connected to the inlet channel a by the communication path 24.
  • the pressure receiving plate 2 2 Is set substantially equal to the pressure receiving area of the valve element 3.
  • the pressure in the inlet passage a that pushes down the valve body 3 and the internal pressure in the bag chamber e that pushes up the pressure receiving plate 22 are the same pressure. Therefore, the acting force for opening and closing the valve body 3 has no relation to the pressure of the flowing fluid, and the operation of the valve body 3 does not become unstable even when the valve body 3 is installed in an unstable pressure line, and light operation is performed. It operates accurately with force, and does not generate water hammer due to the suction of the valve body 3 to the valve seat 4, and the durability of the valve body 3 and the valve seat 4 is improved.
  • the valve diameter can be increased because the pressure balance means is not affected by the uneven pressure around the valve body 3.
  • the seal portion 23 between the pressure receiving plate 22 and the -valve box 1 is illustrated as an O-ring type in the figure, but it is a matter of course that other types such as a bellows and a diaphragm may be used. .
  • the communication passage 24 that communicates the bag chamber e and the inlet flow passage a it is possible to eliminate the fine flow passage by taking a sufficient inside diameter of the passage, and the fluid passing therethrough cannot flow in one direction. Since the flow goes to a dead end in the bag room e and reciprocates, clogging due to foreign substances such as dust * sand grains and dust is unlikely to occur.
  • the driving of the valve shaft 2 is exemplified by a manual type.
  • the valve shaft 3 is moved forward and backward by a so-called external screw type driving mechanism that rotates the handle after stopping the rotation of the valve shaft 2. It is designed to open and close.
  • FIG. 10 shows an eighth embodiment of the present invention, in which a valve seat 4 is formed so as to be able to advance and retreat via a seal portion 25 with respect to a valve box 1 containing it.
  • the valve seat 4 is configured to receive the valve element 3 while retreating along the traveling direction of the flowing fluid (ie, downward in the figure).
  • the valve seat 4 is moved in the upstream direction (i.e., upward in the figure) by urging means 26 (a compression spring is illustrated in the figure).
  • urging means 26 a compression spring is illustrated in the figure.
  • Direction can move within a predetermined range sandwiched between the projections of the valve box 1 or the locking pins.
  • the valve seat 4 is urged by the urging means 26 to advance to a position where it is biased upstream.
  • the valve body 3 is retracted in the downstream direction (that is, in the downward direction in the figure) in a state of being integrated with the valve body 3, and is decelerated by the urging means 26 and stopped. I do.
  • the stop position may be a position offset in the downstream direction, or a position where the urging force of the urging means 26 and the valve closing force coincide with each other.
  • the momentary retreat of the valve seat 4 is similar to the momentary pulling of the hand when catching a ball, and the water hammer due to the sudden closing of the fluid is reduced. Things.
  • valve device of the eighth embodiment in which the concave and convex portions 5 and 6 are omitted is also available. Conceivable.
  • the biasing means 26 is more convenient if the biasing force can be adjusted, because the operating mode of the valve device can be adjusted.
  • the biasing force adjustment method can be variously designed according to the prior art, for example, by attaching a screw-type adjusting member, and a detailed description thereof will be omitted.
  • valve device of the present invention When incorporating the valve device of the present invention into a pipeline system, it is sufficient to simply interpose the pipeline 32 as shown in the embodiment of FIG.
  • this valve device V When operating this valve device V, even if it is suddenly opened and closed, the impact of a water hammer etc. does not occur, so that deterioration of the pipeline, damage and dust generation are suppressed, and There is no need to install a shock absorbing device, and it is not necessary to take any palliative treatment measures such as opening and closing the valve and leaking fluid from the bypass discharge valve with much time, making it easier to self-inoculate So it is very convenient and economical.
  • each figure shows a lift type on-off valve type, but other types of on-off valves (for example, butterfly valve, gate valve, etc.), check valves, automatic control valves, etc. It is effective to widely apply to various types of valves.
  • on-off valves for example, butterfly valve, gate valve, etc.
  • check valves for example, check valves, automatic control valves, etc. It is effective to widely apply to various types of valves.
  • a separate damping means may be additionally provided, and in order to prevent cavitation and the like, comb teeth are provided on the valve body 3 and the valve seat 4.
  • a sawtooth-shaped projection or a rectifying grid, or the shape of the valve closing surface may be a cone or a curved surface.
  • a compression spring or a tension spring may be appropriately selected, and any type may be used as long as it has the same effect.
  • the coil spring another type of spring or elastic member may be used. May be used, or 4 mm may be attached to the spring case. Further, it may be linked to a weight, or a pneumatic or hydraulic device may be applied. Needless to say, the mounting position need not be limited to the illustrated position.
  • an electric, electromagnetic, pneumatic, or hydraulic driving device may be used, or the valve may be manually driven to open and close.
  • the valve may be manually driven to open and close.
  • seal member to be attached to each seal part
  • O-ring, nose, seal, seal ring, diaphragm, bellows, etc. may be applied as appropriate according to the usage conditions, or other elastic members may be attached. If good sealing properties can be maintained by direct contact, the sealing member may be omitted.
  • the type and shape of the inlet channel a and the outlet channel d of the valve box 1 may be appropriately selected, such as a screw-in type or a flange type, depending on the use conditions.
  • a strainer or the like may be appropriately provided.
  • the valve device of the present invention may be installed in a pipe, or may be installed at a pipe terminal and used for discharge. Further, the valve device of the present invention can be applied not only to the case where the flowing fluid is a liquid but also to the case of a gas.
  • the present invention has a simple and rational structure, so that the design 'manufacturing' can be easily maintained and compact, the cost is low, the opening and closing control of the pipeline is reliably performed, and the operation is stable.
  • a valve device that is unlikely to cause impacts such as water hammer, chattering, and hunting immediately before the valve closes or when the valve starts to open is obtained.
  • this valve device deterioration, breakage and dust generation of the pipeline are suppressed, and there is no need to separately install a shock absorbing device. This eliminates the need for symptomatic treatment, such as leaking air from the bypass discharge valve, and provides an easy and convenient pipe system. Therefore, the present invention has a remarkable effect.

Abstract

A valve device which ensures reliable opening/closing control of pipeline and a stabilized operation such that even when valve opening/closing operation is quickly effected, water hammering, chattering, hunting or the like hardly occurs immediately before valve closing or at the instant of valve opening; and a pipeline system. A valve device having a valve disk adapted to move away from and into contact with a valve seat to open/close a flow path, characterized the mutually associated closure surface regions of the valve disk and valve seat are provided with uneven portions adapted to fitted to each other with a predetermined clearance therebetween in the final stage of valve closing stroke, and the flow path of the clearance between the uneven portions fitted to each other is formed having a shape to bend the direction of travel of the flowing fluid to increase the resistance loss; and a pipeline system characterized by having such valve device inserted therein.

Description

明 細 書 弁装置及び管路システム 技術分野  Description Valve equipment and pipeline system Technical field
本発明は、 流路を開閉制御する弁装置、 及ぴ該弁装置を使用する管路システ ムに関するものである。 背景技術  The present invention relates to a valve device that controls opening and closing of a flow path, and a pipe system using the valve device. Background art
一般に、 管路に介設し、 弁体を弁座に離接させて弁口を開閉する弁装置は、 第 1 2図に示すような典型的な開閉弁のほか、 各種のものが広く使用されてい る o  In general, various types of valve devices are widely used in addition to the typical on-off valve as shown in Fig. 12 to open and close the valve port by connecting and disconnecting the valve element to the valve seat in a pipeline. O
ところで、 これら弁装置はいずれも、 急速な弁開閉操作等によって急閉鎖す ると、 その悪影響として、 軽度な場合はいわゆるチャタリングやハンチング、 重度な場合はいわゆるウォーターハンマ一等の衝撃を生じる問題があつた。 この悪影響を回避するために、 従来各種の方法が是案されてきた。  By the way, when all of these valve devices are suddenly closed by a rapid valve opening / closing operation etc., the adverse effect is that there is a problem such as so-called chattering and hunting in a mild case and a so-called water hammer in a severe case. Atsuta. Various methods have been proposed in the past to avoid this adverse effect.
従来の第 1の方法は、 第 1 3図に例示したように、 弁体 3の形状をニードル 状、 砲弾状、 Vポート状などの形状にして、 流過流量を弁閉鎖の直前に連続的 に絞ってスムーズに減らして行くというものである。 しかし、 これはある程度 の効果はあるものの、 本質的な問題解決とはならない。何故なら、 スムーズな 流路形状のまま流量を絞ると、 却って流速は速まる傾向となるので、 その流過 を遮断する弁閉鎖の瞬間の衝撃の解消にはあまり寄与しておらず、 むしろ、 弁 閉鎖ストロークの大きい弁体形状になつて弁閉鎖までの時間が延びたことが真 の原因となつて衝撃が緩和されたに過ぎない。弁閉鎖までの時間を延ばせば、 即ちゆっくりと弁を閉鎖させれば衝撃が緩和されることは、 もとより自明であ り、 もしそれが許される使用条件下であるなら、 ゆっくりと弁を閉鎖させれば 事足りるものであって、上記の手段を講じても単なる屋上屋となりかねない。 従来の第 2の方法は、 弁体を主弁体と小口径の副弁体の二段構えにして順番 に操作する方法であるが、 流過流量を弁閉鎖の直前に連続的にスムーズに減ら そうとするものであるから、 前記第 1の方法と同じ問題がある。 In the first conventional method, as shown in Fig. 13, the shape of the valve body 3 is needle-shaped, shell-shaped, V-port-shaped, etc. Is to reduce the amount smoothly. However, although this has some effect, it is not an essential solution. The reason is that if the flow rate is reduced while keeping the smooth flow path shape, the flow velocity tends to increase rather than reducing the impact at the moment of closing the valve to block the flow. The prolonged time to valve closure due to the valve body shape with a large closing stroke was the only cause, and the shock was only moderated. It is self-evident that prolonging the time to valve closure, i.e. closing the valve slowly, alleviates the impact, and that if it is under acceptable use conditions, the valve should be closed slowly. If That's enough, and taking the above measures can be a mere rooftop. The second conventional method is a method in which the valve element is operated in two steps, consisting of a main valve element and a small-diameter auxiliary valve element, and is operated in sequence. There is the same problem as in the first method, because it is to be reduced.
従来の第 3の方法は、 弁閉鎖時に起こる衝撃は容認した上で、 その衝撃を緩 和する衝撃吸収装置を管路に別途装着するものであり、 これもある程度の効果 はあるものの、 対症療法に過ぎず、 本質的な問題解決とはならない。  The third conventional method is to accept the shock that occurs when the valve is closed, and then attach a separate shock absorber to the pipeline to mitigate the shock.Although this also has some effect, symptomatic treatment is also available. This is not an essential solution.
そして、 従来の第 4の方法として、 特に半導体製造分野等で提案されてきた のが、 バイパス方式である。即ち、 第 1 4図に例示したように、 流体供給を供 耠源 3 1—管路 3 2—管路 3 3—供給源 3 1のループ回流状態にして、 そのル ープから分岐配管してユースポイント 3 4向けの流体を取り出したのち該弁 V 1で開閉操作する方法、 もしくは、 第 1 5図に例示したように、 該弁 V 1と並 列にバイパス放出弁 V 2を設けて、 ノ ィパス放出弁 V 2から管路内流体を一部 漏洩させながら該弁 V 1を開閉する方法である。 半導体製造分野等においては 、 多種の薬液やガスを液ダレや相互混入を防ぎつつ的確に切り替えて供給する ために、 該弁 V Iを短時間で開閉する場合があり、 弁開閉駆動は短時間で作動 する電動式、 電磁式、 気圧式等が採用されることが多く、 この場合にウォータ 一ハンマー等の衢撃によって管路が破損して薬液やガスが噴出したり管路内で 発塵したりすることを避ける必要があるために、 かかる提案がされているもの である。 この第 4の方法の場合は、 ループ回路やバイパス放出弁により衝撃源 を^ 1¾するので、 衝撃の発生を抑制する効果はあるが、 付設システムや流体漏 洩分などのコストが高くなるという問題がある。  As a fourth conventional method, a bypass method has been proposed especially in the semiconductor manufacturing field and the like. That is, as shown in FIG. 14, fluid is supplied to the supply source 3 1—line 3 2—line 3 3—supply source 31 in a loop circulating state, and branch piping is performed from the loop. After taking out the fluid for use point 34, use valve V1 to open or close, or, as illustrated in FIG. 15, install bypass discharge valve V2 in parallel with valve V1. This is a method of opening and closing the valve V1 while partially leaking the fluid in the pipeline from the no-pass discharge valve V2. In the semiconductor manufacturing field and the like, the valve VI may be opened and closed in a short time in order to accurately switch and supply various kinds of chemicals and gases while preventing liquid dripping and mutual mixing. Operated electric, electromagnetic, pneumatic, etc. are often used, in which case the pipeline is damaged by water or a hammer or the like, and the chemical solution or gas is ejected or dust is generated in the pipeline. Such proposals have been made because it is necessary to avoid such situations. In the case of the fourth method, the impact source is suppressed by a loop circuit or a bypass discharge valve, so that the impact is suppressed by 1%. However, the cost of the attached system and the amount of fluid leakage increases. There is.
そこで、 本発明は、 これら従来技術の問題点を抜本的に解決し、 設計 '製作 Therefore, the present invention drastically solves these problems of the prior art, and
'維持管理が容易且つコンパクトで、 コストが低廉であり、 管路の開閉制御を 確実に行うと共に、 ¾が安定していて、 たとえ弁開閉が急速に行われる場合 でも、 その弁閉鎖直前や開き始めの瞬間にウォーターハンマー、 チャタリング 、 ハンチング等の衝撃が起こりにくい弁装置及ぴ管路システムを得る事を目的 とする。 発明の開示 容易 Easy maintenance and compact, low cost, reliable control of pipeline opening and closing, ¾ is stable, even if valve opens and closes rapidly, just before or after valve closes Water hammer and chatter at the first moment It is an object of the present invention to obtain a valve device and a pipeline system that are unlikely to cause impact such as hunting. Disclosure of the invention
前記目的を達成するため、 本発明は、 弁体が弁座に離接して流路を開閉する 弁装置において、 弁体と弁座の相対応する閉鎖面部位に、 弁閉鎖行程の終期に 互いに所定の隙間をもって嵌入し合う凹凸部が設けられ、 且つ、 嵌入し合った 該凹凸部の隙間の流路が、 流過流体の進行方向を曲折させて抵抗損失を増大さ せる 犬に形成されたことを特徵としている。  In order to achieve the above object, the present invention provides a valve device in which a valve element is separated from and opened to a valve seat to open and close a flow path, wherein the valve element and the valve seat correspond to each other at a closed surface portion at the end of a valve closing stroke. Irregularities are provided that fit into each other with a predetermined gap, and a flow path in the gaps of the fitted concaves and convexes is formed in a dog that bends the traveling direction of the flowing fluid to increase resistance loss. It features that.
前—M3凸部は弁閉鎖時のシール部を兼ねてもよい。  The front-M3 projection may also serve as a seal when the valve is closed.
又、 前記弁座が、 それを収容する弁箱に対して進退移動可能に形成され、 弁 閉鎖行程の終期に該弁座が流過流体の進行方向に沿つて後退しつつ前記弁体を 受け止める構造に構成されてもよい。  Further, the valve seat is formed so as to be able to advance and retreat with respect to a valve box accommodating the valve seat, and at the end of the valve closing stroke, the valve seat receives the valve body while retreating along the traveling direction of the flowing fluid. It may be configured in a structure.
又、 前記いずれかの弁装置を備えた管路システムに構成されてもよい。 これらの構成によって、 本発明においては、 管路の開閉制御を確実に行うと 共に、 作動が安定していて、 たとえ弁開閉が急速に行われる場合でも、 その弁 閉鎖直前や開き始めの瞵間にウォーターハンマー、 チャタリング、 ハンチング 等の衝撃が起こりにくい弁装置及ぴ管路システムを得たものである。 図面の簡単な説明  Further, the pipe system may be provided with any one of the valve devices. With these configurations, in the present invention, the control of the opening and closing of the pipeline is performed reliably, and the operation is stable, and even if the valve is rapidly opened and closed, the time immediately before the valve closes and the time when the valve starts to open is controlled. In addition, a valve device and a pipeline system that hardly cause impacts such as water hammer, chattering, and hunting were obtained. BRIEF DESCRIPTION OF THE FIGURES
第 1図は、 本発明の弁装置の第 1実施例の縦断面図 (一部正面図) である。 第 2図は、 本発明の弁装置の第 1実施例の要部縦断面図であり、 弁全開状態 を示す。  FIG. 1 is a longitudinal sectional view (partial front view) of a first embodiment of the valve device of the present invention. FIG. 2 is a longitudinal sectional view of a main part of the first embodiment of the valve device of the present invention, showing a fully opened state of the valve.
第 3図は、 本発明の弁装置の第 1実施例の要部縦断面図であり、 弁閉鎖状態 を示す。  FIG. 3 is a longitudinal sectional view of a main part of the first embodiment of the valve device of the present invention, showing a valve closed state.
第 4図は、 本発明の弁装置の第 2実施例の要部縦断面図 (一部正面図) で ある。 FIG. 4 is a longitudinal sectional view (partially front view) of a main part of a second embodiment of the valve device of the present invention. is there.
第 5図は、 本発明の弁装置の第 3実施例の要部縦断面図 (一部正面図) で あ 。  FIG. 5 is a longitudinal sectional view (partially front view) of a main part of a third embodiment of the valve device of the present invention.
第 6図は、 本発明の弁装置の第 4実施例の要部縦断面図 (一部正面図) で ¾ 。  FIG. 6 is a longitudinal sectional view (partially front view) of a main part of a fourth embodiment of the valve device of the present invention.
第 7図は、 本発明の弁装置の第 5実施例の要部縦断面図 (一部正面図) で ある。  FIG. 7 is a vertical sectional view (partially front view) of a main part of a fifth embodiment of the valve device of the present invention.
第 8図は、 本発明の弁装置の第 6実施例の縦断面図 (一部正面図) である。 第 9図は、 本発明の弁装置の第 7実施例の縦断面図 (一部正面図) である。 第 1 0図は、 本発明の弁装置の第 8実施例の縦断面図 (一部正面図)である。 第 1 1図は、 本発明の管路システムの実施例の説明図である。  FIG. 8 is a longitudinal sectional view (partial front view) of a sixth embodiment of the valve device of the present invention. FIG. 9 is a longitudinal sectional view (partial front view) of a seventh embodiment of the valve device of the present invention. FIG. 10 is a longitudinal sectional view (partial front view) of an eighth embodiment of the valve device of the present invention. FIG. 11 is an explanatory diagram of an embodiment of the pipeline system of the present invention.
第 1 2図は、 従来技術の弁装置の一例を示す縦断面図 (一部正面図)である。 第 1 3図は、 従来技術の弁装置の一例を示す縦断面図 (一部正面図)である。 第】 4図は、 徒来技 の管路システムの一例を示す説明図である。  FIG. 12 is a longitudinal sectional view (partially front view) showing an example of a valve device of the prior art. FIG. 13 is a longitudinal sectional view (partial front view) showing an example of a valve device of the prior art. FIG. 4 is an explanatory diagram showing an example of a pipeline system of a conventional technique.
第 1 5図は、 従来技術の管路システムの一例を示す説明図である。 発明を実施するための最良の形態  FIG. 15 is an explanatory diagram showing an example of a conventional pipeline system. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 実施例を示した図面に基づき本発明をより詳細に説明する。 なお、 各 図において共通する部分には共通の図面符号を付してある。  Hereinafter, the present invention will be described in more detail with reference to the drawings showing examples. In the drawings, common parts are denoted by common reference numerals.
第 1図は、 本発明の弁装置の第 1実施例の全体図であり、 第 2図及び第 3図 はその要部図で、 第 2図が弁全開状態、 第 3図が弁閉鎖状態を示したものであ 。  FIG. 1 is an overall view of a first embodiment of a valve device of the present invention, and FIGS. 2 and 3 are main views of the valve device. FIG. 2 is a fully opened state of the valve, and FIG. 3 is a closed state of the valve. It is shown.
第 1図〜第 3図において、 図示しない管路に介装される本弁装置 Vの弁箱 1 の内部には、 入口流路 aから弁口 b及ぴ流路 cを経由して出口流路 dに至る流 路が設けられている。 なお、 本実施例においては、 流体が d— c→b— aの方 向に流れていても作動上差し支えないが、 以下便宜上 a— b ~ c→ dの方向に 流れているものとして説明する。 In FIGS. 1 to 3, the inside of the valve box 1 of the valve device V, which is interposed in a pipe (not shown), has an outlet flow from the inlet flow path a through the valve port b and the flow path c. There is a channel leading to road d. In this embodiment, the fluid may flow in the direction of d−c → b−a, but there is no problem in operation. The description will be made assuming that it is flowing.
弁口 bを形成する弁座 4に臨んで弁体 3が配設され、 弁体 3は、 弁箱 1をシ ール部 8を介して密封的に貫通する弁軸 2に装着され、 そして、弁軸 2が適宜 の駆動装置 1 1によって駆動されることによって、 弁体 3が弁座 4に離接し弁 口 bを開閉するよう構成されている。 なお、 弁口 bの閉鎖時の密閉を保っため の手段として、 弁体 3にシール部 7を設けたものが図示されているが、 弁座 4 の方に設けてもよく、 又、 シール部の形式や材質も適宜に選択してよい。 弁体 3と弁座 4の相対応する閉鎖面部位には、 弁閉鎖行程の終期に互いに所 定の隙間をもって嵌入し合う凹凸部 5 ; 6が! ¾けられている。 そして、 この凹 凸部 5 ; 6は、 互いに嵌入し合った時の両者間の隙間の流路 cが流過流体の進 行方向をジクザグ状に繰り返し曲折させて、 抵抗損失を増大させる形状に形成 されている。本実施例においては、 典型的な例として、 流過流体の進行方向を 直角方向に複数回曲折させる形状のものが図示されているが、 各曲折の角度は 直角以外の角度でもよく、 又、 曲折の回数も図示の回数以外の回数でもよい。 凹凸部 5 ; 6の配置箇所は、 弁体 3と弁座 4の相対応する閉鎖面上であれば、 特に限定する必要はない。 製作の容易性から言えば、 第 1図〜第 3図に例示し たように、 閉鎖面上に円環状の溝を形成して組み合わせるのが最適であるが、 一方に多数の突起部を形成し他方に相対応する陥没部を形成するなどしてもよ い。 又、 凹凸部 5 ; 6は、 図示のように閉鎖シール部 7の外側に形成する方法 のほかにも、 内側に形成してもよいし、 両側に形成してもよい。  A valve body 3 is disposed facing a valve seat 4 forming a valve port b, and the valve body 3 is mounted on a valve shaft 2 which hermetically penetrates the valve box 1 through a seal portion 8, and When the valve shaft 2 is driven by an appropriate driving device 11, the valve body 3 is configured to be separated from and connected to the valve seat 4 to open and close the valve port b. In addition, as a means for maintaining the sealing when the valve port b is closed, the valve body 3 provided with the seal portion 7 is shown, but it may be provided on the valve seat 4 side, and the seal portion may be provided. May be selected as appropriate. Corresponding closing surfaces of the valve body 3 and the valve seat 4 are provided with concave and convex portions 5 and 6 which are fitted with a predetermined gap at the end of the valve closing process! It is open. The concave and convex portions 5 and 6 have a shape in which the flow path c in the gap between the two when they are fitted into each other repeatedly bends the traveling direction of the flowing fluid in a zigzag shape, thereby increasing the resistance loss. It is formed. In the present embodiment, as a typical example, a shape in which the traveling direction of the flowing fluid is bent a plurality of times in a right angle direction is illustrated, but the angle of each bend may be an angle other than a right angle. The number of turns may be other than the number shown. The location of the uneven portions 5 and 6 is not particularly limited as long as it is on the corresponding closing surfaces of the valve body 3 and the valve seat 4. From the standpoint of ease of manufacture, it is best to form an annular groove on the closed surface and combine it as shown in Figs. Alternatively, a corresponding depression may be formed on the other side. In addition to the method of forming the concavo-convex portions 5 and 6 on the outside of the closing seal portion 7 as shown in the figure, the concavo-convex portions 5 and 6 may be formed on the inside or on both sides.
本発明の作動態様について、 第 1図〜第 3図に基づいて説明すると、 第 1図 及び第 2図に示した弁全開の状態においては、 管路内の流体は a→b→c→d を絰由して流れており、 この時、 凹凸部 5 ; 6の抵抗損失は微少に過ぎない。 次に、 駆動装置 1 1を操作して弁閉鎖行程に入ると、 弁体 3が弁座 4に接近 するにつれて、 凹凸部 5 ; 6が互いに嵌入を始め、 その嵌入し合った凹凸部 5 ; 6の隙間の流路 cが、 流過流体の進行方向をジクザグ状に繰り返し曲折させ る形状なので、 抵抗損失は急激に増大し、 流過流体が減速する。 このため弁体 3が弁座 4に着座する時点では、 既に流過流体は大幅に減速しており、 従って ウォーターハンマー等の衝撃を生じることなく、 穏やかに着座する。 The operation of the present invention will be described with reference to FIGS. 1 to 3. In the fully opened state shown in FIGS. 1 and 2, the fluid in the pipeline is a → b → c → d At this time, the resistance loss of the uneven portions 5 and 6 is only very small. Next, when the drive device 11 is operated to enter the valve closing stroke, as the valve element 3 approaches the valve seat 4, the concave and convex portions 5 and 6 start to be fitted into each other, and the fitted concave and convex portions 5; The flow path c in the gap of 6 repeatedly bends the traveling direction of the flowing fluid zigzag. Because of this shape, the resistance loss increases rapidly and the flowing fluid decelerates. Therefore, when the valve element 3 is seated on the valve seat 4, the flow-through fluid has already been greatly decelerated, so that the seat can be gently seated without generating an impact such as a water hammer.
ところで、 そもそも運動している物体を急激に停止させようとする場合、 タ イミングを合わせて運動救体の勢いを殺しながら受け止めれば衝撃少なく急停 止させることができることは、 人間の捕球の場合を考えれば容易に想像される ところであり、 その基本原理は流体にも当てはまるのであるが、 管路内を流れ ている流体を急激に閉止する際に、 徒来技術で行われているような 「弁閉鎖の 直前に流れを絞っておく」 こと力 s¾ちに 「運動流体の勢いを殺す」 ことにはな らないことは、 前述した通りである。即ち、 スムーズな流路形状のまま流量を 絞ると、 却って流速は速まる傾向となるので、 その流過を遮断する弁閉鎖の瞬 間の衝撃の解消にはあまり寄与しない。 By the way, when trying to suddenly stop an object that is moving in the first place, if the timing is matched and the momentum of the rescue body is received while being killed, it can be stopped quickly with less impact. It is easily imagined in consideration of the case, and the basic principle applies to fluids, but when suddenly closing the fluid flowing in the pipe line, it is difficult to use "kill the momentum of movement fluid" in this and the force s ¾ Chi "and keep down the flow just prior to the valve closed" it shall not be the same as described above. In other words, if the flow rate is reduced while maintaining the smooth flow path shape, the flow velocity tends to increase rather, and does not contribute much to the elimination of the instantaneous impact of closing the valve that blocks the flow.
一方、 本资明においては、 「弁閉鎖の直前に流れを絞っておく」 ことではな く、 「弁閉鎖の直前にラビリンス効果によつてエネルギーを減衰させておく」 ことによって、 弁閉鎖の瞬間の衝撃を解消するものであり、 従来技術とは技術 的思想が明確に異なる。 このラビリンス効果とは、 曲折した隙間を流過する流 体は粘性摩擦抵抗 .曲り抵抗 ·速度変化等によるエネルギー損失 (抵抗損失) を生じるという現象である。 通常は、 軸シールの目的で軸方向に多段ラビリン スを形成する場合が多く、 又、 この軸シール用のラビリンスにおいては、 軸方 向の組立てが困難になるのを避けるために、 凹凸部が嵌合し合う 「食違い形」 とせずに、 両凸部同士に隙間ができるように形成するのが一般的である。 しか し、 本発明においては、 このラビリンス (即ち凹凸部 5 ; 6 ) を向き合った平 面上に配置し、 該凹凸部 5 ; 6は、 弁体 3が弁座 4に接近するにつれて互いに 十分に嵌入させることができるので、 理想的な 「食違い形」 ラビリンスが形成 され、 従って、 顕著なラビリンス効果を発揮できるものである。  On the other hand, in the present invention, instead of "throttling the flow just before the valve is closed", the energy is attenuated by the labyrinth effect just before the valve is closed. The technical idea is clearly different from that of the conventional technology. The labyrinth effect is a phenomenon in which a fluid flowing through a bent gap generates energy loss (resistance loss) due to viscous friction resistance, bending resistance, speed change, and the like. Usually, a multi-stage labyrinth is formed in the axial direction for the purpose of the shaft seal in many cases, and in the labyrinth for the shaft seal, irregularities are formed in order to avoid the difficulty of assembling in the axial direction. In general, they are formed so that there is a gap between the two convex portions without forming a “staggered shape” that fits together. However, in the present invention, the labyrinth (that is, the concave and convex portions 5; 6) is arranged on an opposed flat surface, and the concave and convex portions 5; 6 are sufficiently separated from each other as the valve body 3 approaches the valve seat 4. Because they can be fitted, an ideal "staggered" labyrinth is formed, and thus can exhibit a significant labyrinth effect.
このため、 本発明においては、 管路の開閉制御を確実に行えるのみならず、 作動が安定しており、 たとえ弁開閉が急速に行われる場合でも、 その弁閉鎖直 前や開き始めの瞬間にウォーターハンマー、 チャタリング、 ハンチング等の衝 撃が起こりにくい。 又、 全体的にコンパクトで部品点数が少ないため、 標準化 が容易で低廉なコストで製作でき、 維持管理も容易である。 For this reason, in the present invention, not only can the opening and closing control of the pipeline be performed reliably, The operation is stable, and even if the valve opens and closes rapidly, impacts such as water hammer, chattering, and hunting are unlikely to occur immediately before the valve closes or when it opens. In addition, since it is compact and has a small number of parts, it can be easily standardized and manufactured at low cost, and maintenance is easy.
凹凸部 5 ; 6の形状としては、 上記のほかにも各種のものが考えられ、 それ らを例示したのが第 4図〜第 7図である。  Various shapes other than the above can be considered as the shapes of the concave and convex portions 5 and 6, and FIGS. 4 to 7 illustrate these.
第 4図は、 本発明の第 2実施例を示し、 凹凸部 5 ; 6を斜め勾配のついた溝 形とし、 又、 シール部 7の内側にも凹凸部を形成したものである。 第 5図は、 本発明の第 3実施例を示し、 凹凸部 5 ; 6を階段状に形成したものである。 第 6図は、 本発明の第 4実施例を示し、 凹凸部 5 ; 6そのものに (図中では凹凸 部 6に) 弁閉鎖時のシール部の機能を兼ねさせたものである。 そして、 第 7図 は、 本発明の第 5実施例を示し、 弁閉鎖速度が一定であっても凹凸部 5 ; 6 'の 嵌入度合が変化するように凹凸部 5 ; 6の凸部高さ (図中では凹凸部 6の凸部 高さ) を段階的に変える構造にしたものである。 その他の構成及び作動態様は いずれも第 1実施例と同様なので詳説は省略する。  FIG. 4 shows a second embodiment of the present invention, in which the concave and convex portions 5 and 6 are formed as grooves with an oblique slope, and the concave and convex portions are also formed inside the seal portion 7. FIG. 5 shows a third embodiment of the present invention, in which concave and convex portions 5 and 6 are formed in a step-like shape. FIG. 6 shows a fourth embodiment of the present invention, in which the concave and convex portions 5 and 6 themselves (the concave and convex portion 6 in the figure) also have the function of the seal portion when the valve is closed. FIG. 7 shows a fifth embodiment of the present invention, in which the height of the convex portions 5; 6 is changed so that the degree of insertion of the concave portions 5; 6 'is changed even when the valve closing speed is constant. (In the figure, the height of the projections of the projections and depressions 6) is changed stepwise. All other configurations and operation modes are the same as those of the first embodiment, and thus detailed description is omitted.
第 8図は、 本発明の第 6実施例を示したものであり、 半導体製造分野等によ く用いられるダイヤフラム式弁装置に本発明の原理を適用し、 凹凸部 5 6を 形成した例である。 この場合、 凹凸部 5はダイヤフラム 2 1と一体に形成して もよいし、 別途に装着してもよい。  FIG. 8 shows a sixth embodiment of the present invention, in which the principle of the present invention is applied to a diaphragm valve device often used in the field of semiconductor manufacturing and the like, and an uneven portion 56 is formed. is there. In this case, the uneven portion 5 may be formed integrally with the diaphragm 21 or may be separately mounted.
第 9図は、 本発明の第 7実施例を示したものであり、 第; I実施例のものにお いて、 弁体 3に対する流体の圧力作用方向の逆方向に該流体の圧力を受け止め て、 弁体 3に係わる流体の作用圧力の少なくとも一部を栢殺するバランス手段 を付加したものである。即ち、 弁軸 2には、 更に受圧板 2 2が付設され、 その 受圧板 2 2は、 弁箱 1に対してシール部 2 3を介して進退移動可能に装着され 、 受圧板 2 2と弁箱 1との間に密封的に包容形成された袋室 eが、 連通路 2 4 によって入口流路 aに連通されている。本実施例においては、 この受圧板 2 2 の受圧面積は、 弁体 3の受圧面積とほぼ等しく設定されている。 図中で弁体 3 を押し下げる入口流路 aの圧力と受圧板 2 2を押し上げる袋室 eの内圧力とが 同じ圧力であるために、 弁体 3の前後の偏圧は相殺されバランスする。 従って 、 弁体 3を開閉させる作用力は、 流過流体の圧力とは無関係となり、 圧力が不 安定な管路中に設置しても、 弁体 3の作動が不安定にならず、 軽い操作力で正 確に作動する上、 弁体 3の弁座 4への吸付きによるウォーターハンマー等も発 生せず、 弁体 3や弁座 4の耐久性も向上する。 そして、 圧力バランス手段によ り弁体 3前後の偏圧の影響を受けないことから、 弁口径を大きくすることも可FIG. 9 shows a seventh embodiment of the present invention. In the first embodiment of the present invention, the pressure of the fluid is received in the direction opposite to the pressure acting direction of the fluid on the valve body 3. However, a balance means for adding at least a part of the working pressure of the fluid related to the valve body 3 is added. That is, the valve shaft 2 is further provided with a pressure receiving plate 22. The pressure receiving plate 22 is attached to the valve box 1 so as to be able to move forward and backward through the seal portion 23. A bag chamber e hermetically sealed between the box 1 and the box 1 is connected to the inlet channel a by the communication path 24. In this embodiment, the pressure receiving plate 2 2 Is set substantially equal to the pressure receiving area of the valve element 3. In the figure, the pressure in the inlet passage a that pushes down the valve body 3 and the internal pressure in the bag chamber e that pushes up the pressure receiving plate 22 are the same pressure. Therefore, the acting force for opening and closing the valve body 3 has no relation to the pressure of the flowing fluid, and the operation of the valve body 3 does not become unstable even when the valve body 3 is installed in an unstable pressure line, and light operation is performed. It operates accurately with force, and does not generate water hammer due to the suction of the valve body 3 to the valve seat 4, and the durability of the valve body 3 and the valve seat 4 is improved. The valve diameter can be increased because the pressure balance means is not affected by the uneven pressure around the valve body 3.
B¾となる ο B¾ ο
弁体 3と受圧板 2 2の受圧面積の関係については、 完全にバランスさせずに 弁体 3前後の偏圧の一部のみを相殺することを選択してもよく、使用条件に合 わせて各種設定が可能である。  Regarding the relationship between the pressure receiving area of the valve element 3 and the pressure receiving area of the pressure receiving plate 22, it may be possible to select to cancel only a part of the partial pressure before and after the valve element 3 without completely balancing them. Various settings are possible.
受圧板 2 2と-弁箱 1の間のシール部 2 3については、 図中では 0リング形式 のものが例示されているが、 ベローズ、 ダイヤフラムなど他の形式のものでも よいことは勿論である。 袋室 eと入口流路 aとを連通する連通路 2 4について は、 十分に通路内径をとつて精細な流路をなくしても差し支えなく、 その中を 通過する流体も一方向への流れではなく袋室 eで行き止まり往復する流れなの で、 ゴミ *砂粒 ·塵埃等の異物による目詰まりは発生しにくい。  The seal portion 23 between the pressure receiving plate 22 and the -valve box 1 is illustrated as an O-ring type in the figure, but it is a matter of course that other types such as a bellows and a diaphragm may be used. . Regarding the communication passage 24 that communicates the bag chamber e and the inlet flow passage a, it is possible to eliminate the fine flow passage by taking a sufficient inside diameter of the passage, and the fluid passing therethrough cannot flow in one direction. Since the flow goes to a dead end in the bag room e and reciprocates, clogging due to foreign substances such as dust * sand grains and dust is unlikely to occur.
なお、 弁軸 2の駆動は手動式のものが例示されており、 弁軸 2に回り止めを 施した上でハンドルを回動操作するいわゆる外ねじ式の駆動機構によつて弁体 3を進退させ開閉させるようになっている。  The driving of the valve shaft 2 is exemplified by a manual type. The valve shaft 3 is moved forward and backward by a so-called external screw type driving mechanism that rotates the handle after stopping the rotation of the valve shaft 2. It is designed to open and close.
第 1 0図は、 本発明の第 8実施例を示したものであり、 弁座 4が、 それを収 容する弁箱 1に対してシール部 2 5を介して進退移動可能に形成され、 弁閉鎖 行程の終期に弁座 4が流過流体の進行方向 (即ち図中では下方向) に沿って後 退しつつ弁体 3を受け止める構造に構成されたものである。 弁座 4は付勢手段 2 6 (図中では圧縮ばねが例示されている) により上流方向 (即ち図中では上 方向) に付勢され、 且つ弁箱 1の突起部もしくは係止ピン等に挟まれた所定範 囲内で動けるようになっている。 弁全開時には、 弁座 4は付勢手段 2 6に付勢 されて上流方向に片寄せされた位置に進出している。 そして、 弁閉鎖動時には 、 弁体 3が当接した瞬間から弁体 3と一体化した状態で下流方向 (即ち図中で は下方向) に後退し、 付勢手段 2 6によって減速されて停止する。 その停止位 置は、 下流方向に片寄せされた位置であってもよいし、 付勢手段 2 6の付勢力 と弁閉力が鈞り合う位置であってもよく、 使用条件によつて適宜に設計してよ レ いずれにしても、 この弁座 4の瞬間的な後退は、 捕球する時に手を瞬間的 に後に引く動作にも似て、 流体の急激な閉止によるウォーターハンマーは軽減 されるものである。 FIG. 10 shows an eighth embodiment of the present invention, in which a valve seat 4 is formed so as to be able to advance and retreat via a seal portion 25 with respect to a valve box 1 containing it. At the end of the valve closing stroke, the valve seat 4 is configured to receive the valve element 3 while retreating along the traveling direction of the flowing fluid (ie, downward in the figure). The valve seat 4 is moved in the upstream direction (i.e., upward in the figure) by urging means 26 (a compression spring is illustrated in the figure). Direction), and can move within a predetermined range sandwiched between the projections of the valve box 1 or the locking pins. When the valve is fully opened, the valve seat 4 is urged by the urging means 26 to advance to a position where it is biased upstream. Then, at the time of the valve closing movement, from the moment when the valve body 3 comes into contact, the valve body 3 is retracted in the downstream direction (that is, in the downward direction in the figure) in a state of being integrated with the valve body 3, and is decelerated by the urging means 26 and stopped. I do. The stop position may be a position offset in the downstream direction, or a position where the urging force of the urging means 26 and the valve closing force coincide with each other. In any case, the momentary retreat of the valve seat 4 is similar to the momentary pulling of the hand when catching a ball, and the water hammer due to the sudden closing of the fluid is reduced. Things.
この弁座 4の後退によるウォーターハンマーの軽減作用は、 凹凸部 5 ; 6に よるウォーターハンマーの軽減作用と相まって、 より的確な作動を実現するも のであるが、 それ独自でも、 即ち凹凸部 5 ; 6を省いても、 一定のウォーター ハンマー軽減の効果があることは前述の通りであり、 図示は省略したが、 この 第 8実施例のものから凹凸部 5 ; 6を省いた形式の弁装置も考えられる。 付勢手段 2 6は、 その付勢力を調整可能にすれば、 本弁装置の作動態様を調 整できるので更に好都合である。 その付勢力調整方法は、 ねじ式の調整部材を 付設するなど、 従来技術によつて各種設計が可能であるから詳説は省略する。 本発明の弁装置を管路システムに組み込む場合は、 第 1 1図の実施例に示す ように単に管路 3 2に介設するのみでよい。本弁装置 Vを操作する際には、 た とえそれが急開閉であつてもウォーターハンマー等の衝撃が起こらないので、 管路の劣化'破損や発塵等が抑えられ、 又、 別途に衝撃吸収装置を装着する必 要もなく、 ことさらに時間をかけて弁開閉したり流体をバイパス放出弁から漏 洩させるなどの対症療法的手段をとらなくても済み、 自雜化も容易となるので 、 極めて便利且つ経済的である。  The action of reducing the water hammer due to the retreat of the valve seat 4 is combined with the action of reducing the water hammer by the uneven portions 5 and 6 to achieve more accurate operation. As described above, even if 6 is omitted, a certain effect of reducing the water hammer can be obtained. Although not shown, the valve device of the eighth embodiment in which the concave and convex portions 5 and 6 are omitted is also available. Conceivable. The biasing means 26 is more convenient if the biasing force can be adjusted, because the operating mode of the valve device can be adjusted. The biasing force adjustment method can be variously designed according to the prior art, for example, by attaching a screw-type adjusting member, and a detailed description thereof will be omitted. When incorporating the valve device of the present invention into a pipeline system, it is sufficient to simply interpose the pipeline 32 as shown in the embodiment of FIG. When operating this valve device V, even if it is suddenly opened and closed, the impact of a water hammer etc. does not occur, so that deterioration of the pipeline, damage and dust generation are suppressed, and There is no need to install a shock absorbing device, and it is not necessary to take any palliative treatment measures such as opening and closing the valve and leaking fluid from the bypass discharge valve with much time, making it easier to self-inoculate So it is very convenient and economical.
次に、 各実施例に共通の技術事項について説明する。 弁の形式については、 各図にはリフト型開閉弁形式のものを例示したが、 そ の他の形式の開閉弁 (例えば、 バタフライ弁、 ゲート弁等)、逆止弁、 自動制 御弁等の各種の弁に広く適用することが ΊΪΓ能である。 Next, technical matters common to the embodiments will be described. As for the valve type, each figure shows a lift type on-off valve type, but other types of on-off valves (for example, butterfly valve, gate valve, etc.), check valves, automatic control valves, etc. It is effective to widely apply to various types of valves.
弁体 3のチヤタリングゃハンチング等を更に確実に防止するために、 別途制 動手段 (ダンパー) を付設してもよいし、 キヤビテーシヨン等を防止するため に、 弁体 3や弁座 4に櫛歯状、 鋸歯状突起や整流格子を設けたり、 それら弁閉 鎖面の形状をコ一ン状ゃ曲面状にしてもよい。  In order to further prevent chattering and hunting of the valve body 3, a separate damping means may be additionally provided, and in order to prevent cavitation and the like, comb teeth are provided on the valve body 3 and the valve seat 4. , A sawtooth-shaped projection or a rectifying grid, or the shape of the valve closing surface may be a cone or a curved surface.
付勢手段 2 6については、 圧縮ばねや引っ張りばねを適宜に選択してよく、 又、 同じ作用をするものであればその形式は問わず、 コィルばねの代りに他の 形式のばねや弾性部材を用いてもよいし、 ばねケースに 4¾¾してもよい。又、 重錘にリンクしたり、 気圧、 液圧装置等を適用してもよい。 その取付け位置も 図示の位置に限る必要はないことは言うまでもない。  As the urging means 26, a compression spring or a tension spring may be appropriately selected, and any type may be used as long as it has the same effect. Instead of the coil spring, another type of spring or elastic member may be used. May be used, or 4 mm may be attached to the spring case. Further, it may be linked to a weight, or a pneumatic or hydraulic device may be applied. Needless to say, the mounting position need not be limited to the illustrated position.
駆動装置 1 1については、 電動式、 電磁式、 気圧式、 液圧式等の駆動装置を 用いてもよいし、 手動で弁開閉駆動してもよい。 いずれにしても、 本 明によ れば急速に弁開閉させても悪影響が出ない。  As the driving device 11, an electric, electromagnetic, pneumatic, or hydraulic driving device may be used, or the valve may be manually driven to open and close. In any case, according to the present invention, there is no adverse effect even if the valve is quickly opened and closed.
各シ一ル部分に装着されるシ ル部材については、 使用条件に応じて適宜に 0リング、 ノ、 °ッキン、 シールリング、 ダイヤフラム、 ベローズ等を適用したり 、 その他の弾性部材を装着してよく、 又、 直接接触により良好な密封性を保持 できる場合は、 該シール部材を省略してもよい。  Regarding the seal member to be attached to each seal part, O-ring, nose, seal, seal ring, diaphragm, bellows, etc. may be applied as appropriate according to the usage conditions, or other elastic members may be attached. If good sealing properties can be maintained by direct contact, the sealing member may be omitted.
弁箱 1の入口流路 aや出口流路 dの形式、 形状については、 使用条件に応じ て、 ねじ込み式やフランジ式など適宜に選択してよい。 又、 適宜にストレーナ 一等を介設してもよい。  The type and shape of the inlet channel a and the outlet channel d of the valve box 1 may be appropriately selected, such as a screw-in type or a flange type, depending on the use conditions. In addition, a strainer or the like may be appropriately provided.
本発明の弁装置は、 管路中に設置してもよいし、 管路端末に設置して放流用 として用いてもよい。 叉、 本発明の弁装置は、 流過流体が液体の場合のみなら ず、 気体の場合にも適用できる。  The valve device of the present invention may be installed in a pipe, or may be installed at a pipe terminal and used for discharge. Further, the valve device of the present invention can be applied not only to the case where the flowing fluid is a liquid but also to the case of a gas.
本発明の弁装置及ぴ管路システムの実施用途については、 工業用、 農業用そ の他あらゆる分野に適用可能なものである。 又、 本発明の弁装置及び管路シス テムの各構成要素の組合せ、 配列関係、 取付け位置に いては、 図示例に限定 する必要はなく、 適宜に設計上の選択をする とができる。 そのほかにも、 本 発明の趣旨の範囲内で種々設計変更が可能であり、 本発明を前記の各実施例に 限定す ものではない。 産業上の利用可熊性 Regarding the practical use of the valve device and the pipeline system of the present invention, the industrial and agricultural It is applicable to all other fields. Further, the combination, arrangement relationship, and mounting position of each component of the valve device and the pipeline system of the present invention need not be limited to the illustrated example, and can be appropriately selected in design. In addition, various design changes are possible within the scope of the present invention, and the present invention is not limited to the above embodiments. Industrial availability
本発明はこのように、 簡潔で合理的な構造によって、 設計 '製作'維持管理 が容易且つコンパクトで、 コストが低廉であり、 管路の開閉制御を確実に行う と共に、 作動が安定していて、 たとえ弁開閉が急速に行われる場合でも、 その 弁閉鎖直前や開き始めの瞬間にウォーターハンマー、 チャタリング、 ハンチン グ等の衝撃が起こりにくい弁装置を得たものである。 更には、 この弁装置を使 用して、 管路の劣化 ·破損や発塵等が抑えられ、 別途に衝撃吸収装置を装着す る必要もなく、 ことさらに時間をかけて弁開閉したり流体をバイパス放出弁か ら漏洩させるなどの対症療法的手段をとらなくても済み、 自動化も容易で便利 な管路システ Λを得たものである。徒って、 本発明は顕著な実施効果を上げる ものである。  As described above, the present invention has a simple and rational structure, so that the design 'manufacturing' can be easily maintained and compact, the cost is low, the opening and closing control of the pipeline is reliably performed, and the operation is stable. However, even if the valve opens and closes rapidly, a valve device that is unlikely to cause impacts such as water hammer, chattering, and hunting immediately before the valve closes or when the valve starts to open is obtained. Furthermore, by using this valve device, deterioration, breakage and dust generation of the pipeline are suppressed, and there is no need to separately install a shock absorbing device. This eliminates the need for symptomatic treatment, such as leaking air from the bypass discharge valve, and provides an easy and convenient pipe system. Therefore, the present invention has a remarkable effect.

Claims

請 求 の 範 囲 The scope of the claims
1 . 弁体が弁座に離接して流路を開閉する弁装置において、 弁体と弁座の相 対応する閉鎖面部位に、 弁閉鎖行程の終期に互いに所定の隙間をもつて嵌入し 合う四凸部が設けられ、 且つ、 嵌入し合った該四凸部の隙間の流路が、 流過流 体の進行方向を曲折させて抵抗損失を増大させる形状に形成されたことを特徴 とする弁装置。 1. In a valve device that opens and closes a flow path by the valve element moving away from and into contact with the valve seat, the valve element and the valve seat are fitted into the corresponding closed surface portions with a predetermined gap at the end of the valve closing stroke. Four convex portions are provided, and the flow path in the gap between the fitted four convex portions is formed in a shape that bends the traveling direction of the flowing turbulent body to increase resistance loss. Valve device.
2 . 前記凹凸部が弁閉鎖時のシール部を兼ねていることを特徵とする、 請求 の範囲第 1項に記載の弁装置。  2. The valve device according to claim 1, wherein the uneven portion also functions as a seal portion when the valve is closed.
3 . 前記弁座が、 それを収容する弁箱に対して進退移動可能に形成され、 弁 閉鎖行程の終期に該弁座が流過流体の進行方向に沿って後退しつつ前記弁体を 受け止める構造に構成されたことを特徴とする、 請求の範囲第 1項又は第 2項 に記載の弁装置。 3. The valve seat is formed so as to be able to move forward and backward with respect to the valve box housing the valve seat, and at the end of the valve closing stroke, the valve seat receives the valve body while retreating along the traveling direction of the flowing fluid. 3. The valve device according to claim 1, wherein the valve device has a structure.
4 . 請求の範囲第 1項〜第 3項のいずれかに記載の弁装置を備えたことを特 徵とする管路システム。  4. A pipe system comprising the valve device according to any one of claims 1 to 3.
PCT/JP2001/006828 2000-08-09 2001-08-08 Valve device and pipeline system WO2002012766A1 (en)

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KR20180110343A (en) * 2017-03-29 2018-10-10 엠티에이치콘트롤밸브(주) Control valve apparatus
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JP2004340344A (en) * 2003-05-19 2004-12-02 Smc Corp Vacuum pressure regulating valve
JPWO2005088175A1 (en) * 2004-03-12 2007-08-09 トヨタ自動車株式会社 valve
JP2010121780A (en) * 2004-03-12 2010-06-03 Toyota Motor Corp Valve
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JP2008029682A (en) * 2006-07-31 2008-02-14 Nohmi Bosai Ltd Drain valve
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EP2700850A3 (en) * 2012-08-24 2014-03-05 Karl Dungs GmbH & Co.KG Double seat valve with reliable closing function
CN103629377A (en) * 2012-08-24 2014-03-12 卡尔·邓格斯有限责任两合公司 Double seat valve with secure closing function
US20160377183A1 (en) * 2012-12-07 2016-12-29 Parker-Hannifin Corporation Slit valve assembly having a spacer for maintaining a gap
US10113651B2 (en) * 2012-12-07 2018-10-30 Parker-Hannifin Corporation Slit valve assembly having a spacer for maintaining a gap
KR101622980B1 (en) * 2014-06-30 2016-05-20 서울도시가스 주식회사 Apparatus for prevent inflow of water into gas pipe
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US20180163875A1 (en) * 2015-03-04 2018-06-14 Douglas C. Heiderman Modified Vacuum Actuated Valve Assembly and Sealing Mechanism for Improved Flow Stability for Fluids Sub-Atmospherically Dispensed from Storage and Delivery Systems
CN105179707A (en) * 2015-09-26 2015-12-23 陶宗飞 Valve
JP2018040485A (en) * 2016-09-09 2018-03-15 アイシン精機株式会社 Fluid control valve
CN106499827A (en) * 2016-11-22 2017-03-15 辽宁大唐国际锦州热电有限责任公司 The low side valve of protection against erosion
KR20180110343A (en) * 2017-03-29 2018-10-10 엠티에이치콘트롤밸브(주) Control valve apparatus
KR101953170B1 (en) * 2017-03-29 2019-05-17 엠티에이치콘트롤밸브(주) Control valve apparatus
SE1950844A1 (en) * 2019-07-04 2021-01-05 Purmo Group Sweden Ab Valve arrangement
EP3760899A1 (en) * 2019-07-04 2021-01-06 Purmo Group Sweden AB Valve arrangement

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