WO2002005330A3 - Door assembly for sealing an opening of a chamber - Google Patents

Door assembly for sealing an opening of a chamber Download PDF

Info

Publication number
WO2002005330A3
WO2002005330A3 PCT/US2001/041229 US0141229W WO0205330A3 WO 2002005330 A3 WO2002005330 A3 WO 2002005330A3 US 0141229 W US0141229 W US 0141229W WO 0205330 A3 WO0205330 A3 WO 0205330A3
Authority
WO
WIPO (PCT)
Prior art keywords
opening
chamber
door assembly
sealing
axis
Prior art date
Application number
PCT/US2001/041229
Other languages
French (fr)
Other versions
WO2002005330A2 (en
Inventor
Jeff Blahnik
Joe Kraus
Dean C Hruzek
Original Assignee
Applied Materials Inc
Jeff Blahnik
Joe Kraus
Dean C Hruzek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc, Jeff Blahnik, Joe Kraus, Dean C Hruzek filed Critical Applied Materials Inc
Priority to AU2001281293A priority Critical patent/AU2001281293A1/en
Publication of WO2002005330A2 publication Critical patent/WO2002005330A2/en
Publication of WO2002005330A3 publication Critical patent/WO2002005330A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)

Abstract

In accordance with a first aspect, a door assembly is provided that is adapted to seal an opening of a chamber. The door assembly includes (1) a seal plate adapted to seal the opening of the chamber by moving along a first axis that is substantially perpendicular to the opening; (2) a central member adapted to remain stationary along the first axis; and (3) at least one inflatable member located between the seal plate and the central member and adapted to inflate and move the seal plate along the first axis into sealing engagement with the opening. Systems and methods also are provided in accordance with this and other aspects.
PCT/US2001/041229 2000-07-08 2001-06-30 Door assembly for sealing an opening of a chamber WO2002005330A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001281293A AU2001281293A1 (en) 2000-07-08 2001-06-30 Door assembly for sealing an opening of a chamber

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21691800P 2000-07-08 2000-07-08
US60/216,918 2000-07-08

Publications (2)

Publication Number Publication Date
WO2002005330A2 WO2002005330A2 (en) 2002-01-17
WO2002005330A3 true WO2002005330A3 (en) 2002-06-20

Family

ID=22808989

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/041229 WO2002005330A2 (en) 2000-07-08 2001-06-30 Door assembly for sealing an opening of a chamber

Country Status (2)

Country Link
AU (1) AU2001281293A1 (en)
WO (1) WO2002005330A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8796589B2 (en) 2001-07-15 2014-08-05 Applied Materials, Inc. Processing system with the dual end-effector handling
KR100716041B1 (en) 2004-06-02 2007-05-09 어플라이드 머티어리얼스, 인코포레이티드 Methods and apparatus for sealing a chamber
US8648977B2 (en) 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
DE102015106916A1 (en) * 2015-05-04 2016-11-10 M. Braun Inertgas-Systeme Gmbh transfer valve

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4070001A (en) * 1976-07-06 1978-01-24 Musgrove Ronald R Vacuum safety valve
US4957018A (en) * 1987-09-24 1990-09-18 Varian Associates, Inc. Mechanism for selectively locking and unlocking a translatable shaft
US5769952A (en) * 1994-06-07 1998-06-23 Tokyo Electron, Ltd. Reduced pressure and normal pressure treatment apparatus
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
WO2000045422A2 (en) * 1999-01-27 2000-08-03 Applied Materials, Inc. Inflatable slit/gate valve

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4070001A (en) * 1976-07-06 1978-01-24 Musgrove Ronald R Vacuum safety valve
US4957018A (en) * 1987-09-24 1990-09-18 Varian Associates, Inc. Mechanism for selectively locking and unlocking a translatable shaft
US5769952A (en) * 1994-06-07 1998-06-23 Tokyo Electron, Ltd. Reduced pressure and normal pressure treatment apparatus
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
WO2000045422A2 (en) * 1999-01-27 2000-08-03 Applied Materials, Inc. Inflatable slit/gate valve

Also Published As

Publication number Publication date
AU2001281293A1 (en) 2002-01-21
WO2002005330A2 (en) 2002-01-17

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