WO2001075987A8 - Piezokeramischer biegewandler - Google Patents

Piezokeramischer biegewandler

Info

Publication number
WO2001075987A8
WO2001075987A8 PCT/DE2001/001299 DE0101299W WO0175987A8 WO 2001075987 A8 WO2001075987 A8 WO 2001075987A8 DE 0101299 W DE0101299 W DE 0101299W WO 0175987 A8 WO0175987 A8 WO 0175987A8
Authority
WO
WIPO (PCT)
Prior art keywords
supporting body
piezoceramic
bending converter
nickel
piezoceramic bending
Prior art date
Application number
PCT/DE2001/001299
Other languages
English (en)
French (fr)
Other versions
WO2001075987A1 (de
Inventor
Herbert Di Hofmann
Renate Hf Hofmann
Michael Riedel
Andreas Schmid
Original Assignee
Siemens Ag
Renate Hf Hofmann
Michael Riedel
Andreas Schmid
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Renate Hf Hofmann, Michael Riedel, Andreas Schmid filed Critical Siemens Ag
Priority to EP01937967A priority Critical patent/EP1269551A1/de
Priority to JP2001573563A priority patent/JP2003529943A/ja
Publication of WO2001075987A1 publication Critical patent/WO2001075987A1/de
Publication of WO2001075987A8 publication Critical patent/WO2001075987A8/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Piezokeramischer Biegewandler (1) mit einem flachen Tragkörper (2) und einer darauf mindestens einseitig aufgebrachten polarisierten Blei-Zirkonat-Titan-Piezokeramik (3). Für eine geringe thermische Eigenverbiegung sind erfindungsgemäß als Materialien für den Tragkörper (2) eine Nickel/Kobalt/Eisen-Legierung, eine Nickel/Eisen-Legierung und ein Silizium/Germanium-Halbleimaterial angegeben, wobei der thermische Ausdehnungskoeffizient des Tragkörpers (2) an den der Piezokeramik (3) angepasst ist.
PCT/DE2001/001299 2000-04-04 2001-04-03 Piezokeramischer biegewandler WO2001075987A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01937967A EP1269551A1 (de) 2000-04-04 2001-04-03 Piezokeramischer biegewandler
JP2001573563A JP2003529943A (ja) 2000-04-04 2001-04-03 ピエゾセラミックス湾曲変換器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10016621 2000-04-04
DE10016621.0 2000-04-04

Publications (2)

Publication Number Publication Date
WO2001075987A1 WO2001075987A1 (de) 2001-10-11
WO2001075987A8 true WO2001075987A8 (de) 2001-12-13

Family

ID=7637483

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/001299 WO2001075987A1 (de) 2000-04-04 2001-04-03 Piezokeramischer biegewandler

Country Status (7)

Country Link
US (1) US20030178917A1 (de)
EP (1) EP1269551A1 (de)
JP (1) JP2003529943A (de)
KR (1) KR20030028733A (de)
CN (1) CN1524300A (de)
TW (1) TW516250B (de)
WO (1) WO2001075987A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1791192B1 (de) * 2005-11-25 2008-03-12 Festo Ag & Co. Piezo-Biegewandler
US8738456B2 (en) * 2006-11-14 2014-05-27 Xerox Corporation Electronic shopper catalog
JP6519136B2 (ja) * 2014-09-26 2019-05-29 ブラザー工業株式会社 圧電アクチュエータ、及び、圧電アクチュエータの製造方法
KR20180060391A (ko) 2016-11-29 2018-06-07 한국건설기술연구원 압전 액추에이터가 구비된 실시간 능동 대응 구조물 및 그 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622815A (en) * 1970-03-25 1971-11-23 Motorola Inc High reliability ceramic bender
US4056654A (en) * 1975-07-24 1977-11-01 Kkf Corporation Coating compositions, processes for depositing the same, and articles resulting therefrom
JPS6156920A (ja) * 1984-08-28 1986-03-22 Nippon Denso Co Ltd 圧電素子を用いた振動及び音波の検出器
JPS61177785A (ja) * 1985-02-04 1986-08-09 Nippon Telegr & Teleph Corp <Ntt> バイモルフ素子
JPH02260108A (ja) * 1989-03-30 1990-10-22 Toshiba Corp 磁気ヘッド装置
JPH0376175A (ja) * 1989-08-18 1991-04-02 Ube Ind Ltd 圧電アクチュエータ
US5404067A (en) * 1990-08-10 1995-04-04 Siemens Aktiengesellschaft Bonded piezoelectric bending transducer and process for producing the same
DE19520796A1 (de) * 1995-06-07 1996-12-12 Siemens Ag Piezoelektrischer Biegewandler
DE19620826C2 (de) * 1996-05-23 1998-07-09 Siemens Ag Piezoelektrischer Biegewandler sowie Verfahren zu dessen Herstellung
JP3812917B2 (ja) * 1997-05-14 2006-08-23 本田技研工業株式会社 圧電型アクチュエーター

Also Published As

Publication number Publication date
CN1524300A (zh) 2004-08-25
WO2001075987A1 (de) 2001-10-11
EP1269551A1 (de) 2003-01-02
JP2003529943A (ja) 2003-10-07
KR20030028733A (ko) 2003-04-10
TW516250B (en) 2003-01-01
US20030178917A1 (en) 2003-09-25

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