WO2001073937A3 - Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing - Google Patents

Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing Download PDF

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Publication number
WO2001073937A3
WO2001073937A3 PCT/US2001/009611 US0109611W WO0173937A3 WO 2001073937 A3 WO2001073937 A3 WO 2001073937A3 US 0109611 W US0109611 W US 0109611W WO 0173937 A3 WO0173937 A3 WO 0173937A3
Authority
WO
WIPO (PCT)
Prior art keywords
gimbal structure
drive
vertical
comb
dimensional
Prior art date
Application number
PCT/US2001/009611
Other languages
French (fr)
Other versions
WO2001073937A2 (en
Inventor
Behrang Behin
Kam Y Lam
Meng-Hsiung Kiang
Michael J Daneman
Satinderpall S Pannu
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/751,660 external-priority patent/US6819822B2/en
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Priority to EP01924326A priority Critical patent/EP1269619A2/en
Priority to AU2001250989A priority patent/AU2001250989A1/en
Priority to JP2001571547A priority patent/JP2003529108A/en
Publication of WO2001073937A2 publication Critical patent/WO2001073937A2/en
Publication of WO2001073937A3 publication Critical patent/WO2001073937A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.
PCT/US2001/009611 2000-03-22 2001-03-22 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing WO2001073937A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01924326A EP1269619A2 (en) 2000-03-22 2001-03-22 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
AU2001250989A AU2001250989A1 (en) 2000-03-24 2001-03-22 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
JP2001571547A JP2003529108A (en) 2000-03-24 2001-03-22 Two-dimensional gimbal-type scanning actuator with vertical electrostatic comb drive for operation and / or sensing

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US19198700P 2000-03-24 2000-03-24
US19185600P 2000-03-24 2000-03-24
US19109700P 2000-03-24 2000-03-24
US60/191,856 2000-03-24
US60/191,097 2000-03-24
US60/191,987 2000-03-24
US09/751,660 2000-12-28
US09/751,660 US6819822B2 (en) 2000-03-24 2000-12-28 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Publications (2)

Publication Number Publication Date
WO2001073937A2 WO2001073937A2 (en) 2001-10-04
WO2001073937A3 true WO2001073937A3 (en) 2002-01-03

Family

ID=27497876

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/009611 WO2001073937A2 (en) 2000-03-22 2001-03-22 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Country Status (3)

Country Link
EP (1) EP1269619A2 (en)
AU (1) AU2001250989A1 (en)
WO (1) WO2001073937A2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US6757092B2 (en) 2001-12-10 2004-06-29 Nayef M. Abu-Ageel Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
US7872394B1 (en) 2001-12-13 2011-01-18 Joseph E Ford MEMS device with two axes comb drive actuators
EP1490714A4 (en) * 2002-03-18 2005-08-17 Continuum Photonics Inc Multiple-axis control system for an optical switch
GB2389707A (en) * 2002-06-14 2003-12-17 Suisse Electronique Microtech Linear response MEMS device
JP4337511B2 (en) 2003-02-12 2009-09-30 株式会社デンソー Electrostatic actuator and manufacturing method thereof
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
DE102005050515A1 (en) 2005-10-21 2007-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Surface substrate with electrically conductive structure
KR100682958B1 (en) * 2006-01-10 2007-02-15 삼성전자주식회사 Two-axes micro optical scanner
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
CN103150985A (en) 2008-02-11 2013-06-12 高通Mems科技公司 Measurement and apparatus for electrical measurement of electrical drive parameters for MEMS based display
WO2009140077A2 (en) * 2008-05-12 2009-11-19 Board Of Regents, The University Of Texas System Optical scanning devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SELVAKUMAR A ET AL: "A HIGH-SENSITIVITY Z-AXIS CAPACITIVE SILICON MICROACCELEROMETER WITH A TORSIONAL SUSPENSION", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 7, no. 2, June 1998 (1998-06-01), pages 192 - 200, XP000834738, ISSN: 1057-7157 *

Also Published As

Publication number Publication date
WO2001073937A2 (en) 2001-10-04
AU2001250989A1 (en) 2001-10-08
EP1269619A2 (en) 2003-01-02

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